Thinning in-process disk lapping wheel

Abstract

The application discloses a thinning machine-mounted disc flattening grinding wheel and belongs to the field of thinning machines. The grinding wheel comprises a wheel body, a plurality of tooth pieces which are uniformly fixed to the wheel body, an output shaft which is detachably installed on the wheel body, a plurality of first water inlets which are uniformly arranged on the wheel body and correspond to two tooth pieces, a plurality of second water inlets which are arranged in groups and each group has two second water inlets, a water inlet pipe which is in communication with a water inlet cover and is fixed to the water inlet cover, a mounting frame which is fixed to the water inlet pipe, and a fixing bolt which is threadedly connected to the mounting frame. The water inlet pipe, the water inlet cover, the first water inlets and the second water inlets are arranged, so that the water inlet pipe is in communication with external water source equipment, then cooling water enters the water inlet cover through the water inlet pipe, then the water enters the first water inlets, and part of the water is discharged through the first water inlets, thereby prolonging the service life of the tooth pieces.

Description

Technical Field

[0001] This application relates to the field of thinning machines, and more specifically, to a thinning machine-mounted disc dressing wheel. Background Technology

[0002] Thinning machines are process equipment used in the semiconductor manufacturing industry for wafer thinning. This equipment achieves precise control of wafer thickness through rotary grinding and generally supports wafer processing from 4 inches to 12 inches. Typical technical features include air spindle drive, multi-station synchronous operation, and online thickness monitoring.

[0003] The product structure can be referenced from a novel thinning grinding wheel disclosed in Chinese Patent Document 201720184309.X. The main purpose is to provide a novel thinning grinding wheel structure that allows for both roughing and finishing processes in a single operation during the machining of high-precision discrete components. This novel thinning grinding wheel includes a grinding wheel body with a central positioning hole at its center. A grinding head positioning groove is also provided on the grinding wheel body, containing multiple snap-fit ​​joints. A rocker arm is located at the rear end of each snap-fit ​​joint, and the rocker arm is connected to each snap-fit ​​joint via an elastic element. An abrasive head is positioned between each pair of adjacent snap-fit ​​joints, directly contacting the rear rocker arm. A locking nut that mates with the abrasive head is also provided outside the grinding head positioning groove. This thinning grinding wheel effectively ensures the machining accuracy of discrete components and improves product manufacturing efficiency.

[0004] During processing, the grinding wheel needs to be installed on the output shaft of the thinning machine. Then, the output shaft rotates, driving the grinding wheel to rotate, so that the teeth on the grinding wheel process the wafer. This is the existing technology, and the teeth are generally cooled by water cooling. However, in this patent, since the cooling water flows randomly and can only be directed towards the teeth, it may not be able to directly and effectively cool each tooth, which will also affect the service life of the teeth.

[0005] A thinning machine-mounted disc dressing wheel is now provided. Utility Model Content

[0006] The summary section of this application is intended to provide a brief overview of the concepts, which will be described in detail in the detailed description section below. This summary section is not intended to identify key or essential features of the claimed technical solutions, nor is it intended to limit the scope of the claimed technical solutions.

[0007] To address the technical problems mentioned in the background section, some embodiments of this application provide a thinned machine-mounted disc leveling grinding wheel, comprising: a wheel body; multiple toothed plates, evenly fixed to the wheel body; an output shaft, detachably mounted to the wheel body; multiple first water inlets, evenly distributed on the wheel body, with each first water inlet located between two toothed plates; multiple sets of second water inlets, each set consisting of two, with the second water inlets located on the inner wall of the first water inlets, the second water inlets being inclined in opposite directions and corresponding to the toothed plates; a water inlet cover, detachably mounted to the wheel body and rotatably connected to the wheel body; a water inlet pipe, communicating with and fixedly connected to the water inlet cover; a mounting bracket, fixedly connected to the water inlet pipe; and a fixing bolt threaded onto the mounting bracket.

