Reticle gripper

Abstract

The utility model provides a kind of mask clamping tool, including fixed assembly, moving assembly, clamping assembly and shell: at least part of the fixed assembly and at least part of the moving assembly are placed inside the shell, at least part of the clamping assembly is placed outside the shell;The moving assembly is movably fixed on fixed assembly, the moving assembly is connected with the clamping assembly, the clamping assembly can be clamped or released mask under the drive of the moving assembly.This mask clamping tool can be convenient in equipment downtime clamping mask and stable grabbing, can improve the stability in the process of mask clamping and moving, avoid mask damage and drop.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a photomask clamping tool. Background Technology

[0002] In ASML IMM, ARF, KRF, and I-line equipment, when the photomask malfunctions on the suction cup or robotic arm, the operator generally needs to manually remove the photomask.

[0003] Because the space for manually picking up photomasks on suction cups and robotic arms is limited, manual handling of photomasks can easily contaminate important exposure areas. In addition, improper operation by operators can easily lead to the risk of bumping, dropping, and damaging the photomask, resulting in product delays and increased maintenance costs for the photomask or equipment.

[0004] Therefore, for those skilled in the art, how to design a photomask gripper that can safely pick up photomasks is a technical problem that urgently needs to be solved. Utility Model Content

[0005] The purpose of this utility model is to provide a photomask gripping tool that can easily grip and stably hold the photomask when the equipment is down, thereby improving the stability during the gripping and moving of the photomask and preventing damage and drop of the photomask.

[0006] To achieve the above objectives, this utility model provides a photomask clamping tool, comprising a fixing component, a moving component, a clamping component, and a housing: at least a portion of the fixing component and at least a portion of the moving component are located inside the housing, and at least a portion of the clamping component is located outside the housing; the moving component is movably fixed to the fixing component, the moving component is connected to the clamping component, and the clamping component is capable of clamping or releasing the photomask under the drive of the moving component.

[0007] Optionally, the moving component includes an interconnected telescopic portion and a moving portion, the telescopic portion being movably connected to the fixed component; the number of the moving portions is at least two sets, and all the moving portions are evenly arranged in the circumferential direction of the telescopic portion; the gripping component includes at least two sets of gripping portions, each set of gripping portions being connected to a corresponding set of moving portions; all the gripping portions cooperate with each other to jointly grip the photomask.

[0008] Optionally, the fixing component includes a limiting sleeve and a fixing part connected to each other, the number of fixing parts corresponding to the number of moving parts, and all the fixing parts are evenly arranged in the circumferential direction of the limiting sleeve; at least part of the telescopic part passes through the limiting sleeve, and each group of moving parts is slidably connected to a corresponding group of fixing parts.

[0009] Optionally, the telescopic part includes a movable round rod and a mounting base connected together, the movable round rod passing through the limiting sleeve; the movable part includes a connecting rod and a sliding member, the number of the connecting rod is at least one, one end of the connecting rod is rotatably connected to the mounting base, and the other end is connected to the sliding member; the sliding member is fixedly connected to the gripping part.

[0010] Optionally, the fixing part includes a connecting member and a limiting member that are connected to each other; the limiting member is slidably connected to the sliding member, and the extending direction of the limiting member is perpendicular to the axial direction of the moving rod.

[0011] Optionally, the number of the moving part, the fixed part, and the gripping part are all two sets; the two sets of moving parts are respectively arranged and fixed on both sides of the telescopic part, the two sets of fixed parts are respectively arranged and fixed on both sides of the limiting sleeve, and each set of gripping parts is connected to the corresponding set of moving parts.

[0012] Optionally, each set of fixing parts further includes a first connecting shaft connected to the connecting member, and two limiting members are respectively fixed at both ends of the first connecting shaft; the moving part further includes a second connecting shaft connected to the connecting rod, and two sliding members are respectively fixed at both ends of the second connecting shaft and respectively connected to one of the corresponding limiting members; each set of gripping parts includes two clamping members, and each clamping member is connected to one of the corresponding sliding members.

[0013] Optionally, the clamping member is L-shaped, one end of the clamping member is connected to the sliding member, and the other end of the clamping member has a chuck, which is provided with a receiving groove for placing the photomask.

