A semiconductor ultra-pure analysis laboratory bottle washing machine

Abstract

The utility model discloses a kind of bottle washing machines for semiconductor ultra-pure analysis laboratory, including rack, workbench installed in the rack, multiple cleaning stations are provided on the workbench, the cleaning station is uniformly matched with the cleaning nozzle and the pressure component, the water outlet direction of the cleaning nozzle is away from the workbench, the water outlet end of the cleaning nozzle is provided with flow guide piece, the flow guide piece is set spirally around preset axis, and also extend along the preset axis direction, the preset axis is same with the water outlet direction of the cleaning nozzle, the pressure component is used to press the container to be cleaned located in the cleaning station. When using, the container to be cleaned is inverted to the cleaning nozzle, and the water flow is guided by the flow guide piece to be radially sprayed to complete the automatic cleaning of the inner wall of the container. The pressure component can press the container to limit its position, thereby ensuring the cleaning effect of the container and improving the efficiency of automatic cleaning.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, specifically relating to a bottle washing machine for semiconductor ultrapure analysis laboratory. Background Technology

[0002] In the field of semiconductor microcontamination control, specialized containers are required to hold various materials for testing and analysis during experiments. Because these containers retain contaminants of different properties after experiments, they must undergo rigorous cleaning before reuse. It is particularly noteworthy that most experiments in the semiconductor industry require cleanroom environments, and cleanrooms have extremely stringent standards for controlling particulate and chemical contamination. This necessitates that the cleanliness of the experimental containers reach an even higher level.

[0003] Therefore, in order to address the above-mentioned technical problems, it is necessary to provide a bottle washing machine for semiconductor ultrapure analysis laboratories. Utility Model Content

[0004] The purpose of this invention is to provide a bottle washing machine for semiconductor ultrapure analysis laboratories, which can solve the problems of poor cleaning effect and low cleaning efficiency for large batches of experimental containers.

[0005] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows: A bottle washing machine for semiconductor ultrapure analysis laboratories includes a frame and a worktable installed within the frame. Multiple cleaning stations are provided on the worktable, each equipped with a cleaning nozzle and a pressure assembly. The water outlet direction of the cleaning nozzle is opposite to that of the worktable. A guide is provided at the water outlet end of the cleaning nozzle, and the guide is spirally arranged around a preset axis and extends along the preset axis. The preset axis is the same as the water outlet direction of the cleaning nozzle. The pressure assembly is used to press against the containers to be cleaned located at the cleaning stations.

[0006] In one or more embodiments of the present invention, the pressing assembly includes a mounting frame disposed on the side of the cleaning station, at least one bracket slidably mounted on the mounting frame, and an abutment plate slidably mounted on the bracket, wherein the sliding direction of the mounting frame is perpendicular to the workbench, and the sliding direction of the abutment plate is parallel to the workbench, for pressing against the container to be cleaned located at the cleaning station.

[0007] In one or more embodiments of this utility model, the mounting bracket includes two relatively fixed mounting plates, the mounting plates having elongated holes, the extending direction of the elongated holes being the same as the sliding direction of the mounting bracket, and the bracket being fixed to the mounting bracket by fasteners.

[0008] In one or more embodiments of the present invention, the bottle washing machine further includes a plurality of air blowing components, one of which is installed in conjunction with a cleaning station for drying containers.

[0009] In one or more embodiments of the present invention, the bottle washing machine further includes a control panel, which is provided with a button operation area for controlling the water output of the cleaning nozzle.

[0010] In one or more embodiments of this utility model, the control panel is disposed on the outside of the frame.

[0011] In one or more embodiments of the present invention, the bottle washing machine further includes a hand valve installed on the outside of the frame.

[0012] In one or more embodiments of the present invention, the bottle washing machine further includes a pipeline connecting the washing nozzle and the hand valve, the pipeline being a high-temperature resistant and corrosion-resistant pipeline.

[0013] In one or more embodiments of this utility model, the workbench divides the frame into an upper cleaning space and a lower assembly space. The cleaning space is equipped with a door, and the assembly space is equipped with a waste liquid discharge pipeline.

[0014] In one or more embodiments of this utility model, the bottom of the frame is provided with casters.

[0015] Compared with existing technologies, this novel semiconductor ultrapure analysis laboratory bottle washing machine, when in use, inverts the container to be cleaned onto the cleaning nozzle. A flow guide is used to guide the water flow radially, thus automatically cleaning the inner wall of the container. Simultaneously, the flow guide prevents the water from directly impacting the bottom of the container and causing it to detach from the cleaning station. A pressure-retaining component presses against the container to limit its position, thereby ensuring effective cleaning and improving the efficiency of automated cleaning. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of a bottle washing machine for semiconductor ultrapure analysis laboratory according to one embodiment of the present invention; Figure 2 This is a schematic diagram of the hidden switch door of a bottle washer for a semiconductor ultrapure analysis laboratory according to one embodiment of the present invention; Figure 3 This is a simplified schematic diagram of the flow guide component of a bottle washing machine for semiconductor ultrapure analysis laboratory in one embodiment of the present invention; Figure 4 This is a simplified structural diagram of the pressure assembly of a bottle washing machine for semiconductor ultrapure analysis laboratory according to one embodiment of the present invention.

