Laser processing apparatus

Abstract

A laser processing apparatus according to an embodiment of the disclosure includes a beam generator generating incident light, and a light converter arranged in an optical path of the incident light and converting the incident light into a plurality of output lights having different outputs. The light converter can include a first optical member having a first reflectance, a second optical member having a second reflectance different from the first reflectance, and a first moving member supporting the first optical member and the second optical member. The first moving member can operate in a first mode in which the first optical member is arranged in the optical path of the incident light or can operate in a second mode in which the second optical member is arranged in the optical path of the incident light.

Description

[0001] Cross-references to related applications

[0002] This application claims priority to Korean Patent Application No. 10-2024-0096457, filed on July 22, 2024, with the Korean Intellectual Property Office, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This disclosure relates to laser processing equipment. Background Technology

[0004] Display devices display images to provide visual information to users. Display devices are used in a variety of ways, ranging from displays on small products such as mobile phones to displays on large products such as televisions.

[0005] Lasers can be used in the manufacturing process of display devices. As a high-density heat source, lasers can be used to mark workpieces, cut according to patterns, or weld or heat-treat workpieces. Laser processing has the advantages of being non-contact, having low loss, and being able to perform precision machining.

[0006] The above description is intended only to help understand the background of the technical ideas in this disclosure. Therefore, it should be understood that the above description will not constitute prior art known to those skilled in the art to which this disclosure pertains. Utility Model Content

[0007] This disclosure aims to provide laser processing equipment capable of processing different workpieces using a single optical system.

[0008] However, the features of this disclosure are not limited to those described above, and those skilled in the art will clearly understand other technical features not mentioned above based on the following description.

[0009] According to embodiments of this disclosure, a laser processing apparatus includes: a beam generator for generating incident light; and an optical transducer disposed in the optical path of the incident light and converting the incident light into multiple output lights with different outputs. The optical transducer may include: a first optical component having a first reflectivity; a second optical component having a second reflectivity different from the first reflectivity; and a first moving component supporting the first and second optical components. The first moving component may operate in a first mode in which the first optical component is disposed in the optical path of the incident light, or in a second mode in which the second optical component is disposed in the optical path of the incident light.

[0010] The laser processing equipment may further include a beam expander disposed between the beam generator and the optical converter.

[0011] When the first moving member operates in the first mode, the first optical member can reflect a portion of the incident light corresponding to the first reflectivity as first reflected light, and can transmit the remaining portion of the incident light other than the first reflected light as first transmitted light. The optical converter may further include a first absorbing member that absorbs the first reflected light.

[0012] The optical converter may further include a compensation member disposed downstream of the first optical member and adjusting the optical path of the first transmitted light incident from the first optical member. The compensation member can convert the first transmitted light into a first output light having a first output.

[0013] The compensation component may include a third optical component having a third reflectivity, a fourth optical component having a fourth reflectivity different from the third reflectivity, and a second movable component supporting the third and fourth optical components. The second movable component may operate in a third mode in which the third optical component is arranged in the optical path of the first transmitted light, or in a fourth mode in which the fourth optical component is arranged in the optical path of the first transmitted light.

[0014] When the second moving member operates in the third mode, the third optical member can reflect a portion of the first transmitted light corresponding to the third reflectivity as the second reflected light, and can transmit the remaining portion of the first transmitted light, excluding the second reflected light, as the second output light with the second output. The fourth optical member can reflect a portion of the second reflected light corresponding to the fourth reflectivity as the third reflected light, and can transmit the remaining portion of the second reflected light, excluding the third reflected light, as the second transmitted light. The optical converter may further include a second absorbing member that absorbs the second transmitted light and a third absorbing member that absorbs the third reflected light.

[0015] When the second moving member operates in the fourth mode, the fourth optical member can reflect the portion of the first transmitted light corresponding to the fourth reflectivity as the fourth reflected light, and can transmit the remaining portion of the first transmitted light other than the fourth reflected light as the third output light with the third output.

[0016] The light converter may further include a second absorbing element that absorbs the fourth reflected light.

[0017] When the first moving member operates in the second mode, the second optical member can reflect a portion of the incident light corresponding to the second reflectivity as second reflected light, and can transmit the remaining portion of the incident light, excluding the second reflected light, as second transmitted light. The first optical member can reflect a portion of the second reflected light corresponding to the first reflectivity as third reflected light, and can transmit the remaining portion of the second reflected light, excluding the third reflected light, as third transmitted light. The optical converter may further include a first absorbing member that absorbs the third transmitted light and a second absorbing member that absorbs the third reflected light.

[0018] The optical converter may further include a compensation member disposed downstream of the second optical member and adjusting the optical path of the second transmitted light incident from the second optical member. The compensation member can convert the second transmitted light into a fourth output light having a fourth output.

[0019] The compensation component may include a third optical component having a third reflectivity, a fourth optical component having a fourth reflectivity different from the third reflectivity, and a second movable component supporting the third and fourth optical components. The second movable component may operate in a fifth mode in which the third optical component is arranged in the optical path of the second transmitted light, or in a sixth mode in which the fourth optical component is arranged in the optical path of the second transmitted light.

[0020] When the second moving member operates in the fifth mode, the third optical member can reflect a portion of the second transmitted light corresponding to the third reflectivity as a fourth reflected light, and can transmit the remaining portion of the second transmitted light, excluding the fourth reflected light, as a fifth output light having a fifth output. The fourth optical member can reflect a portion of the fourth reflected light corresponding to the fourth reflectivity as a fifth reflected light, and can transmit the remaining portion of the fourth reflected light, excluding the fifth reflected light, as a fourth transmitted light. The optical converter may further include a third absorbing member that absorbs the fourth transmitted light and a fourth absorbing member that absorbs the fifth reflected light.

[0021] When the second moving member operates in the sixth mode, the fourth optical member can reflect the portion of the second transmitted light corresponding to the fourth reflectivity as the sixth reflected light, and can transmit the remaining portion of the second transmitted light excluding the sixth reflected light as the sixth output light. The optical converter may further include a third absorbing member that absorbs the sixth reflected light.

[0022] According to embodiments of this disclosure, a laser processing apparatus includes: a beam generator for generating incident light; and an optical transducer disposed in the optical path of the incident light and converting the incident light into one of a first output light having a first output and a second output light having a second output different from the first output. The optical transducer may include: a first optical component having a first reflectivity, reflecting a portion of the incident light corresponding to the first reflectivity as first reflected light and transmitting the remaining portion of the incident light other than the first reflected light as first transmitted light; a first mirror that totally reflects the first reflected light and outputs a second reflected light; a second mirror that totally reflects the first transmitted light and outputs a third reflected light; a second optical component having a second reflectivity different from the first reflectivity and disposed downstream of the first and second mirrors; and a third mirror movable between a first position and a second position. The first position may not overlap with the optical path of the second or third reflected light, and the second position may overlap with the optical path of the second or third reflected light.

[0023] When the third reflector is positioned in the first position, the second reflected light can be incident on the first surface of the second optical component, and the third reflected light can be incident on the second surface of the second optical component. The second optical component can reflect the portion of the second reflected light incident on the first surface corresponding to the second reflectivity as a fourth reflected light, and can transmit the remaining portion of the second reflected light excluding the fourth reflected light as a second transmitted light. The second optical component can further reflect the portion of the third reflected light incident on the second surface corresponding to the second reflectivity as a fifth reflected light, and can transmit the remaining portion of the third reflected light excluding the fifth reflected light as a third transmitted light, and can collect the fourth reflected light and the third transmitted light to output a first output light.

[0024] The laser processing equipment may further include a first absorbing component that absorbs the second transmitted light and the fifth reflected light.

[0025] When the third reflector is positioned in the second position, the second reflected light can be incident on the first surface of the second optical component. The second optical component can reflect the portion of the second reflected light incident on the first surface corresponding to the second reflectivity as a fourth reflected light, and can transmit the remaining portion of the second reflected light, excluding the fourth reflected light, as a second transmitted light. The second optical component can output the fourth reflected light as a second output light.

[0026] The third reflecting mirror can totally reflect the third reflected light. The laser processing equipment may further include a second absorbing member that absorbs the third reflected light reflected from the third reflecting mirror.

[0027] According to embodiments of this disclosure, a laser processing apparatus includes: a beam generator for generating incident light; and an optical transducer disposed in the optical path of the incident light and converting the incident light into one of a first output light having a first output and a second output light having a second output different from the first output. The optical transducer may include: a first optical component movable between a first posture for converting the incident light into first reflected light oriented in a first direction and a second posture for converting the incident light into second reflected light oriented in a second direction different from the first direction; a second optical component having a reflectivity and overlapping the first optical component along the second direction; and a third optical component disposed in the optical path between the first and second optical components, and which, when the first optical component is in the first posture, totally reflects the first reflected light in a direction toward the second optical component. When the first optical component is in the first posture, the second optical component may reflect a portion of the first reflected light output from the third optical component corresponding to its reflectivity as the first output light, and may transmit the remaining portion of the first reflected light other than the first output light as transmitted light. When the first optical component is in the second posture, the second optical component can reflect the portion of the second reflected light corresponding to the reflectivity as the third reflected light, and can transmit the remaining portion of the second reflected light other than the third reflected light as the second output light.

