Air floating platform with lifting function

Abstract

The utility model relates to precise mechanical equipment technical field discloses a kind of air floating platform with lifting function, the platform includes by linear motor driven motion platform and the scissor type lifting mechanism arranged on it;Lifting mechanism includes first support frame and second support frame of liftability;Its key is, second support frame is equipped with buffer mechanism, the buffer mechanism includes push rod, first spring, buffer plate and second spring, and first support frame lower end is equipped with buffer rod.When lifting mechanism drops, buffer rod impacts push rod, and energy is absorbed by double spring synergic effect.The utility model effectively solves the problem of lift end impact vibration, realizes smooth stop, and significantly improves the stability of equipment operation and workpiece precision.

Description

Technical Field

[0001] This utility model relates to the field of precision mechanical equipment technology, and in particular to an air flotation platform with lifting function. Background Technology

[0002] In high-tech fields such as semiconductor manufacturing, optical inspection, and ultra-precision machining, the high-precision and stable loading and movement of workpieces is a key aspect of ensuring product quality. To this end, the industry has developed various precision motion platforms. These platforms typically employ linear motors driven by high-precision guide rails to achieve rapid, smooth, and precisely positioned movement within a horizontal plane.

[0003] With the continuous improvement of automation, many production processes not only require workpieces to move horizontally but also to be lifted vertically to meet the needs of processes such as loading and unloading, multi-layer processing, or optical focusing. Therefore, integrating lifting functions into existing precision motion platforms to form a composite motion platform has become an important direction for technological development.

[0004] However, new technical problems have emerged in the process of integrating the lifting mechanism with the precision motion platform. Existing solutions, when implementing the lifting function, often experience mechanical shock and vibration due to rigid contact when the lifting platform reaches the end of its travel, especially during rapid descent to the bottom. This impact can not only cause displacement or even damage to the precision workpiece (such as a silicon wafer) it carries, but also transmit the vibration to the entire equipment platform, affecting its long-term positioning accuracy and structural stability—unacceptable for sub-micron or even nanometer-level precision operations. Utility Model Content

[0005] To overcome the above deficiencies, this utility model provides an air-floating platform with lifting function, which aims to improve the problem of rigid impact and vibration at the end of the lifting process of high-precision motion platforms with lifting function, affecting the long-term stability of the equipment and the accuracy of the workpiece being carried. This utility model aims to provide an air-floating platform with lifting function with an improved structure that can effectively solve the above problems.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an air-floating platform with lifting function, comprising: a base, a linear guide rail, a motion table, a first linear motor, and a lifting mechanism including a first liftable support frame and a second support frame as a base; and a buffer mechanism installed on the second support frame.

[0007] The buffer mechanism includes a push rod and a first spring sleeved on the push rod.

[0008] Furthermore, the lower end of the first support frame of the lifting mechanism is provided with a buffer rod. When the lifting mechanism descends, the buffer rod is used to impact the push rod of the buffer mechanism to compress the first spring.

[0009] Preferably, the lifting mechanism further includes a scissor arm hinged between the first support frame and the second support frame, and a first cylinder for driving the scissor arm to extend and retract.

[0010] Preferably, the scissor arm is composed of an inner rod and an outer rod hinged together, and the two ends of the scissor arm are respectively hinged to the first fixed plate and the second fixed plate; the lifting mechanism is further provided with a second cylinder, and the cylinder body and piston rod of the first cylinder and the second cylinder are respectively hinged to the first fixed plate and the second fixed plate.

[0011] Preferably, the first support frame and the second support frame are provided with slide rails and pulleys that roll in cooperation with the slide rails to guide the lifting and lowering motion.

[0012] Preferably, the buffer mechanism further includes a third fixing plate for fixing the buffer mechanism to the second support frame, a buffer plate that moves by being pushed by the push rod, and a second spring that connects the buffer plate and the third fixing plate at both ends respectively.

[0013] Preferably, the buffer mechanism further includes a housing that encloses the push rod, the first spring, and the buffer plate to protect the internal components.

[0014] Preferably, the air-floating platform with lifting function further includes a second linear motor, and the first linear motor and the second linear motor together drive the motion platform to move in the horizontal plane.

