Mechanical gripper Z-axis lifting mechanism

Abstract

The utility model discloses a mechanical gripper Z -axis lifting mechanism, its structure is rectangular tube backboard inner top installation servo motor, and servo motor output end is connected through the shaft coupling silk worm top, and silk worm is connected with the screw nut on, and the screw nut is installed screw nut seat on, and the screw nut seat is fixed on the slider fixed seat, and the slider fixed seat is connected on the linear guide rail slidingly, and the linear guide rail is set along the inside of rectangular tube backplate, and the slider fixed seat is installed in the inside top of guide rail mounting post, and the guide rail mounting post is sleeved in the inside of rectangular tube backplate, and the guide rail mounting post bottom end is connected mechanical gripper, the utility model discloses the advantages are: compact structure, can adapt to higher truss crossbeam to various height workpiece grip, can effectively reduce the overall space occupation of mechanical gripper, and the accurate positioning is accurate, and the longer gripper cantilever can provide good gripper stiffness, can bear larger load, and the lifting structure such as screw rod guide rail is all installed in the rectangular tube, can effectively prevent the pollution of oil dirt etc, prolongs the practical life, and improves production stability.

Description

Technical Field

[0001] This utility model relates to a mechanical gripper Z-axis lifting mechanism, specifically a mechanical gripper Z-axis lifting mechanism for ALD coating equipment. Background Technology

[0002] In ALD coating equipment, a truss mechanical gripper is used to move the workpiece. The mechanical gripper is installed on the Z-axis lifting mechanism, which is installed on the lateral movement mechanism of the truss beam.

[0003] In existing Z-axis lifting mechanisms, the entire Z-axis assembly rises along with the lead screw, causing the mechanical gripper to rise to a very high position, which in turn requires a correspondingly high equipment frame. When the truss beam is relatively high, the overall structural height needs to be further increased when the mechanical gripper needs to grasp a workpiece at a lower height, resulting in a large overall structural space occupation. On the other hand, the lead screw structure is exposed, making it susceptible to contamination by oil and other substances, which affects production stability. Utility Model Content

[0004] This utility model proposes a Z-axis lifting mechanism for a mechanical gripper, which aims to overcome the above-mentioned shortcomings of the existing technology, reduce the height of the mechanism and the space occupied, and prevent oil pollution.

[0005] The technical solution of this utility model is a Z-axis lifting mechanism for a mechanical gripper. Its structure includes a rectangular tube back plate, with a servo motor mounted at the top inside the back plate. The output end of the servo motor is connected downwards to the top of a lead screw via a coupling. The lead screw, near its top, passes through a lead screw support seat. A lead screw nut is connected to the lead screw, and a lead screw nut seat is mounted on the lead screw nut. The lead screw nut seat is fixed to a slider fixing seat, which is slidably connected to a linear guide rail. The linear guide rail is set along the inner height direction of the rectangular tube back plate. The slider fixing seat is mounted on the inner top of a guide rail mounting post, which is sleeved inside the rectangular tube back plate. The bottom end of the guide rail mounting post is connected to the mechanical gripper body. During movement, the guide rail mounting post and other related structures slide within the rectangular tube back plate, effectively preventing oil contamination and achieving a compact overall structure. Compared to existing technologies, this effectively reduces space occupation, provides precise positioning, has a long gripper cantilever, ensures gripper rigidity, and can withstand large loads.

[0006] Preferably, a cable chain is installed on one outer side of the rectangular tube back plate, and the cable chain is connected to a cable chain fixing plate on the stepped surface at the bottom of the guide rail mounting column. This ensures accurate lifting and moving.

[0007] Preferably, the rectangular tube back plate has a lubrication port for installing a lubrication port sealing plate on the other side near the bottom. This allows for lubrication and maintenance of the internal structure.

[0008] Preferably, the bottom step surface of the guide rail mounting column is provided with gripper top blocks on both sides opposite to each other. Several adjusting bolts are evenly distributed on the bottom step surface of the guide rail mounting column. When the bottom step surface of the guide rail mounting column is connected to the mechanical gripper body, the gripper top blocks on both sides abut against the top of the mechanical gripper body, and the bottom step surface of the guide rail mounting column is fixedly connected to the top of the mechanical gripper body by adjusting bolts. This achieves an adjustable and stable connection with the gripper.

[0009] The advantages of this utility model are: the structure is compact and reasonable, which can be adapted to the high truss beam to grasp workpieces of various heights, effectively reducing the overall space occupied by the mechanical gripper, and the positioning is accurate. The long gripper cantilever can provide good gripper rigidity and can withstand a large load. Moreover, the lifting structure such as the screw guide rail is installed in the rectangular tube, which can effectively prevent the contamination of oil and other substances, extend the service life, and improve production stability. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the Z-axis lifting mechanism of the mechanical gripper of this utility model.

[0011] Figure 2 This is a schematic diagram of the Z-axis lifting mechanism of the mechanical gripper applied to a truss mechanical gripper.

