A ceramic disc pre-treatment device

Abstract

The utility model provides a kind of ceramic disc pretreatment device.Case is set to conveying belt, and ceramic disc is conveyed by conveying belt, the first end of shell is equipped with the import for ceramic disc to pass, the second end is equipped with the export for ceramic disc to pass, and washing assembly, blow-dry component and electric stick are all set in shell, and washing assembly is set to the first end of shell for the surface cleaning of ceramic disc on conveying belt, electric stick is set to the second end of shell for adsorbing dust on ceramic disc on conveying belt, and blow-dry component is set between washing assembly and electric stick for the blow-dry of ceramic disc on conveying belt.By the above disclosed ceramic disc pretreatment device, not only can effectively pretreat ceramic disc by washing assembly, blow-dry component and electric stick, but also can effectively avoid new impurities introduction.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing, specifically a ceramic disk pretreatment device. Background Technology

[0002] Chemical mechanical polishing (CMP) is a key step in the substrate wafer processing. It involves placing the substrate wafer between a polishing slurry and a polishing pad, and achieving nanoscale planarization of the substrate wafer through the synergistic effect of chemical reaction and mechanical abrasion.

[0003] Before chemical mechanical polishing, the ceramic disc needs to be pretreated. The operator first sprays water on the ceramic disc with a spray bottle, then wipes it dry with a lint-free cloth, and then uses an air gun and scraper to remove the particles attached to the surface. Then the substrate wafer is attached to the ceramic disc, and finally the ceramic disc with the substrate wafer attached is fixed on the polishing machine carrier for polishing.

[0004] However, manually pre-treating ceramic plates by staff is not only time-consuming and labor-intensive, but also easily introduces new impurities. Therefore, there is an urgent need for a device that can pre-treat ceramic plates. Utility Model Content

[0005] In view of this, the present invention provides a ceramic plate pretreatment device to solve the problems of time-consuming and labor-intensive manual pretreatment of ceramic plates by workers, as well as the problem of easily introducing new impurities.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] A ceramic disc pretreatment device includes: a conveyor belt, a housing, a cleaning assembly, a drying assembly, and an electric rod;

[0008] The housing is mounted on a conveyor belt, which is used to transport ceramic discs.

[0009] The first end of the housing has an inlet for the ceramic disc to pass through, and the second end has an outlet for the ceramic disc to pass through.

[0010] The cleaning assembly, drying assembly, and electric rod are all housed within the housing;

[0011] The cleaning component is located at the first end of the housing and is used to clean the upper surface of the ceramic discs on the conveyor belt;

[0012] An electric rod is located at the second end of the housing and is used to adsorb dust on the ceramic discs on the conveyor belt;

[0013] The drying assembly is located between the cleaning assembly and the electric rod, and is used to dry the ceramic discs on the conveyor belt.

[0014] Preferably, the cleaning assembly includes: a mounting bracket, a roller, and a connecting pipe;

[0015] The mounting bracket is located inside the housing;

[0016] The roller is rotatably mounted on the fixed frame;

[0017] One end of the connecting pipe is connected to an external cleaning fluid source, and the other end delivers cleaning fluid to the drum.

[0018] Preferably, the fixing frame includes: an upper horizontal bar, a guide vertical bar, a fixing vertical bar, and a lower horizontal bar;

[0019] The upper ends of the guide rod and the fixed rod are both fixed to the two ends of the upper horizontal rod, which is fixed to the housing.

[0020] The guide rod is a hollow tube, and the connecting pipe is connected to the upper end of the guide rod;

[0021] The lower crossbar is a hollow tube with multiple through holes. One end of the lower crossbar is connected to the lower end of the fixed vertical bar, and the other end is connected to the lower end of the guide vertical bar.

[0022] The roller is rotatably mounted on the lower crossbar.

[0023] Preferably, the roller is perpendicular to the conveying direction of the conveyor belt.

[0024] Preferably, the drying assembly includes: a fixed tube, an air tube, and multiple air nozzles;

[0025] The fixing tube is fixed to the shell, and one end is connected to one end of the trachea;

[0026] The other end of the trachea is used to connect to an external air source;

[0027] Multiple air nozzles are located on the same side of the fixed pipe and are connected to the fixed pipe.

[0028] Preferably, multiple air nozzles are evenly arranged along the axial direction of the fixed pipe.

[0029] Preferably, the axial direction of the fixed pipe is perpendicular to the conveying direction of the conveyor belt.

[0030] Preferably, the electric rods are arranged along the conveyor belt conveying direction.

[0031] Preferably, it also includes a power source for supplying electrical energy to the electric baton.

[0032] Preferably, the power source is a battery.

