Mask plate, display panel and display device

Abstract

A mask plate has a functional area. The functional area includes a display area and at least one detection area. The detection area is located at a top corner of the display area. The mask plate includes a functional part. The functional part includes a first opening, a plurality of second openings and a plurality of grooves. The plurality of second openings are arranged in multiple rows and multiple columns. At least one of the second openings is located in the display area. The plurality of grooves and the first opening are located in the detection area.

Description

Technical Field

[0001] This disclosure relates to the field of display technology, and more particularly to a mask, a display panel, and a display device. Background Technology

[0002] Organic Light Emitting Diode (OLED) display technology is a technology that uses light-emitting materials to emit light when driven by an electric current to achieve display. OLED display devices have advantages such as being ultra-lightweight, ultra-thin, high-brightness, wide viewing angle, low voltage, low power consumption, fast response, high definition, shock resistance, flexibility, low cost, simple manufacturing process, use of fewer raw materials, high luminous efficiency, and wide temperature range. Utility Model Content

[0003] On one hand, a photomask is provided, having a functional area. The functional area includes a display area and at least one detection area, the detection area being located at the apex corner of the display area. The photomask includes a functional portion, the functional portion including: a first opening, a plurality of second openings, and a plurality of grooves. The plurality of second openings are arranged in multiple rows and columns. At least one second opening is located in the display area, and the plurality of grooves and the first opening are located in the detection area.

[0004] In some embodiments, the functional area further includes a non-detection area. The non-detection area is located on at least one side of the display area and is adjacent to the detection area. At least one of the second openings is located in the non-detection area.

[0005] In some embodiments, along the row direction of the plurality of second openings, the spacing between adjacent first openings and second openings is greater than or equal to the spacing between two adjacent second openings. Along the column direction of the plurality of second openings, the spacing between adjacent first openings and second openings is greater than or equal to the spacing between two adjacent second openings.

[0006] In some embodiments, the mask is configured to deposit a luminescent material of a first color. The first opening is located in the same column as a column of second openings located in the display area. And / or, the first opening in the mask is located in the same row as a row of second openings located in the non-detection area.

[0007] In some embodiments, the mask is configured to deposit a luminescent material of a second color. The first opening is located in the same column as a column of second openings located in the non-detection area. And / or, the first opening is located in the same row as a row of second openings located in the non-detection area.

[0008] In some embodiments, the shape of the first opening projected onto the plane of the mask plate, the shape of the second opening projected onto the plane of the mask plate, and the shape of the groove projected onto the plane of the mask plate are the same.

[0009] In some embodiments, the dimensions of the first opening projected onto the plane of the mask plate along the row direction, the dimensions of the second opening projected onto the plane of the mask plate along the row direction, and the dimensions of the groove projected onto the plane of the mask plate along the row direction are equal or substantially equal.

[0010] In some embodiments, there are multiple detection areas, each located at one of the four apex corners of the display area. Along the row direction of the multiple second openings, the first openings in the detection areas at two adjacent apex corners of the display area are symmetrically distributed with respect to a first center line. Furthermore, the areas occupied by the multiple recesses in the detection areas at two adjacent apex corners are symmetrically distributed with respect to the first center line. The first center line is the center line extending from the display area along the column direction of the multiple second openings.

[0011] On the other hand, a display panel is provided, the display panel having a display area and at least one detection area. The detection area is located at the top corner of the display area. The display panel includes a light-emitting layer. The light-emitting layer includes a first pattern and a plurality of functional patterns arranged at intervals. The plurality of functional patterns are arranged in multiple rows and columns, and at least one of the functional patterns is used for emitting light and is located in the display area. The first pattern is located in the detection area.

[0012] In some embodiments, the display panel further includes a non-detection area. The non-detection area is located on at least one side of the display area and adjacent to the detection area. The functional pattern includes a light-emitting pattern and a second pattern. The functional pattern located in the display area is the light-emitting pattern. The second pattern in the functional pattern is located in the non-detection area.

[0013] In some embodiments, along the row direction of the plurality of functional patterns, the spacing between adjacent first patterns and functional patterns is greater than or equal to the spacing between two adjacent functional patterns. Along the column direction of the plurality of functional patterns, the spacing between adjacent first patterns and functional patterns is greater than or equal to the spacing between two adjacent functional patterns.

[0014] In some embodiments, the display panel further includes: an anode layer and a defining layer stacked together. The light-emitting layer is located on the side of the defining layer away from the anode layer. The anode layer includes a plurality of anodes and a plurality of positioning portions. The plurality of anodes are located in the display area. The defining layer includes a plurality of third openings located in the display area, one of the third openings exposing at least a portion of an anode. The orthographic projection of one of the third openings onto the plane of the anode layer is located within the orthographic projection range of a light-emitting pattern onto the plane of the anode layer. The plurality of positioning portions are located in the detection area, and positioning portions are respectively provided on adjacent sides of the first pattern.

[0015] In some embodiments, among the plurality of positioning portions located on adjacent sides of the first pattern, the distance between any one of the positioning portions and the first pattern is greater than or equal to the distance between two adjacent third openings.

[0016] In some embodiments, the number of the first patterns is multiple. The center line connecting at least two of the positioning portions located on the same side of the multiple first patterns is parallel to the row direction.

[0017] In some embodiments, the light-emitting layer includes a first sub-light-emitting layer, a second sub-light-emitting layer, and a third sub-light-emitting layer stacked together. The materials of the first sub-light-emitting layer, the second sub-light-emitting layer, and the third sub-light-emitting layer are different. There are multiple first patterns, each including a first sub-pattern, a second sub-pattern, and a third sub-pattern. The first sub-pattern is located on the first sub-light-emitting layer, the second sub-pattern is located on the second sub-light-emitting layer, and the third sub-pattern is located on the third sub-light-emitting layer. Along the row or column direction of the arrangement of the multiple functional patterns, the distance between any one of the first sub-pattern, the second sub-pattern, and the third sub-pattern and an adjacent second pattern or light-emitting pattern is greater than or equal to the sum of the size of the designated pattern and the distance between two adjacent third openings. The designated pattern is the smallest of the first, second, and third sub-patterns.

[0018] In some embodiments, along the row or column direction of the plurality of functional patterns, the spacing between two adjacent sub-patterns of the first sub-pattern, the second sub-pattern, and the third sub-pattern is greater than or equal to the sum of the size of the set pattern and the spacing between two adjacent third openings.