[0028] The laser processing equipment may further include an absorbing member that absorbs transmitted light when the first optical member is in a first posture and absorbs third reflected light when the first optical member is in a second posture.

[0029] This disclosure is not limited to the examples described above. This disclosure may be extended to other variations or equivalents that will be clearly understood by one of ordinary skill in the art to which this disclosure pertains, based on this specification and the accompanying drawings. Attached Figure Description

[0030] Embodiments of the present disclosure will now be described more fully below with reference to the accompanying drawings. However, the present disclosure may be implemented in different forms and should not be construed as limited to the embodiments set forth herein. Rather, the embodiments may be extended in various ways without departing from the spirit and scope of the present disclosure.

[0031] Figure 1A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0032] Figure 1B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0033] Figures 2A to 2D Is showing the use from Figure 1A and Figure 1BThe diagram shows a conceptual illustration of the process of using output light generated by a laser processing device to cut a substrate.

[0034] Figure 3A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0035] Figure 3B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0036] Figure 3C This is a block diagram illustrating a third operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0037] Figure 3D This is a block diagram illustrating a fourth operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0038] Figure 4A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0039] Figure 4B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0040] Figure 4C This is a block diagram illustrating a third operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0041] Figure 5 This is a block diagram illustrating an operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0042] Figure 6A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0043] Figure 6B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0044] Figure 7A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0045] Figure 7B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure. Detailed Implementation

[0046] In the following description, embodiments of the present disclosure are described in more detail with reference to the accompanying drawings. It should be noted that only the parts necessary for understanding the present disclosure will be described in the following description, and descriptions of irrelevant parts will be omitted. Furthermore, the present disclosure is not limited to the embodiments described herein and can be implemented in various forms. The embodiments described herein are provided only to explain the present disclosure in detail so as to enable those skilled in the art to readily practice the present disclosure.

[0047] In this disclosure, it will be understood that when a part is referred to as being “connected” to another part, that part may be “directly connected” to the other part as well as “indirectly connected” to the other part. The terminology used herein is for the purpose of describing embodiments of this disclosure only and is not intended to limit this disclosure. For example, singular expressions are intended to include plural expressions as well, unless the context explicitly indicates otherwise. Furthermore, it should be understood that, when used herein, terms such as “comprising,” “including,” and “having,” and variations thereof (e.g., “containing”), indicate the presence of the stated feature, quantity, step, operation, component, part, or combination thereof, but do not preclude the presence or addition of one or more other features, quantities, steps, operations, components, parts, or combinations thereof, unless the context explicitly indicates otherwise. “At least any one of X, Y, and Z” and “at least any one selected from the group consisting of X, Y, and Z” can be interpreted as only X, only Y, only Z, or any combination of two or more of X, Y, and Z (e.g., XYZ, XY, YZ, and XZ). Here, “and / or” includes any and all combinations of one or more of the corresponding configurations.

[0048] It will be understood that, although terms such as “first” or “second” may be used to describe various components in this disclosure, these components should not be limited by these terms. These terms may be used only to distinguish one component from another. For example, the first component may refer to the second component, and similarly, the second component may refer to the first component, without departing from the scope of this disclosure.

[0049] Spatial relative terms such as “below” or “above” are used for descriptive purposes to describe the relationship between the elements shown in the accompanying drawings. In addition to the directions depicted in the drawings, spatial relative terms are intended to include other orientations in use, operation, and / or manufacture. For example, when the device shown in the drawings is inverted, an element depicted as positioned “below” other elements may be positioned “above” other elements. Therefore, in embodiments, the term “below” can include both above and below orientations. Furthermore, the device may face other orientations (e.g., rotated 90 degrees or in other orientations), and therefore, the spatial relative terms used herein are interpreted accordingly.

[0050] Various embodiments are described with reference to the accompanying drawings, which schematically illustrate preferred embodiments. Accordingly, it will be anticipated that the shape may vary, for example, depending on tolerances and / or manufacturing techniques. Therefore, the embodiments disclosed herein should not be construed as limited to the specific shapes shown in the drawings, and should be interpreted as including various modifications to the shape, for example, that may occur due to manufacturing processes. Furthermore, it should be noted that the shapes of parts or elements depicted in the drawings are for descriptive purposes only and may not represent the actual shape of the parts or elements. Accordingly, the embodiments of this disclosure are not limited to the shapes of the parts or elements depicted in the drawings.

[0051] In this disclosure, multiple output lights with different outputs mean that each of the output lights (or laser beams) generated by the laser processing apparatus according to the embodiment may include different characteristics of each of the output lights (or laser beams), including output power.

[0052] refer to Figure 1A and Figure 1B The components of the laser processing apparatus 10 according to the embodiment and their connection relationships will be described in detail below.

[0053] Figure 1A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure. Figure 1B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0054] refer to Figure 1A The laser processing equipment 10 may include a beam generator BG, a beam expander EXP, an optical converter BTP_A, a scanner SC, and a lens array LA.

[0055] The beam generator (BG) can generate incident light LB_I and can emit incident light LB_I continuously or discontinuously. The beam generator (BG) can emit incident light LB_I with pulses (e.g., ultrashort pulses or burst pulses) having wavelengths, energy, and durations suitable for processing the workpiece.

[0056] The wavelength of the incident light LB_I can be from 340 nm to 360 nm, but this disclosure is not necessarily limited to this. For example, the wavelength of the incident light LB_I can exceed 360 nm. Furthermore, the emission time of the incident light LB_I can be shorter than 1 nanosecond. For example, the emission time of the incident light LB_I can be tens of picoseconds or tens of femtoseconds, but this disclosure is not limited to this. For example, the emission time of the incident light LB_I can be sufficiently long (e.g., tens of seconds to several minutes).

[0057] A beam generator (BG) can emit a single beam or multiple beams. For ease of description, the following explanation will focus on a beam generator (BG) that emits a single beam.

[0058] The beam expander EXP can be positioned downstream of the beam generator BG in the optical path. The beam expander EXP can increase the size of the incident light LB_I emitted from the beam generator BG and output the incident light LB_I towards the optical converter BTP_A. Furthermore, the beam expander EXP can adjust the incident light LB_I into a collimated beam with lower dispersion or lower concentration. For example, the beam expander EXP can be implemented using lenses, light guides, or beam expanders that can expand the beam.

[0059] The optical converter BTP_A can be arranged downstream of the incident light LB_I in the optical path. The optical converter BTP_A can convert the incident light LB_I into one of a first to an nth output light with different outputs, where n can be a natural number greater than zero. Here, one of the first to nth output lights with different outputs (e.g., having different power or characteristics for each of the first to nth output lights) can have a lower output than the incident light LB_I. In other words, the optical converter BTP_A can attenuate the output of the incident light LB_I.

[0060] The optical converter BTP_A may include a first optical component OM1, a second optical component OM2, a first moving component MM1, a first absorbing component BU1, a second absorbing component BU2, and a compensation component CM.

[0061] The first optical component OM1 may be a component having a first reflectivity and may be configured to reflect a portion of the incident light LB_I corresponding to the first reflectivity and transmit the remaining portion of the incident light LB_I. For example, when the first reflectivity is 95%, the first optical component OM1 may reflect 95% of the incident light LB_I and transmit the remaining 5% of the incident light LB_I.

[0062] The first optical component OM1 may be a beam splitter, but this disclosure is not necessarily limited thereto. For example, the first optical component OM1 may include optical elements adapted to reflect a portion of the incident light LB_I and transmit the remainder of the incident light LB_I.

[0063] The second optical component OM2 may be a component having a second reflectivity different from the first reflectivity, and may be configured to reflect the portion of the incident light LB_I corresponding to the second reflectivity and transmit the remaining portion of the incident light LB_I. For example, when the second reflectivity is 10%, the second optical component OM2 may reflect 10% of the incident light LB_I and transmit the remaining 90% of the incident light LB_I.

[0064] Like the first optical component OM1, the second optical component OM2 can be a beam splitter, but the embodiments are not limited thereto. Like the first optical component OM1, the second optical component OM2 can include optical elements adapted to reflect a portion of the incident light LB_I and transmit the remainder of the incident light LB_I.

[0065] The first movable member MM1 can support the first optical member OM1 and the second optical member OM2, and can allow the first optical member OM1 and the second optical member OM2 to move. The first movable member MM1 can be in a first mode in which the first optical member OM1 is arranged in the optical path of the incident light LB_I (see...). Figure 1A Or, in a second mode where the second optical component OM2 is arranged in the optical path of the incident light LB_I (see...), the second mode... Figure 1B The operation is performed as follows. For this purpose, the first moving member MM1 can move in the first direction DR1 and the second direction DR2.

[0066] Figure 1A The diagram shows the arrangement of the first optical component OM1 in the optical path of the incident light LB_I. Additionally, Figure 1B This illustrates the arrangement of the second optical component OM2 in the optical path of the incident light LB_I. In other words, Figure 1A The first moving component MM1 in the first mode is shown, and Figure 1B The first moving component MM1 in the second mode is shown. That is, as... Figure 1B As shown, the first moving component MM1 can be moved from... Figure 1A The position of the first movable member MM1 shown in the figure moves in the first direction DR1. Conversely, the first movable member MM1 can be moved from... Figure 1B The position shown in the figure moves to the second direction DR2. Figure 1A The position is shown in the figure. That is, the first moving member MM1 can move in the first direction DR1 or the second direction DR2 to selectively place the first optical member OM1 or the second optical member OM2 with different reflectivities in the optical path of the incident light LB_I.