[0008] When the thinning machine is working, it drives the output shaft to rotate, which in turn drives the wheel to rotate, thus processing the wafer. Before this, the mounting bracket can be installed in the corresponding position using fixing bolts. Then, the water inlet pipe is connected to an external water source. Cooling water then enters the water inlet shroud through the water inlet pipe, and then enters the first water inlet hole. Part of the water is discharged through the first water inlet hole for initial cooling, while the other part is discharged through the second water inlet hole. Because the second water inlet hole is inclined and oriented towards the toothed blade, the cooling water is discharged directly towards... The gear plate directly and effectively cools the gear plate, improving the cooling effect. When the output shaft rotates, the slider, annular groove, annular cavity, and water inlet cover ensure that the water inlet cover remains fixed while the wheel rotates. The first and second connecting blocks can be disassembled and installed using the second mounting bolt, allowing the water inlet cover to be removed for easy cleaning of the first water inlet hole. During installation, the guide block can be aligned with the guide groove first, then the wheel can be rotated to align the guide block with the limit groove, with the limit groove abutting against the limit block, facilitating the subsequent installation of the first mounting bolt.

[0009] In some embodiments, a retaining ring is fixedly connected to the wheel body, and the retaining ring is movably mounted to the output shaft. A first mounting bolt is threadedly connected to the retaining ring, and the first mounting bolt is threadedly connected to the output shaft.

[0010] In some implementations, multiple first mounting bolts are provided and are evenly distributed circumferentially on the retaining ring.

[0011] In some implementations, the wheel body is provided with a guide groove, and a guide block corresponding to the guide groove is fixedly connected to the output shaft, and a limiting groove corresponding to the guide block is provided on the wheel body.

[0012] In some embodiments, the wheel body has an annular groove, and a slider is slidably mounted on the annular groove. An annular cavity is formed on the inner wall of the annular groove, and an annular strip corresponding to the annular cavity is fixedly connected to the slider. The water inlet cover is detachably connected to the slider.

[0013] In some implementations, two of each of the annular bar and slider are provided.

[0014] In some implementations, a first connecting block is fixed to the slider, a second connecting block is fixed to the water inlet cover, and a second mounting bolt is threaded between the first connecting block and the second connecting block.

[0015] In some implementations, two of each of the guide block, guide groove, and limiting groove are provided.

[0016] In some implementations, a reinforcing rib is fixed between the mounting bracket and the water inlet shroud.

[0017] In some implementations, the reinforcing rib is L-shaped.

[0018] The beneficial effects of this application are as follows: By setting up an inlet pipe, an inlet cover, a first inlet hole, and a second inlet hole, the inlet pipe can be connected to an external water source. Then, cooling water enters the inlet cover through the inlet pipe, and then enters the first inlet hole. Part of the water is discharged through the first inlet hole for initial cooling, and the other part of the water is discharged through the second inlet hole. Since the second inlet hole is inclined and faces the toothed plate, the cooling water is directly discharged to the toothed plate, which directly and effectively cools the toothed plate, improves the cooling effect, and increases the service life of the toothed plate. When the output shaft rotates, the inlet cover remains fixed under the action of the slider, the annular groove, the annular cavity, and the inlet cover. The first connecting block and the second connecting block can be disassembled and installed through the second mounting bolt, so that the inlet cover can be removed for easy cleaning of the first inlet hole. Attached Figure Description

[0019] The accompanying drawings, which form part of this application, are used to provide a further understanding of the application and to make other features, objects, and advantages of the application more apparent. The illustrative embodiments and descriptions of this application are used to explain the application and do not constitute an undue limitation of the application.

[0020] Furthermore, throughout the accompanying drawings, the same or similar reference numerals denote the same or similar elements. It should be understood that the drawings are schematic, and the elements are not necessarily drawn to scale.

[0021] In the attached diagram:

[0022] Figure 1 This is an overall schematic diagram based on an embodiment of this application;

[0023] Figure 2 It is a schematic diagram of a three-dimensional structure;

[0024] Figure 3 It is a sectional view;

[0025] Figure 4 This is a sectional view of the wheel body;

[0026] Figure 5 This is a cross-sectional view of the water inlet hood;

[0027] Figure 6 yes Figure 3 Enlarged view of part A;

[0028] Figure 7 yes Figure 4 Enlarged view of part B;

[0029] Figure 8 yes Figure 5 Enlarged view of part C;

[0030] Figure 9 yes Figure 5 Enlarged view of part D.