[0019] In some embodiments, the plurality of functional patterns include a first functional pattern, a second functional pattern, and a third functional pattern. The first functional pattern is located in the first sub-light-emitting layer, the second functional pattern is located in the second sub-light-emitting layer, and the third functional pattern is located in the third sub-light-emitting layer. At least one first functional pattern, at least one second functional pattern, and at least one third functional pattern adjacent to each other constitute a functional unit. The plurality of functional units are arranged in multiple functional unit columns. The first sub-pattern, the second sub-pattern, and the third sub-pattern are each arranged in a column with different functional unit columns.

[0020] In some embodiments, the functional unit column containing the first sub-pattern is adjacent to the functional unit column containing the second sub-pattern.

[0021] In some embodiments, at least one functional unit column is provided between the functional unit column where the first sub-pattern is located and the functional unit column where the second sub-pattern is located.

[0022] In some embodiments, the display panel further includes a non-detection area. At least one of the functional unit columns containing the first sub-pattern, the second sub-pattern, and the third sub-pattern is located in the display area, and at least one is located in the non-detection area.

[0023] In some embodiments, the display panel further includes a non-detection area. The plurality of functional units are arranged in multiple functional unit rows. The first sub-pattern, the second sub-pattern, and the third sub-pattern are arranged in the same functional unit row, and the functional unit row containing the first sub-pattern, the second sub-pattern, and the third sub-pattern is located in the non-detection area.

[0024] In some embodiments, in the same light-emitting layer, along the row or column direction of the plurality of functional patterns, the first pattern has the same size as the functional pattern.

[0025] On the other hand, a display device is provided. The display device includes: a display panel as described in any of the above embodiments, and a circuit board electrically connected to the display panel. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in this disclosure, the accompanying drawings used in some embodiments of this disclosure will be briefly described below. Obviously, the drawings described below are merely drawings of some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings. Furthermore, the drawings described below can be considered as schematic diagrams and are not intended to limit the actual dimensions, etc., of the products involved in the embodiments of this disclosure.

[0027] Figure 1 This is a structural diagram of a display device according to some embodiments of the present disclosure;

[0028] Figure 2 This is a structural diagram of a display panel according to some embodiments of the present disclosure;

[0029] Figure 3 This is a structural diagram of another display panel according to some embodiments of the present disclosure;

[0030] Figure 4 This is a structural diagram of a mask according to one possible implementation.

[0031] Figure 5 for Figure 4 A magnified structural diagram of a local area of ​​the mask plate in DV1;

[0032] Figure 6 To utilize Figure 4 The structural diagram of the test substrate formed by the fabrication of the mask plate in the process;

[0033] Figure 7 To utilize Figure 4 A graph showing the relationship between the offset of the display area and the offset of the detection area in the test substrate formed by the fabrication of the mask in the process;

[0034] Figure 8 According to Figure 4 A diagram showing the relationship between the relative positions of the light-emitting patterns in the display area, the relative positions of the detection patterns in the detection area, and the standard positions in the test substrate formed by the preparation of the mask in the process.

[0035] Figure 9 This is a structural diagram of a mask according to some embodiments of the present disclosure;

[0036] Figure 10A This is a structural diagram of another mask plate according to some embodiments of the present disclosure;

[0037] Figure 10B To utilize Figure 10A A structural diagram of a display panel formed by vapor deposition on a central mask.

[0038] Figure 11A This is a structural diagram of another mask plate according to some embodiments of the present disclosure;

[0039] Figure 11B To utilize Figure 11A A structural diagram of a display panel formed by vapor deposition on a central mask.

[0040] Figure 12A This is a structural diagram of another mask plate according to some embodiments of the present disclosure;

[0041] Figure 12B To utilize Figure 12A A structural diagram of a display panel formed by vapor deposition on a central mask.

[0042] Figure 13 This is a structural diagram of yet another display panel according to some embodiments of the present disclosure;

[0043] Figure 14 This is a structural diagram of a mask and a corresponding display panel according to some embodiments of the present disclosure;

[0044] Figure 15 This is a structural diagram of another mask plate according to some embodiments of the present disclosure;

[0045] Figure 16 This is a structural diagram of another mask plate according to some embodiments of the present disclosure;

[0046] Figure 17 This is a structural diagram of yet another display panel according to some embodiments of the present disclosure;

[0047] Figure 18 This is a structural diagram of yet another display panel according to some embodiments of the present disclosure;

[0048] Figure 19 This is a structural diagram of another mask plate according to some embodiments of the present disclosure;

[0049] Figure 20 This is a structural diagram of yet another display panel according to some embodiments of the present disclosure;

[0050] Figure 21 This is a structural diagram of yet another display panel according to some embodiments of the present disclosure;

[0051] Figure 22 This is a structural diagram of yet another display panel according to some embodiments of the present disclosure;

[0052] Figure 23 This is a structural diagram of another mask plate according to some embodiments of the present disclosure;

[0053] Figure 24 This is a structural diagram of yet another display panel according to some embodiments of the present disclosure;

[0054] Figure 25 This is a structural diagram of yet another display panel according to some embodiments of the present disclosure;

[0055] Figure 26 This is a structural diagram of yet another display panel according to some embodiments of the present disclosure. Detailed Implementation

[0056] The technical solutions in some embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments provided in this disclosure are within the scope of protection of this disclosure.

[0057] Unless the context otherwise requires, throughout the specification and claims, the term "comprise" and its other forms, such as the third-person singular "comprises" and the present participle "comprising," are interpreted as open-ended and encompassing, meaning "including, but not limited to." In the description of the specification, terms such as "one embodiment," "some embodiments," "exemplary embodiments," "example," "specific example," or "some examples," etc., are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this disclosure. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics mentioned may be included in any suitable manner in any one or more embodiments or examples.

[0058] Hereinafter, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this disclosure, unless otherwise stated, "a plurality of" means two or more.

[0059] In describing some embodiments, the terms "coupled" and "connected," and their derivative expressions, may be used. The term "connected" should be interpreted broadly; for example, a "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection via an intermediate medium. The term "coupled," for example, indicates that two or more components have direct physical or electrical contact. The term "coupled" or "communicatively coupled" may also refer to two or more components that do not have direct contact with each other but still cooperate or interact with each other. The embodiments disclosed herein are not necessarily limited to the content of this document.

[0060] "At least one of A, B and C" has the same meaning as "at least one of A, B or C", both including the following combinations of A, B and C: only A, only B, only C, combinations of A and B, combinations of A and C, combinations of B and C, and combinations of A, B and C.