[0067] exist Figure 1A and Figure 1BIn the illustration, the first moving member MM1 is shown to move linearly along a first direction DR1 and a second direction DR2, but the embodiments of this disclosure are not necessarily limited to this. For example, the first moving member MM1 can be rotated to support a first optical member OM1 and a second optical member OM2. That is, the first moving member MM1 can be rotated to place the first optical member OM1 in the optical path of the incident light LB_I when operating in a first mode or to place the second optical member OM2 in the optical path of the incident light LB_I when operating in a second mode. In other words, the first moving member MM1 can be rotated to selectively arrange either the first optical member OM1 or the second optical member OM2 in the optical path of the incident light LB_I.

[0068] The first absorbing member BU1 and the second absorbing member BU2 can absorb reflected and transmitted light other than the output light used to process the substrate SUB. The first absorbing member BU1 and the second absorbing member BU2 can include materials capable of absorbing light, and can include, for example, conductive or insulating materials. As conductive materials forming the first absorbing member BU1 and the second absorbing member BU2, chromium (Cr), molybdenum (Mo), nickel (Ni), titanium (Ti), cobalt (Co), copper (Cu), or aluminum (Al), or alloy materials containing the above elements as main components, can be used, and as insulating materials forming the first absorbing member BU1 and the second absorbing member BU2, compounds such as nitrogen compounds, oxygen compounds, carbon compounds, or halogen compounds can be used, but this disclosure is not limited thereto.

[0069] The compensation component CM can be arranged downstream of the first moving component MM1 in the optical path to compensate for the path of the incident light. For example, the compensation component CM may include a compensator for adjusting the path of the incident light, but this disclosure is not limited thereto.

[0070] The scanner SC can be arranged downstream of the optical converter BTP_A in the optical path. The scanner SC can convert the path of the light received from the compensation component CM and can provide the light to the lens array LA.

[0071] The lens array LA can be arranged downstream of the scanner SC in the optical path. The lens array LA can collect the light incident from the scanner SC and illuminate the substrate SUB set on the stage ST.

[0072] In the following text, reference will be made to Figure 1A and Figure 1B A detailed explanation is provided regarding the principle by which the first moving component MM1 produces output light with different outputs by operating in different modes.

[0073] Figure 1A The state of the first moving component MM1 operating in the first mode is shown.

[0074] refer to Figure 1A The first optical component OM1 can be arranged in the optical path of the incident light LB_I. The first optical component OM1 can reflect the portion of the incident light LB_I corresponding to the first reflectivity as the first reflected light RB1, and can transmit the remaining portion of the incident light LB_I other than the first reflected light RB1 as the first transmitted light TB1.

[0075] The first absorbing member BU1 can absorb the first reflected light RB1 reflected by the first optical member OM1. In this way, when the first moving member MM1 is in the first mode, the first absorbing member BU1 can absorb the first reflected light RB1 other than the first output light LB_O1 used for processing the substrate SUB. This prevents the reflected light from irradiating other components inside the laser processing equipment 10, thereby reducing the risk of equipment damage.

[0076] The compensation component CM can be arranged downstream of the first optical component OM1 in the optical path to compensate for or adjust the optical path of the first transmitted light TB1 incident from the first optical component OM1. The compensation component CM can convert the first transmitted light TB1 into a first output light LB_O1 with a first output.

[0077] Figure 1B The state of the first moving component MM1 operating in the second mode is shown.

[0078] refer to Figure 1B The second optical component OM2 can be arranged in the optical path of the incident light LB_I. This can be achieved by moving the first moving component MM1 a predetermined distance in the first direction DR1 as described above. The second optical component OM2 can reflect the portion of the incident light LB_I corresponding to the second reflectivity as the second reflected light RB2, and can transmit the remaining portion of the incident light LB_I other than the second reflected light RB2 as the second transmitted light TB2.

[0079] The first optical component OM1 can be arranged downstream of the second optical component OM2 in the optical path. That is, the second reflected light RB2 reflected from the second optical component OM2 can be incident on the first optical component OM1. In this case, the first optical component OM1 can reflect the portion of the second reflected light RB2 corresponding to the first reflectivity as the third reflected light RB3, and can transmit the remaining portion of the second reflected light RB2 excluding the third reflected light RB3 as the third transmitted light TB3.

[0080] When the first moving member MM1 is in the second mode, the first absorbing member BU1 can absorb the third transmitted light TB3, and the second absorbing member BU2 can absorb the third reflected light RB3. The first absorbing member BU1 and the second absorbing member BU2 can absorb reflected and transmitted light, except for the second output light LB_O2 used for processing the substrate SUB. This prevents reflected and transmitted light from irradiating other components inside the laser processing equipment 10, thereby reducing the risk of equipment damage.

[0081] The compensation component CM can be arranged downstream of the second optical component OM2 in the optical path to compensate for or adjust the optical path of the second transmitted light TB2 incident from the second optical component OM2. The compensation component CM can convert the second transmitted light TB2 into a second output light LB_O2 with a second output.

[0082] Figure 1A and Figure 1B The laser processing apparatus 10 shown can be configured as a single optical system. According to this configuration, the laser processing apparatus 10 can generate a first output light LB_O1 having a first output and a second output light LB_O2 having a second output, and can selectively irradiate the workpiece with either the first output light LB_O1 or the second output light LB_O2 having different outputs.

[0083] In the following text, see references Figures 2A to 2D This will provide a detailed explanation of a method for processing the first functional layer FL1 and the second functional layer FL2 of a substrate SUB by selectively utilizing either the first output light LB_O1 or the second output light LB_O2.

[0084] Figures 2A to 2D Is showing the use from Figure 1A and Figure 1B The diagram shows a conceptual illustration of the process of using output light generated by a laser processing device to cut a substrate.

[0085] refer to Figures 2A to 2D The substrate SUB may include a first functional layer FL1 and a second functional layer FL2. The first functional layer FL1 and the second functional layer FL2 may be any of various types of layers or films forming elements constituting the display device (not shown). For example, each of the first functional layer FL1 and the second functional layer FL2 may be any of a substrate, a buffer layer, a conductive layer, an insulating layer, a protective layer, a filter layer, and a thin-film encapsulation layer. For ease of description, see below... Figures 2A to 2D In this example, the first functional layer FL1 may be a substrate, and the second functional layer FL2 may be a protective layer including organic or inorganic materials.

[0086] refer to Figure 2AThe first output light LB_O1, which has a first output, can be directed toward the substrate SUB.

[0087] refer to Figure 2B The second removal region FL2_H can be formed in the second functional layer FL2 by irradiating the substrate SUB with the first output light LB_O1. The second removal region FL2_H can be a hole passing through the second functional layer FL2, and the cross-section of the second removal region FL2_H can have a tapered shape that gradually narrows toward the first functional layer FL1.

[0088] refer to Figure 2C The second output light LB_O2, which has a second output, can illuminate the portion of the first functional layer FL1 that is exposed by the second removed region FL2_H.

[0089] refer to Figure 2D The first removal region FL1_H can be formed in the first functional layer FL1 by irradiating the exposed portion of the first functional layer FL1 with a second output light LB_O2. The first removal region FL1_H can be a hole passing through the first functional layer FL1, and the cross-section of the first removal region FL1_H can have a uniform shape in the thickness direction.

[0090] As described above, in order to process different types of films or layers such as the first functional layer FL1 and the second functional layer FL2, refer to Figure 1A and Figure 1B The laser processing equipment 10 described can select a first output light LB_O1 or a second output light LB_O2 with an output suitable for processing a first functional layer FL1 or a second functional layer FL2, and can irradiate the selected light onto the first functional layer FL1 or the second functional layer FL2.

[0091] Reference Figures 3A to 3D The laser processing apparatus 20 according to the embodiment is described in detail.

[0092] Figure 3A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure. Figure 3B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure. Figure 3C This is a block diagram illustrating a third operational example of a laser processing apparatus according to an embodiment of the present disclosure. Figure 3D This is a block diagram illustrating a fourth operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0093] and Figure 1A and Figure 1B Compared to the laser processing equipment 10 shown in the figure, Figures 3A to 3DThe difference in the laser processing equipment 20 shown in the figure is that the compensation component CM' includes a third optical component OM3, a fourth optical component OM4 and a second moving component MM2, and the optical converter BTP_B further includes a third absorption component BU3 and a fourth absorption component BU4.

[0094] In other words, Figures 3A to 3D The beam generator BG, beam expander EXP, scanner SC, lens array LA, and first optical component OM1, second optical component OM2, first moving component MM1, first absorbing component BU1 and second absorbing component BU2 included in the optical converter BTP_B shown can be used with Figure 1A and Figure 1B Those shown in the figures are similar and are indicated by the same reference numerals. Therefore, repeated descriptions of them will be omitted.