[0015] Preferably, the air-floating platform with lifting function further includes a cable chain connected to the motion platform via an upper connecting plate, and the cable chain is connected to the side plate or the base, which serves as a fixed base, via a lower connecting plate, for storing and protecting cables.

[0016] This utility model has the following beneficial effects: In this invention, by setting a buffer mechanism consisting of a buffer rod, a push rod, a first spring, and a second spring working together at the end of the lifting mechanism's movement, the problem of vibration caused by rigid impact and easy damage to workpieces and equipment structures when the lifting platform descends to the bottom in the prior art is solved. This achieves the effect of effectively absorbing impact energy, realizing smooth stopping, and improving the stability and protection accuracy of equipment operation.

[0017] This invention solves the problem of swaying or unstable posture that may occur during the lifting process of traditional lifting mechanisms by using a cylinder-driven scissor arm and a guide pair formed by a slide rail and pulley. It achieves a smooth lifting process, precise and controllable posture, and ensures a high degree of flatness of the work surface. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of an air-floating platform with lifting function proposed in this utility model; Figure 2 This is a schematic diagram of the first linear motor part of an air-floating platform with lifting function proposed in this utility model. Figure 3 This is a schematic diagram of the pulley structure of an air-floating platform with lifting function proposed in this utility model; Figure 4 This is a schematic diagram of the buffer plate structure of an air flotation platform with lifting function proposed in this utility model. Figure 5 for Figure 3 Enlarged view of point A in the middle.

[0019] Legend: 1. Linear guide rail; 2. First linear motor; 3. Second linear motor; 4. Side plate; 5. Motion table; 6. Upper connecting plate; 7. Cable chain; 8. Lower connecting plate; 9. Lifting mechanism; 901. First support frame; 902. Slide rail; 903. Pulley; 904. Inner rod; 905. Outer rod; 906. First fixing plate; 907. Second fixing plate; 908. First cylinder; 909. Second cylinder; 910. Second support frame; 10. Buffer mechanism; 1001. Buffer rod; 1002. Push rod; 1003. Outer shell; 1004. Third fixing plate; 1005. First spring; 1006. Buffer plate; 1007. Second spring; 11. Base. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please refer to Figures 1 to 5 This utility model provides an air-floating platform with lifting function, which aims to solve the problem that high-precision platforms with integrated lifting function in the prior art are susceptible to impact and vibration due to the lack of a dedicated end buffer structure.

[0022] like Figure 1 and Figure 2 As shown, the air-floating platform with lifting function includes a base 11 and a side plate 4 as the installation reference. A linear guide rail 1 is set on the base 11, and a motion table 5 is slidably connected to the linear guide rail 1 via a slider. The stators of the first linear motor 2 and the second linear motor 3 are fixed to the side plate 4 and the base 11, while their movers are fixed to the motion table 5, which together drive the motion table 5 to perform precise linear motion in the horizontal plane. A drag chain 7, which supplies power and air to the motion table 5, is fixedly connected to the side plate 4 or the base 11 as the fixed base via a lower connecting plate 8, and is movably connected to the motion table 5 via an upper connecting plate 6. A lifting mechanism 9 is installed on the motion table 5 to carry the workpiece and realize vertical lifting motion.

[0023] Please refer to Figure 1 , Figure 3 , Figure 4 and Figure 5 The lifting mechanism 9 includes a first support frame 901 that can be lifted and lowered relative to each other and a second support frame 910 that serves as a base. The first support frame 901 and the second support frame 910 are rotatably connected by a scissor arm. The scissor arm is composed of an inner rod 904 and an outer rod 905 hinged together. The two ends of the scissor arm are respectively hinged to a first fixed plate 906 and a second fixed plate 907. The cylinder bodies and piston rods of the first cylinder 908 and the second cylinder 909 are respectively hinged to the first fixed plate 906 and the second fixed plate 907. By driving the scissor arm to extend and retract, the first support frame 901 is lifted and lowered relative to the second support frame 910. To ensure the stability of the lifting posture, a slide rail 902 is fixed on the first support frame 901 and the second support frame 910, and a pulley 903 is provided that rolls with the slide rail 902. Crucially, a buffer rod 1001 is fixedly provided at the lower end of the first support frame 901.