[0014] Optionally, the moving component further includes a moving handle and a fixed handle, the fixed handle being disposed at one end of the housing; the moving handle being connected to the moving rod and used to drive the moving rod to move in the vertical direction; the housing is provided with a mounting groove, through which the moving handle extends.

[0015] Optionally, the photomask clamping tool further includes a limit button, which is movably disposed on the fixed handle or the housing; the limit button is used to prevent the moving component from moving.

[0016] This application provides a photomask gripping tool that can easily and stably grip the photomask when the equipment is down. It can also move flexibly and is not easy to drop the photomask. It can improve the stability during photomask gripping and movement, extend the service life of the photomask, and prevent the photomask from being damaged or falling off. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the fixing component, the moving component, and the clamping component in a preferred embodiment of the present invention;

[0018] Figure 2 This is a front view of the fixing component, the moving component, and the clamping component in a preferred embodiment of the present invention.

[0019] Figure 3 This is a schematic diagram of the structure of the photomask clamping tool in a preferred embodiment of the present invention;

[0020] Figure 4 This is a front view of the photomask gripping tool in a preferred embodiment of the present invention.

[0021] Figure 5 This is a side view of the photomask gripping tool in a preferred embodiment of the present invention.

[0022] Figure 6 This is a top view of the photomask gripping tool in a preferred embodiment of the present invention.

[0023] Figure 7 This is a schematic diagram of the clamp structure in a preferred embodiment of the present invention.

[0024] The reference numerals in the attached figures are explained as follows:

[0025] Fixed component 1; limiting sleeve 11; fixed part 12; connector 121; limiting part 122; first connecting shaft 123; moving component 2; telescopic part 21; moving round rod 211; mounting base 212; moving part 22; connecting rod 221; sliding part 222; second connecting shaft 223; moving handle 23; clamping component 3; clamping part 31; chuck 32; receiving groove 33; outer shell 4; mounting groove 41; fixed handle 5; limiting button 6. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0027] The terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the mechanism or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] It should be understood that the terms "first," "second," etc., are used in this utility model to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this utility model, "first" information can also be called "second" information, and similarly, "second" information can also be called "first" information.

[0029] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "fixation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between the components; they can refer to a direct connection or a connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] Furthermore, those skilled in the art can combine and integrate the different embodiments or examples described herein, as well as the features of the different embodiments or examples, without contradiction.

[0031] A preferred embodiment of this application provides a photomask gripping tool suitable for ASML scanner IMM / ARF / KRF / I-line series machines. This tool can grip photomasks on a suction cup, a robotic arm, or inside a photomask box, facilitating the removal and movement of photomasks when the equipment is down.

[0032] Reference Figures 1-6 As shown, the photomask gripping tool includes a fixing component 1, a moving component 2, a gripping component 3, and a housing 4. At least a portion of the fixing component 1 and at least a portion of the moving component 2 are located inside the housing 4, and at least a portion of the gripping component 3 is located outside the housing 4. The moving component 2 is movably fixed to the fixing component 1, and the moving component 2 is connected to the gripping component 3. The gripping component 3 is capable of gripping or releasing the photomask under the drive of the moving component 2.

[0033] This application provides a photomask gripping tool that can easily and stably grip the photomask when the equipment is down. It can also move flexibly and is not easy to drop the photomask. It can improve the stability during photomask gripping and movement, extend the service life of the photomask, and prevent the photomask from being damaged or falling off.

[0034] Specifically, the gripping assembly 3 includes at least two sets of gripping parts, all of which cooperate to grip the photomask (unlabeled). In actual use, the operator can drive all the gripping parts of the gripping assembly 3 to move synchronously by moving the moving assembly 2 to grip or release the photomask.

[0035] Reference Figure 1 and Figure 2 As shown, the moving component 2 includes an interconnected telescopic portion 21 and moving portions 22, with the telescopic portion 21 movably connected to the fixed component 1. There are at least two sets of moving portions 22, all evenly arranged circumferentially around the telescopic portion 21. Each set of gripping portions is connected to a corresponding set of moving portions 22. The operator can move the telescopic portion 21 to synchronously drive all moving portions 22 to move, and after all moving portions 22 move, they synchronously drive all gripping portions to move. Specifically, when all gripping portions move, they can move towards each other to grasp the photomask; they can also move away from each other to release the photomask.