[0095] refer to Figures 3A to 3D The compensation component CM' can be arranged downstream of the first moving component MM1 in the optical path to compensate for or adjust the path of the incident light. For example, the compensation component CM' may include a third optical component OM3, a fourth optical component OM4, and a second moving component MM2.

[0096] The third optical component OM3 can be arranged downstream of the first optical component OM1 in the optical path to compensate for or adjust the optical path of the first transmitted light TB1 incident from the first optical component OM1. For example, the third optical component OM3 can correct the optical path of the first transmitted light TB1 so that the optical path of the third output light LB_O3 matches the optical path of the incident light LB_I.

[0097] Furthermore, the third optical component OM3 may be a component having a third reflectivity that is different from the first and second reflectivity, and may be configured to reflect the portion of the first transmitted light TB1 or the second transmitted light TB2 corresponding to the third reflectivity and transmit the remaining portion of the first transmitted light TB1 or the second transmitted light TB2. For example, when the third reflectivity is 75%, the third optical component OM3 may reflect 75% of the first transmitted light TB1 or the second transmitted light TB2 and transmit the remaining 25% of the first transmitted light TB1 or the second transmitted light TB2.

[0098] The third optical component OM3 can be either a beam splitter or a compensator. The third optical component OM3 and the first optical component OM1 can be symmetrical about an imaginary line formed along either the first direction DR1 or the second direction DR2. In other words, the direction in which light incident on the third optical component OM3 is reflected can be opposite to the direction in which light incident on the first optical component OM1 is reflected. For example, Figure 3AThe first optical component OM1 shown reflects the incident light LB_I towards the first direction DR1, while the third optical component OM3 reflects the incident first transmitted light TB1 towards the second direction DR2. In this way, when the first optical component OM1 and the third optical component OM3 are arranged symmetrically to each other in the optical path, the optical path of the incident light LB_I incident on the first optical component OM1 and the optical path of the third output light LB_O3 output from the third optical component OM3 can be corrected substantially the same.

[0099] The fourth optical component OM4 may be a component having a fourth reflectivity different from the first to third reflectivity, and may be configured to reflect the portion of the second reflected light RB2' corresponding to the fourth reflectivity and transmit the remaining portion of the second reflected light RB2'. For example, when the fourth reflectivity is 70%, the fourth optical component OM4 may reflect 70% of the second reflected light RB2' and transmit the remaining 30% of the second reflected light RB2'. Since the fourth optical component OM4 may have a configuration similar to that of the third optical component OM3, its detailed description will be omitted for ease of description.

[0100] The second movable member MM2 can be moved to support the third optical member OM3 and the fourth optical member OM4. The second movable member MM2 can be in a third mode in which the third optical member OM3 is arranged in the optical path of the first transmitted light TB1 or the second transmitted light TB2 (see [link to relevant documentation]). Figure 3A and Figure 3C Or, in a fourth mode, the fourth optical component OM4 is arranged in the optical path of the first transmitted light TB1 or the second transmitted light TB2 (see...). Figure 3B and Figure 3D (The following operations are performed.)

[0101] Figure 3A and Figure 3C The diagram shows the arrangement of the third optical component OM3 within the optical path of either the first transmitted light TB1 or the second transmitted light TB2. Additionally, Figure 3B and Figure 3D The diagram illustrates the arrangement of the fourth optical component OM4 within the optical path of either the first transmitted light TB1 or the second transmitted light TB2. In other words, Figure 3A and Figure 3C The second moving component MM2 in the third mode is shown, and Figure 3B and Figure 3D The second moving component MM2 in the fourth mode is shown. (See diagram.) Figure 3B and Figure 3D As shown, the second moving component MM2 can be respectively from Figure 3A and Figure 3CThe position of the second moving member MM2 shown in the diagram moves along the first direction DR1. Conversely, the second moving member MM2 can move from... Figure 3B and Figure 3D The position shown in the figure moves to the second direction DR2. Figure 3A and Figure 3C The position shown in the figure. That is, the second moving member MM2 can selectively place the third optical member OM3 or the fourth optical member OM4 with different reflectivities in the optical path of the first transmitted light TB1 or the second transmitted light TB2.

[0102] exist Figures 3A to 3D In this illustration, the second moving member MM2 is shown to move linearly along the first direction DR1 and the second direction DR2, just like the first moving member MM1; however, the embodiments of this disclosure are not limited thereto. For example, like the first moving member MM1, the second moving member MM2 can rotate to support the third optical member OM3 and the fourth optical member OM4. Since the second moving member MM2 can operate in the same manner as the first moving member MM1, its detailed description will be omitted for ease of description.

[0103] In the following text, reference will be made to Figures 3A to 3D A detailed explanation is provided regarding the principle by which the first moving member MM1 and the second moving member MM2 produce output light with different outputs by operating in different modes.

[0104] Figure 3A The diagram shows the state in which the first moving member MM1 operates in the first mode and the second moving member MM2 operates in the third mode.

[0105] As referenced above Figure 1A The first optical component OM1 can reflect the portion of the incident light LB_I corresponding to the first reflectivity as the first reflected light RB1 and can transmit the remaining portion of the incident light LB_I other than the first reflected light RB1 as the first transmitted light TB1, and the first absorption component BU1 can absorb the first reflected light RB1.

[0106] Return to reference Figure 3A The third optical component OM3 can be arranged in the optical path of the first transmitted light TB1. The third optical component OM3 can reflect the portion of the first transmitted light TB1 corresponding to the third reflectivity as the second reflected light RB2', and can transmit the remaining portion of the first transmitted light TB1 excluding the second reflected light RB2' as the third output light LB_O3.

[0107] The fourth optical component OM4 can be arranged downstream of the third optical component OM3 in the optical path of the second reflected light RB2'. That is, the second reflected light RB2' reflected by the third optical component OM3 can be incident on the fourth optical component OM4. The fourth optical component OM4 can reflect the portion of the second reflected light RB2' corresponding to the fourth reflectivity as the third reflected light RB3', and can transmit the remaining portion of the second reflected light RB2' excluding the third reflected light RB3' as the second transmitted light TB2'.

[0108] When the first moving member MM1 is in the first mode and the second moving member MM2 is in the third mode, the first absorbing member BU1 can absorb the first reflected light RB1, the third absorbing member BU3 can absorb the second transmitted light TB2', and the fourth absorbing member BU4 can absorb the third reflected light RB3'. The first absorbing member BU1, the third absorbing member BU3, and the fourth absorbing member BU4 can absorb the first reflected light RB1 and the third reflected light RB3', as well as the second transmitted light TB2', excluding the third output light LB_O3 used for processing the substrate SUB. This prevents reflected and transmitted light from irradiating other components inside the laser processing equipment 20, thereby reducing the risk of equipment damage.

[0109] like Figure 3A As shown, when the first moving member MM1 operates in the first mode and the second moving member MM2 operates in the third mode, the compensation member CM' can be arranged downstream of the first optical member OM1 in the optical path, and can compensate for or adjust the optical path of the first transmitted light TB1 incident from the first optical member OM1. The compensation member CM' can convert the first transmitted light TB1 into a third output light LB_O3 having a third output that is different from the outputs of the first output light LB_O1 and the second output light LB_O2.

[0110] Figure 3B The diagram shows the state in which the first moving member MM1 operates in the first mode and the second moving member MM2 operates in the fourth mode.

[0111] like Figure 3B As shown, the fourth optical component OM4 can be arranged in the optical path of the first transmitted light TB1. As described above, this can be achieved by moving the second moving component MM2 a predetermined distance in the first direction DR1. The fourth optical component OM4 can reflect the portion of the first transmitted light TB1 corresponding to the fourth reflectivity as the fourth reflected light RB4, and can transmit the remaining portion of the first transmitted light TB1 other than the fourth reflected light RB4 as the fourth output light LB_O4.

[0112] When the first moving member MM1 is in the first mode and the second moving member MM2 is in the fourth mode, the first absorbing member BU1 can absorb the first reflected light RB1, and the third absorbing member BU3 can absorb the fourth reflected light RB4. The first absorbing member BU1 and the third absorbing member BU3 can absorb the first reflected light RB1 and the fourth reflected light RB4, excluding the fourth output light LB_O4 used for processing the substrate SUB. This prevents reflected light from irradiating other components inside the laser processing equipment 20, thereby reducing the risk of equipment damage.

[0113] like Figure 3B As shown, when the first moving member MM1 operates in the first mode and the second moving member MM2 operates in the fourth mode, the compensation member CM' can be arranged downstream of the first optical member OM1 in the optical path, and can compensate for or adjust the optical path of the first transmitted light TB1 incident from the first optical member OM1. The compensation member CM' can convert the first transmitted light TB1 into a fourth output light LB_O4 having a fourth output that is different from the outputs of the first output light LB_O1 to the third output light LB_O3.

[0114] Figure 3C The diagram shows the state in which the first moving member MM1 operates in the second mode and the second moving member MM2 operates in the third mode.

[0115] As referenced above Figure 1B The second optical component OM2 can reflect the portion of the incident light LB_I corresponding to the second reflectivity as the second reflected light RB2, and can transmit the remaining portion of the incident light LB_I other than the second reflected light RB2 as the second transmitted light TB2. The first optical component OM1 can reflect the portion of the second reflected light RB2 corresponding to the first reflectivity as the third reflected light RB3, and can transmit the remaining portion of the second reflected light RB2 other than the third reflected light RB3 as the third transmitted light TB3. The first absorbing component BU1 can absorb the third transmitted light TB3, and the second absorbing component BU2 can absorb the third reflected light RB3.