[0031] Figure label:

[0032] 1. Wheel body; 2. Gear plate; 3. Fixing ring; 4. First mounting bolt; 5. Water inlet cover; 6. Second water inlet hole; 7. Output shaft; 8. Reinforcing rib; 9. Fixing bolt; 10. Mounting bracket; 11. Water inlet pipe; 12. Annular groove; 13. First water inlet hole; 14. Annular cavity; 15. Guide block; 16. Limiting groove; 17. Guide groove; 18. Slider; 19. Second mounting bolt; 20. Second connecting block; 21. First connecting block; 22. Annular strip. Detailed Implementation

[0033] Embodiments of this disclosure will now be described in more detail with reference to the accompanying drawings. While some embodiments of this disclosure are shown in the drawings, it should be understood that this disclosure can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this disclosure. It should be understood that the accompanying drawings and embodiments of this disclosure are for illustrative purposes only and are not intended to limit the scope of protection of this disclosure.

[0034] It should also be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings. Unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other.

[0035] It should be noted that the concepts of "first" and "second" mentioned in this disclosure are used only to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependencies.

[0036] It should be noted that the terms "a" and "a plurality of" used in this disclosure are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0037] This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0038] Reference Figure 1-9 A thinning machine-mounted disc leveling grinding wheel includes: a wheel body 1, toothed plates 2, an output shaft 7, a first water inlet hole 13, a second water inlet hole 6, a water inlet cover 5, a water inlet pipe 11, a mounting bracket 10, and fixing bolts 9. Multiple toothed plates 2 are mounted and evenly fixed to the wheel body 1. The output shaft 7 is detachably mounted to the wheel body 1. Multiple first water inlets 13 are evenly distributed on the wheel body 1, with each first water inlet hole 13 located between two toothed plates 2. Multiple sets of second water inlets 6 are provided, with two in each set. The second water inlets 6 are located on the inner wall of the first water inlets 13, and are inclined in opposite directions, corresponding to the toothed plates 2. The water inlet cover 5 is detachably mounted on the wheel body 1 and rotatably connected to the wheel body 1. The water inlet pipe 11 communicates with and is fixedly connected to the water inlet cover 5. Mounting bracket 10 is fixedly connected to water inlet pipe 11. Fixing bolt 9 is threaded onto mounting bracket 10.

[0039] A fixing ring 3 is fixedly connected to the thinning machine wheel body 1, and the fixing ring 3 is movably installed with the output shaft 7. A first mounting bolt 4 is threadedly connected to the fixing ring 3, and the first mounting bolt 4 is threadedly connected to the output shaft 7.

[0040] Multiple first mounting bolts 4 of the thinning machine are evenly distributed circumferentially on the fixing ring 3. The wheel body 1 of the thinning machine is provided with a guide groove 17, and a guide block 15 corresponding to the guide groove 17 is fixedly connected to the output shaft 7. The wheel body 1 is provided with a limiting groove 16 corresponding to the guide block 15.

[0041] The thinning machine wheel body 1 has an annular groove 12, and a slider 18 is slidably mounted on the annular groove 12. An annular cavity 14 is formed on the inner wall of the annular groove 12, and an annular strip 22 corresponding to the annular cavity 14 is fixedly connected to the slider 18. The water inlet cover 5 is detachably connected to the slider 18. The thinning machine has two annular strips 22 and two sliders 18.

[0042] A first connecting block 21 is fixedly connected to the slider 18 of the thinning machine, and a second connecting block 20 is fixedly connected to the water inlet cover 5 of the thinning machine. A second mounting bolt 19 is threadedly connected between the first connecting block 21 and the second connecting block 20. Two guide blocks 15, guide grooves 17, and limit grooves 16 are provided for the thinning machine. A reinforcing rib 8 is fixedly connected between the mounting bracket 10 of the thinning machine and the water inlet cover 5. The reinforcing rib 8 of the thinning machine is L-shaped.