[0033] Based on the above-described ceramic disc pretreatment device provided by this utility model, a housing is disposed on a conveyor belt, and ceramic discs are conveyed by the conveyor belt. The housing has an inlet at its first end for the ceramic discs to pass through, and an outlet at its second end. A cleaning assembly, a drying assembly, and an electric rod are all disposed within the housing. The cleaning assembly for cleaning the upper surface of the ceramic discs on the conveyor belt is located at the first end of the housing, the electric rod for adsorbing dust from the ceramic discs on the conveyor belt is located at the second end of the housing, and the drying assembly for drying the ceramic discs on the conveyor belt is located between the roller and the electric rod. This ceramic disc pretreatment device not only effectively pretreatments the ceramic discs using the cleaning assembly, drying assembly, and electric rod, but also effectively prevents the introduction of new impurities. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0035] Figure 1 A schematic diagram of a ceramic disc pretreatment device provided in an embodiment of this utility model;

[0036] Figure 2 This is a schematic diagram of the cleaning assembly used to clean a ceramic disc according to an embodiment of the present invention;

[0037] Figure 3 A schematic diagram of the structure of the electric rod provided in an embodiment of this utility model.

[0038] Among them, there is a conveyor belt 1; a shell 2, an inlet 21, an outlet 22; a cleaning assembly 3, a fixing frame 31, an upper crossbar 311, a guide vertical bar 312, a fixing vertical bar 313, a lower crossbar 314, a roller 32, and a connecting pipe 33; a drying assembly 4, a fixing pipe 41, an air pipe 42, and an air nozzle 43; an electric rod 5; a power supply 6; and a ceramic disc 7. Detailed Implementation

[0039] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0040] This utility model embodiment provides a ceramic disc pretreatment device, see [link to related document]. Figure 1and combined Figure 2 and Figure 3 , Figure 1 This is a schematic diagram of the structure of a ceramic disc pretreatment device, which includes: a conveyor belt 1, a housing 2, a cleaning assembly 3, a drying assembly 4, and an electric rod 5;

[0041] The housing 2 is disposed on the conveyor belt 1, which is used to transport the ceramic disc 7;

[0042] The first end of the housing 2 has an inlet 21 for the ceramic disc 7 to pass through, and the second end has an outlet 22 for the ceramic to pass through.

[0043] The cleaning component 3, the drying component 4, and the electric rod 5 are all housed inside the housing 2;

[0044] The cleaning component 3 is located at the first end of the housing 2 and is used to clean the upper surface of the ceramic disc 7 on the conveyor belt 1.

[0045] The electric rod 5 is located at the second end of the housing 2 and is used to adsorb dust on the ceramic disc 7 on the conveyor belt 1.

[0046] The drying assembly 4 is located between the cleaning assembly 3 and the electric rod 5, and is used to dry the ceramic discs 7 on the conveyor belt 1.

[0047] It should be noted that when the electric rod 5 of this application is energized, an electric field is formed inside the shell 2. When the conveyor belt 1 transports the dried ceramic disc 7 to the electric field, the particles (dust) on the ceramic disc 7 move toward the electric rod 5 under the action of the electric field until they are adsorbed onto the electric rod 5.

[0048] It is worth noting that the electric field generated by the electric rod 5 in this application is a non-uniform electric field. If the particles (dust) on the ceramic disk 7 are negatively charged, the electric rod 5 can be made positively charged. In this case, after the ceramic disk 7 enters the electric field, the particles (dust) will move towards the electric rod 5 under the action of the electric field until they are adsorbed onto the electric rod 5. If the particles (dust) on the ceramic disk 7 are positively charged, the electric rod 5 can be made negatively charged. In this case, after the ceramic disk 7 enters the electric field, the particles (dust) will move towards the electric rod 5 under the action of the electric field until they are adsorbed onto the electric rod 5. If the charge of the particles (dust) on the ceramic disk 7 is uncertain, the ceramic disk 7 can pass through the electric field region twice, and the electric rod 5 can be made positively or negatively charged each time. Thus, regardless of whether the particles (dust) on the ceramic disk 7 are negatively or positively charged, the particles (dust) on the ceramic disk 7 can be adsorbed.

[0049] It should also be noted that the cleaning component 3 of this application mainly uses a wet cleaning method when cleaning the ceramic plate 7. Therefore, this application needs to set a drying component 4 between the cleaning component 3 and the electric rod 5 to dry the ceramic plate 7.