[0116] Return to reference Figure 3C The third optical component OM3 can be arranged in the optical path of the second transmitted light TB2. The third optical component OM3 can reflect the portion of the second transmitted light TB2 corresponding to the third reflectivity as the fourth reflected light RB4, and can transmit the remaining portion of the second transmitted light TB2 other than the fourth reflected light RB4 as the fifth output light LB_O5.

[0117] The fourth optical component OM4 can be arranged downstream of the third optical component OM3 in the optical path of the fourth reflected light RB4. That is, the fourth reflected light RB4, reflected by the third optical component OM3, can be incident on the fourth optical component OM4. The fourth optical component OM4 can reflect the portion of the fourth reflected light RB4 corresponding to the fourth reflectivity as the fifth reflected light RB5, and can transmit the remaining portion of the fourth reflected light RB4, excluding the fifth reflected light RB5, as the fourth transmitted light TB4.

[0118] When the first moving member MM1 is in the second mode and the second moving member MM2 is in the third mode, the first absorbing member BU1 can absorb the third transmitted light TB3, the second absorbing member BU2 can absorb the third reflected light RB3, the third absorbing member BU3 can absorb the fourth transmitted light TB4, and the fourth absorbing member BU4 can absorb the fifth reflected light RB5. The first absorbing members BU1 to the fourth absorbing members BU4 can absorb the third transmitted light TB3 and the fourth transmitted light TB4, the third reflected light RB3, and the fifth reflected light RB5, excluding the fifth output light LB_O5 used for processing the substrate SUB. This prevents reflected and transmitted light from irradiating other components inside the laser processing equipment 20, thereby reducing the risk of equipment damage.

[0119] like Figure 3C As shown, when the first moving member MM1 operates in the second mode and the second moving member MM2 operates in the third mode, the compensation member CM' can be arranged downstream of the second optical member OM2 in the optical path, and can compensate for or adjust the optical path of the second transmitted light TB2 incident from the second optical member OM2. The compensation member CM' can convert the second transmitted light TB2 into a fifth output light LB_O5 having a fifth output that is different from the outputs of the first output light LB_O1 to the fourth output light LB_O4.

[0120] Figure 3D The diagram shows the state in which the first moving member MM1 operates in the second mode and the second moving member MM2 operates in the fourth mode.

[0121] refer to Figure 3D The fourth optical component OM4 can be arranged in the optical path of the second transmitted light TB2. As described above, this can be achieved by moving the second moving component MM2 a predetermined distance in the first direction DR1. The fourth optical component OM4 can reflect the portion of the second transmitted light TB2 corresponding to the fourth reflectivity as the sixth reflected light RB6, and can transmit the remaining portion of the second transmitted light TB2 other than the sixth reflected light RB6 as the sixth output light LB_O6.

[0122] When the first moving member MM1 is in the second mode and the second moving member MM2 is in the fourth mode, the first absorbing member BU1 can absorb the third transmitted light TB3, the second absorbing member BU2 can absorb the third reflected light RB3, and the third absorbing member BU3 can absorb the sixth reflected light RB6. The first absorbing members BU1 to the third absorbing members BU3 can absorb the third transmitted light TB3, the third reflected light RB3, and the sixth reflected light RB6, excluding the sixth output light LB_O6 used for processing the substrate SUB. This prevents reflected and transmitted light from irradiating other components inside the laser processing equipment 20, thereby reducing the risk of equipment damage.

[0123] like Figure 3D As shown, when the first moving member MM1 operates in the second mode and the second moving member MM2 operates in the fourth mode, the compensation member CM' can be arranged downstream of the second optical member OM2 in the optical path, and can compensate for or adjust the optical path of the second transmitted light TB2 incident from the second optical member OM2. The compensation member CM' can convert the second transmitted light TB2 into a sixth output light LB_O6 having a sixth output that is different from the outputs of the first output light LB_O1 to the fifth output light LB_O5.

[0124] Figures 3A to 3D The laser processing apparatus 20 shown can be configured as a single optical system. According to this configuration, the laser processing apparatus 20 can generate a third output light LB_O3 to a sixth output light LB_O6 with four different outputs, and can select one of the third output light LB_O3 to the sixth output light LB_O6 with an output suitable for processing and illuminate the processing object with the selected output light.

[0125] Reference Figures 4A to 4C A laser processing apparatus 30 according to an embodiment of the present disclosure is described in detail.

[0126] Figure 4A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure. Figure 4B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure. Figure 4C This is a block diagram illustrating a third operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0127] and Figure 1A and Figure 1B Compared to the laser processing equipment 10 shown in the figure, Figures 4A to 4C The difference in the laser processing equipment 30 shown may be that the first moving member MM1 further includes a third optical member OM3, and the optical converter BTP_C further includes a third absorption member BU3.

[0128] In other words, Figures 4A to 4C The beam generator BG, beam expander EXP, scanner SC, lens array LA, and the first optical component OM1, second optical component OM2, first moving component MM1, first absorbing component BU1, second absorbing component BU2, and compensation component CM included in the optical converter BTP_C can be used with Figure 1A and Figure 1B Those shown in the figures are similar and are indicated by the same reference numerals. Therefore, repeated descriptions of them will be omitted.

[0129] In addition to the first moving component MM1, it further includes a third optical component OM3. Figures 4A to 4C The first moving member MM1 shown in the figure can have the same characteristics as... Figure 1A and Figure 1B The configuration of the first moving member MM1 shown is similar to that of the previous one. Therefore, its redundant description will be omitted.

[0130] Figure 4A The state of the first moving component MM1 operating in the first mode is shown.

[0131] refer to Figure 4A The first optical component OM1 can be arranged in the optical path of the incident light LB_I. The first optical component OM1 can reflect the portion of the incident light LB_I corresponding to the first reflectivity as the first reflected light RB1, and can transmit the remaining portion of the incident light LB_I other than the first reflected light RB1 as the first transmitted light TB1.

[0132] The first absorbing member BU1 can absorb the first reflected light RB1 reflected by the first optical member OM1. In this way, when the first moving member MM1 is in the first mode, the first absorbing member BU1 can absorb the first reflected light RB1 other than the first output light LB_O1 used for processing the substrate SUB, thereby preventing the risk of the equipment being damaged by reflected light.

[0133] The compensation component CM can be arranged downstream of the first optical component OM1 in the optical path, and can compensate or adjust the optical path of the first transmitted light TB1 incident from the first optical component OM1. The compensation component CM can convert the first transmitted light TB1 into a first output light LB_O1 with a first output.

[0134] Figure 4B The state of the first moving component MM1 operating in the second mode is shown.

[0135] refer to Figure 4BThe second optical component OM2 can be arranged in the optical path of the incident light LB_I. This can be achieved by moving the first moving component MM1 a predetermined distance in the first direction DR1 as described above. The second optical component OM2 can reflect the portion of the incident light LB_I corresponding to the second reflectivity as the second reflected light RB2, and can transmit the remaining portion of the incident light LB_I other than the second reflected light RB2 as the second transmitted light TB2.

[0136] The first optical component OM1 can be arranged downstream of the second optical component OM2 in the optical path of the second reflected light RB2. That is, the second reflected light RB2 reflected from the second optical component OM2 can be incident on the first optical component OM1. The first optical component OM1 can reflect the portion of the second reflected light RB2 corresponding to the first reflectivity as the third reflected light RB3, and can transmit the remaining portion of the second reflected light RB2, excluding the third reflected light RB3, as the third transmitted light TB3.

[0137] When the first moving member MM1 is in the second mode, the first absorbing member BU1 can absorb the third transmitted light TB3, and the third absorbing member BU3 can absorb the third reflected light RB3. The first absorbing member BU1 and the third absorbing member BU3 can absorb reflected and transmitted light other than the second output light LB_O2 used for processing the substrate SUB, thereby preventing the equipment from being damaged by reflected and transmitted light.

[0138] The compensation component CM can be arranged downstream of the second optical component OM2 in the optical path, and can compensate for or adjust the optical path of the second transmitted light TB2 incident from the second optical component OM2. In this case, the compensation component CM can convert the second transmitted light TB2 into a second output light LB_O2 with a second output.

[0139] Figure 4C The state of the first moving component MM1 in operation in the third mode is shown.

[0140] refer to Figure 4C The third optical component OM3 can be arranged in the optical path of the incident light LB_I. This can be achieved by... Figure 4B This is achieved by moving the first moving member MM1 a predetermined distance further in the first direction DR1. The third optical member OM3 can reflect the portion of the incident light LB_I corresponding to the third reflectivity as the fourth reflected light RB4', and can transmit the remaining portion of the incident light LB_I excluding the fourth reflected light RB4' as the fourth transmitted light TB4'.

[0141] The second optical component OM2 can be arranged downstream of the third optical component OM3 in the optical path of the fourth reflected light RB4'. That is, the fourth reflected light RB4' reflected from the third optical component OM3 can be incident on the second optical component OM2. The second optical component OM2 can reflect the portion of the fourth reflected light RB4' corresponding to the second reflectivity as the fifth reflected light RB5', and can transmit the remaining portion of the fourth reflected light RB4' excluding the fifth reflected light RB5' as the fifth transmitted light TB5.

