An obliquely arranged pre-arrangement pipe device

CN224659246UActive Publication Date: 2026-08-21HEFEI JIUFU SEMICON TECH CO LTD
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Patent Information

Application Number
CN202522057818.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-25
Publication Date
2026-08-21
Estimated Expiration
2035-09-25

AI Technical Summary

Technical Problem

[0004]本实用新型的目的是为了解决现有技术中对接管道时工作效率低,调节时间长的问题,而提出的一种斜向布置的预配管装置

Benefits of technology

[0013]1、本实用新型通过设置多个牛眼轮,操作人员通过移动牛眼轮带动固定底板进行移动,方便对设备进行粗略的调节,缩短操作人员调节时间,通过设置两个测量杆,使三轴坐标调节机构位于两个测量杆,方便操作人员对对预配管进行调节定位,缩短对接管道工作时间。

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Abstract

The utility model relates to pre -laying pipe device technical field especially relates to a kind of pre -laying pipe device of oblique arrangement, including fixed base plate and elevated base plate, and fixed base plate is installed in elevated base plate end part.The utility model is moved by setting multiple cow eye wheels, and operator is moved by cow eye wheel drive fixed base plate, it is convenient to roughly adjust equipment, shorten operator adjustment time, by setting two measuring rods, so that three-axis coordinate adjusting mechanism is located in two measuring rods, it is convenient for operator to adjust and position pre -laying pipe, shorten docking pipeline working time, by setting multiple laser pens, after adjusting, operator is marked by marking pen on laser position, prevent due to accidental situation, equipment produces deviation, it is convenient for operator to adjust, by setting rotating bolt, operator is disassembled by rotating bolt, to cow eye wheel fixed plate, it is convenient for operator to fix fixed base plate.
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Description

Technical Field

[0001] This utility model relates to the field of pre-piping device technology, and in particular to a pre-piping device arranged at an angle. Background Technology

[0002] Piping is a crucial step in the semiconductor equipment installation process. The existing method for piping rigid pipes in semiconductor equipment involves installing the pipes and positioning them after the semiconductor equipment has arrived at the site and been installed, in order to ensure the assembly accuracy of the rigid pipes.

[0003] Semiconductor equipment contains various types of pipe interfaces, and the original manufacturer's drawings specify the positions of these interfaces using X, Y, and Z axes. Within a certain area of ​​a semiconductor device, there may be a group of gas interfaces tilted towards the X and Y axes. Because extremely high precision is required when connecting pipes, traditional techniques struggle to adjust the equipment's coordinates, impacting operator time and installation efficiency. Furthermore, after adjustment, traditional techniques often fail to accurately calibrate the positions. Subsequent equipment movement due to unforeseen circumstances affects the accuracy of subsequent pipe connections, necessitating readjustment and reducing overall work efficiency. Utility Model Content

[0004] The purpose of this invention is to solve the problems of low working efficiency and long adjustment time when connecting pipes in the prior art, and to propose a pre-installed pipe device with an oblique arrangement.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A pre-installed pipe assembly device arranged at an angle includes a fixed base plate and an elevated base plate. The fixed base plate is installed at the end of the elevated base plate. Multiple bullseye wheels are symmetrically arranged on both sides of the fixed base plate. A three-axis coordinate adjustment mechanism is provided at the end of the fixed base plate. A transition plate is provided at the end of the three-axis coordinate adjustment mechanism. A first mounting plate is provided on the side wall of the transition plate. A laser pointer is symmetrically arranged on the side wall of the first mounting plate. A second mounting plate is provided on the side wall of the first mounting plate. Multiple pipe joints are linearly arranged at the bottom of the second mounting plate. Multiple handles are symmetrically arranged at the end of the fixed base plate.

[0007] Preferably, multiple bullseye wheel fixing plates are symmetrically arranged on both sides of the fixed base plate, and multiple rotating bolts are provided at the symmetrical ends of the bullseye wheel fixing plates. The bottom of the bullseye wheel fixing plates is connected to multiple bullseye wheels.

[0008] Preferably, the first mounting plate has multiple laser pointer holders symmetrically arranged at its end, each laser pointer holder containing a laser pointer, and the laser pointers and laser pointer holders are arranged in a one-to-one correspondence.

[0009] Preferably, the laser pointer tip is further provided with a laser pointer fixing plate, and the laser pointer fixing plate and the laser pointer are arranged in a one-to-one correspondence.