[0061] "A and / or B" includes the following three combinations: A only, B only, and a combination of A and B.

[0062] It should be understood that when a layer or element is referred to as being on another layer or substrate, it can mean that the layer or element is directly on the other layer or substrate, or that there is an intermediate layer between the layer or element and the other layer or substrate.

[0063] This document describes exemplary embodiments with reference to cross-sectional views and / or plan views, which are idealized exemplary drawings. In the drawings, the thickness of layers and the area of ​​regions are enlarged for clarity. Therefore, variations in shape relative to the drawings are contemplated due to, for example, manufacturing techniques and / or tolerances. Thus, exemplary embodiments should not be construed as being limited to the shapes of the regions shown herein, but rather include shape deviations due to, for example, manufacturing processes. For example, etched areas shown as rectangular would typically have curved features. Therefore, the regions shown in the drawings are schematic in nature, and their shapes are not intended to show the actual shapes of the areas of the device, nor are they intended to limit the scope of the exemplary embodiments.

[0064] like Figure 1 As shown, some embodiments of this disclosure provide a display device 1000, which can be any display device that displays images, whether moving (e.g., video) or fixed (e.g., still images), and whether text or images. More specifically, the display device of the embodiments is contemplated to be implemented in or associated with a variety of electronic devices, such as (but not limited to) mobile phones, wireless devices, personal data assistants (PDAs), handheld or portable computers, GPS receivers / navigators, cameras, MP4 video players, camcorders, game consoles, watches, clocks, calculators, television monitors, flat panel displays, computer monitors, automotive displays (e.g., odometer displays, etc.), navigators, cockpit controllers and / or displays, displays of camera views (e.g., displays of rearview cameras in vehicles), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging and aesthetic structures (e.g., displays of images of an item), etc.

[0065] The display device 1000 includes a display panel 100 and a cover plate.

[0066] In some examples, the display panel 100 may be an organic light-emitting diode (OLED) display panel.

[0067] For example, the display panel can be AMOLED (Active Matrix Driving OLED). AMOLED display panels have advantages such as low manufacturing cost, high response speed, power saving, DC drive capability for portable devices, and wide operating temperature range.

[0068] The cover plate is located on the light-emitting side of the display panel 100. The cover plate protects the display panel 100 from damage such as external impacts. The cover plate can be made of glass.

[0069] The display device 1000 may further include a circuit board. The circuit board is connected to the display panel 100 and is used to transmit display drive signals to the display panel 100, etc. The circuit board may be a printed circuit board (PCB).

[0070] In some examples, such as Figure 2 As shown, the display panel 100 has a display area C1 and a peripheral area BB. The peripheral area BB surrounds at least the display area C1.

[0071] For example, display area C1 is the area of ​​display panel 100 used to display images.

[0072] For example, the aforementioned display area C1 refers to the area of ​​the display panel 100 used to display images.

[0073] For example, the shape of the display area C1 can include various types, and can be selected and set according to actual needs. The embodiments of this disclosure do not limit this.

[0074] For example, the shape of the display area C1 can be rectangular, approximately rectangular, circular, or elliptical. An approximately rectangular shape is not strictly a rectangle; its four interior corners may be rounded, or one of its sides may not be a straight line. For ease of description, the embodiments of this disclosure will be illustrated using an approximately rectangular shape for the display area C1.

[0075] In some examples, such as Figure 3 As shown, the display panel 100 includes a substrate 10, a pixel driving circuit layer 20, a light-emitting device layer 601, an encapsulation layer 80, etc., which are stacked in sequence.

[0076] For example, the substrate 10 described above can be a flexible substrate or a rigid substrate. When the substrate is flexible, the substrate material can be a highly elastic material such as dimethylsiloxane, PI (polyimide), or PET (polyethylene terephthalate). When the substrate is rigid, the substrate material can be glass or the like.

[0077] The pixel driving circuit layer 20 is used to provide driving signals to the light-emitting devices in the light-emitting device layer 601. The pixel driving circuit layer 20 includes a plurality of pixel driving circuits.

[0078] The pixel driving circuit includes at least one transistor TFT.

[0079] The light-emitting device layer 601 includes: an anode layer 30, a light-emitting layer 50, and a cathode layer 60.

[0080] The anode layer 30 includes a plurality of anodes 301 spaced apart. The pixel driving circuit is connected to the anode of at least one light-emitting device for transmitting driving signals thereto.

[0081] The cathode layer includes multiple cathodes that receive constant voltage signals. The light-emitting layer includes a light-emitting pattern 521 that emits light under the action of driving signals provided by the cathodes and anodes.

[0082] For example, such as Figure 3 As shown, the display panel 100 also includes the aforementioned anode layer 30 and defining layer 40 stacked together. The light-emitting layer 50 is located on the side of the defining layer 40 away from the anode layer 30.

[0083] The defining layer 40 includes a plurality of third openings 41 located in the display area C1, and one third opening 41 exposes at least a portion of an anode 301. The orthographic projection of a third opening 41 onto the plane containing the anode layer 30 is within the orthographic projection range of a light-emitting pattern 521 onto the plane containing the anode layer 30.

[0084] For example, the light-emitting pattern 521 in the light-emitting layer 50 contacts the anode 301 through the third opening 41.

[0085] For example, the boundary line of the orthographic projection of the luminescent pattern 521 onto the plane where the anode layer 30 is located surrounds the orthographic projection of the corresponding third opening 41 onto the plane where the anode layer 30 is located, and there is a certain distance between the boundary line of the orthographic projection of the luminescent pattern 521 onto the plane where the anode layer 30 is located and the boundary line of the orthographic projection of the corresponding third opening 41 onto the plane where the anode layer 30 is located. A portion of the luminescent pattern 521 is located within the third opening 41, and another portion surrounds the corresponding third opening 41 and overlaps on the defining layer 40.

[0086] Understandably, the luminescent pattern 521 includes multiple luminescent sub-patterns for emitting different colors of light. Luminescent sub-patterns emitting the same color can be formed in the same vapor deposition process. Adjacent luminescent sub-patterns can emit different colors of light.