[0036] Furthermore, the fixing component 1 includes a limiting sleeve 11 and fixing parts 12 connected to each other. The number of fixing parts 12 corresponds to the number of moving parts 22, and all fixing parts 12 are evenly arranged in the circumferential direction of the limiting sleeve 11. At least a portion of the telescopic part 21 passes through the limiting sleeve 11, thereby limiting the movement direction of the telescopic part 21 by the limiting sleeve 11. At the same time, each group of moving parts 22 is slidably connected to a corresponding group of fixing parts 12, so that the sliding direction of the moving part 22 is limited by the fixing parts 12, thereby limiting the movement direction of the gripping part.

[0037] Reference Figures 1 to 7 As shown, in one specific embodiment, there are two sets of moving parts 22 and two sets of fixed parts 12. The two sets of moving parts 22 are respectively disposed and fixed on both sides of the telescopic part 21, and the two sets of fixed parts 12 are respectively disposed and fixed on both sides of the limiting sleeve 11. Each set of moving parts 22 is slidably connected to a corresponding set of fixed parts 12. At this time, there are also two sets of gripping parts. Each set of gripping parts is connected to a corresponding set of moving parts 22 and moves under the drive of the corresponding set of moving parts 22.

[0038] In another specific embodiment, the number of moving parts 22 and fixed parts 12 may also be at least three sets. When there are three sets of moving parts 22 and fixed parts 12, all three sets of moving parts 22 are connected to the telescopic part 21, and adjacent moving parts 22 are spaced 120° apart. At the same time, all three sets of fixed parts 12 are connected to the limiting sleeve 11, and adjacent fixed parts 12 are also spaced 120° apart. In this case, there are also three sets of gripping parts, each gripping part is connected to a corresponding set of moving parts 22, and moves under the drive of the corresponding set of moving parts 22.

[0039] Continue to refer to Figure 1 and Figure 2 As shown, in one specific embodiment, the telescopic part 21 includes a movable round rod 211 and a mounting base 212 connected together, with the movable round rod 211 passing through the limiting sleeve 11. The movable part 22 includes a connecting rod 221 and a sliding member 222. The number of connecting rods 221 is at least one. One end of the connecting rod 221 is rotatably connected to the mounting base 212, and the other end is connected to the sliding member 222. The sliding member 222 is fixedly connected to the gripping part and slidably connected to the fixed part 12.

[0040] In actual operation, the movable round rod 211 can move within the limiting sleeve 11. After the movable round rod 211 moves, it can drive the connecting rods 221 of all moving parts 22 to rotate synchronously relative to the mounting base 212 through the mounting base 212. After each set of connecting rods 221 rotates, it can drive the corresponding set of sliding parts 222 to move.

[0041] Furthermore, the fixing part 12 includes a connecting member 121 and a limiting member 122 that are connected to each other. The limiting member 122 is slidably connected to the sliding member 222, and the extending direction of the limiting member 122 is perpendicular to the axis of the moving rod 211. At this time, when the sliding member 222 is subjected to force, it can only slide in the extending direction of the limiting member 122, thereby driving multiple sets of gripping parts to move towards or away from each other.

[0042] Reference Figure 1 and Figure 1 As shown, in one example, the limiting member 122 is a round rod, and the sliding member 222 is a movable sleeve. The movable sleeve is sleeved on the round rod and can slide relative to the round rod.

[0043] In another example, the limiting member 122 is a movable sleeve, and the sliding member 222 is a round rod that extends into the movable sleeve and can slide relative to the movable sleeve.

[0044] In another example, the limiting member 122 is a groove, and the sliding member 222 is a slider, which is located in the groove and can move in the groove.

[0045] Reference Figures 1-6As a specific embodiment, the number of moving parts 22, fixing parts 12, and gripping parts are all in two sets. Each fixing part 12 also includes a first connecting shaft 123, which is connected to the connecting member 121. There are two limiting members 122, which are respectively fixed to both ends of the first connecting shaft 123. Each moving part 22 also includes a second connecting shaft 223, which is connected to the connecting rod 221. There are two sliding members 222, which are respectively fixed to both ends of the second connecting shaft 223. Each sliding member 222 is slidably connected to a corresponding limiting member 122. Each gripping part includes two clamping members 31, each clamping member 31 being connected to a corresponding sliding member 222.

