A precision probe bending forming die for probe card manufacturing

Abstract

The utility model relates to a kind of probe precision bending forming die for probe card manufacturing, including base and mould assembly, mould assembly includes upper mould, lower mould, drive seat, rotating platform, support, servo motor, electric box, electromagnetic strip, box cover, end handle, control button and workpiece groove, lower mould is set below upper mould, drive seat is set below lower mould.The utility model in mould assembly can be placed to probe card workpiece by workpiece groove in lower mould when using, then make upper mould gland on lower mould, electromagnetic strip is inserted into workpiece groove to probe card workpiece is compressed tightly at this time, then electromagnetic strip can be magnetically absorbed into workpiece groove, so that the stability of probe card workpiece can be improved when processing, displacement can be avoided when processing, to avoid causing processing error, in addition, workpiece groove is distributed in relative structure, two groups of probe card workpiece can be placed simultaneously, alternating processing is facilitated, and processing efficiency can be improved.

Description

Technical Field

[0001] This utility model relates to the field of probe card processing technology, and in particular to a probe precision bending and forming mold for probe card manufacturing. Background Technology

[0002] Probe cards are the interface between the chip under test and the test machine in semiconductor wafer testing. They are mainly used to perform preliminary electrical performance tests on the chip before packaging. The probes on the probe card are directly contacted with the pads or bumps on the chip to extract the chip signal. With the help of peripheral test instruments and software control, automated measurement is achieved. After screening out defective chips, the subsequent packaging process can be carried out, which can reduce packaging costs.

[0003] Probe cards can be classified into cantilever probe cards, vertical probe cards, and MEMS probe cards according to their structure. Cantilever probe cards are low-cost and suitable for low-speed analog chip testing; vertical probe cards have more precise tip contact and are suitable for high-density bump testing; MEMS probe cards use microelectromechanical systems technology, which has better accuracy and consistency and is suitable for advanced packaging. In the processing of cantilever probes, bending molds are required to bend the probe tips, but existing bending molds have certain inconveniences in use.

[0004] Due to the small size of the probe cards, existing bending forming dies have two major problems in practical applications: First, the dies lack stability in fixing the probe cards. Due to the small size of the probe cards, the dies cannot form precise and firm positioning constraints, which makes the probe cards prone to positional displacement during processing, leading to processing errors and affecting the dimensional accuracy and subsequent performance of the probe cards. Second, the processing efficiency is low. Existing dies adopt a "single-set" workpiece fixing mode, meaning that only one set of probe cards can be positioned and processed at a time. Moreover, after each set of probe cards is processed, the machine needs to be stopped and new workpieces need to be manually reloaded. The whole process involves a long downtime, which seriously restricts the efficiency of mass production.

[0005] To address this, we propose a precision bending and forming mold for probe card fabrication. Utility Model Content

[0006] In existing technologies, the mold's stability in fixing the probe card is poor. Due to the small size of the probe card, the mold cannot form a precise and firm positioning constraint, which leads to the probe card's positional displacement during processing, resulting in processing errors. Existing molds adopt a "single-set" workpiece fixing mode, meaning that only one set of probe cards can be positioned and processed at a time. Moreover, after each set of probe cards is processed, the machine needs to be stopped and new workpieces need to be manually reloaded. The whole process involves a long downtime, which seriously restricts the efficiency of mass production. This utility model provides a probe precision bending forming mold for probe card manufacturing.

[0007] The technical solution adopted by this utility model is: a probe precision bending and forming mold for probe card manufacturing, including a base and a mold assembly. The mold assembly includes an upper mold, a lower mold, a drive seat, a rotary table, a bracket, a servo motor, an electrical box, an electromagnetic strip, a box cover, an end handle, control buttons, and a workpiece groove. The lower mold is located below the upper mold, the drive seat is located below the lower mold, the rotary table is located on the upper outer surface of the drive seat, the bracket is fixedly installed on the upper outer surface of the rotary table, the servo motor is fixedly installed in the middle of the drive seat, the electrical box is fixedly installed on the upper outer surface of the upper mold, the electromagnetic strip is fixedly installed on the lower outer surface of the upper mold, the box cover is located on the upper outer surface of the electrical box, the end handle is fixedly installed on the upper outer surface of the box cover, the control buttons are located on the upper outer surface of the end handle, and the workpiece groove is located in the middle of the lower mold.