[0024] The buffer mechanism 10 is mounted on the second support frame 910, and its function is to absorb impact energy when the lifting mechanism 9 descends. The buffer mechanism 10 includes a push rod 1002 with its axis arranged along the lifting direction, a first spring 1005 sleeved on the push rod 1002, and a third fixing plate 1004 for fixing the buffer mechanism 10 to the second support frame 910. The buffer mechanism 10 also includes a buffer plate 1006 that moves under the push of the push rod 1002 and a second spring 1007 that connects the buffer plate 1006 and the third fixing plate 1004 at both ends. In order to protect the internal components and guide their movement, the buffer mechanism 10 is also provided with a housing 1003, which encloses the push rod 1002, the first spring 1005 and the buffer plate 1006.

[0025] In the assembled and working state, when the first support frame 901 descends to the end of its stroke, the buffer rod 1001 at its lower end impacts the push rod 1002 of the buffer mechanism 10. The push rod 1002 moves downward under force, thereby compressing the first spring 1005 and pushing the buffer plate 1006. At the same time, the second spring 1007 also works in coordination. This structure, which uses the impact cooperation of the buffer rod 1001 and the push rod 1002 and the energy absorption of the double springs, ensures a smooth stop at the end of the lifting process, effectively protecting the equipment and the workpiece it carries.

[0026] In a preferred embodiment, to enhance the smoothness and load-bearing capacity of the lifting drive, the scissor arm is composed of an inner rod 904 and an outer rod 905 hinged together. The two ends of the scissor arm are respectively hinged to the first fixed plate 906 and the second fixed plate 907. The lifting mechanism 9 is also provided with a second cylinder 909. The cylinder bodies and piston rods of the first cylinder 908 and the second cylinder 909 are respectively hinged to the first fixed plate 906 and the second fixed plate 907, forming a symmetrical drive structure.

[0027] As another preferred embodiment, in order to ensure the accuracy and stability of the posture during the lifting process and prevent swaying, the first support frame 901 and the second support frame 910 are fixedly provided with slide rails 902 and pulleys 903 that roll in cooperation with the slide rails 902. The trajectory of the lifting movement is constrained by the guiding effect of the track and the pulleys 903.

[0028] As another preferred embodiment, in order to further optimize the buffering characteristics and achieve reliable reset of the mechanism, the buffering mechanism 10 also includes a third fixing plate 1004 for fixing the buffering mechanism 10 to the second support frame 910, the buffer plate 1006 being pushed by the push rod 1002 to move, and a second spring 1007 connecting the buffer plate 1006 and the third fixing plate 1004 at both ends respectively.

[0029] As another preferred embodiment, in order to protect the internal components of the buffer mechanism 10 and provide guidance, the buffer mechanism 10 is also provided with a housing 1003, which encloses the push rod 1002, the first spring 1005 and the buffer plate 1006.

[0030] As another preferred embodiment, in order to realize the two-dimensional free movement of the motion platform 5 in the horizontal plane, the air-floating platform with lifting function is also equipped with a second linear motor 3, and the first linear motor 2 and the second linear motor 3 jointly drive the motion platform 5.

[0031] As another preferred embodiment, in order to effectively protect and manage the power supply and air supply lines of the motion platform 5, the air flotation platform with lifting function is also provided with a drag chain 7 connected to the motion platform 5 through the upper connecting plate 6. The drag chain 7 is connected to the side plate 4 or the base 11, which serves as the fixed base, through the lower connecting plate 8.

[0032] Working principle: When the workpiece needs to be moved in the horizontal plane, the stators of the first linear motor 2 and the second linear motor 3 are energized to generate an electromagnetic field, which drives their respective movers. Since the movers are fixedly connected to the motion table 5, the motion table 5 is driven to perform a fast and stable two-dimensional linear motion under the precise guidance of the linear guide rail 1. During this process, the drag chain 7 bends or extends with the motion table 5, providing reliable follow-up protection for the internal cables and air pipes.