[0087] In one possible implementation, to ensure deposition accuracy, a test substrate needs to be deposited before the display panel to be deposited, and the deposition position needs to be detected. The deposition position is then adjusted based on the detection results to ensure the accuracy of the deposition position in the display panel to be deposited. Specifically, such as... Figures 4-6 As shown, a corresponding detection area T is provided on the mask, and the detection area T is located on one side of the display area C1. After the evaporation is completed, the area on the detection substrate 100' corresponding to the detection area T is cut off. The detection area T is provided with a corresponding detection opening 101'. The luminescent material is evaporated through the detection opening 101' to form a detection pattern 102'. The offset size between the position of the detection pattern 102' and the preset position is measured. Based on the offset size, the position of the evaporated luminescent pattern in the display area is adjusted, thereby reducing the probability of color mixing caused by the connection or overlap between adjacent luminescent patterns.

[0088] Masks are generally used for vapor deposition of the light-emitting layer on a display motherboard, which includes multiple display panels to be vapor-deposited. Each display panel typically includes a fan-out area. However, the relative positions of the fan-out areas and display areas differ between different display panels, and the reserved area within the fan-out areas varies. Furthermore, the detection areas are distributed on opposite sides of the display motherboard, and the spacing between each detection area and the display area of ​​the same display panel within the motherboard varies. It is difficult to achieve a symmetrical distribution of multiple test areas relative to the center lines of each display area. This results in the offset trend of the detection pattern in the test areas not matching the offset trend of the light-emitting pattern in the display areas, failing to accurately reflect the offset of the display areas.

[0089] Furthermore, during the stretching and tensioning process, the mask may tend to expand outward or contract inward. The detection area is located outside the support strip 353' in the mask, and the distance between it and the display area C1 of the display panel is relatively large (see reference). Figure 4 The large outward or inward expansion ratio of the detection area in the photomask results in a large offset of the detection pattern in the detection area, while the actual offset of the light-emitting pattern in the display area is small. Therefore, the offset of the detection pattern in the detection area cannot be used to reflect the offset of the light-emitting pattern in the display area, which is not conducive to improving the evaporation accuracy.

[0090] In addition, the portion of the mask located in the detection area, except for the detection opening, is made entirely of solid material. The solid material occupies a large proportion and has a large mass, resulting in a large mass in the detection area of ​​the mask. Consequently, during the stretching process of the mask, the large mass of the solid material in the detection area can easily reduce the stability of the mask, leading to a significant difference between the offset trend of the detection pattern and the offset trend of the luminescent pattern, which is not conducive to improving the evaporation accuracy.

[0091] Specifically, refer to Figure 7 , Figure 7 This diagram illustrates the relationship between the offset of the light-emitting pattern in the display area C1 and the offset of the detection pattern in the detection area T in a test substrate formed using one of the aforementioned possible implementations of the mask. Mask1 to Mask6 represent six different masks. It is evident that the offset of the detection pattern in the detection area T differs significantly from the offset of the light-emitting pattern in the display area C1, indicating that the offset of the detection area T does not accurately reflect the offset of the display area C1. Therefore, adjusting the vapor deposition position of the display area C1 based on the offset of the detection area T does not improve the accuracy of the vapor deposition position.

[0092] refer to Figure 8 , Figure 8 This diagram illustrates the relationship between the relative positions of the light-emitting patterns in the display area C1 and the detection patterns in the detection area T, and the standard position, in a test substrate formed using a mask as described in one possible implementation. It is evident that the offset trend of the detection patterns in the detection area T relative to the standard position differs from the offset trend of the light-emitting patterns in the display area C1 relative to the standard position. The offset trend of the detection area T does not accurately reflect the offset trend of the display area C1. Therefore, adjusting the vapor deposition position of the display area C1 based on the offset of the detection area T does not improve the accuracy of the vapor deposition position.

[0093] Based on this, embodiments of the present disclosure provide a mask 300, such as... Figure 9 As shown, the mask 300 is used to form the light-emitting layer in the display panel 100.

[0094] For example, the mask plate 300 includes an outer frame 351, a plurality of cover strips 352 and a plurality of howling strips 353 fixed to the outer frame, and a mask body 354.

[0095] For example, multiple shielding strips 352 are arranged at intervals along the second direction Y, which can be equally spaced, and each shielding strip 352 extends along or approximately along the first direction X. Multiple support strips 353 are arranged at intervals along the first direction X, which can be equally spaced, and each support strip 353 extends along or approximately along the second direction Y. The multiple support strips 353 and the multiple shielding strips 352 intersect each other, dividing the plane where the mask body 354 is located into multiple functional areas CC.

[0096] The mask 300 has a functional area CC. For example, the shape of the functional area CC can be rectangular or approximately rectangular. Alternatively, the shape of the functional area CC can be polygonal or approximately polygonal.

[0097] The photomask 300 is typically used to form the light-emitting layer in the display motherboard (also known as the display panel). After the display motherboard is manufactured, it is cut to obtain multiple display panels. The multiple functional areas CC of the photomask 300 correspond to the multiple display panels 100, and one functional area CC is set to correspond to one display panel 100.

[0098] like Figure 9 As shown, the aforementioned functional area CC includes a display area C1 and at least one detection area C2, with the detection area C2 located at the top corner of the display area C1.

[0099] The detection area C2 is adjacent to the display area C1.

[0100] For example, the apex position can be the location where the two boundary lines of the display area C1 intersect.

[0101] For example, the function area CC includes a detection area C2, which is located at the top corner of the display area C1.

[0102] For example, the function area CC includes two detection areas C2, which can be located at the two opposite corners of the display area C1.

[0103] For example, the function area CC includes four detection areas C2, which can be located at the four corners of the display area C1.

[0104] like Figure 2 As shown, the display panel also has a display area C1 and at least one detection area C2. The detection area C2 is located at the top corner of the display area C1.

[0105] The display area of ​​the aforementioned mask 300 is directly or substantially directly opposite to the display area of ​​the display panel 100, and is used to form the light-emitting layer located in the display area of ​​the display panel 100. The display area of ​​the display panel 100 is used to display images.

[0106] The detection area C2 of the mask 300 is directly or substantially directly opposite the detection area of ​​the display panel 100. The detection area of ​​the display panel 100 is not used to display images. For example, the detection area C2 is an area in the display panel 100 or the mask used to detect the offset of the luminescent pattern. The detection area C2 in the display panel 100 can be part of the peripheral area BB.