[0008] Furthermore, a frame is fixedly installed on the upper outer surface of the base, a base is provided on the lower outer surface of the base, a guide groove is provided in the middle of the base, a lead screw and a movable slide are provided in the middle of the guide groove, the movable slide is located outside the lead screw, a rotating handle is provided on the outer surface of one end of the lead screw, a cylinder is provided on the upper outer surface of the frame, and a bending head is fixedly installed on the outer surface of one end of the cylinder.

[0009] Furthermore, the lower mold and the workpiece groove are integrally formed, and the upper outer surface of the bracket is connected to the lower outer surface of the lower mold.

[0010] Furthermore, the output end of the servo motor is connected to the lower outer surface of the rotary table, and a storage battery is installed inside the electrical box.

[0011] Furthermore, the base and the base plate are integrally formed, and the base and the guide groove are integrally formed.

[0012] Furthermore, the lead screw is threadedly connected to the movable slide, the lead screw passes through the guide groove, and the lead screw and the rotating handle are integrally formed.

[0013] The beneficial effects of this utility model are:

[0014] In this invention, the mold assembly allows the probe card workpiece to be placed in the workpiece slot of the lower mold, and then the upper mold is placed on top of the lower mold. At this time, the electromagnetic strip is inserted into the workpiece slot to press the probe card workpiece firmly. Simultaneously, the control box can be operated to supply power to the electromagnetic strip, causing it to be magnetically attracted into the workpiece slot. This improves the stability of the probe card workpiece during processing, preventing displacement and avoiding processing errors. In addition, the workpiece slots are arranged in a relatively opposite structure, allowing two sets of probe card workpieces to be placed simultaneously. After one set of probe card workpieces is processed, the servo motor can be started to drive the rotary table to rotate, which in turn drives the lower mold to rotate via the support. This allows for easy adjustment of the orientation of the probe card workpieces, facilitating alternating processing and improving processing efficiency. Attached Figure Description

[0015] Figure 1 This is an overall structural diagram of the present invention;

[0016] Figure 2 This is a structural diagram of the mold assembly of this utility model;

[0017] Figure 3 This is a structural diagram of the upper mold of this utility model;

[0018] Figure 4 This is a structural diagram of the frame of this utility model.

[0019] The components in the diagram are labeled as follows: 1. Base; 2. Mold assembly; 201. Upper mold; 202. Lower mold; 203. Drive base; 204. Rotary table; 205. Support; 206. Servo motor; 207. Electrical box; 208. Electromagnetic strip; 209. Box cover; 210. End handle; 211. Control button; 212. Workpiece groove; 3. Frame; 4. Base; 5. Guide groove; 6. Lead screw; 7. Rotary handle; 8. Moving slide; 9. Cylinder; 10. Bending head. Detailed Implementation

[0020] In the description of this utility model, it should be noted that the terms "front", "up", "down", "left", "right", "vertical", "horizontal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0021] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0022] The following is in conjunction with the appendix Figures 1-4 The present invention will be further described below.

[0023] To address the problems existing in the background technology, this application proposes the following technical solution: a probe precision bending forming mold for probe card fabrication.

