A sample balancing and grinding thinning device

Abstract

The utility model relates to sample balanced grinding thinning technical field especially, relates to a kind of sample balanced grinding's thinning device, including hierarchical sleeve assembly and cap sleeve assembly, hierarchical sleeve assembly is by high sleeve, low sleeve, counterweight, first movable tensile double-sided adhesive tape and first tensile handle component;The utility model forms precision dynamic cooperation structure by high / low sleeve with H8 grade tolerance cooperation's counterweight of inner wall surface finish degree Ra≤0.8 μm, prevents sample micron level plastic deformation in grinding process by vertical orientation precision control, utilizes constant pressure contact mechanism to ensure the sustained stable contact of sample and grinding disc, accurately controls thinning thickness, innovation uses variable adhesive force double-sided adhesive tape fixing system, initial 8N adhesive force guarantees fixed reliability, adhesive force drops to 0.3N after tensile 30% and no residue, effectively reduce the sample pollution risk when electron microscope detects.

Description

Technical Field

[0001] This utility model relates to the field of sample balance grinding and thinning technology, and in particular to a sample balance grinding and thinning device. Background Technology

[0002] In microscopic characterization techniques such as metallography and transmission electron microscopy (TEM), in order to ensure the accurate analysis of the internal lattice structure, phase composition and physicochemical properties of materials, the sample to be tested must undergo a strict pretreatment process to make its surface achieve nanoscale flatness or form an ultrathin cross section with a thickness of micrometer to sub-millimeter.

[0003] Common sample balancing grinding thinning devices only include the function of fixing the sample, which can fix the position of the sample, but lack the functions of preventing deformation, ensuring the thinning thickness and preventing contamination. They cannot guarantee that the sample will not be deformed due to the fixing method, the accuracy of the thinning thickness, or that the sample will not be contaminated by adhesive residue. They are prone to problems such as deformation caused by the sample fixing method, insufficient thickness control accuracy and grinding contamination, which affect the sample quality.

[0004] Therefore, in view of the lack of deformation suppression, thickness accuracy control and contamination protection functions in the above-mentioned sample balancing grinding thinning device, which leads to systemic defects such as micron-level plastic deformation caused by sample clamping stress, excessive thinning thickness and adhesive residue contamination, there is an urgent need to design a new type of sample balancing grinding thinning device. Utility Model Content

[0005] To overcome the systemic defects of common sample balancing grinding thinning devices, such as the lack of deformation suppression, thickness accuracy control and contamination protection functions, which leads to micron-level plastic deformation caused by sample clamping stress, excessive thinning thickness and adhesive residue contamination.

[0006] The technical solution of this utility model is as follows: a sample balancing grinding thinning device, including a grading sleeve assembly and a cap sleeve assembly. The grading sleeve assembly consists of a high sleeve, a low sleeve, a counterweight, a first movable stretchable double-sided adhesive and a first stretch handle. The bottom of the counterweight is attached with the first movable stretchable double-sided adhesive. The cap sleeve assembly consists of an outer sleeve, a lower counterweight, a cap brim, a handle groove, a second movable stretchable double-sided adhesive and a second stretch handle. The bottom of the lower counterweight is attached with the second movable stretchable double-sided adhesive.

[0007] Preferably, the high and low sleeves are precision machined from 304 stainless steel, ensuring an inner wall surface finish Ra≤0.8μm and a clearance tolerance of H8 with the counterweight. This ensures vertical guiding accuracy and forms a precise dynamic fit with the counterweight, preventing micron-level plastic deformation of the sample during grinding. The high or low sleeve limits the sample's position, and the counterweight presses down on the sample, ensuring constant contact between the sample and the grinding disc. The first movable stretchable double-sided adhesive is pulled by the first pull handle, or the second movable stretchable double-sided adhesive is pulled by the second pull handle. The initial adhesive force is 8N, which drops to 0.3N after being stretched by 30%, leaving virtually no adhesive residue. This reduces the contamination rate of electron microscopy samples and achieves the functions of preventing deformation, ensuring the thickness of the thinned sample, and preventing contamination. This addresses the common problem of sample balance grinding thinning devices that only include sample fixation functions, which can fix the position of the sample but lack the functions of preventing deformation, ensuring the thickness of the thinned sample, and preventing contamination due to adhesive residue. This can easily lead to problems such as deformation caused by the sample fixation method, insufficient thickness control accuracy, and grinding contamination, affecting the quality of the sample.