[0107] The detection area C2 is located at the top corner of the display area C1, and the functional area CC includes the detection area C2, making the detection area C2 adjacent to the display area C1. The distance between the detection area C2 and the display area C1 is small, and the vapor deposition offset of the detection area C2 is very close to that of the display area C1. The vapor deposition offset of the detection area C2 can accurately reflect the vapor deposition offset of the display area C1. Therefore, the vapor deposition position of the display area C1 can be adjusted by using the vapor deposition offset of the detection area C2, which allows for more precise adjustment of the vapor deposition position of the display area C1. This helps to improve the vapor deposition accuracy of the display area C1 of the display panel and improve the display quality of the display panel.

[0108] In some examples, such as Figure 10A As shown, the mask plate 300 includes a functional portion 310. For example, the functional portion 310 is located on the mask body 354. The functional portion 310 includes a first opening 340, a plurality of second openings 320, and a plurality of grooves 330.

[0109] For example, such as Figure 15 As shown, the first opening 340 and the plurality of second openings 320 are through holes, through which the vapor-deposited material can pass to the display motherboard to be vapor-deposited. The vapor-deposited material can be deposited into the groove 330, but cannot be vapor-deposited onto the display motherboard.

[0110] For example, the first opening 340, multiple second openings 320, and multiple grooves 330 are arranged in multiple rows and columns. This allows for a more regular arrangement of the functional parts 310, which helps to reduce the fabrication difficulty of the mask 300.

[0111] Among them, such as Figure 10A and Figure 15 As shown, multiple second openings 320 are arranged in multiple rows and columns. At least one second opening 320 is located in the display area C1, and multiple grooves 330 and first openings 340 are located in the detection area C2.

[0112] For example, combining Figure 10A , Figure 10B and Figure 14Part of the luminescent material can be deposited onto the display panel through the second opening 320 located in the display area C1, forming a luminescent pattern 521 in the luminescent layer of the display area. Part of the luminescent material can be deposited onto the display panel through the first opening 340 located in the detection area C2, forming a first pattern 51 (i.e., the first pattern mentioned below). Part of the luminescent material is deposited into the groove 330. The deposition position of the first pattern 51 deposited onto the display panel through the first opening 340 is detected, thereby obtaining the deposition offset of the luminescent pattern in the display area.

[0113] Because multiple grooves 330 and a first opening 340 are provided in the detection area C2 of the mask plate, the portion of the mask plate 300 located in the detection area C2 has less solid material and a smaller mass. The proportion of solid material in the detection area C2 is similar to or approximately equal to the proportion of solid material in the display area C1. Therefore, during the stretching and tensioning of the mask plate 300, the outward expansion (or inward contraction) of the detection area C2 is small, and the outward expansion (or inward contraction) proportion of the detection area C2 is equal to or approximately equal to the outward expansion (or inward contraction) proportion of the detection area. The offset of the first opening 340 in the detection area C2 caused by the stretching and tensioning is equal to or approximately equal to the offset of the second opening 320 in the display area C1 caused by the stretching and tensioning. This allows the offset of the first pattern in the display panel formed through the first opening 340 to more accurately reflect the offset of the light-emitting pattern in the display panel formed through the second opening 320. As a result, the vapor deposition position of the light-emitting pattern in the display area can be adjusted more precisely, resulting in higher vapor deposition accuracy. Furthermore, the expansion of the size of the light-emitting pattern 521 can be monitored by detecting the difference between the size of the first pattern 51 (the size along the first direction X or the size along the second direction Y) and the size of the corresponding first opening 340. This allows for monitoring or adjustment of the expansion phenomenon during the vapor deposition process, thereby further improving the vapor deposition accuracy.

[0114] The mask 300 provided in the embodiments of this disclosure includes a display area C1 and at least one detection area C2 in its functional area CC. The detection area C2 is located at the top corner of the display area C1, making the detection area C2 adjacent to the display area C1. The distance between the detection area C2 and the display area C1 is small, and the vapor deposition offset of the detection area C2 is close to that of the display area C1. The vapor deposition offset of the detection area C2 can accurately reflect the vapor deposition offset of the display area C1. Therefore, by adjusting the vapor deposition position of the display area C1 using the vapor deposition offset of the detection area C2, the vapor deposition position of the display area C1 can be adjusted more precisely, thereby improving the vapor deposition accuracy of the display area C1 in the display panel and improving the display quality of the display panel. The mask also has at least one second opening 320 in the functional part 310 located in the display area C1, and multiple grooves 330 and first openings 340 located in the detection area C2. The second opening 320 in the display area C1 can be used to form a light-emitting pattern in the display panel, and the first opening 340 can be used to form a first pattern 51 in the display panel. The offset of the first pattern 51 can be detected, and the vapor deposition position of the light-emitting pattern can be adjusted based on the offset of the first pattern 51, so that the vapor deposition accuracy is high. In this design, multiple grooves 330 and a first opening 340 are provided in the detection area C2 of the mask 300. This results in a smaller amount of solid material in the portion of the mask 300 located in the detection area C2, with a smaller mass. The proportion of solid material in the detection area C2 is similar to or approximately equal to the proportion of solid material in the display area C1. Therefore, during the stretching and tensioning of the mask 300, the outward expansion (or inward contraction) of the detection area C2 is smaller, and the outward expansion (or inward contraction) proportion of the detection area C2 is equal to or approximately equal to the outward expansion (or inward contraction) proportion of the detection area. The offset of the first opening 340 in the detection area C2 caused by the stretching and tensioning is equal to or approximately equal to the offset of the second opening 320 in the display area C1 caused by the stretching and tensioning. This allows the offset of the first pattern in the display panel formed through the first opening 340 to more accurately reflect the offset of the light-emitting pattern in the display panel formed through the second opening 320. Consequently, the vapor deposition position of the light-emitting pattern in the display area can be adjusted more precisely, resulting in higher vapor deposition accuracy. Furthermore, the expansion of the size of the light-emitting pattern 521 can be monitored by detecting the difference between the size of the first pattern 51 (the size along the first direction X or the size along the second direction Y) and the size of the corresponding first opening 340. This allows for monitoring or adjustment of the expansion phenomenon during the vapor deposition process, thereby further improving the vapor deposition accuracy.

[0115] In some examples, such as Figure 14As shown, the light-emitting layer 50 in the display panel 100 includes a first pattern 51 and a plurality of functional patterns 52 arranged at intervals. The plurality of functional patterns 52 are arranged in multiple rows and columns, and at least one functional pattern 52 is used for emitting light and is located in the display area C1. The first pattern 51 is located in the detection area C2.

[0116] For example, the functional pattern 52 located in the display area C1 and used for emitting light is the aforementioned emitting pattern 521.