[0046] At this time, the photomask gripping tool includes two sets of gripping parts, each set of gripping parts including two clamping members 31, and the clamping members 31 of the two sets of gripping parts are respectively arranged opposite to each other. The design of four clamping members 31 can ensure that the photomask is fixed in position during gripping and movement, and prevent the photomask from slipping during movement.

[0047] More specifically, when the movable rod 211 moves upward, it can simultaneously drive the clamping members 31 of the two gripping parts to move closer to each other via the two sets of moving parts 22, thereby clamping the photomask. When the movable rod 211 moves downward, it can simultaneously drive the clamping members 31 of the two gripping parts to move further apart via the two sets of moving parts 22, thereby releasing the photomask.

[0048] Continue to refer to Figure 1 In a preferred embodiment, each set of moving parts 22 includes two connecting rods 221. One end of each connecting rod 221 is rotatably fixed to the mounting base 212, and the other end of each connecting rod 221 is connected to the second connecting shaft 223. The two connecting rods 221 are preferably symmetrically arranged on both sides of the connecting member 121 to ensure smooth movement of the sliding member 222.

[0049] As another specific embodiment, the number of moving parts 22, fixing parts 12, and gripping parts can all be at least three sets. Each set of fixing parts 12 includes a limiting member 122, each set of moving parts 22 includes a sliding member 222, and each set of gripping parts includes a clamping member 31. When each sliding member 222 moves relative to the limiting member 122, it can drive a corresponding clamping member 31 to move. At least three clamping members 31 moving synchronously can jointly clamp or release the photomask.

[0050] Continue to refer to Figures 3-7 As shown in the figure, in one specific embodiment, the clamping member 31 is L-shaped. One end of the clamping member 31 is connected to the sliding member 222, and the other end of the clamping member 31 has a chuck 32. The chuck 32 is provided with a receiving groove 33 for placing the photomask. The material of the chuck 33 is preferably high-fluorine rubber to further prevent the photomask from slipping.

[0051] Meanwhile, the clamping member 31 is preferably made of a metallic material (e.g., 316 stainless steel) to give the clamping member 31 high strength, antistatic properties and resistance to common chemicals.

[0052] In actual use, when the photomask clamping tool is holding the photomask, the photomask can be placed in the receiving grooves 33 of the four clamping parts 31 to ensure stable clamping and movement of the photomask.

[0053] Continue to refer to Figure 1 and Figure 2 The moving component 2 also includes a moving handle 23, which is connected to the moving rod 211 and is used to drive the moving rod 211 to move in the vertical direction.

[0054] Reference Figures 3-6 As shown, the housing 4 is provided with a mounting groove 41, and the movable handle 23 passes through and extends out of the mounting groove 41, so that part of the movable handle 23 is placed outside the housing 4. The operator can push and pull the movable handle 23 to realize the synchronous movement of all clamping parts 31.

[0055] Continue to refer to Figures 1-4 The photomask clamping tool also includes a fixed handle 5, which is located at one end of the housing 4. The fixed handle 5 is preferably made of a conductive material (such as polypropylene) to prevent static electricity from being generated. This material has the characteristics of extended lifespan, antistatic properties, and resistance to common chemicals, thus preventing the photomask from being damaged by discharge. At the same time, the fixed handle 5 can be ergonomically designed according to the operating space of the equipment, making it convenient for the operator to grip and clamp the photomask.

[0056] like Figures 3-6 As shown, the photomask clamping tool also includes a limit button 6, which is movably mounted on the fixed handle 5 or the housing 4. The limit button 6 is used to prevent the moving component 2 from moving.

[0057] In one specific embodiment, the limit button 6 is connected to a contact (not shown). When the limit button 6 is pressed, the contact abuts against the moving component 2 to prevent the moving component 2 from moving. This application does not limit the type of contact; the contact can be configured as an elastic element or a non-elastic element.