[0033] When vertical lifting is required, the first cylinder 908 and the second cylinder 909 are activated. By changing the distance between the first fixed plate 906 and the second fixed plate 907, the scissor arm composed of the inner rod 904 and the outer rod 905 is driven to extend or retract. The movement of the scissor arm smoothly lifts or lowers the first support frame 901 and the workpiece it carries vertically. The rolling cooperation between the slide rail 902 and the pulley 903 ensures the stability and precision of the lifting process. At the end of the descent process, the core buffering function of this utility model is activated: the buffer rod 1001 at the lower end of the first support frame 901 contacts and impacts the push rod 1002 of the buffer mechanism 10 installed on the second support frame 910. The push rod 1002 moves downward under force, and its movement first causes the first spring 1005 sleeved on it to be rapidly compressed, absorbing most of the impact kinetic energy; at the same time, the push rod 1002 pushes the buffer plate 1006, and the movement of the buffer plate 1006 further acts on the second spring 1007, realizing secondary buffering and energy dissipation. The entire buffer assembly moves stably under the guidance of the outer shell 1003. Through the series of synergistic effects of the buffer rod 1001, the push rod 1002, the first spring 1005, the buffer plate 1006 and the second spring 1007, the effective absorption and smooth transition of the impact energy at the end are achieved, solving the problem of equipment vibration and workpiece damage that may be caused by hard stop in the prior art.

[0034] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An air-floating platform with lifting function, comprising: Base (11), linear guide rail (1) disposed on the base (11); The motion table (5) is slidably mounted on the linear guide rail (1) via a slider; The first linear motor (2) is used to drive the motion table (5) to move along the linear guide rail (1); A lifting mechanism (9) is mounted on the motion platform (5). The lifting mechanism (9) includes a first support frame (901) that can be lifted and lowered, and a second support frame (910) that serves as a base. The mechanism is characterized in that... The air-floating platform with lifting function also includes a buffer mechanism (10) installed on the second support frame (910). The buffer mechanism (10) includes a push rod (1002) and a first spring (1005) sleeved on the push rod (1002). The lower end of the first support frame (901) is provided with a buffer rod (1001), which is used to impact the push rod (1002) to compress the first spring (1005) when the lifting mechanism (9) descends.

2. The air-floating platform with lifting function according to claim 1, characterized in that: The lifting mechanism (9) also includes: A scissor arm hinged between the first support frame (901) and the second support frame (910); The first cylinder (908) is used to drive the scissor arm to extend and retract.

3. The air-floating platform with lifting function according to claim 2, characterized in that: The scissor arm is composed of an inner rod (904) and an outer rod (905) hinged together. The two ends of the scissor arm are respectively hinged to the first fixed plate (906) and the second fixed plate (907). The lifting mechanism (9) is also provided with a second cylinder (909). The cylinder body and piston rod of the first cylinder (908) and the second cylinder (909) are respectively hinged to the first fixed plate (906) and the second fixed plate (907).

4. The air-floating platform with lifting function according to claim 2, characterized in that: The first support frame (901) and the second support frame (910) are provided with slide rails (902) and pulleys (903) that roll in cooperation with the slide rails (902).

5. The air-floating platform with lifting function according to claim 1, characterized in that: The buffer mechanism (10) further includes: The third fixing plate (1004) is used to fix the buffer mechanism (10) to the second support frame (910). A buffer plate (1006) is moved by the push rod (1002); The second spring (1007) has its two ends connected to the buffer plate (1006) and the third fixing plate (1004), respectively.

6. The air-floating platform with lifting function according to claim 5, characterized in that: The buffer mechanism (10) is further provided with a housing (1003), which encloses the push rod (1002), the first spring (1005) and the buffer plate (1006).

7. The air-floating platform with lifting function according to claim 1, characterized in that: The air-floating platform with lifting function is also equipped with a second linear motor (3), and the first linear motor (2) and the second linear motor (3) together drive the motion platform (5) to move in the horizontal plane.

8. The air-floating platform with lifting function according to claim 1, characterized in that: The air flotation platform with lifting function is also provided with a drag chain (7) connected to the motion table (5) via an upper connecting plate (6), and the drag chain (7) is connected to the side plate (4) or the base (11) which serves as a fixed base via a lower connecting plate (8).

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