Wafer transfer robot air-floating vibration isolation base

Abstract

The utility model relates to anti -vibration pedestal technical field especially wafer handling mechanical arm air floatation type anti -vibration pedestal, and its mainly aims at the problem that base station and connecting seat are easy to loosen because of the reaction force of base station, and proposes the following technical scheme including base station, the base station below is provided with air floatation base, air floatation base outside fixedly connected with operating panel, the base station top fixedly connected with connecting seat, connecting seat top fixedly connected with mechanical arm main part, the base station one side fixedly connected with support rod. The utility model adopts the winding rod and winds up the rope, to let the tightening rope slide in the inside sliding groove, drives the rotating rod to be close to the connecting seat, like this can further reinforce the connection of connecting seat and base station, and the positioning plate inserts the outside ratchet to ensure that the winding rod does not rotate reversely, so also strengthened the fixed effect after the tightening rope winding, improved the stability of base station and tightening rope connection.

Description

Technical Field

[0001] This utility model relates to the field of vibration damping base technology, and in particular to an air-floating vibration damping base for wafer handling robotic arms. Background Technology

[0002] A vibration damping base is a device used to reduce equipment vibration. It mainly slows down the propagation of vibration by adding a layer of damping material between the equipment and the ground. It is more common in some precision equipment, such as wafer handling robotic arms, which use air-floating vibration damping bases.

[0003] During use, the robotic arm performs precise actions to pick up and place wafers, which requires emergency stop positioning. The vibration generated during the emergency stop positioning of the robotic arm is transmitted to the air-floating anti-vibration base, and the vibration generated by the emergency stop is canceled out by the internal air-floating structure.

[0004] However, under prolonged use, the movement directions of the robotic arm and the air-floating vibration-damping base are mostly opposite. Over time, the connection between the robotic arm and the air-floating vibration-damping base inevitably loosens, requiring regular inspection and tightening. Therefore, this invention proposes an air-floating vibration-damping base for a wafer handling robotic arm. Utility Model Content

[0005] The purpose of this invention is to address the problem in the background technology that, under long-term use, the movement directions of the robotic arm and the air-floating vibration-damping base are mostly opposite, and the connection between the robotic arm and the air-floating vibration-damping base inevitably becomes loose over long-term use, thus requiring regular inspection and tightening of the connection. The invention proposes an air-floating vibration-damping base for wafer handling robotic arms.

[0006] The technical solution of this utility model: A wafer handling robotic arm air-floating vibration-damping base includes a base platform, an air-floating base disposed below the base platform, an operation panel fixedly connected to the outside of the air-floating base, a connecting seat fixedly connected to the top of the base platform, a robotic arm body fixedly connected to the top of the connecting seat, and a support rod fixedly connected to one side of the base platform. Two sets of support rods are symmetrically arranged, and a rotating rod is rotatably connected to the top of each support rod. The rotating rod abuts against the top of the connecting seat and is used to press against the connecting seat.

[0007] The rotating rod has a sliding groove located away from the support rod. A tightening rope is slidably connected inside the sliding groove. One end of the tightening rope is fixedly connected to a positioning rod, which is fixedly connected to the outside of the base.

[0008] A protective shell is fixedly connected to the top of the air flotation base near the base platform, and the protective shell is used to protect the air flotation base.

[0009] Optionally, a winding rod is fixedly connected to the end of the tightening rope away from the positioning rod, the winding rod is rotatably connected to one side of the base, and a limit component is provided on the outside of the winding rod.

[0010] Optionally, the limiting component includes a ratchet, which is fixedly connected to the outside of the winding bar, and a positioning plate is fitted onto the outside of the ratchet.

[0011] Optionally, the positioning plate is rotatably connected to one side of the base, and a positioning block is abutted against the bottom of the positioning plate, with the positioning block fixedly connected to one side of the base.

[0012] Optionally, a spring is fixedly connected to the top of the positioning plate, and a fixing plate is fixedly connected to the end of the spring away from the positioning plate, and the fixing plate is fixedly connected to one side of the base.

[0013] Optionally, the spring is arranged in an arc shape, and the arc shape of the spring is used to cooperate with the rotation of the positioning plate.

[0014] Optionally, a rotating block is fixedly connected to the end of the winding rod away from the base, and the rotating block is hexagonal in shape.

[0015] In summary, this application includes at least one of the following beneficial technical effects:

[0016] This utility model uses a winding rod to wind up the tightening rope, allowing the tightening rope to slide inside the sliding groove, which drives the rotating rod to fit tightly against the connecting seat. This further strengthens the connection between the connecting seat and the base. The positioning plate embedded in the ratchet ensures that the winding rod will not rotate in the opposite direction, thus enhancing the fixing effect of the tightening rope after winding and improving the stability of the connection between the base and the tightening rope. Attached Figure Description

[0017] Figure 1 A schematic diagram of the air-floating vibration-damping base for a wafer handling robot arm is provided.