[0010] Preferably, the second mounting plate has two measuring rods symmetrically arranged at its end, the measuring rods having threads at their ends, and the second mounting plate having multiple mounting holes at its end.

[0011] Preferably, the bottom of the second mounting plate is provided with a plurality of pipe joint locking flanges in a linear manner, and the ends of the pipe joint locking flanges are connected to the ends of the pipe joints.

[0012] Compared with the prior art, the present invention has the following advantages:

[0013] 1. This utility model, by setting multiple bullseye wheels, allows operators to move the fixed base plate by moving the bullseye wheels, facilitating rough adjustments to the equipment and shortening the adjustment time. By setting two measuring rods, the three-axis coordinate adjustment mechanism is located on the two measuring rods, which facilitates the operator to adjust and position the pre-assembled pipe, shortening the working time for connecting the pipes.

[0014] 2. This utility model uses multiple laser pointers. After adjustment, the operator marks the laser position with a marker to prevent the equipment from shifting due to unexpected situations, making it convenient for the operator to make adjustments. By using rotating bolts, the operator can disassemble the bullseye wheel fixing plate and fix the base plate. Attached Figure Description

[0015] Figure 1 Isometric view;

[0016] Figure 2 These are isometric views of the front and rear angles.

[0017] In the diagram: 1. Fixed base plate; 2. Three-axis coordinate adjustment mechanism; 3. Pipe joint locking flange; 4. Laser pen fixing plate; 5. Laser pen; 6. Laser pen bracket; 7. First mounting plate; 8. Pipe joint; 9. Second mounting plate; 10. Adapter plate; 11. Bullseye wheel fixing plate; 12. Measuring rod; 13. Bullseye wheel; 14. Rotating bolt; 15. Handle; 16. Elevated base plate. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0019] Reference Figures 1-2A pre-installed pipe device arranged at an angle includes a fixed base plate 1 and an elevated base plate 16. The fixed base plate 1 is installed at the end of the elevated base plate 16. Multiple bullseye wheels 13 are symmetrically arranged on both sides of the fixed base plate 1 via a shaft platform, which facilitates the operator to perform a rough positioning before adjustment and reduces the operation time of the operator during adjustment.

[0020] Multiple bullseye wheel fixing plates 11 are symmetrically arranged on both sides of the fixed base plate 1. Multiple rotating bolts 14 are symmetrically arranged at the ends of the bullseye wheel fixing plates 11. The ends of the bullseye wheel fixing plates 11 are provided with threaded holes. The external thread of the rotating bolt 14 is engaged with the internal thread of the rotating groove. The bottom of the bullseye wheel fixing plate 11 and multiple bullseye wheels 13 are connected by a shaft platform. This arrangement makes it convenient for the operator to push the fixed base plate 1. After the pipe docking position is adjusted, the bullseye wheel fixing plates 11 can be released by rotating the bolts 14, making it convenient for the operator to disassemble.

[0021] The fixed base plate 1 is provided with a three-axis coordinate adjustment mechanism 2 at one end. The three-axis coordinate adjustment mechanism 2 includes components such as a precision screw, a servo motor, a guide rail, and a support platform. This arrangement enables the three-axis coordinate adjustment mechanism 2 to adjust the equipment to precise coordinates. This technology is existing technology and will not be elaborated on here.

[0022] The adapter plate 10 is fixedly mounted at the end of the three-axis coordinate adjustment mechanism 2 by bolt assembly. The first mounting plate 7 is fixedly mounted on the side wall of the adapter plate 10 by bolt assembly. Laser pointers 5 are symmetrically arranged on the side wall of the first mounting plate 7. Multiple laser pointer brackets 6 are symmetrically fixedly mounted at the end of the first mounting plate 7 by bolt assembly. The laser pointers 5 are fixedly mounted on the inner side wall of the laser pointer brackets 6 by bolt assembly. The laser pointers 5 and laser pointer brackets 6 are arranged in a one-to-one correspondence. This arrangement provides support for the laser pointers 5 and prevents them from falling during operation, which would affect the subsequent operation process.

[0023] The laser pointer fixing plate 4 and the laser pointer 5 are also provided at the end, and the laser pointer fixing plate 4 and the laser pointer 5 are set one-to-one. After the adjustment is completed, the operator marks the position of the laser pointer 5 with a marker to prevent the equipment from moving due to accidental situations and the operator from not paying full attention, which would affect the accuracy of subsequent pipe docking.