[0008] Preferably, the first removable stretchable double-sided tape is provided with a first stretch handle on its side, and the second removable stretchable double-sided tape is provided with a second stretch handle on its side.

[0009] Preferably, both the high sleeve and the low sleeve are made of stainless steel, with an inner wall surface finish Ra≤0.8μm, and the clearance fit tolerance between the high sleeve and the low sleeve and the counterweight is H8 grade.

[0010] Preferably, the wall thickness difference between the high sleeve and the low sleeve is configured to be 3-5mm, and the inner diameter tolerance of the high sleeve and the low sleeve is controlled within ±0.01mm.

[0011] Preferably, a handle groove is provided on the front side of the brim, and its structure has an anti-overturning moment ≥0.15N·m.

[0012] Preferably, the initial adhesive force of the first removable stretchable double-sided adhesive and the second removable stretchable double-sided adhesive is 8N, and the adhesive force drops to below 0.3N after 30% stretching deformation.

[0013] Preferably, the outer sleeve, lower counterweight, and brim can be made of stainless steel, tungsten carbide, high carbon steel, copper, or other metal materials.

[0014] The beneficial effects of this utility model are: 1. High and low sleeves are manufactured using precision CNC machining from 304 stainless steel. The inner cylindrical surfaces are mirror-polished to achieve a surface roughness Ra≤0.8μm, forming an H8-grade precision clearance guide system with the counterweight. Combined with a sleeve end face flatness of ≤0.005mm, a rigid guide channel with a perpendicularity error <0.01° is constructed. The counterweight moves smoothly downwards along the sleeve axis under gravity, ensuring uniform contact between the sample and the grinding disc through constant contact pressure, eliminating stress concentration caused by traditional rigid clamping. The sample's thinning stroke is precisely controlled by the limiting action of the high or low sleeve. The current thickness processing accuracy is ±2μm. The matching tensile adhesive structure uses a modified acrylic low-residue adhesive. The first and second removable tensile double-sided adhesives provide a peel strength of 8N in the initial bonding stage. When a radial tensile force is applied through the first or second tensile handle to induce a 30% strain in the adhesive, its adhesive force nonlinearly decreases to below 0.3N. At the same time, some molecular chains in the adhesive undergo directional breakage to form a weak interface layer, achieving non-destructive separation of the sample. This multi-level synergistic control system ultimately achieves deformation <0.1%, thickness processing error ≤1.5%, and surface contaminant density <100 particles / cm. 2 The composite technical indicators. Attached Figure Description

[0015] Figure 1 The diagram shown is a structural schematic of the components of a sample balancing grinding and thinning device, a graded sleeve grinding and polishing device, according to this utility model. Figure 2 The diagram shown is a structural schematic of the brim counterweight device accessory of a sample balancing grinding thinning device according to this utility model. Figure 3 The diagram shown is a bottom view of the counterweight structure of a sample balancing grinding thinning device according to this utility model. Figure 4 The diagram shown is a bottom view of the counterweight structure of a sample balancing grinding thinning device according to this utility model. Figure 5 The diagram shown is a front view of the counterweight structure of a sample balancing grinding thinning device according to this utility model.

[0016] Explanation of reference numerals in the attached drawings: 11. High sleeve; 12. Low sleeve; 13. Counterweight; 14. First movable stretchable double-sided tape; 15. First stretch handle; 21. Outer sleeve; 22. Lower counterweight; 23. Cap brim; 24. Handle groove; 25. Second movable stretchable double-sided tape; 26. Second stretch handle. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] Please see Figures 1-5 This utility model provides an embodiment: a sample balancing grinding thinning device, including a grading sleeve assembly and a cap sleeve assembly. The grading sleeve assembly consists of a high sleeve 11, a low sleeve 12, a counterweight 13, a first movable stretchable double-sided adhesive 14, and a first stretch handle 15. The bottom of the counterweight 13 is attached with the first movable stretchable double-sided adhesive 14. The cap sleeve assembly consists of an outer sleeve 21, a lower counterweight 22, a cap brim 23, a handle groove 24, a second movable stretchable double-sided adhesive 25, and a second stretch handle 26. The bottom of the lower counterweight 22 is attached with the second movable stretchable double-sided adhesive 25.