[0018] Explanation of key figure labels: 1. Frame; 2. Workbench; 3. Cleaning nozzle; 4. Flow guide; 5. Pressure assembly; 51. Mounting bracket; 52. Support; 53. Abutment plate; 6. Control panel; 7. Manual valve; 8. Opening and closing door. Detailed Implementation

[0019] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0020] Reference Figures 1 to 3 According to one embodiment of the present invention, a bottle washing machine for a semiconductor ultrapure analysis laboratory includes a frame 1 and a workbench 2 installed in the frame 1. The workbench 2 is provided with multiple cleaning stations, each of which is equipped with a cleaning nozzle 3 and a pressure assembly 5. The water outlet direction of the cleaning nozzle 3 is away from the workbench 2. The water outlet end of the cleaning nozzle 3 is provided with a guide 4. The guide 4 is spirally arranged around a preset axis and extends along the preset axis direction. The preset axis is the same as the water outlet direction of the cleaning nozzle 3. The pressure assembly 5 is used to press against the container to be cleaned located at the cleaning station.

[0021] Reference Figure 2 and Figure 3In this embodiment, five cleaning stations are used as an example to illustrate the number of cleaning stations in the semiconductor ultrapure analysis laboratory bottle washing machine of the fundamental application. In other embodiments, the number of cleaning stations can also be different, and they can be arranged in a single row or multiple rows. This application does not impose specific restrictions on this number and arrangement, as long as it meets the cleaning needs of the laboratory. In this embodiment, the flow guide 4 can be set as a spiral strip, and it can gradually contract in the direction away from the cleaning nozzle 3. The structure of the flow guide 4 can be used to guide the water flow to spray radially to clean the inner wall of the container. At the same time, since the flow guide 4 is set at the water outlet end of the cleaning nozzle 3, it can also prevent the water flow from directly impacting the bottom of the container and causing it to leave the cleaning station. The pressure component 5 can press against the bottle to restrict its position, thereby ensuring the cleaning effect of the container and thus improving the efficiency of automated cleaning.

[0022] Reference Figure 3 and Figure 4 The pressing component 5 includes a mounting frame 51 disposed on the side of the cleaning station, at least one bracket 52 slidably mounted on the mounting frame 51, and an abutment plate 53 slidably mounted on the bracket 52. The sliding direction of the mounting frame 51 is perpendicular to the workbench 2, and the sliding direction of the abutment plate 53 is parallel to the workbench 2, used to press against the container to be cleaned located at the cleaning station. Specifically, the mounting frame 51 includes two relatively fixed mounting plates, each with an elongated hole extending in the same direction as the sliding direction of the mounting frame 51. The bracket 52 is fixed to the mounting frame 51 by fasteners. In this embodiment, three brackets 52 are used as an example for illustrative purposes. The height of the bracket 52 can be adjusted using the elongated hole and fasteners to accommodate containers of different sizes. The abutment plate 53, mounted on the bracket 52, can be pulled out and abut against the bottom of an inverted container to limit its movement and ensure effective cleaning of the container.

[0023] Reference Figure 2 The workbench 2 is also equipped with a water outlet trough, and the workbench 2 is configured to guide water flow into the water outlet trough. Specifically, the water outlet trough is located at a lower position of the water flow, and the workbench 2 is tilted to guide the water flow to overflow into the water outlet trough. In other embodiments, a flow channel can also be provided on the workbench 2, which is connected to the water outlet trough to guide the water flow to overflow into the water outlet trough.

[0024] During operation, the operator inverts the container to be cleaned onto the cleaning nozzle 3, and the container is automatically cleaned by the agitation of water. After cleaning, the internal cleanliness of the container meets the requirements for containing ultrapure water. Wastewater from the cleaning process flows by gravity to the outlet tank, effectively improving the efficiency of automated cleaning. This application features multiple cleaning stations, enabling batch processing of experimental containers and ensuring that their surface cleanliness, chemical residue, and other indicators fully meet the standards for cleanroom use.

[0025] In one optional embodiment, the bottle washing machine further includes multiple air blowing components, one of which is installed in conjunction with a washing station for drying containers. The air blowing components can dry the containers after washing, thus keeping them dry for future use. The cooperation between the cleaning nozzle 3 and the air blowing components ensures the automation of container washing and drying.