[0018] Figure 2 for Figure 1 A schematic diagram of the cross-sectional structure;

[0019] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0020] Figure 4 for Figure 2 Enlarged diagram of point B in the middle.

[0021] Figure label:

[0022] 1. Base; 3. Air-floating base; 4. Main body of robotic arm; 5. Support rod; 6. Rotating rod; 7. Sliding groove; 8. Tightening rope; 9. Positioning rod; 10. Protective shell; 11. Rewinding rod; 12. Rotating block; 13. Ratchet; 14. Positioning plate; 15. Positioning block; 16. Spring; 17. Fixing plate; 18. Connecting seat; 19. Operation panel. Detailed Implementation

[0023] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this utility model, but not all embodiments.

[0024] The components of the present invention embodiments described and shown in the accompanying drawings can typically be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention.

[0025] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0026] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0028] Example

[0029] like Figure 1 , Figure 2 and Figure 4As shown, the wafer handling robotic arm air-floating vibration-damping base proposed in this utility model includes a base 1, an air-floating base 3 below the base 1, an operation panel 19 fixedly connected to the outside of the air-floating base 3, a connecting seat 18 fixedly connected to the top of the base 1, and a robotic arm body 4 fixedly connected to the top of the connecting seat 18. The robotic arm body 4 will vibrate when handling wafers, and since wafers are relatively precise instruments, it is necessary to ensure that the connecting seat 18 does not loosen. This requires the air-floating base 3 to provide a reaction force. A support rod 5 is fixedly connected to one side of the base 1. There are two sets of support rods 5 arranged symmetrically. A rotating rod 6 is rotatably connected to the top of the support rod 5, and the rotating rod 6 abuts against the connecting seat 1. At the top of the 8th floor, a rotating rod 6 is used to press the connecting seat 18. The rotating rod 6 can also help fix the connecting seat 18. A sliding groove 7 is provided on the rotating rod 6 away from the support rod 5. A tightening rope 8 is slidably connected inside the sliding groove 7. The rotating rod 6 can be tightened by passing the tightening rope 8 through the sliding groove 7. One end of the tightening rope 8 is fixedly connected to a positioning rod 9. The positioning rod 9 is fixedly connected to the outside of the base 1. The position of the tightening rope 8 is limited by the positioning rod 9. A protective shell 10 is fixedly connected to the top of the air-floating base 3 near the base 1. The protective shell 10 is used to protect the air-floating base 3. When the air-floating base 3 adjusts the base 1, the protective shell 10 can protect the adjustment position of the air-floating base 3.

[0030] For further details, please refer to Figure 2 and Figure 3 A winding rod 11 is fixedly connected to the end of the tightening rope 8 away from the positioning rod 9. The winding rod 11 is rotatably connected to one side of the base 1. The winding rod 11 can wind the tightening rope 8 around the outside of the winding rod 11, thereby increasing the force exerted by the tightening rope 8 on the rotating rod 6. A limit component is provided on the outside of the winding rod 11. The limit component includes a ratchet 13, which is fixedly connected to the outside of the winding rod 11. A positioning plate 14 is fitted on the outside of the ratchet 13. The positioning plate 14 can limit the rotation of the ratchet 13, thereby winding and fixing the tightening rope 8. A rotating block 12 is fixedly connected to the end of the winding rod 11 away from the base 1. The rotating block 12 is hexagonal. The rotating block 12 can be easily operated by inserting an ordinary hexagonal wrench into the outside of the rotating block 12, thereby allowing the rotating block 12 to control the rotation of the winding rod 11.

[0031] For further details, please refer to Figure 2 and Figure 3The positioning plate 14 is rotatably connected to one side of the base 1. The bottom of the positioning plate 14 abuts against the positioning block 15, which is fixedly connected to one side of the base 1. The positioning block 15 can restrict the positioning plate 14, thereby restricting the rotation of the ratchet 13. A spring 16 is fixedly connected to the top of the positioning plate 14. A fixing plate 17 is fixedly connected to the end of the spring 16 away from the positioning plate 14. The spring 16 can push the positioning plate 14 to reset through the fixing plate 17. The fixing plate 17 is fixedly connected to one side of the base 1. The spring 16 is arc-shaped. The arc shape of the spring 16 is used to cooperate with the rotation of the positioning plate 14. The spring 16 can also ensure that the force acting on the positioning plate 14 is more stable.

[0032] In this embodiment, during installation, the main body 4 of the robotic arm is mounted on the top of the base 1 by the connecting seat 18. Then, the rotating rod 6 is brought into contact with the top of the connecting seat 18 around the support rod 5. At this time, the hexagonal wrench is rotated outside the rotating block 12. Then, the winding rod 11 will wind the tightening rope 8 around the outside of the winding rod 11. When the tightening rope 8 is tightened, the positioning plate 14 will be tightly attached to the outside of the ratchet 13, thereby ensuring that the ratchet 13 will not rotate in the opposite direction and ensuring that the positioning plate 14 fixes the ratchet 13.