[0024] The first mounting plate 7 has a second mounting plate 9 on its side wall. The second mounting plate 9 has two measuring rods 12 symmetrically arranged at its end. The measuring rods 12 have threads at their ends. The second mounting plate 9 has multiple mounting holes at its ends. The external threads of the measuring rods 12 are engaged with the internal threads of the mounting holes to prevent the measuring rods 12 from falling off due to instability when the base plate 1 moves, thus preventing subsequent measurements from being performed. This arrangement provides support for the measuring rods 12.

[0025] The bottom of the second mounting plate 9 is provided with multiple pipe joints 8 in a linear fashion. The pipe joint locking flange 3 is fixedly installed in a linear fashion at the bottom of the second mounting plate 9 by bolt assembly. The end of the pipe joint locking flange 3 is connected to the end of the pipe joint 8. The end of the fixed base plate 1 is provided with multiple handles 15 symmetrically, which facilitates the operator to quickly lock the pipe joint 8, shortens the subsequent pipe connection time, and improves the work efficiency when connecting pipes.

[0026] The bolt assemblies described above are all prior art. A bolt assembly includes a bolt and a threaded hole for threading two components together.

[0027] The functional principle of this utility model can be explained through the following operation methods:

[0028] The operator moves the fixed base plate 1 by using the handle 15. The fixed base plate 1 moves by multiple bullseye wheels 13, which facilitates the operator to make rough positioning adjustments.

[0029] By activating the three-axis coordinate adjustment mechanism 2, the three-axis coordinate adjustment mechanism 2 is finely adjusted through a precision screw, so that the three-axis coordinate adjustment mechanism 2 is located at the center position of the two measuring rods 12, so that the current position and the calibration coordinates are completely coincident. After the adjustment is completed, the operator marks the laser calibration position with a marker pen. If the equipment moves due to unexpected circumstances, the operator can detect it in time by the marked position.

[0030] After adjustment, the bullseye wheel fixing plate 11 is released by rotating multiple rotating bolts 14, making it convenient for operators to disassemble multiple bullseye wheels 13 and fix the fixing base plate 1 to prevent the fixing base plate 1 from sliding after adjustment, which would cause the marking position to deviate.

[0031] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A pre-installed piping device arranged at an angle, comprising a fixed base plate and an elevated base plate, wherein the fixed base plate is installed at the end of the elevated base plate, characterized in that, Multiple bullseye wheels are symmetrically arranged on both sides of the fixed base plate. A three-axis coordinate adjustment mechanism is provided at the end of the fixed base plate. An adapter plate is provided at the end of the three-axis coordinate adjustment mechanism. A first mounting plate is provided on the side wall of the adapter plate. A laser pointer is symmetrically arranged on the side wall of the first mounting plate. A second mounting plate is provided on the side wall of the first mounting plate. Multiple pipe joints are linearly arranged at the bottom of the second mounting plate. Multiple handles are symmetrically arranged at the end of the fixed base plate.

2. The obliquely arranged pre-installed piping device according to claim 1, characterized in that, Multiple eye wheel fixing plates are symmetrically arranged on both sides of the fixed base plate. Multiple rotating bolts are provided at the symmetrical ends of the eye wheel fixing plates. The bottom of the eye wheel fixing plates is connected to multiple eye wheels.

3. The obliquely arranged pre-installed piping device according to claim 2, characterized in that, Multiple laser pointer holders are symmetrically arranged at the end of the first mounting plate. Each laser pointer holder contains a laser pointer, and the laser pointers and laser pointer holders are arranged in a one-to-one correspondence.

4. The obliquely arranged pre-piping device according to claim 3, characterized in that, The laser pointer is also equipped with a laser pointer fixing plate at the end, and the laser pointer fixing plate and the laser pointer are set up one-to-one.

5. A pre-installed piping device arranged obliquely according to claim 4, characterized in that, The second mounting plate has two symmetrical measuring rods at its end, the ends of which are threaded, and the second mounting plate has multiple mounting holes at its end.

6. A pre-installed piping device arranged obliquely according to claim 5, characterized in that, The bottom of the second mounting plate is linearly provided with multiple pipe joint locking flanges, and the ends of the pipe joint locking flanges are connected to the ends of the pipe joints.