[0026] Reference Figure 2 In this embodiment, the bottle washer also includes a control panel 6, which has a button operation area for controlling the water output of the cleaning nozzles 3. The water output can be controlled by operating the control panel 6 to adjust the cleaning intensity. The control panel 6 is located on the outside of the frame 1. The bottle washer also includes a hand valve 7 installed on the outside of the frame 1. The external location of the control panel 6 and the hand valve 7 effectively avoids contamination of the cleaning environment due to human operation, further ensuring the cleanliness of the containers and meeting the requirements for laboratory use.

[0027] Reference Figure 2 The bottle washing machine also includes a pipeline connecting the cleaning nozzle 3 and the hand valve 7. The pipeline is made of high-temperature and corrosion-resistant material. The pipeline can be made of the same PFA material as the containers to be cleaned to minimize metal contamination of the cleaning water and further ensure the cleanliness of the containers.

[0028] Reference Figure 1 and Figure 2 The workbench 2 divides the frame 1 into a cleaning space at the top and an assembly space at the bottom. The cleaning space is equipped with a door 8, and the assembly space is equipped with a waste liquid discharge pipeline.

[0029] In one optional embodiment, the bottom of the frame 1 is provided with casters for moving it to the corresponding position.

[0030] Therefore, the semiconductor ultrapure analysis laboratory bottle washer of this application can clean multiple containers simultaneously and has functions such as automatic drainage and adjustable water volume, thus improving the efficiency of automated container cleaning. Meanwhile, the positioning of the control panel 4 and the manual valve 5 minimizes interference from the external environment on the internal cleaning space, and the selection of pipelines ensures the cleanliness of the cleaning water, thereby ensuring the cleanliness of the cleaned containers.

[0031] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0032] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A bottle washer for a semiconductor ultrapure analysis laboratory, characterized in that, The device includes a frame (1) and a workbench (2) installed inside the frame (1). The workbench (2) is provided with multiple cleaning stations. Each cleaning station is equipped with a cleaning nozzle (3) and a pressure assembly (5). The water outlet direction of the cleaning nozzle (3) is away from the workbench (2). The water outlet end of the cleaning nozzle (3) is provided with a guide (4). The guide (4) is spirally arranged around a preset axis and extends along the preset axis. The preset axis is the same as the water outlet direction of the cleaning nozzle (3). The pressure assembly (5) is used to press against the container to be cleaned located at the cleaning station.

2. The bottle washer for semiconductor ultrapure analysis laboratory use according to claim 1, characterized in that, The pressing component (5) includes a mounting bracket (51) disposed on the side of the cleaning station, at least one bracket (52) slidably mounted on the mounting bracket (51), and an abutment plate (53) slidably mounted on the bracket (52), wherein the sliding direction of the mounting bracket (51) is perpendicular to the workbench (2), and the sliding direction of the abutment plate (53) is parallel to the workbench (2), for pressing against the container to be cleaned located at the cleaning station.

3. The semiconductor ultrapure analysis laboratory bottle washer according to claim 2, characterized in that, The mounting bracket (51) includes two relatively fixed mounting plates. The mounting plates have elongated holes. The extension direction of the elongated holes is the same as the sliding direction of the mounting bracket (51). The bracket (52) is fixed to the mounting bracket (51) by fasteners.

4. The semiconductor ultrapure analysis laboratory bottle washer according to claim 1, characterized in that, The bottle washing machine also includes multiple air blowing components, one of which is installed in conjunction with a cleaning station for drying containers.

5. The bottle washer for semiconductor ultrapure analysis laboratory use according to claim 1, characterized in that, The bottle washing machine also includes a control panel (6), which has a button operation area for controlling the water output of the cleaning nozzle (3).

6. The bottle washer for semiconductor ultrapure analysis laboratory according to claim 5, characterized in that, The control panel (6) is located on the outside of the frame (1).

7. The semiconductor ultrapure analysis laboratory bottle washer according to claim 1, characterized in that, The bottle washing machine also includes a hand valve (7) installed on the outside of the frame (1).

8. The semiconductor ultrapure analysis laboratory bottle washer according to claim 7, characterized in that, The bottle washing machine also includes a pipeline connecting the cleaning nozzle (3) and the hand valve (7), and the pipeline is a high-temperature resistant and corrosion-resistant pipeline.

9. The bottle washer for semiconductor ultrapure analysis laboratory use according to claim 1, characterized in that, The workbench (2) divides the frame (1) into a cleaning space at the top and an assembly space at the bottom. The cleaning space is equipped with a door (8), and the assembly space is equipped with a waste liquid discharge pipeline.

10. The semiconductor ultrapure analysis laboratory bottle washer according to claim 1, characterized in that, The bottom of the frame (1) is equipped with casters.

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