An on-line liquid supply device with premixing function

Abstract

The utility model discloses an online liquid supply device with premixing function relates to semiconductor manufacturing equipment technical field, include: the premixing cavity of driven rotation setting has the stirring blade of rotation, and its inboard bottom portion fixed mounting has bubble device and ultrasonic device respectively, first liquid supply cavity, and first connecting pipe are fixedly linked with between the input and premixing cavity of first output of high water level distribution fixed communication, second liquid supply cavity, and second connecting pipe are fixedly linked with between the input and premixing cavity of second output of high water level distribution fixed communication, liquid storage cabin, and third connecting pipe are fixedly linked with between the input of top and the third output of premixing cavity between high water level and lowest water level distribution, solid powder cavity, and fourth connecting pipe are fixedly linked with between the first output and the first input of premixing cavity top. The utility model reaches the foundation on the basis of reducing the pollution rate, promotes the process stability, and reaches the final effect of promoting the production capacity.

Description

Technical Field

[0001] This utility model relates to semiconductor manufacturing equipment processing technology, specifically an online liquid supply device with premixing function. Background Technology

[0002] As semiconductor manufacturing advances towards advanced processes, the process flow becomes increasingly complex. Wet processes (such as wet cleaning, photolithography, wet etching, CMP polishing, and ECP plating) account for approximately 70% of the total. This proportion demonstrates the crucial role of wet processes in wafer production, while simultaneously raising the bar for their stability. Wet processes utilize numerous chemical solutions. For multi-component solutions, the commonly used method is traditional offline mixing, where multiple solutions are mixed and stirred according to a specific ratio, or solid powders are dissolved in the solution before being transported to the wet process chamber via a chemical delivery system for reaction.

[0003] Existing technologies often employ offline mixing followed by transfer, storage, and delivery of the solution for liquid supply. However, this offline mixing and supply method has the following drawbacks:

[0004] 1. Risk of secondary pollution: After mixing, the solution comes into contact with ambient air during transportation and storage, which can lead to the introduction of particulate matter and directly affect the yield.

[0005] 2. Deterioration due to time sensitivity: Some substances with time sensitivity, such as peracetic acid, ferric chloride, and ethyl acetate, undergo hydrolysis during storage, which reduces the yield of the process and requires them to be used as soon as possible after preparation.

[0006] 3. Insufficient mixing precision: Manual feeding results in a powder dissolution rate of only 85%-90%, and concentration fluctuations lead to an increase in the defect rate;

[0007] 4. Waste of storage and transportation containers: Storage and transportation containers for chemical liquids require corrosion resistance, insulation, fire resistance, and cleanliness, which are expensive and require a reduction in quantity design. Utility Model Content

[0008] The purpose of this invention is to provide an online liquid supply device with a premixing function to solve the fundamental defects of the traditional offline mixing liquid supply mode.

[0009] To achieve the above objectives, this utility model provides the following technical solution: an online liquid supply device with premixing function, comprising:

[0010] The inner rotating part is equipped with a premixing chamber with a driven rotating stirring blade, and a bubbling device and an ultrasonic device are fixedly installed on the bottom of the inner side respectively.

[0011] The first liquid supply chamber has a first connecting pipe fixedly connected between its input end and the first output end of the premixing chamber located at a high water level distribution.

[0012] The second liquid supply chamber has a second connecting pipe fixedly connected between its input end and the premixing chamber located at the second output end of the high water level distribution;

[0013] The liquid storage tank has an input end at its top that is located between the high water level and the lowest water level of the premixing chamber, and a third output end that is fixedly connected to a third connecting pipe.

[0014] The solid powder chamber has a fourth connecting pipe fixedly connected to the first input end at the top of the premixing chamber;

[0015] The DI water supply pipe is fixedly connected to the second input end at the top of the premixing chamber.

[0016] Preferably, the device further includes a first weighing device, wherein the first weighing device and the second liquid supply chamber are respectively located at the detection ends of the two first weighing devices.

[0017] Preferably, level sensors for detecting high and low water levels are fixedly installed in the premixing chamber and the liquid storage tank.

[0018] Preferably, a first pneumatic pump and a first check valve are connected in series on the first connecting pipe along the conveying direction.

[0019] Preferably, a second pneumatic pump and a second check valve distributed along the conveying direction are connected in series on the second connecting pipe.

[0020] Preferably, the third connecting pipe is connected in series with a third pneumatic pump, a coarse filter, a fine filter, and a third check valve distributed along the conveying direction.

[0021] Preferably, the fourth connecting pipe is connected in series with a first pneumatic butterfly valve distributed along the conveying direction.