[0012] In the diagram, 1 is the rectangular tube back plate, 2 is the servo motor, 3 is the coupling, 4 is the lead screw support, 5 is the linear guide, 6 is the slider fixing seat, 7 is the drag chain, 8 is the lead screw nut seat, 9 is the lead screw, 10 is the guide rail mounting column, 11 is the drag chain fixing plate, 12 is the gripper top block, 13 is the adjusting bolt, 14 is the oil filling port sealing plate, 15 is the truss beam, and 16 is the mechanical gripper body. Detailed Implementation

[0013] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0014] like Figure 1 , 2 As shown, a Z-axis lifting mechanism for a mechanical gripper includes a rectangular tube back plate 1. A servo motor 2 is installed at the top inside the rectangular tube back plate 1. The output end of the servo motor 2 is connected downward to the top of a lead screw 9 via a coupling 3. The lead screw 9 passes through a lead screw support seat 4 near its top end. A lead screw nut is connected to the lead screw 9. A lead screw nut seat 8 is installed on the lead screw nut. The lead screw nut seat 8 is fixed on a slider fixing seat 6. The slider fixing seat 6 is slidably connected to a linear guide rail 5. The linear guide rail 5 is set along the height direction of the inner side of the rectangular tube back plate 1. The slider fixing seat 6 is installed at the top of the inner side of a guide rail mounting post 10. The guide rail mounting post 10 is sleeved on the inner side of the rectangular tube back plate 1. The bottom end of the guide rail mounting post 10 is connected to the mechanical gripper body 16.

[0015] In the specific design, a drag chain 7 is installed on one outer side of the rectangular tube back plate 1. The drag chain 7 is connected to the drag chain fixing plate 11 on the step surface at the bottom of the guide rail mounting column 10. An oil filling port for installing an oil filling port sealing plate 14 is provided on the other side of the rectangular tube back plate 1 near the bottom. A gripper top block 12 is provided on both sides of the step surface at the bottom of the guide rail mounting column 10. Several adjusting bolts 13 are evenly distributed on the step surface at the bottom of the guide rail mounting column 10. When the step surface at the bottom of the guide rail mounting column 10 is connected to the mechanical gripper body 16, the gripper top blocks 12 on both sides abut against the top sides of the mechanical gripper body 16, and the step surface at the bottom of the guide rail mounting column 10 is fixedly connected to the top of the mechanical gripper body 16 by adjusting bolts 13.

[0016] In use, the top of the back of the rectangular tube back plate 1 is mounted on the truss beam 15 via a transverse moving mechanism. When moving along the Z-axis, the servo motor 2 drives the lead screw nut to rise and fall along the lead screw 9. Through the lead screw nut seat 8, the slider fixing seat 6 rises and falls along the linear guide rail 5, which in turn drives the guide rail mounting column 10 to rise and fall, thereby realizing the Z-axis lifting and lowering movement of the mechanical gripper. During movement, the guide rail mounting column 10 and other related structures are all accommodated and slide within the rectangular tube back plate 1, which can effectively prevent oil contamination and achieve a compact overall structure. Compared with the existing technology, it can effectively reduce the space occupied, and the positioning is accurate. It has a long gripper cantilever, which can ensure the gripper rigidity and withstand a large load. Even when the truss beam 15 is high, it can still ensure that the gripper can grasp the workpiece at a lower height. Moreover, it can shorten the overall height compared with the existing technology and has less impact on the height of the equipment frame.

[0017] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0018] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present utility model, and these all fall within the protection scope of the present utility model.

Claims

1. A Z-axis lifting mechanism for a mechanical gripper, characterized in that, Includes a rectangular tube back plate (1), a servo motor (2) is installed at the top inside the rectangular tube back plate (1), the output end of the servo motor (2) is connected downward through a coupling (3) to the top of the lead screw (9), the part of the lead screw (9) near the top passes through the lead screw support seat (4), a lead screw nut is connected to the lead screw (9), a lead screw nut seat (8) is installed on the lead screw nut, the lead screw nut seat (8) is fixed on the slider fixing seat (6), the slider fixing seat (6) is slidably connected to the linear guide rail (5), the linear guide rail (5) is set along the height direction of the inner side of the rectangular tube back plate (1), the slider fixing seat (6) is installed at the top of the inner side of the guide rail mounting column (10), the guide rail mounting column (10) is sleeved on the inner side of the rectangular tube back plate (1), and the bottom end of the guide rail mounting column (10) is connected to the mechanical gripper body (16).

2. The Z-axis lifting mechanism of a mechanical gripper as described in claim 1, characterized in that, A drag chain (7) is installed on one outer side of the rectangular tube back plate (1), and the drag chain (7) is connected to the drag chain fixing plate (11) on the step surface at the bottom of the guide rail mounting column (10).

3. The Z-axis lifting mechanism of a mechanical gripper as described in claim 2, characterized in that, The rectangular tube back plate (1) has an oil filling port near the bottom on the other side for installing an oil filling port sealing plate (14).

4. The Z-axis lifting mechanism of a mechanical gripper as described in claim 2, characterized in that, The guide rail mounting column (10) has gripper top blocks (12) on both sides of the stepped surface at the bottom end. Several adjusting bolts (13) are evenly distributed on the stepped surface at the bottom end of the guide rail mounting column (10). When the stepped surface at the bottom end of the guide rail mounting column (10) is connected to the mechanical gripper body (16), the gripper top blocks (12) on both sides press against the top sides of the mechanical gripper body (16), and the stepped surface at the bottom end of the guide rail mounting column (10) is fixedly connected to the top of the mechanical gripper body (16) by adjusting bolts (13).

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