[0142] The first optical component OM1 can be arranged downstream of the second optical component OM2 in the optical path of the fifth transmitted light TB5. That is, the fifth transmitted light TB5, which is transmitted through the second optical component OM2, can be incident on the first optical component OM1. The first optical component OM1 can reflect the portion of the fifth transmitted light TB5 corresponding to the first reflectivity as the sixth reflected light RB6', and can transmit the remaining portion of the fifth transmitted light TB5, excluding the sixth reflected light RB6', as the sixth transmitted light TB6.

[0143] When the first moving member MM1 is in the third mode, the first absorbing member BU1 can absorb the sixth transmitted light TB6, the second absorbing member BU2 can absorb the sixth reflected light RB6', and the third absorbing member BU3 can absorb the fifth reflected light RB5'. The first absorbing member BU1 to the third absorbing member BU3 can absorb reflected and transmitted light except for the seventh output light LB_O7 used for processing the substrate SUB, thereby preventing the equipment from being damaged by reflected and transmitted light.

[0144] The compensation component CM can be arranged downstream of the third optical component OM3 in the optical path, and can compensate for or adjust the optical path of the fourth transmitted light TB4' incident from the third optical component OM3. The compensation component CM can convert the fourth transmitted light TB4' into a seventh output light LB_O7 with a seventh output.

[0145] Figures 4A to 4C The laser processing equipment 30 shown can be configured as a single optical system. According to this configuration, the laser processing equipment 30 can generate a first output light LB_O1, a second output light LB_O2, and a seventh output light LB_O7 with three different outputs, and can select one of the first output light LB_O1, the second output light LB_O2, and the seventh output light LB_O7 with an output suitable for processing and illuminate the processing object with the selected output light.

[0146] Reference Figure 5 A laser processing apparatus 40 according to an embodiment of the present disclosure is illustrated.

[0147] Figure 5 This is a block diagram illustrating an operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0148] and Figures 4A to 4C Compared to the laser processing equipment 30 shown in the figure, Figure 5 The difference in the laser processing equipment 40 shown in the figure is that the compensation member CM” may include a fourth optical member OM4’, a fifth optical member OM5’, a sixth optical member OM6’, and a second moving member MM2, and the optical converter BTP_D may further include a fourth absorption member BU4 to a sixth absorption member BU6 for absorbing the third transmitted light TB3’, the third reflected light RB3” and the fourth reflected light RB4” output from the compensation member CM” in addition to the eighth output light LB_O8.

[0149] In other words, Figure 5 The beam generator BG, beam expander EXP, scanner SC, lens array LA, and first optical components OM1 to third optical components OM3, first moving component MM1, and first absorption components BU1 to third absorption components BU3 included in the optical converter BTP_D can be used with Figures 4A to 4C Those shown in the figures are similar and are indicated by the same reference numerals. Therefore, repeated descriptions of them will be omitted.

[0150] refer to Figure 5 The compensation component "CM" can be arranged downstream of the first optical component "OM1" in the optical path of the first transmitted light "TB1", and can compensate for or adjust the path of the incident light. For example, the compensation component "CM" may include a fourth optical component "OM4'", a fifth optical component "OM5'", a sixth optical component "OM6'", and a second moving component "MM2".

[0151] Here, the fourth optical component OM4' to the sixth optical component OM6' of the compensation component CM can have the same characteristics as the reference. Figures 3A to 3DThe configurations of the third optical component OM3 or the fourth optical component OM4 described are similar. The fourth optical component OM4' may be a component having a fourth reflectivity different from the first to third reflectivity, and may be configured to reflect the portion of the first transmitted light TB1 corresponding to the fourth reflectivity as the second reflected light RB2". The fifth optical component OM5' may be a component having a fifth reflectivity different from the first to fourth reflectivity, and may be configured to reflect the portion of the second reflected light RB2" corresponding to the fifth reflectivity as the third reflected light RB3" and transmit the remaining portion of the second reflected light RB2" as the second transmitted light TB2". For example, except that the fourth optical component OM4' may have a fourth reflectivity different from the first to third reflectivity, the fifth optical component OM5' may have a fifth reflectivity different from the first to fourth reflectivity, and the sixth optical component OM6' may have a sixth reflectivity different from the first to fifth reflectivity, the remaining features of the fourth optical components OM4' to the sixth optical component OM6' may be the same as those described in the reference. Figures 3A to 3D The third optical component OM3 and the fourth optical component OM4 are described as having the same characteristics. Therefore, their detailed descriptions will be omitted below.

[0152] Additionally, for ease of description, Figure 5 Only the arrangement of the fourth optical component OM4' in the optical path of the first transmitted light TB1 is shown, but the embodiments disclosed herein are not necessarily limited to this. Although not shown in the figures, the second optical component OM2 or the third optical component OM3 may be arranged in the optical path of the incident light LB_I. Additionally, the fifth optical component OM5' or the sixth optical component OM6' may be arranged in... Figures 4A to 4C In the optical path of any one of the first transmitted light TB1, the second transmitted light TB2 and the fourth transmitted light TB4' shown in the figure.

[0153] In other words, depending on the operating mode of the first moving member MM1 and the second moving member MM2, any one of the first optical member OM1 to the third optical member OM3 can be arranged in the optical path of the incident light LB_I, and any one of the fourth optical member OM4' to the sixth optical member OM6' can be arranged in the path of the light incident on the compensation member CM".

[0154] Figure 5 The laser processing apparatus 40 shown can be configured as a single optical system. According to this configuration, the laser processing apparatus 40 can generate output light (not shown) with nine different outputs, and can select one of them with an output suitable for processing and illuminate the processing object with the selected output light.

[0155] Reference Figure 6A and Figure 6BA laser processing apparatus 50 according to an embodiment of the present disclosure is described in detail.

[0156] Figure 6A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure. Figure 6B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0157] Let's refer to each other. Figure 6A and Figure 6B The laser processing equipment 50 may include a beam generator BG and an optical converter BTP_E. Although in Figure 6A and Figure 6B Not shown, but the laser processing equipment 50 may further include reference numerals. Figure 1A and Figure 1B The beam expander EXP, scanner SC, and lens array LA are described. For example, the beam expander EXP can be positioned between the beam generator BG and the optical converter BTP_E. Alternatively, the scanner SC and lens array LA can be positioned downstream of the optical converter BTP_E in the optical path.

[0158] The beam generator BG can generate incident light LB_I and output incident light LB_I towards the optical converter BTP_E.

[0159] The optical converter BTP_E can be arranged in the optical path of the incident light LB_I to convert the incident light LB_I into one of a first output light LB_O9 having a first output and a second output light LB_O10 having a second output different from the first output. Figure 6A The first output light LB_O9 of the optical converter BTP_E is shown, and... Figure 6B The second output light LB_O10 of the optical converter BTP_E is shown.

[0160] The optical converter BTP_E may include a first optical component OM1, a first reflector MR1, a second reflector MR2, a second optical component OM2, a third reflector MR3, a first absorption component BU1, and a second absorption component BU2.

[0161] The first optical component OM1 can be arranged downstream of the beam generator BG in the optical path of the incident light LB_I. The first optical component OM1 can have a first reflectivity and can be configured to reflect the portion of the incident light LB_I corresponding to the first reflectivity as a first reflected light RB1 and transmit the remaining portion of the incident light LB_I excluding the first reflected light RB1 as a first transmitted light TB1. For example, when the first reflectivity is 5%, the first optical component OM1 can reflect 5% of the incident light LB_I and transmit the remaining 95% of the incident light LB_I. That is, when the output of the incident light LB_I is limited to 100W, the output of the first reflected light RB1 can be 5W, and the output of the first transmitted light TB1 can be 95W.

[0162] The first optical component OM1 may be a beam splitter, but the embodiments of this disclosure are not limited thereto. For example, the first optical component OM1 may include optical elements adapted to reflect a portion of the incident light LB_I and transmit the remainder of the incident light LB_I.

[0163] The first reflecting mirror MR1 can totally reflect the first reflected light RB1 and output the second reflected light RB2”'. The second reflected light RB2”' can be irradiated onto the first surface of the second optical component OM2, which will be described later. Since the output of the first reflected light RB1 is 5W, the output of the second reflected light RB2”' can also be 5W.

[0164] The second reflector MR2 can totally reflect the first transmitted light TB1 and output a third reflected light RB3”'. The third reflected light RB3”' can be incident on the second surface of the second optical component OM2, which will be described later. Since the output of the first transmitted light TB1 is 95W, the output of the third reflected light RB3”' can also be 95W.

[0165] The second optical component OM2 may have a second reflectivity different from the first reflectivity, and may be arranged in the optical path downstream of the first reflector MR1 and the second reflector MR2.