[0033] In this way, the vibration generated when the main body 4 of the robotic arm moves the wafer is transmitted to the base 1 through the connector 18, and the air float base 3 restricts the deflection of the base 1 and applies a reaction force. This prevents the main body 4 of the robotic arm from shaking. The protective shell 10 can also protect the adjustment of the air float base 3. Under long-term reaction force, the connection between the connector 18 and the base 1 may become loose, but the rotating rod 6 also restricts the connector 18, which ensures that even if maintenance is forgotten for a short period of time, the connector 18 can still be tightly connected to the base 1.

[0034] During maintenance, first tighten the connection between the connecting seat 18 and the base 1, then rotate the rotating block 12 to rotate the winding rod 11. The ratchet 13 will then move the positioning plate 14 again, and the positioning plate 14 will push the spring 16 to compress on one side of the fixed plate 17. When the rotation reaches the appropriate tightness, the spring 16 will push the positioning plate 14 to perfectly fit into the outside of the ratchet 13 on one side of the fixed plate 17. The positioning plate 14 is positioned by the positioning block 15 to ensure that the ratchet 13 will not rotate in the opposite direction. The 03 can be adjusted through the operation panel 19.

[0035] It should be noted that this device uses a winding rod 11 to wind up the tightening rope 8, allowing the tightening rope 8 to slide inside the sliding groove 7, which drives the rotating rod 6 to fit tightly against the connecting seat 18. This further strengthens the connection between the connecting seat 18 and the base 1. The positioning plate 14 is embedded outside the ratchet 13 to ensure that the winding rod 11 does not rotate in the opposite direction, thus enhancing the fixing effect of the tightening rope 8 after winding and improving the stability of the connection between the base 1 and the tightening rope 8.

[0036] The above specific embodiments are merely optional embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A wafer handling robotic arm with an air-floating vibration-damping base, comprising a base (1), wherein an air-floating base (3) is disposed below the base (1), and an operation panel (19) is fixedly connected to the outside of the air-floating base (3), characterized in that, A connecting seat (18) is fixedly connected to the top of the base (1), and a robotic arm body (4) is fixedly connected to the top of the connecting seat (18). A support rod (5) is fixedly connected to one side of the base (1). There are two sets of support rods (5) arranged symmetrically. A rotating rod (6) is rotatably connected to the top of the support rod (5). The rotating rod (6) abuts against the top of the connecting seat (18). The rotating rod (6) is used to press the connecting seat (18). The rotating rod (6) has a sliding groove (7) located away from the support rod (5). A tightening rope (8) is slidably connected inside the sliding groove (7). One end of the tightening rope (8) is fixedly connected to a positioning rod (9). The positioning rod (9) is fixedly connected to the outside of the base (1). A protective shell (10) is fixedly connected to the top of the air-floating base (3) near the base (1), and the protective shell (10) is used to protect the air-floating base (3).

2. The air-floating vibration-damping base for the wafer handling robotic arm according to claim 1, characterized in that, The tightening rope (8) is fixedly connected to a winding rod (11) at the end away from the positioning rod (9). The winding rod (11) is rotatably connected to one side of the base (1). A limit component is provided on the outside of the winding rod (11).

3. The air-floating vibration-damping base for the wafer handling robotic arm according to claim 2, characterized in that, The limiting component includes a ratchet (13), which is fixedly connected to the outside of the winding bar (11), and a positioning plate (14) is fitted onto the outside of the ratchet (13).

4. The air-floating vibration-damping base for the wafer handling robotic arm according to claim 3, characterized in that, The positioning plate (14) is rotatably connected to one side of the base (1), and the bottom of the positioning plate (14) abuts against a positioning block (15), which is fixedly connected to one side of the base (1).

5. The air-floating vibration-damping base for the wafer handling robotic arm according to claim 4, characterized in that, A spring (16) is fixedly connected to the top of the positioning plate (14), and a fixing plate (17) is fixedly connected to the end of the spring (16) away from the positioning plate (14). The fixing plate (17) is fixedly connected to one side of the base (1).

6. The air-floating vibration-damping base for the wafer handling robotic arm according to claim 5, characterized in that, The spring (16) is arranged in an arc shape, and the arc shape of the spring (16) is used to cooperate with the rotation of the positioning plate (14).

7. The air-floating vibration-damping base for the wafer handling robotic arm according to claim 2, characterized in that, The winding rod (11) is fixedly connected to a rotating block (12) at the end away from the base (1), and the rotating block (12) is hexagonal.

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