[0058] In actual operation, the operator can hold the fixed handle 5 with one hand and pull the moving handle 23 upward to clamp the photomask. After clamping the photomask with the photomask clamping tool, the operator can press the limit button 6 to lock the position of the moving component 2 and the clamping component 31, so that the photomask clamping tool always remains in the clamping state.

[0059] When it is necessary to release the photomask, the limit button 6 can be pressed again to release the lock on the moving component 2. At this time, the operator can push the moving handle 23 down to release the photomask.

[0060] In summary, this utility model provides a photomask gripping tool that can easily and stably grip photomasks when the equipment is down. It can also move flexibly, making it less likely for the photomask to fall off. This improves the stability during photomask gripping and movement, extends the service life of the photomask, and prevents damage and falling of the photomask.

[0061] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present utility model.

Claims

1. A photomask gripping tool, characterized in that, It includes a fixing component, a moving component, a clamping component, and a housing: at least a portion of the fixing component and at least a portion of the moving component are located inside the housing, and at least a portion of the clamping component is located outside the housing; the moving component is movably fixed to the fixing component, the moving component is connected to the clamping component, and the clamping component is capable of clamping or releasing the photomask under the drive of the moving component.

2. The photomask gripping tool as described in claim 1, characterized in that, The moving component includes an interconnected telescopic part and a moving part, the telescopic part being movably connected to the fixed component; the number of the moving parts is at least two sets, and all the moving parts are evenly arranged in the circumferential direction of the telescopic part; the gripping component includes at least two sets of gripping parts, each set of gripping parts being connected to a corresponding set of moving parts; all the gripping parts cooperate with each other to jointly grip the photomask.

3. The photomask gripping tool as described in claim 2, characterized in that, The fixing component includes a limiting sleeve and a fixing part connected to each other. The number of fixing parts corresponds to the number of moving parts. All the fixing parts are evenly arranged in the circumferential direction of the limiting sleeve. At least part of the telescopic part passes through the limiting sleeve. Each group of moving parts is slidably connected to a corresponding group of fixing parts.

4. The photomask gripping tool as described in claim 3, characterized in that, The telescopic part includes a movable round rod and a mounting base connected together, the movable round rod passing through the limiting sleeve; the movable part includes a connecting rod and a sliding member, the number of the connecting rod is at least one, one end of the connecting rod is rotatably connected to the mounting base, and the other end is connected to the sliding member; the sliding member is fixedly connected to the gripping part.

5. The photomask gripping tool as described in claim 4, characterized in that, The fixing part includes a connecting member and a limiting member that are connected to each other; the limiting member is slidably connected to the sliding member, and the extending direction of the limiting member is perpendicular to the axial direction of the moving rod.

6. The photomask gripping tool as described in claim 5, characterized in that, The number of the moving part, the fixed part, and the gripping part are all two sets; the two sets of moving parts are respectively arranged and fixed on both sides of the telescopic part, and the two sets of fixed parts are respectively arranged and fixed on both sides of the limiting sleeve. Each set of gripping parts is connected to the corresponding set of moving parts.

7. The photomask gripping tool as described in claim 6, characterized in that, Each set of fixed parts further includes a first connecting shaft connected to the connecting member, and two limiting members are respectively fixed at both ends of the first connecting shaft; the moving part further includes a second connecting shaft connected to the connecting rod, and two sliding members are respectively fixed at both ends of the second connecting shaft and respectively connected to one of the corresponding limiting members; each set of gripping parts includes two clamping members, and each clamping member is connected to one of the corresponding sliding members.

8. The photomask gripping tool as described in claim 7, characterized in that, The clamping member is L-shaped, with one end connected to the sliding member and the other end having a chuck with a receiving groove for placing the photomask.

9. The photomask gripping tool as described in claim 4, characterized in that, The moving component further includes a moving handle and a fixed handle, the fixed handle being disposed at one end of the housing; the moving handle is connected to the moving rod and is used to drive the moving rod to move in the vertical direction; the housing is provided with a mounting groove, through which the moving handle extends.

10. The photomask gripping tool as described in claim 9, characterized in that, It also includes a limit button, which is movably disposed on the fixed handle or the housing; the limit button is used to prevent the moving component from moving.

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