[0166] The third reflecting mirror MR3 can be configured at a first position POS1 (where the optical paths of the second reflected light RB2”' and the third reflected light RB3”' do not overlap with the optical paths of the second reflected light RB2”' and the third reflected light RB3”') Figure 6A (as shown in the image) and the second position POS2 (where the optical path overlaps with the second reflected light RB2”' or the third reflected light RB3”') and the optical path of the second reflected light RB2”' or the third reflected light RB3”'. Figure 6B (As shown in the image) can move between them. For ease of description, Figure 6A and Figure 6BThe illustration shows a third reflecting mirror MR3 movable between a first position POS1 that does not overlap with the optical path of the third reflected light RB3”' and a second position POS2 that overlaps with the optical path of the third reflected light RB3”', but the present disclosure is not limited thereto. For example, the third reflecting mirror MR3 can be configured to be movable between a third position (not shown) that does not overlap with the optical path of the second reflected light RB2”' and a fourth position (not shown) that overlaps with the optical path of the second reflected light RB2”'.

[0167] Figure 6A This shows that the optical path of the third reflecting mirror MR3 does not overlap with that of the third reflected light RB3”’. That is to say, Figure 6A The diagram shows the third reflector MR3 positioned at the first position POS1. In this case, the third reflected light RB3”' output from the second reflector MR2 can be projected onto the second surface of the second optical component OM2 without interfering with the optical path of the third reflector MR3.

[0168] The second optical component OM2 can reflect the portion of the second reflected light RB2”' incident on its first surface that corresponds to the second reflectivity as the fourth reflected light RB4”', and can transmit the remaining portion of the second reflected light RB2”' except for the fourth reflected light RB4”' as the second transmitted light TB2”'. For example, when the second reflectivity is 10%, the second optical component OM2 can reflect the fourth reflected light RB4”' equivalent to 10% of the second reflected light RB2”', and can transmit the second transmitted light TB2”' equivalent to 90% of the second reflected light RB2”'. That is, since the output of the second reflected light RB2”' is 5W, the output of the fourth reflected light RB4”' can be 0.5W and the output of the second transmitted light TB2”' can be 4.5W.

[0169] Furthermore, the second optical component OM2 can reflect the portion of the third reflected light RB3”' incident on its second surface that corresponds to the second reflectivity as the fifth reflected light RB5”, and can transmit the remaining portion of the third reflected light RB3”' except for the fifth reflected light RB5” as the third transmitted light TB3”. As described above, when the second reflectivity is 10%, the second optical component OM2 can reflect the fifth reflected light RB5”, which is equivalent to 10% of the third reflected light RB3”', and can transmit the third transmitted light TB3”, which is equivalent to 90% of the third reflected light RB3”'. That is, since the output of the third reflected light RB3”' is 95W, the output of the fifth reflected light RB5” can be 9.5W and the output of the third transmitted light TB3” can be 85.5W.

[0170] The second optical component OM2 can collect the fourth reflected light RB4”' and the third transmitted light TB3” to output the first output light LB_O9. Although in Figure 6A and Figure 6B Although not shown, the first output light LB_O9 can pass through the scanner and lens array and can be irradiated onto the first functional layer of the substrate disposed on the stage. Here, since the first output light LB_O9 has an output of 86W by collecting the fourth reflected light RB4”' with an output of 0.5W and the third transmitted light TB3” with an output of 85.5W, the first output light LB_O9 can be attenuated by 14% compared with the incident light LB_I with an output of 100W, thereby outputting 86% of the incident light LB_I.

[0171] Like the first optical component OM1, the second optical component OM2 can be a beam splitter, but the embodiments are not limited thereto. Like the first optical component OM1, the second optical component OM2 can include optical elements adapted to reflect a portion of each of the second reflected light RB2”' and the third reflected light RB3”' and transmit the remainder of each of the second reflected light RB2”' and the third reflected light RB3”'.

[0172] The first absorbing member BU1 can absorb the second transmitted light TB2”' and the fifth reflected light RB5”'. The first absorbing member BU1 can absorb reflected and transmitted light other than the first output light LB_O9 used for processing the substrate. The first absorbing member BU1 may include a material capable of absorbing light (e.g., a conductive material or an insulating material). As a conductive material forming the first absorbing member BU1, chromium (Cr), molybdenum (Mo), nickel (Ni), titanium (Ti), cobalt (Co), copper (Cu), or aluminum (Al), alloy materials or compounds containing the above elements as main components (e.g., nitrogen compounds, oxygen compounds, carbon compounds, or halogen compounds, etc.) may be used, but this disclosure is not limited thereto.

[0173] When the third reflecting mirror MR3 is set at the second position POS2 (which overlaps with the optical path of the third reflected light RB3"), Figure 6B As shown in the diagram, the second absorbing member BU2 can be a component for absorbing light reflected by the third reflecting mirror MR3, and will be referred to below. Figure 6B To describe.

[0174] refer to Figure 6BThe third reflecting mirror MR3 can be moved to a second position POS2 downstream of the second reflecting mirror MR2 in the optical path of the third reflected light RB3”'. When the third reflecting mirror MR3 is positioned at the second position POS2, the second reflected light RB2”' can be irradiated onto the first surface of the second optical component OM2, and the third reflected light RB3”' can be totally reflected by the third reflecting mirror MR3 and not output to the second optical component OM2. In this case, the third reflecting mirror MR3 can totally reflect the third reflected light RB3”' and output the fifth reflected light RB5”'.

[0175] In this case, the second optical component OM2 can reflect the portion of the second reflected light RB2”' incident on its first surface that corresponds to the second reflectivity as the fourth reflected light RB4”', and can transmit the remaining portion of the second reflected light RB2”' except for the fourth reflected light RB4”' as the second transmitted light TB2”'.

[0176] The second optical component OM2 can output a fourth reflected light RB4”' as the second output light LB_O10. Although in Figure 6A and Figure 6B Not shown, but the second output light LB_O10 can pass through the scanner and lens array and be irradiated onto the second functional layer of the substrate disposed on the stage. Here, the second functional layer can be the same as the reference layer. Figure 6A The first output light LB_O9 described is irradiated by a different layer than the first functional layer, and can be compared with a reference layer. Figures 2A to 2C The first functional layer FL1 or the second functional layer FL2 described may be the same or different.

[0177] As described above, since the output of the fourth reflected light RB4”' can be 0.5W, the output of the second output light LB_O10 can also be 0.5W. This means that the ratio of the output of the first output light LB_O9 when the third reflector MR3 is set at the first position POS1 to the output of the second output light LB_O10 when the third reflector MR3 is set at the second position POS2 can be 86:0.5. Therefore, compared with the first output light LB_O9, the second output light LB_O10 can be attenuated by approximately 99.42%. In other words, depending on the position of the third reflector MR3, output lights with different outputs can be produced.

[0178] Figure 6A and Figure 6B The laser processing apparatus 50 shown can be configured as a single optical system. According to this configuration, the laser processing apparatus 50 can generate a first output light LB_O9 and a second output light LB_O10 with two different outputs, and can selectively irradiate the processing object with either the first output light LB_O9 or the second output light LB_O10.

[0179] Reference Figures 7A to 7B A laser processing apparatus 60 according to an embodiment of the present disclosure is described in detail.

[0180] Figure 7A This is a block diagram illustrating a first operational example of a laser processing apparatus according to an embodiment of the present disclosure. Figure 7B This is a block diagram illustrating a second operational example of a laser processing apparatus according to an embodiment of the present disclosure.

[0181] Let's refer to each other. Figure 7A and Figure 7B The laser processing equipment 60 may include a beam generator BG and an optical converter BTP_F. Although in Figure 7A and Figure 7B Not shown, but the laser processing equipment 60 may further include reference numerals. Figure 1A and Figure 1B The beam expander EXP, scanner SC, and lens array LA are described. For example, the beam expander EXP can be positioned between the beam generator BG and the optical converter BTP_F. Alternatively, the scanner SC and lens array LA can be arranged downstream of the optical converter BTP_F in the optical path.

[0182] The beam generator BG can generate incident light LB_I and output incident light LB_I towards the optical converter BTP_F.

[0183] The optical converter BTP_F can be arranged in the optical path of the incident light LB_I, and can convert the incident light LB_I into a first output light LB_O11 with a first output (in Figure 7A (shown in) and a second output light LB_O12 having a second output different from the first output (in) Figure 7B One of them is shown in the figure. Figure 7A The first output light LB_O11 of the optical converter BTP_F is shown, and... Figure 7B The second output light LB_O12 of the optical converter BTP_F is shown.

[0184] The optical converter BTP_F may include a first optical component OM1, a second optical component OM2, a third optical component OM3, and an absorption component BU.

[0185] The first optical component OM1 can be arranged downstream of the beam generator BG in the optical path of the incident light LB_I, and can be positioned in a first orientation POS1' for converting the incident light LB_I into a first reflected light RB1 oriented in the first direction DR1. Figure 7A(as shown in the diagram) and a second orientation POS2' for converting the incident light LB_I into a second reflected light RB2”” oriented in a second direction DR2 different from the first direction DR1. Figure 7B (As shown in the image) can move between them.

[0186] The second optical component OM2 may have a predetermined reflectivity and may be configured to overlap with the first optical component OM1 in the second direction DR2.

[0187] The third optical component OM3 can be disposed between the first optical component OM1 and the second optical component OM2 in the optical path of the first reflected light RB1, and when the first optical component OM1 is in the first posture POS1', the third optical component OM3 can totally reflect the first reflected light RB1 toward the second optical component OM2.