[0043] The thinning machine is existing technology. When the thinning machine is working, it drives the output shaft 7 to rotate, which in turn drives the wheel 1 to rotate, thereby processing the wafer. Before this, the mounting bracket 10 can be installed in the corresponding position using fixing bolts 9. Then, the water inlet pipe 11 is connected to an external water source. Cooling water then enters the water inlet cover 5 through the water inlet pipe 11, and then enters the first water inlet hole 13. Part of the water is discharged through the first water inlet hole 13 for initial cooling, and the other part of the water is discharged through the second water inlet hole 6. Because the second water inlet hole 6 is inclined and faces the toothed plate 2, the cooling water is directly discharged to the toothed plate 2, directly and effectively cooling the wafer. Cooling the gear 2 improves the cooling effect and extends its service life. When the output shaft 7 rotates, the action of the slider 18, annular groove 12, annular cavity 14, and water inlet cover 5 ensures that the water inlet cover 5 remains fixed while the wheel body 1 rotates. The first connecting block 21 and the second connecting block 20 can be disassembled and installed using the second mounting bolt 19, allowing the water inlet cover 5 to be removed for easy cleaning of the first water inlet hole 13. During installation, the guide block 15 can be aligned with the guide groove 17 first, then the wheel body 1 can be rotated to align the guide block 15 with the limiting groove 16. The limiting groove 16 abuts against the limiting block, facilitating the subsequent installation of the first mounting bolt 4.

[0044] The above description is merely a selection of preferred embodiments of this disclosure and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in the embodiments of this disclosure is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the above-described inventive concept. For example, technical solutions formed by substituting the above-described features with (but not limited to) technical features with similar functions disclosed in the embodiments of this disclosure.

Claims

1. A thinning machine-mounted disc dressing wheel, comprising: Wheel body; Multiple toothed plates are installed and evenly fixed to the wheel body; The output shaft is detachably mounted to the wheel body; The characteristic feature is that the thinning machine-mounted disc dressing wheel further includes: The first water inlet hole has multiple holes, which are evenly distributed on the wheel body, and the corresponding first water inlet hole is located between two toothed plates; The second water inlet is configured in multiple groups, with two in each group. The second water inlet is opened on the inner wall of the first water inlet. The second water inlet is inclined in the opposite direction and corresponds to the toothed plate. The water inlet cover is detachably mounted on the wheel body, and the water inlet cover is rotatably connected to the wheel body; The water inlet pipe is connected to and fixedly connected to the water inlet cover; Mounting bracket, fixedly connected to the water inlet pipe; The fixing bolts are threaded onto the mounting bracket.

2. The thinning machine-mounted disc dressing wheel according to claim 1, characterized in that: A fixing ring is fixedly connected to the wheel body, and the fixing ring is movably installed with the output shaft. A first mounting bolt is threadedly connected to the fixing ring, and the first mounting bolt is threadedly connected to the output shaft.

3. The thinning machine-mounted disc dressing wheel according to claim 2, characterized in that: The first mounting bolts are provided in multiples and are evenly distributed circumferentially on the fixing ring.

4. The thinning machine-mounted disc dressing wheel according to claim 1, characterized in that: The wheel body is provided with a guide groove, and a guide block corresponding to the guide groove is fixedly connected to the output shaft. The wheel body is also provided with a limiting groove corresponding to the guide block.

5. A thinning machine-mounted disc dressing wheel according to claim 1, characterized in that: The wheel body has an annular groove, and a slider is slidably installed on the annular groove. An annular cavity is formed on the inner wall of the annular groove, and an annular strip corresponding to the annular cavity is fixedly connected to the slider. The water inlet cover is detachably connected to the slider.

6. A thinning machine-mounted disc dressing wheel according to claim 5, characterized in that: Two of each of the ring bar and slider are provided.

7. A thinning machine-mounted disc dressing wheel according to claim 5, characterized in that: A first connecting block is fixedly connected to the slider, and a second connecting block is fixedly connected to the water inlet cover. A second mounting bolt is threaded between the first connecting block and the second connecting block.

8. A thinning machine-mounted disc dressing wheel according to claim 4, characterized in that: Two of each of the guide block, guide groove, and limiting groove are provided.

9. A thinning machine-mounted disc dressing wheel according to claim 1, characterized in that: A reinforcing rib is fixedly connected between the mounting bracket and the water inlet cover.

10. A thinning machine-mounted disc dressing wheel according to claim 9, characterized in that: The reinforcing rib is L-shaped.

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