[0117] For example, the first pattern 51 is formed by depositing luminescent material onto the display panel through the first opening 340 in the mask plate 300.

[0118] Therefore, the offset between the position of the first pattern 51 and the set position can be detected. The detection area C2 where the first pattern 51 is located is close to the display area C1 where the light-emitting pattern 521 is located. The offset of the first pattern 51 is equal to or approximately equal to the offset of the light-emitting pattern 521. The offset trend of the first pattern 51 is the same as the offset trend of the light-emitting pattern 521. Therefore, the offset of the first pattern 51 can be used to reflect the offset of the light-emitting pattern 521. The vapor deposition position of the corresponding light-emitting pattern 521 can be adjusted according to the offset of the first pattern 51, thereby improving the vapor deposition accuracy.

[0119] In some examples, such as Figure 10A As shown, in the above-mentioned mask, the functional area CC also includes a non-detection area C3. The non-detection area C3 is located on at least one side of the display area C1 and is adjacent to the detection area C2.

[0120] At least one second opening 320 is located in the non-detection area C3.

[0121] For example, the non-detection area C3 is also adjacent to the display area C1. One or more second openings 320 are located in the non-detection area C3.

[0122] For example, such as Figure 14 As shown, there are multiple non-detection areas C3. One non-detection area C3 is located on one side of the display area C1 along the row direction X, and another non-detection area C3 is located on one side of the display area C1 along the column direction Y. These two non-detection areas C3 are adjacent to the same detection area C2. Here, the row direction X can be the first direction mentioned above, and the column direction Y can be the second direction mentioned above.

[0123] By setting at least one second opening 320 in the non-detection area C3, the proportion of solid material in the non-detection area C3 can be made smaller, resulting in a smaller solid material mass in the portion of the mask located in the non-detection area C3. The proportion of solid material in the portion of the mask located in the non-detection area C3, the proportion of solid material in the portion of the mask located in the display area C1, and the proportion of solid material in the portion of the mask located in the detection area C2 are equal or approximately equal. This allows the offset of the first opening 340 in the detection area C2, the offset of the second opening 320 in the display area C1, and the offset of the second opening 320 in the non-detection area C3 to be equal or nearly equal. This ensures that the offset of the detection area C2 can more accurately reflect or represent the offset of each position in the display area C1, avoiding a large solid material mass in the portion of the mask located in the non-detection area C3, which would lead to a large proportion of outward expansion (or inward contraction) in the portion of the mask located in the non-detection area C3. This also avoids the non-detection area C3 causing uneven offsets in the display area C1 and the detection area C2.

[0124] Accordingly, such as Figure 10B As shown, the display panel 100 also has a non-detection area C3. The non-detection area C3 is located on at least one side of the display area C1 and is adjacent to the detection area C2.

[0125] For example, the non-detection C3 in the display panel 100 is set to correspond to the non-detection area in the mask.

[0126] like Figure 14 As shown, the functional pattern 52 includes a light-emitting pattern 521 and a second pattern 522. The functional pattern 52 located in the display area C1 is the light-emitting pattern 521. The second pattern 522 in the functional pattern 52 is located in the non-detection area C3.

[0127] For example, combining Figure 10A and Figure 10B The luminescent material is deposited onto the display panel through the second opening 320 in the non-detection area C3 of the mask to form the second pattern 522.

[0128] Therefore, the light-emitting material can be deposited onto the display panel using the aforementioned mask, forming at least one second pattern 522 in the non-detection area C3 of the display panel. This ensures that the proportions of the solid material in the mask located in the display area C1, the display area C1 portion, and the detection area C2 portion are equal or approximately equal. This makes the offset of the first pattern 51 formed through the first opening 340 in the detection area C2, the offset of the light-emitting pattern 521 formed through the second opening 320 in the display area C1, and the offset of the second pattern 522 formed through the second opening 320 in the non-detection area C3 equal or nearly equal. The offset of the first pattern 51 in the detection area C2 can more accurately reflect or represent the offset of each light-emitting pattern 521 in the display area C1. This allows for more accurate adjustment of the position of the light-emitting patterns 521, reducing the probability of connection or overlap between light-emitting patterns 521 of different colors, reducing the risk of color mixing emitted by the light-emitting device, and thus improving the display quality of the display panel.

[0129] In some examples, such as Figure 10A , Figure 11A and Figure 12A As shown, along the row direction of the plurality of second openings 320, the distance L1 between adjacent first openings 340 and second openings 320 is greater than or equal to the distance L2 between two adjacent second openings 320.

[0130] For example, such as Figure 10A and Figure 12A As shown, along the row direction of the plurality of second openings 320, the spacing between adjacent first openings 340 and second openings 320 is greater than the spacing between two adjacent second openings 320. For example, as... Figure 11A As shown, along the row direction of the multiple second openings 320, the distance between adjacent first openings 340 and second openings 320 is equal to the distance between two adjacent second openings 320.

[0131] For example, the row direction X intersects the column direction Y. The angle between the row direction X and the column direction Y can be 85°, 90°, 95°, 105°, 110°, or 120°.

[0132] like Figure 16 As shown, along the column direction of the plurality of second openings 320, the spacing between adjacent first openings 340 and second openings 320 is greater than or equal to the spacing between two adjacent second openings 320.

[0133] For example, along the column direction of the plurality of second openings 320, the distance between adjacent first openings 340 and second openings 320 is greater than the distance between two adjacent second openings 320. As another example, along the column direction of the plurality of second openings 320, the distance between adjacent first openings 340 and second openings 320 is equal to the distance between two adjacent second openings 320.

[0134] For example, the spacing between two adjacent second openings 320 is equal to or approximately equal to the spacing between the two functional patterns 52 formed by the two second openings 320.

[0135] This allows for a larger distance between the first opening 340 and the adjacent second opening, and also a larger distance between the formed first pattern 51 and the corresponding functional pattern 52, thus facilitating the detection of the position and size of the first pattern 51.

[0136] For example, such as Figure 10B , Figure 11B and Figure 12B As shown, along the row direction of the multiple functional patterns 52, the spacing L3 between adjacent first patterns 51 and functional patterns 52 is greater than or equal to the spacing L4 between two adjacent functional patterns 52.

[0137] Along the column direction where multiple functional patterns 52 are arranged, the spacing between adjacent first patterns 51 and functional patterns 52 is greater than or equal to the spacing between two adjacent functional patterns 52.

[0138] This allows for a larger spacing between the first pattern 51 and the adjacent functional pattern 52, making it easier to detect the position and size of the first pattern 51.