[0019] Please see Figures 2-5 In this embodiment, a first pull handle 15 is provided on the side of the first removable stretchable double-sided adhesive 14, and a second pull handle 26 is provided on the side of the second removable stretchable double-sided adhesive 25. When the sample needs to be removed after grinding, the first removable stretchable double-sided adhesive 14 is pulled by the first pull handle 15, or the second removable stretchable double-sided adhesive 25 is pulled by the second pull handle 26. Both the high sleeve 11 and the low sleeve 12 are made of 304 stainless steel, with an inner wall surface finish Ra≤0.8μm. The clearance fit tolerance between the high sleeve 11 and the low sleeve 12 and the counterweight 13 is H8 grade, achieved through precision machining using 304 stainless steel. The high sleeve 11 and the low sleeve 12 have an inner wall surface finish Ra≤0.8μm, and their clearance fit tolerance with the counterweight 13 is at grade H8, ensuring vertical guiding accuracy. They form a precise dynamic fit with the counterweight 13 to prevent micron-level plastic deformation of the sample being pressed down during grinding. The wall thickness difference between the high sleeve 11 and the low sleeve 12 is configured to be 3-5mm, and the inner diameter tolerance of the high sleeve 11 and the low sleeve 12 is controlled within ±0.01mm. The inner diameter dimensions of the high sleeve 11 and the low sleeve 12 are completely corresponding to the counterweight 13, thereby ensuring the smooth sliding of the counterweight 13 inside the high sleeve 11 or the low sleeve 12.

[0020] Please see Figures 1-5 In this embodiment, a handle groove 24 is provided on the front side of the brim 23. Its structure has an anti-overturning moment ≥0.15N·m. The lower counterweight 22 can be easily removed from the inside of the outer sleeve 21 through the brim 23. The initial adhesive force of the first movable stretchable double-sided adhesive 14 and the second movable stretchable double-sided adhesive 25 is 8N. After 30% stretching deformation, the adhesive force drops to below 0.3N. The initial adhesive force of the first movable stretchable double-sided adhesive 14 and the second movable stretchable double-sided adhesive 25 is 8N. When the two are stretched by 30%, the adhesive force drops to 0.3N, with basically no adhesive residue, reducing the contamination rate of electron microscope samples. The materials of the outer sleeve 21, the lower counterweight 22 and the brim 23 can be stainless steel, tungsten carbide, high carbon steel, copper and other metal materials. The outer sleeve 21, the lower counterweight 22 and the brim 23 made of stainless steel, tungsten carbide, high carbon steel or copper and other metal materials have higher strength.

[0021] During the routine metallographic sample preparation process, the sample is adhered to the bottom of the first movable stretchable double-sided adhesive tape 14. Then, a counterweight 13 is inserted into the interior of the high sleeve 11 or the low sleeve 12. The inner wall finish of the high sleeve 11 and the low sleeve 12 is Ra≤0.8μm, and the clearance tolerance between the counterweight 13 and the counterweight 13 is H8 grade to ensure vertical guiding accuracy. This forms a precise dynamic fit with the counterweight 13, preventing micron-level plastic deformation of the sample during grinding. Subsequently, the counterweight 13 moves downwards due to its own weight until the sample at the bottom of the first movable stretchable double-sided adhesive tape 14 contacts the grinding disc. The high sleeve 11 or the low sleeve 12 defines the position of the sample, and the counterweight 13 presses down on the sample, ensuring that the sample remains in contact with the grinding disc throughout the grinding process. The sample is thinned using an automatic polishing machine. The sample is adhered to the bottom of the second movable stretchable double-sided adhesive 25. Then, the lower counterweight 22 is inserted into the inner sleeve 21. Subsequently, the lower counterweight 22 drives the sample at the bottom of the first movable stretchable double-sided adhesive 14 to contact the grinding disc for thinning. After thinning is completed, the counterweight 13 or the lower counterweight 22 is removed. Then, the first movable stretchable double-sided adhesive 14 is pulled by the first stretch handle 15, or the second movable stretchable double-sided adhesive 25 is pulled by the second stretch handle 26. The initial adhesive force of the first movable stretchable double-sided adhesive 14 and the second movable stretchable double-sided adhesive 25 is 8N. After being stretched by 30%, it drops to 0.3N, with almost no adhesive residue. This reduces the sample contamination rate under electron microscopy and achieves the functions of preventing deformation, ensuring the thinning thickness, and preventing contamination.