[0024] The specific technical solution includes a base 1 and a mold assembly 2. The mold assembly 2 includes an upper mold 201, a lower mold 202, a drive base 203, a rotary table 204, a bracket 205, a servo motor 206, an electrical box 207, an electromagnetic strip 208, a box cover 209, an end handle 210, control buttons 211, and a workpiece groove 212. The lower mold 202 is located below the upper mold 201, the drive base 203 is located below the lower mold 202, and the rotary table 204 is located below the drive base 201. The upper outer surface of the drive base 203 is fixedly mounted on the upper outer surface of the rotating table 204. The servo motor 206 is fixedly mounted in the middle of the drive base 203. The electrical box 207 is fixedly mounted on the upper outer surface of the upper mold 201. The electromagnetic strip 208 is fixedly mounted on the lower outer surface of the upper mold 201. The box cover 209 is located on the upper outer surface of the electrical box 207. The end handle 210 is fixedly mounted on the upper outer surface of the box cover 209. The control button 211 is located on the upper outer surface of the end handle 210. The workpiece slot 212 is located in the middle of the lower mold 202. When in use, the mold assembly 2 can place the probe card workpiece through the workpiece slot 212 in the lower mold 202, and then the upper mold 201 presses on the lower mold 202. At this time, the electromagnetic strip 208 is inserted into the workpiece slot 212 to press the probe card workpiece. At the same time, the control button 211 can operate the power box 207 to supply power to the electromagnetic strip 208, so that the electromagnetic strip 208 is magnetically attracted to the workpiece slot 212, thereby improving the stability of the probe card workpiece during processing and avoiding displacement during processing, thus avoiding processing errors. In addition, the workpiece slots 212 are arranged in a relatively opposite structure, which can place two sets of probe card workpieces at the same time. After one set of probe card workpieces is processed, the servo motor 206 can be started to drive the rotary table 204 to rotate, so that the rotary table 204 drives the lower mold 202 to rotate through the bracket 205. This allows for easy adjustment of the orientation of the probe card workpieces, facilitating alternating processing and improving processing efficiency.

[0025] Furthermore, the lower mold 202 and the workpiece groove 212 are integrally formed structures. The upper outer surface of the bracket 205 is connected to the lower outer surface of the lower mold 202. The output end of the servo motor 206 is connected to the lower outer surface of the rotary table 204. A storage battery is installed inside the power box 207. When in use, the storage battery can supply power to the electromagnetic strip 208, which can generate magnetic attraction force to fasten the electromagnetic strip 208 into the workpiece groove 212 and press the workpiece, thereby improving the stability of the workpiece.

[0026] Reference Figure 1 and Figure 4 As shown, a frame 3 is fixedly installed on the upper outer surface of the base 1, a base 4 is provided on the lower outer surface of the base 1, a guide groove 5 is provided in the middle of the base 1, a lead screw 6 and a movable slide 8 are provided in the middle of the guide groove 5, the movable slide 8 is located outside the lead screw 6, a handle 7 is provided on the outer surface of one end of the lead screw 6, a cylinder 9 is provided on the upper outer surface of the frame 3, a bending head 10 is fixedly installed on the outer surface of one end of the cylinder 9, the handle 7 can rotate the lead screw 6 during use, so that the lead screw 6 can drive the movable slide 8 to move back and forth in the guide groove 5 through forward and reverse rotation, so that the movable slide 8 can drive the mold assembly 2 to move downwards of the frame 3, and then the cylinder 9 can push the bending head 10 downwards, so that the bending head 10 squeezes the needle tip of the probe card, so that the needle tip is bent.

[0027] Furthermore, the base 1 and the base 4 are integrally formed, the base 1 and the guide groove 5 are integrally formed, the lead screw 6 is threadedly connected to the movable slide 8, the lead screw 6 passes through the guide groove 5, the lead screw 6 and the rotating handle 7 are integrally formed, and the movable slide 8 can drive the mold assembly 2 to move during use, which facilitates the processing of the probe card workpiece.