[0139] For example, the aforementioned mask 300 can be used to vapor deposit luminescent materials of different colors, thereby forming luminescent layers of different colors on the display panel.

[0140] For example, the light-emitting layer in the display panel includes a first sub-light-emitting layer 501, a second sub-light-emitting layer 502, and a third sub-light-emitting layer 503 stacked together. The materials of the first sub-light-emitting layer 501, the second sub-light-emitting layer 502, and the third sub-light-emitting layer 503 are different. The first sub-light-emitting layer 501, the second sub-light-emitting layer 502, and the third sub-light-emitting layer 503 can emit different colors.

[0141] In some examples, such as Figure 10A and Figure 10B As shown, the mask 300 is configured to vapor-deposit a light-emitting material of the first color.

[0142] A photomask 300 deposits a light-emitting material of the first color onto the display panel to form the aforementioned first sub-light-emitting layer 501.

[0143] For example, the luminescent material can be a material containing at least one of the following layers: an electron injection layer, an electron transport layer, a luminescent layer, a hole transport layer, and a hole injection layer.

[0144] For example, the first color could be red.

[0145] For example, such as Figure 16 As shown, the first opening 340 in the mask is in the same column as a column of second openings 320 located in the display area C1. And / or, the first opening 340 in the mask 300 is in the same row as a row of second openings 320 located in the non-detection area C3.

[0146] For example, the first opening 340 in the mask is in the same column as a column of second openings 320 located in the display area C1.

[0147] For example, such as Figure 12A and Figure 16 As shown, the first opening 340 in the mask plate 300 is in the same row as the second opening 320 in the non-detection area C3.

[0148] For example, the first opening 340 in the mask is in the same column as a column of second openings 320 in the display area C1, and the first opening 340 in the mask is in the same row as a row of second openings 320 in the non-detection area C3.

[0149] For example, at least one recess 330 in the mask is located in the same column as a column of second openings 320 located in the display area C1. And / or, as Figure 12A As shown, at least one groove 330 in the mask plate 300 is located in the same row as a second opening 320 in a row located in the non-detection area C3.

[0150] This allows for a more regular arrangement of the first opening 340, the second opening 320, and the groove 330 in the mask, facilitating the design and fabrication of each functional part 310 in the mask.

[0151] In other examples, such as Figure 11A and Figure 11B As shown, the mask 300 is configured to vapor-deposit a second color of luminescent material.

[0152] A second color luminescent material is deposited onto the display panel by vapor deposition of a mask 300, forming the aforementioned third sub-luminescent layer 503.

[0153] like Figure 14As shown, in the mask 300, the first opening 340 is located in the same column as a column of second openings 320 located in the non-detection area C3. And / or, the first opening 340 is located in the same row as a row of second openings 320 located in the non-detection area C3.

[0154] For example, the second color could be green.

[0155] In some other examples, such as Figure 12A and Figure 12B As shown, the mask 300 is configured to deposit a third color light-emitting material. The mask 300 deposits the third color light-emitting material onto the display panel to form the aforementioned third sub-light-emitting layer 503.

[0156] Specifically, the first opening 340 is located in the same column as a column of second openings 320 located in the non-detection area C3. And / or, the first opening 340 is located in the same row as a row of second openings 320 located in the non-detection area C3.

[0157] For example, the third color could be blue.

[0158] In some examples, such as Figure 16 As shown, the shape of the first opening 340 projected onto the plane of the mask plate 300, the shape of the second opening 320 projected onto the plane of the mask plate 300, and the shape of the groove 330 projected onto the plane of the mask plate 300 are the same.

[0159] For example, the orthographic projection of the first opening 340 onto the plane where the mask plate 300 is located is rectangular, circular, or polygonal.

[0160] Therefore, there is no need to redesign the shape of the first opening and the groove, which makes the design and fabrication of each functional part 310 in the mask plate simpler.

[0161] In some examples, such as Figure 16 As shown, the dimensions of the first opening 340, the second opening 320, and the groove 330 in the plane of the mask 300 are equal or approximately equal in the direction of their orthogonal projection along the plane of the mask 300.

[0162] For example, the dimensions of the first opening 340 projected onto the plane of the mask 300 along the column direction, the dimensions of the second opening 320 projected onto the plane of the mask 300 along the column direction, and the dimensions of the groove 330 projected onto the plane of the mask 300 along the column direction are equal or approximately equal.

[0163] Therefore, the areas of the first opening 340 projected onto the plane of the mask 300, the second opening 320 projected onto the plane of the mask 300, and the groove 330 projected onto the plane of the mask 300 are equal or approximately equal. Furthermore, as mentioned above, the shapes of the projected shapes of the first opening 340, the second opening 320, and the groove 330 onto the plane of the mask 300 are the same. This simplifies the fabrication of the first opening 340, the second opening 320, and the groove 330, reducing the difficulty of mask fabrication. In addition, the sizes of the first pattern 51 and the corresponding functional patterns are equal or nearly equal. Therefore, by detecting the size or area of ​​the first pattern 51, the degree of expansion of the first pattern 51 during the vapor deposition process can be obtained. The degree of expansion of the first pattern 51 can reflect the degree of expansion of the functional pattern 52, thereby monitoring the expansion phenomenon of the functional patterns in the display area. Based on this, the vapor deposition process can be controlled to alleviate the expansion phenomenon of the functional patterns and improve the vapor deposition accuracy.

[0164] In some examples, such as Figure 9 , Figure 19 and Figure 23 As shown, there are multiple detection areas C2, which are located at the four corners of the display area C1.

[0165] Along the row direction of the multiple second openings 320, the first opening 340 in the detection area C2 at two adjacent apex positions of the display area C1 is symmetrically distributed with respect to the first center line ZL. Furthermore, the areas occupied by the multiple grooves 330 in the detection area C2 at two adjacent apex positions are symmetrically distributed with respect to the first center line ZL.

[0166] The first center line ZL is the center line extending from the display area C1 along the column direction of the multiple second openings 320.

[0167] Therefore, the distance between the first opening 340 and the first center line in the two detection areas C2 can be equal, and the first opening 340 and the groove 330 in the two detection areas C2 can be relatively evenly distributed around the display area C1. This allows the offset of the first opening 340 in the two detection areas C2 to more accurately reflect the offset of the second opening 320 in the display area C1, thereby ensuring high evaporation accuracy.