[0022] Preferably, the DI water supply pipe is connected in series with a pneumatic diaphragm valve and a flow meter distributed along the delivery direction.

[0023] Preferably, a material conveying pipe is fixedly connected to the second output end at the top of the liquid storage tank, and a metering pump and a fourth check valve are connected in series on the material conveying pipe along the conveying direction.

[0024] Preferably, a second weighing device is also included, wherein the solid powder chambers are distributed at the detection end of the second weighing device.

[0025] In the above technical solution, the online liquid supply device with premixing function provided by this utility model has the following beneficial effects: it further reduces the contamination rate, improves process stability, and further increases production capacity. Secondly, by combining solid powder feeding with premixed liquid supply, the volume of transported materials is reduced by more than 90%, and the amount of packaging materials used is reduced by 85-90%. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0027] Figure 1 A flowchart provided for an embodiment of this utility model.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1. First weighing device; 2. First liquid supply chamber; 3. First pneumatic pump; 4. First check valve; 5. First pneumatic butterfly valve; 6. Premixing chamber; 7. Solid powder chamber; 8. Second weighing device; 9. Third pneumatic pump; 10. Coarse filter; 11. Fine filter; 12. Third check valve; 13. Bubbling device; 14. Ultrasonic device; 15. Second check valve; 16. Second pneumatic pump; 17. Flow meter; 18. Pneumatic diaphragm valve; 19. Second liquid supply chamber; 20. Metering pump; 21. Fourth check valve; 22. Liquid storage tank. Detailed Implementation

[0030] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0031] Please see Figure 1 This utility model provides a technical solution: an online liquid supply device with premixing function, comprising:

[0032] Premix chamber 6:

[0033] The interior is equipped with a driven premixing chamber 6, with three asynchronous motors installed at the top to drive the stirring blades, achieving macroscopic convection mixing;

[0034] A bubbling device 13 and an ultrasonic device 14 are fixedly installed on the inner bottom, which are used for microporous bubbling mass transfer enhancement and ultrasonic deagglomeration of powder agglomerates, respectively.

[0035] It is equipped with high and low water level sensors for linkage control of water level and process nodes.

[0036] Liquid supply chamber assembly:

[0037] First liquid supply chamber 2: connected to the first high-level output end of premixing chamber 6 via a first connecting pipe;

[0038] Second liquid supply chamber 19: connected to the high-level second output terminal of premixing chamber 6 via a second connecting pipe;

[0039] Each liquid supply chamber is equipped with a weighing device 1 to monitor the liquid consumption in real time and achieve quantitative replenishment.

[0040] Solid powder chamber 7:

[0041] It is connected to the first input terminal at the top of the premixing chamber 6 via the fourth connecting pipe;

[0042] Equipped with a second weighing device 8, it enables dynamic monitoring of powder quality;

[0043] The interior can be equipped with feeding devices such as vibrating funnels to prevent clogging.

[0044] DI water supply pipe:

[0045] It is connected to the second input terminal at the top of the premixing chamber 6 and equipped with a pneumatic diaphragm valve 18 and a flow meter 17 to precisely control the inlet water flow.

[0046] Liquid storage tank 22:

[0047] It is connected to the third output terminal of the water level in the premixing chamber 6 via the third connecting pipe;

[0048] It is equipped with high / low liquid level sensors to monitor the liquid level status;

[0049] The outlet is connected to a material conveying pipe, equipped with a metering pump 20 and a fourth check valve 21, to achieve precise liquid supply to the process equipment.

[0050] Piping and valve pump systems:

[0051] The first connecting pipe is equipped with a first pneumatic pump 3 and a first check valve 4;

[0052] The second connecting pipe is equipped with a second pneumatic pump 16 and a second check valve 15.

[0053] The third connecting pipe is equipped with a third pneumatic pump 9, a coarse filter 10, a fine filter 11, and a third check valve 12. The coarse filter 10 uses a non-woven fabric assembly, i.e., at least three non-woven fabric pieces. The fine filter 11 then uses an RO membrane for filtration.

[0054] The fourth connecting pipe is equipped with a first pneumatic butterfly valve 5, which is used to control the powder feeding rate;

[0055] All valves and pumps are centrally controlled by a control unit.

[0056] Workflow:

[0057] Step 1: System Initialization

[0058] A single-component liquid is injected into the liquid supply chamber, and the weighing sensor is calibrated to zero.