[0050] This invention places a housing 2 on a conveyor belt 1, through which ceramic discs 7 are conveyed. The housing 2 has an inlet 21 at its first end for the ceramic discs 7 to pass through, and an outlet 22 at its second end for the ceramic discs to pass through. A cleaning assembly 3, a drying assembly 4, and an electric rod 5 are all housed within the housing 2. The cleaning assembly 3, used to clean the upper surface of the ceramic discs 7 on the conveyor belt 1, is located at the first end of the housing 2. The electric rod 5, used to absorb dust from the ceramic discs 7 on the conveyor belt 1, is located at the second end of the housing 2. The drying assembly 4, used to dry the ceramic discs 7 on the conveyor belt 1, is located between the cleaning assembly 3 and the electric rod 5. This ceramic disc pretreatment device not only effectively pretreats the ceramic discs 7 using the cleaning assembly 3, the drying assembly 4, and the electric rod 5, but also effectively prevents the introduction of new impurities.

[0051] Specifically, the cleaning component 3 includes: a fixing frame 31, a roller 32, and a connecting pipe 33;

[0052] The fixing bracket 31 is disposed inside the housing 2;

[0053] The roller 32 is rotatably mounted on the fixed frame 31;

[0054] One end of the connecting pipe 33 is connected to an external cleaning fluid source, and the other end delivers cleaning fluid to the drum 32.

[0055] It should be noted that the fixing frame 31 is set inside the housing 2, and the roller 32 is rotatably set on the fixing frame 31. One end of the connecting pipe 33 is connected to an external cleaning liquid source, and the other end delivers cleaning liquid to the roller 32. Thus, the connecting pipe 33 can continuously deliver cleaning liquid to the roller 32, keeping the roller 32 moist, thereby improving the cleaning cleanliness of the ceramic disc 7.

[0056] Preferably, roller 32 is equipped with a dust-free cloth.

[0057] Specifically, the fixing frame 31 includes: an upper horizontal bar 311, a guide vertical bar 312, a fixing vertical bar 313, and a lower horizontal bar 314;

[0058] The upper ends of the guide rod 312 and the fixed rod 313 are both fixed to the two ends of the upper horizontal rod 311, and the upper horizontal rod 311 is fixed to the housing 2;

[0059] The guide rod 312 is a hollow tube, and the connecting pipe 33 is connected to the upper end of the guide rod 312;

[0060] The lower horizontal bar 314 is a hollow tube with multiple through holes. One end of the lower horizontal bar 314 is connected to the lower end of the fixed vertical bar 313, and the other end is connected to the lower end of the guide vertical bar 312.

[0061] The roller 32 is rotatably mounted on the lower crossbar 314.

[0062] It should be noted that the upper ends of the guide vertical rod 312 and the fixed vertical rod 313 are both fixed to the two ends of the upper horizontal rod 311. The upper horizontal rod 311 is fixed to the housing 2. The guide vertical rod 312 is set as a hollow tube. The connecting pipe 33 is connected to the upper end of the guide vertical rod 312. The lower horizontal rod 314 is set as a hollow tube and has multiple through holes. One end of the lower horizontal rod 314 is connected to the lower end of the fixed vertical rod 313, and the other end is connected to the lower end of the guide vertical rod 312. The roller 32 is rotatably set on the lower horizontal rod 314. Thus, the cleaning fluid transported by the connecting pipe 33 can enter the lower horizontal rod 314 through the guide vertical rod 312 in sequence. Finally, the cleaning fluid is continuously transported to the roller 32 through the through holes of the lower horizontal rod 314 to ensure that the roller 32 is wet.

[0063] Furthermore, the roller 32 is perpendicular to the conveying direction of the conveyor belt 1.

[0064] It should be noted that the roller 32 can be set perpendicular to the conveying direction of the conveyor belt 1, or it can be set at a certain angle. Those skilled in the art can choose according to their needs.

[0065] Specifically, the drying assembly 4 includes: a fixed tube 41, an air tube 42, and multiple air nozzles 43;

[0066] The fixing tube 41 is fixed to the housing 2, and one end is connected to one end of the air tube 42;

[0067] The other end of the trachea 42 is used to connect to an external air source;

[0068] Multiple air nozzles 43 are located on the same side of the fixed pipe 41 and are connected to the fixed pipe 41.

[0069] It should be noted that the fixing tube 41 is fixed to the housing 2, with one end connected to one end of the air tube 42, and the other end of the air tube 42 connected to an external air source. Multiple air nozzles 43 are all located on the same side of the fixing tube 41 and connected to the fixing tube 41. This allows the air tube 42 to continuously supply dry gas to the fixing tube 41, and the gas to be sprayed out through the multiple air nozzles 43, thereby removing water stains from the surface of the ceramic disc 7 and drying the ceramic disc 7.

[0070] It should also be noted that the gas transported by the trachea 42 in this application is a dry and clean gas.

[0071] Specifically, multiple air nozzles 43 are evenly arranged along the axial direction of the fixed pipe 41.

[0072] It should be noted that by evenly arranging multiple air nozzles 43 along the axial direction of the fixed tube 41, it can be ensured that the multiple air nozzles 43 spray air evenly onto the ceramic disc 7, and quickly dry the liquid on the ceramic disc 7.