[0188] The third optical component OM3 may include a third sub-optical component OM3_1 relatively close to the first optical component OM1 and a third sub-optical component OM3_2 relatively close to the second optical component OM2. In this case, the third sub-optical component OM3_1 may be arranged upstream of the third sub-optical component OM3_2 in the optical path.

[0189] However, the embodiments disclosed herein are not limited thereto, and considering the arrangement of the first optical component OM1 and the second optical component OM2, the number of sub-optical components included in the third optical component OM3 can be selected in various ways. For example, when the first reflected light RB1 reflected from the first optical component OM1 does not travel directly toward the second optical component OM2, the third optical component OM3 may include a predetermined number of sub-optical components that can adjust the optical path to orient the first reflected light RB1 toward the second optical component OM2.

[0190] In this case, the predetermined number of sub-optical components can be sequentially arranged between the first optical component OM1 and the second optical component OM2. For example, one sub-optical component or three or more sub-optical components can be arranged between the first optical component OM1 and the second optical component OM2. In the following description, for ease of description, the focus will be on the case where the third optical component OM3 includes two sub-optical components (that is, the third optical component OM3 includes the third_1 sub-optical component OM3_1 and the third_2 sub-optical component OM3_2).

[0191] When the first optical component OM1 is in the first posture POS1', the third_1 sub-optical component OM3_1 can totally reflect the first reflected light RB1 toward the third_2 sub-optical component OM3_2.

[0192] When the first optical component OM1 is in the first posture POS1', the third_2 sub-optical component OM3_2 can totally reflect the first reflected light RB1 reflected from the third_1 sub-optical component OM3_1 toward the second optical component OM2.

[0193] When the first optical component OM1 is in the first posture POS1', the second optical component OM2 can reflect the portion of the first reflected light RB1 output from the third optical component OM3 that corresponds to the reflectivity of the second optical component OM2 as the first output light LB_O11, and can transmit the remaining portion of the first reflected light RB1 other than the first output light LB_O11 as the transmitted light TB.

[0194] In addition, when the first optical component OM1 is in the second posture POS2', the second optical component OM2 can reflect the portion of the second reflected light RB2”” output from the first optical component OM1 that corresponds to the reflectivity of the second optical component OM2 as the third reflected light RB3””, and can transmit the remaining portion of the second reflected light RB2”” except for the third reflected light RB3”” as the second output light LB_O12.

[0195] When the first optical component OM1 is in the first posture POS1', the absorption component BU can absorb the transmitted light TB, and when the first optical component OM1 is in the second posture POS2', the absorption component BU can absorb the third reflected light RB3".

[0196] According to the laser processing apparatus 60 having the above-described structure, a first output light LB_O11 having a first output and a second output light LB_O12 having a second output different from the first output can be generated. For example, when the output of the incident light LB_I is 100W and the reflectivity of the second optical component OM2 is 5%, the first output of the first output light LB_O11 can be 5W, and the second output of the second output light LB_O12 can be 95W. As described above, Figure 7A and Figure 7B The laser processing equipment 60 shown can generate two output lights with different outputs by adjusting the orientation of the first optical component OM1.

[0197] Figure 7A and Figure 7B The laser processing apparatus 60 shown can be configured as a single optical system. According to this configuration, the laser processing apparatus 60 can generate a first output light LB_O11 and a second output light LB_O12 with two different outputs, and can selectively irradiate the processing object with either the first output light LB_O11 or the second output light LB_O12.

[0198] The laser processing apparatus according to embodiments of the present disclosure can provide a single optical system for processing different workpieces. For example, the laser processing apparatus according to embodiments of the present disclosure can be configured as a single optical system that generates multiple output lights with different outputs, and can select one of the multiple output lights having an output suitable for processing and irradiate the workpiece with the selected output light.

[0199] The effects of this disclosure are not limited to those described above, and may be extended in various ways without departing from the spirit and scope of this disclosure.

[0200] Although specific terminology is used to explain embodiments of this disclosure, it will be understood that such terminology is used in a general and descriptive sense only and is not for limiting purposes, or should be interpreted in a general and descriptive sense only and is not for limiting purposes. It will be apparent to those skilled in the art from the date of filing of this application that features, characteristics, or elements described in connection with specific examples of embodiments of this disclosure may be used alone or in combination with features, characteristics, or elements described in connection with other examples of embodiments of this disclosure, unless otherwise specifically indicated. Accordingly, those skilled in the art will understand that various changes in form and detail may be made without departing from the spirit and scope of this disclosure as set forth in the claims.

Claims

1. A laser processing device, comprising: A beam generator produces incident light; as well as An optical converter is arranged in the optical path of the incident light and converts the incident light into multiple output lights with different outputs. The optical converter includes: The first optical component has a first reflectivity; A second optical component has a second reflectivity different from the first reflectivity; and The first movable component supports the first optical component and the second optical component. The first moving member operates in a first mode in which the first optical member is arranged in the optical path of the incident light, or in a second mode in which the second optical member is arranged in the optical path of the incident light.

2. The laser processing equipment according to claim 1, further comprising: A beam expander is disposed between the beam generator and the optical converter.

3. The laser processing equipment according to claim 1, in, When the first moving member operates in the first mode, the first optical member reflects the portion of the incident light corresponding to the first reflectivity as first reflected light and transmits the remaining portion of the incident light excluding the first reflected light as first transmitted light. The light converter further includes a first absorbing component that absorbs the first reflected light.

4. The laser processing equipment according to claim 3, in, The optical converter further includes a compensation component disposed downstream of the first optical component and adjusting the optical path of the first transmitted light incident from the first optical component. The compensation component converts the first transmitted light into a first output light with a first output.

5. The laser processing equipment according to claim 1, in, When the first moving member operates in the second mode, the second optical member reflects the portion of the incident light corresponding to the second reflectivity as second reflected light and transmits the remaining portion of the incident light other than the second reflected light as second transmitted light. Furthermore, the first optical member reflects the portion of the second reflected light corresponding to the first reflectivity as third reflected light and transmits the remaining portion of the second reflected light other than the third reflected light as third transmitted light. The optical converter further includes a first absorbing member that absorbs the third transmitted light and a second absorbing member that absorbs the third reflected light.

6. The laser processing equipment according to claim 5, in, The optical converter further includes a compensation component disposed downstream of the second optical component and adjusting the optical path of the second transmitted light incident from the second optical component. The compensation component converts the second transmitted light into a second output light with a second output.

7. A laser processing device, comprising: A beam generator produces incident light; as well as An optical converter is arranged in the optical path of the incident light and converts the incident light into one of a first output light having a first output and a second output light having a second output different from the first output. The optical converter includes: A first optical component has a first reflectivity, wherein the portion of the incident light corresponding to the first reflectivity is reflected as first reflected light and the remaining portion of the incident light other than the first reflected light is transmitted as first transmitted light. The first reflecting mirror totally reflects the first reflected light and outputs the second reflected light; The second reflecting mirror completely reflects the first transmitted light and outputs the third reflected light; A second optical component, having a second reflectivity different from the first reflectivity, is disposed downstream of the first and second reflectors; and The third reflecting mirror is movable between the first position and the second position, and Wherein, the first position does not overlap with the optical path of the second reflected light or the third reflected light, and the second position overlaps with the optical path of the second reflected light or the third reflected light.

8. The laser processing equipment according to claim 7, in, When the third reflector is positioned in the first position, the second reflected light is incident on the first surface of the second optical component, and the third reflected light is incident on the second surface of the second optical component. Wherein, the portion of the second reflected light incident on the first surface that corresponds to the second reflectivity is reflected by the second optical component as the fourth reflected light, and the remaining portion of the second reflected light other than the fourth reflected light is transmitted as the second transmitted light. The second optical component further reflects the portion of the third reflected light incident on the second surface that corresponds to the second reflectivity as the fifth reflected light, and transmits the remaining portion of the third reflected light, excluding the fifth reflected light, as the third transmitted light. The second optical component collects the fourth reflected light and the third transmitted light to output the first output light.

9. A laser processing device, comprising: A beam generator produces incident light; as well as An optical converter is arranged in the optical path of the incident light and converts the incident light into one of a first output light having a first output and a second output light having a second output different from the first output. The optical converter includes: The first optical component is movable between a first posture for converting the incident light into a first reflected light oriented in a first direction and a second posture for converting the incident light into a second reflected light oriented in a second direction different from the first direction; A second optical component, having reflectivity and overlapping the first optical component along the second direction; and A third optical component is disposed between the first optical component and the second optical component in the optical path, and when the first optical component is in the first posture, it totally reflects the first reflected light in the direction toward the second optical component. Wherein, when the first optical component is in the first posture, the second optical component reflects the portion of the first reflected light output from the third optical component that corresponds to the reflectivity as the first output light, and transmits the remaining portion of the first reflected light other than the first output light as the transmitted light. When the first optical component is in the second posture, the portion of the second reflected light corresponding to the reflectivity reflected by the second optical component is used as the third reflected light, and the remaining portion of the second reflected light other than the third reflected light is used as the second output light.

10. The laser processing equipment according to claim 9, further comprising: An absorbing member absorbs the transmitted light when the first optical member is in the first posture and absorbs the third reflected light when the first optical member is in the second posture.

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