[0022] Through the above steps, the core guiding mechanism is constructed using a high sleeve 11 and a low sleeve 12, CNC machined from 304 stainless steel. The inner walls of these sleeves are precision-machined with diamond tools to achieve a mirror-like finish with Ra ≤ 0.8μm. An H8 clearance fit system is established with the counterweight 13. The perpendicularity deviation is verified to be <0.005mm / m using a coordinate measuring machine. The counterweight 13 applies a constant load along the sleeve axis within an adjustable pressure range of 5-50N. Combined with the sleeve end face flatness of 0.002mm, the pressure uniformity of the sample-grinding contact surface is increased to 98%, effectively suppressing micron-level plastic deformation caused by uneven stress during grinding. The limiting structure of the high sleeve 11 or low sleeve 12, combined with the real-time feedback system of the laser thickness gauge, forms a closed-loop control, achieving a sample thinning thickness accuracy of ≤±1.5μm. The first movable stretchable double-sided adhesive 14 and the second movable stretchable double-sided adhesive 25 form a temporary fixed interface with a peel strength of 8N during the initial bonding stage through molecular diffusion. When a radial tensile force is applied through the first stretch handle 15 or the second stretch handle 26 to induce a 30% strain in the adhesive, its adhesive force exponentially decreases to below 0.3N due to the molecular chain unwinding effect. Combined with surface energy modulation technology, this achieves a preferential interlayer fracture mode in the adhesive, reducing the adhesive residue to <0.5μg / cm³.2 This reduced the contaminant density on the electron microscope sample surface to 100 particles / cm³. 2 The integrated solution successfully overcomes three major technical bottlenecks in traditional thinning devices, namely sample warping, thickness loss, and adhesive contamination caused by rigid clamping, thereby increasing the TEM pass rate of precision samples such as semiconductor wafers and nanofilms from 62% to 98.7%.

Claims

1. A sample thinning device for balanced grinding, comprising a grading sleeve assembly; characterized in that: It also includes a cap sleeve assembly, which consists of a high sleeve (11), a low sleeve (12), a counterweight (13), a first movable stretchable double-sided adhesive (14), and a first stretch handle (15). The bottom of the counterweight (13) is attached with the first movable stretchable double-sided adhesive (14). The cap sleeve assembly consists of an outer sleeve (21), a lower counterweight (22), a brim (23), a handle groove (24), a second movable stretchable double-sided adhesive (25), and a second stretch handle (26). The bottom of the lower counterweight (22) is attached with the second movable stretchable double-sided adhesive (25).

2. The sample balancing grinding thinning device according to claim 1, characterized in that: The first removable stretchable double-sided tape (14) has a first stretch handle (15) on its side, and the second removable stretchable double-sided tape (25) has a second stretch handle (26) on its side.

3. The sample balancing grinding thinning device according to claim 1, characterized in that: Both the high sleeve (11) and the low sleeve (12) are made of 304 stainless steel, with an inner wall surface finish Ra≤0.8μm. The clearance fit tolerance between the high sleeve (11) and the low sleeve (12) and the counterweight (13) is in the H8 grade.

4. The sample balancing grinding thinning device according to claim 1, characterized in that: The wall thickness difference between the high sleeve (11) and the low sleeve (12) is configured to be 3-5 mm, and the inner diameter tolerance of the high sleeve (11) and the low sleeve (12) is controlled within ±0.01 mm.

5. The sample balancing grinding thinning device according to claim 1, characterized in that: The front side of the brim (23) is provided with a handle groove (24), and its structure has an overturning moment ≥0.15N·m.

6. The sample balancing grinding thinning device according to claim 1, characterized in that: The initial adhesive force of the first removable stretchable double-sided adhesive (14) and the second removable stretchable double-sided adhesive (25) is 8N, and the adhesive force drops to below 0.3N after 30% stretching deformation.

7. The sample balancing grinding thinning device according to claim 1, characterized in that: The outer sleeve (21), lower counterweight (22) and brim (23) can be made of stainless steel, tungsten carbide, high carbon steel or copper.

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