[0028] To ensure that those skilled in the art can fully understand the technical solution, this application provides the following overall overview:

[0029] In use, the probe card workpiece can be placed in the workpiece slot 212 of the lower mold 202, and then the upper mold 201 can be pressed onto the lower mold 202. At this time, the electromagnetic strip 208 is inserted into the workpiece slot 212 to press the probe card workpiece. Simultaneously, the power supply to the electromagnetic strip 208 can be operated by the control button 211 to the power box 207, so that the electromagnetic strip 208 is magnetically attracted into the workpiece slot 212. This can improve the stability of the probe card workpiece during processing and avoid displacement during processing, thus avoiding processing errors. In addition, the workpiece slots 212 are arranged in a relatively opposite structure, which can hold two sets of probe card workpieces at the same time. After processing, the servo motor 206 can be started to drive the rotary table 204 to rotate, so that the rotary table 204 drives the lower mold 202 to rotate through the bracket 205. This allows for easy adjustment of the orientation of the probe card workpiece, facilitating alternating processing and improving processing efficiency. During processing, the rotating handle 7 can be rotated, which drives the lead screw 6 to rotate. The lead screw 6 drives the moving slide 8 to reciprocate in the guide groove 5 through forward and reverse rotation, thereby allowing the moving slide 8 to move the mold assembly 2 to the lower part of the frame 3. Then, the cylinder 9 can push the bending head 10 to move down, so that the bending head 10 squeezes the needle tip of the probe card, causing the needle tip to bend.

[0030] All standard parts used in this utility model can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0031] Although embodiments of the present invention have been shown and described, the scope of the present invention will be defined by the appended claims and their equivalents for those skilled in the art.

Claims

1. A precision bending and forming mold for probe card fabrication, characterized in that, The system includes a base (1) and a mold assembly (2). The mold assembly (2) includes an upper mold (201), a lower mold (202), a drive base (203), a rotary table (204), a bracket (205), a servo motor (206), an electrical box (207), an electromagnetic strip (208), a box cover (209), an end handle (210), control buttons (211), and a workpiece groove (212). The lower mold (202) is located below the upper mold (201), the drive base (203) is located below the lower mold (202), the rotary table (204) is located on the upper outer surface of the drive base (203), and the bracket (205) is fixed. The servo motor (206) is fixedly installed in the middle of the drive seat (203), the electric box (207) is fixedly installed in the upper outer surface of the upper mold (201), the electromagnetic strip (208) is fixedly installed in the lower outer surface of the upper mold (201), the box cover (209) is set in the upper outer surface of the electric box (207), the end handle (210) is fixedly installed in the upper outer surface of the box cover (209), the control button (211) is set in the upper outer surface of the end handle (210), and the workpiece groove (212) is set in the middle of the lower mold (202).

2. The probe precision bending forming mold for probe card fabrication according to claim 1, characterized in that, A frame (3) is fixedly installed on the upper outer surface of the base (1). A base (4) is provided on the lower outer surface of the base (1). A guide groove (5) is provided in the middle of the base (1). A lead screw (6) and a movable slide (8) are provided in the middle of the guide groove (5). The movable slide (8) is located outside the lead screw (6). A handle (7) is provided on the outer surface of one end of the lead screw (6). A cylinder (9) is provided on the upper outer surface of the frame (3). A bending head (10) is fixedly installed on the outer surface of one end of the cylinder (9).

3. The probe precision bending forming mold for probe card fabrication according to claim 1, characterized in that, The lower mold (202) and the workpiece groove (212) are integrally formed, and the upper outer surface of the bracket (205) is connected to the lower outer surface of the lower mold (202).

4. A probe precision bending forming mold for probe card fabrication according to claim 1, characterized in that, The output end of the servo motor (206) is connected to the lower outer surface of the rotary table (204), and a storage battery is installed inside the electrical box (207).

5. A probe precision bending forming mold for probe card fabrication according to claim 2, characterized in that, The base (1) and the base (4) are integrally formed, and the base (1) and the guide groove (5) are integrally formed.

6. A probe precision bending forming mold for probe card fabrication according to claim 1, characterized in that, The lead screw (6) is threadedly connected to the movable slide (8), the lead screw (6) passes through the guide groove (5), and the lead screw (6) and the rotating handle (7) are integrally formed.

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