[0073] It should also be noted that the smaller the distance between adjacent air nozzles 43, the faster the liquid on the ceramic plate 7 can be dried. Those skilled in the art can set the distance between adjacent air nozzles 43 according to their needs, and no specific limitation is made here.

[0074] Furthermore, the axial direction of the fixed pipe 41 is perpendicular to the conveying direction of the conveyor belt 1.

[0075] It should be noted that the axial direction of the fixed pipe 41 can be set perpendicular to the conveying direction of the conveyor belt 1, or it can be set at a preset angle. Those skilled in the art can choose according to their needs.

[0076] Specifically, the electric rod 5 is set along the conveying direction of the conveyor belt 1.

[0077] It should be noted that by setting the electric rod 5 along the conveying direction of the conveyor belt 1, the electric field generated by the electric rod 5 is wider, which makes the ceramic disk 7 conveyed by the conveyor belt 1 stay in the electric field for a longer time, and can further improve the ability of the electric rod 5 to adsorb particles (dust) on the ceramic disk 7.

[0078] Furthermore, the ceramic disc pretreatment device also includes a power supply 6 for providing electrical energy to the electric rod 5.

[0079] It should be noted that by setting up a power supply 6 to provide power to the electric rod 5, the electric rod 5 can be guaranteed to work continuously, thereby achieving the ability to continuously adsorb particles (dust) on the ceramic disc 7.

[0080] Specifically, power source 6 is a battery.

[0081] It should be noted that the power source 6 can be a battery (such as a No. 7 battery, No. 5 battery, button battery, etc.), a lead-acid battery, or a generator or other device that can provide electrical energy. Those skilled in the art can choose according to their needs.

[0082] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A ceramic disc pretreatment device, characterized in that, include: Conveyor belt, housing, cleaning assembly, drying assembly, and electric rods; The housing is disposed on the conveyor belt, which is used to transport ceramic discs; The first end of the housing has an inlet for the ceramic disc to pass through, and the second end has an outlet for the ceramic disc to pass through. The cleaning assembly, the drying assembly, and the electric rod are all disposed within the housing; The cleaning assembly is disposed at the first end of the housing and is used to clean the upper surface of the ceramic disc on the conveyor belt; The electric rod is disposed at the second end of the housing and is used to adsorb dust on the ceramic disc on the conveyor belt; The drying assembly is disposed between the cleaning assembly and the electric rod, and is used to dry the ceramic discs on the conveyor belt.

2. The ceramic disc pretreatment device according to claim 1, characterized in that, The cleaning assembly includes: a mounting frame, a roller, and a connecting pipe; The fixing frame is disposed inside the housing; The roller is rotatably mounted on the fixed frame; One end of the connecting pipe is connected to an external cleaning fluid source, and the other end supplies cleaning fluid to the drum.

3. The ceramic disc pretreatment device according to claim 2, characterized in that, The fixing frame includes: an upper horizontal bar, a guide vertical bar, a fixing vertical bar, and a lower horizontal bar; The upper ends of the guide vertical rod and the upper ends of the fixed vertical rod are both fixed to the two ends of the upper horizontal rod, and the upper horizontal rod is fixed to the housing; The guide rod is a hollow tube, and the connecting pipe is connected to the upper end of the guide rod; The lower crossbar is a hollow tube with multiple through holes. One end of the lower crossbar is connected to the lower end of the fixed vertical bar, and the other end is connected to the lower end of the guide vertical bar. The roller is rotatably mounted on the lower crossbar.

4. The ceramic disc pretreatment device according to claim 2, characterized in that, The roller is perpendicular to the conveying direction of the conveyor belt.

5. The ceramic disc pretreatment device according to claim 1, characterized in that, The drying assembly includes: a fixed tube, an air tube, and multiple air nozzles; The fixing tube is fixed to the housing, and one end is connected to one end of the air tube; The other end of the trachea is used to connect to an external air source; Multiple air nozzles are located on the same side of the fixed pipe and are connected to the fixed pipe.

6. The ceramic disc pretreatment device according to claim 5, characterized in that, The multiple air nozzles are evenly arranged along the axial direction of the fixed tube.

7. The ceramic disc pretreatment device according to claim 5, characterized in that, The axial direction of the fixed pipe is perpendicular to the conveying direction of the conveyor belt.

8. The ceramic disc pretreatment device according to claim 1, characterized in that, The electric rod is arranged along the conveyor belt in the conveying direction.

9. The ceramic disc pretreatment device according to claim 1, characterized in that, Also includes: A power source used to provide electrical energy to the electric rod.

10. The ceramic disc pretreatment apparatus according to claim 9, characterized in that, The power source is a battery.

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