[0059] The solid powder chamber is loaded with a predetermined powder;

[0060] Step 2: Quantitative replenishment of liquid components

[0061] The control unit receives the mixing formula, calculates the required mass of each liquid, and starts the corresponding pneumatic pump.

[0062] When the load cell detects a decrease in mass that reaches the set value, the pneumatic pump is shut off, and the check valve is simultaneously locked.

[0063] Step 3: Feeding solid powder

[0064] The feeding device weighs the powder and dynamically opens the pneumatic butterfly valve:

[0065] The governing equation is: θ = k·m / (ρ·A)

[0066] Where θ is the valve opening degree (%), m is the powder mass (g), and ρ is the powder bulk density (g / cm³). 3 A is the cross-sectional area of ​​the valve port (cm²) 2 ), where k is the fluidization coefficient (0.6-0.8).

[0067] Step 4: Premixing process execution

[0068] Triple hybrid synchronous activation:

[0069] The ultrasonic system operates (20–40 kHz, 300 W (adjustable)) to achieve nanoscale depolymerization.

[0070] The stirring blades rotate at 200 rpm (adjustable) to achieve macroscopic convection;

[0071] Nitrogen gas (flow rate 2 L / min) is introduced into the microporous bubbler to achieve enhanced mass transfer at the microscale.

[0072] Liquid level linkage control: The low liquid level sensor triggers liquid replenishment, and the high liquid level sensor terminates mixing and starts discharging.

[0073] Step 5: Temporary storage and filtration of the mixture

[0074] The premixed liquid is pumped by a pneumatic pump and flows into the storage chamber through a two-stage filtration system; a liquid level sensor monitors the storage volume.

[0075] Step 6: Quantitative Liquid Supply Process

[0076] The metering module receives the demand signal from the process equipment, and the metering pump supplies liquid according to the set flow rate (e.g., 10–500 mL / min) and time interval.

[0077] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. An online liquid supply device with premixing function, characterized in that, include: The inner rotating part is provided with a premixing chamber (6) with a stirring blade that is driven to rotate, and a bubbling device (13) and an ultrasonic device (14) are fixedly installed on the bottom of the inner side respectively; The first liquid supply chamber (2) is fixedly connected to the first output end of the premixing chamber (6) located at a high water level distribution by a first connecting pipe; The second liquid supply chamber (19) is fixedly connected to the second output end of the premixing chamber (6) located at the high water level distribution by a second connecting pipe; The liquid storage tank (22) has an input end at its top that is located between the high water level and the lowest water level of the premixing chamber (6) and a third output end that is fixedly connected to a third connecting pipe. The solid powder chamber (7) has a fourth connecting pipe fixedly connected to the first input end of the top of the premix chamber (6); The DI water supply pipe is fixedly connected to the second input end at the top of the premix chamber (6).

2. The online liquid supply device with premixing function according to claim 1, characterized in that, It also includes a first weighing device (1), and the first weighing device (1) and the second liquid supply chamber (19) are respectively located at the detection ends of the two first weighing devices (1).

3. The online liquid supply device with premixing function according to claim 1, characterized in that, Liquid level sensors for detecting high and low water levels are fixedly installed in the premixing chamber (6) and the liquid storage tank (22).

4. The online liquid supply device with premixing function according to claim 1, characterized in that, The first connecting pipe is connected in series with a first pneumatic pump (3) and a first check valve (4) distributed along the conveying direction.

5. The online liquid supply device with premixing function according to claim 1, characterized in that, A second pneumatic pump (16) and a second check valve (15) distributed along the conveying direction are connected in series on the second connecting pipe.

6. The online liquid supply device with premixing function according to claim 1, characterized in that, The third connecting pipe is connected in series with a third pneumatic pump (9), a coarse filter (10), a fine filter (11), and a third check valve (12) distributed along the conveying direction.

7. The online liquid supply device with premixing function according to claim 1, characterized in that, The fourth connecting pipe is connected in series with a first pneumatic butterfly valve (5) distributed along the conveying direction.

8. The online liquid supply device with premixing function according to claim 1, characterized in that, The DI water supply pipe is connected in series with a pneumatic diaphragm valve (18) and a flow meter (17) distributed along the delivery direction.

9. An online liquid supply device with premixing function according to claim 1, characterized in that, The second output end of the top of the liquid storage tank (22) is fixedly connected to a material conveying pipe, and a metering pump (20) and a fourth check valve (21) distributed along the conveying direction are connected in series on the material conveying pipe.

10. An online liquid supply device with premixing function according to claim 1, characterized in that, It also includes a second weighing device (8), wherein the solid powder chambers (7) are distributed at the detection end of the second weighing device (8).

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