[0168] In some examples, such as Figure 3 and Figure 17 As shown, the display panel 100 also includes an anode layer 30 and a defining layer 40 stacked together. The light-emitting layer 50 is located on the side of the defining layer 40 away from the anode layer 30.

[0169] like Figure 17 , Figure 18 , Figure 21 , Figure 22 , Figure 25 and Figure 26 As shown, the anode layer 30 also includes a plurality of positioning parts 302.

[0170] Multiple anodes 301 are located in the display area C1. Multiple positioning parts 302 are located in the detection area C2, and positioning parts 302 are respectively provided on the adjacent sides of the first pattern 51.

[0171] Understandable Figure 17 , Figure 18 , Figure 21 , Figure 22 , Figure 25 and Figure 26 The diagram only shows the portion of the anode 301 exposed by the opening 41. The boundary line of the orthographic projection of the opening 41 onto the substrate is located within the boundary line of the orthographic projection of the anode 301 onto the substrate.

[0172] For example, the orthographic projection shape of the positioning part 302 on the substrate is rectangular.

[0173] For example, the positioning portions 302 on adjacent sides of the first pattern 51 are respectively a horizontal positioning portion and a vertical positioning portion. For example, as Figure 18 As shown, the first pattern 51 (taking the third sub-pattern 513 in the first pattern 51 as an example) has a horizontal positioning part 3021 on one side along the row direction X, and a vertical positioning part 3022 on one side along the column direction Y. The extension line YL1 of the center line of the horizontal positioning part 3021 along the row direction X passes through the center of the theoretical position of the first pattern 51. The extension line YL2 of the center line of the vertical positioning part 3022 along the column direction Y passes through the center of the theoretical position of the first pattern 51. The intersection of the extension line YL1 of the center line of the horizontal positioning part 3021 along the row direction X and the extension line YL2 of the center line of the vertical positioning part 3022 along the column direction Y is the center of the theoretical position of the first pattern 51.

[0174] Therefore, the positioning unit 302 can be used to determine or position the theoretical position of the first pattern 51, and then the position of the light-emitting pattern 521 in the display area C1 can be adjusted by using the offset between the theoretical position and the actual position of the first pattern 51. The theoretical position here refers to the preset position of the first pattern 51 or the position of the first pattern 51 when there is no offset.

[0175] In some examples, such as Figure 17 As shown, among the multiple positioning parts 302 located on both sides of the first pattern 51, the distance L5 between any positioning part 302 and the first pattern 51 is greater than or equal to the distance L6 between two adjacent third openings 41.

[0176] For example, the distance L5 between any positioning part 302 and the first pattern 51 is greater than the distance L6 between two adjacent third openings 41.

[0177] For example, the distance L5 between any positioning part 302 and the first pattern 51 is equal to the distance L6 between two adjacent third openings 41.

[0178] When the offset of the light-emitting pattern 521 in the display area C1 is large, for example, when the offset of the light-emitting pattern 521 in the display area C1 is the distance L6 between two adjacent third openings 41, the light-emitting pattern 521 is offset from its corresponding third opening 41 to the distance between two adjacent third openings 41. The corresponding first pattern 51 is also offset from its theoretical position by a distance L6. Since the distance between the first pattern 51 and any positioning part 302 is L5, and the distance L5 is greater than or equal to L6, the distance between the offset first pattern 51 and any positioning part 302 is zero or greater than zero. The first pattern 51 and the positioning part 302 do not overlap in the thickness direction of the substrate (the thickness direction here can be the third direction Z), and the light-emitting pattern 521 does not contact the anode exposed by the adjacent third opening 41. Thus, the offset of the first pattern 51 relative to the theoretical position can be detected by the positioning part 302, avoiding the first pattern 51 covering the positioning part 302 and affecting the determination of the theoretical position and the detection of the offset.

[0179] In some examples, such as Figure 18 As shown, there are multiple first patterns 51.

[0180] For example, a first pattern 51 is provided corresponding to two positioning parts 302.

[0181] For example, a positioning part 302 is configured corresponding to at least one first pattern 51.

[0182] For example, a positioning part 302 is provided corresponding to one or two first patterns 51. Figure 22 As shown, a positioning part 302A is configured corresponding to the first sub-pattern 511 and the third sub-pattern 513 in the first pattern 51.

[0183] like Figure 18 As shown, the center line ZXL of at least two positioning parts 302 located on the same side of multiple first patterns 51 is parallel to the row direction X.

[0184] For example, the center line connecting the three longitudinal positioning parts located on the same side of multiple first patterns 51 is parallel to the row direction X. Therefore, during the detection of the position of the positioning part 302, the three longitudinal positioning parts can be detected simultaneously, and the position information of the three positioning parts 302 can be captured simultaneously, making the detection process more convenient and faster.

[0185] In some examples, such as Figure 14 and Figure 17 As shown, the plurality of first patterns 51 include a first sub-pattern 511, a second sub-pattern 512, and a third sub-pattern 513. The first sub-pattern 511 is located in the first sub-light-emitting layer 501, the second sub-pattern 512 is located in the second sub-light-emitting layer 502, and the third sub-pattern 513 is located in the third sub-light-emitting layer 503.

[0186] like Figure 13 As shown, along the row direction X or column direction Y of the multiple functional patterns 52, the distance L7 between any one of the first sub-pattern 511, the second sub-pattern 512 and the third sub-pattern 513 and the adjacent second pattern 522 or light-emitting pattern 521 is greater than or equal to the sum of the size L8 of the set pattern and the distance L6 between the two adjacent third openings 41, that is, L7≥L6+L8.

[0187] The pattern is set as the smallest of the three sub-patterns: the first sub-pattern 511, the second sub-pattern 512, and the third sub-pattern 513.

[0188] For example, the pattern is set as the first sub-pattern 511.

[0189] Therefore, the spacing between the first pattern 51 and the adjacent functional pattern 52 can be relatively large, making the position detection of the first pattern 51 more convenient.

[0190] In some examples, such as Figure 13 and Figure 18 As shown, along the row direction X or column direction Y of the multiple functional patterns 52, the distance L9 between two adjacent sub-patterns 511, 512 and 513 is greater than or equal to the sum of the size L8 of the set pattern and the distance L6 between two adjacent third openings 41, i.e. L9≥L6+L8.

[0191] Therefore, the spacing between adjacent first patterns 51 can be larger, making the position detection of the first pattern 51 more convenient.

[0192] In some examples, such as Figure 24 As shown, the multiple functional patterns 52 include a first functional pattern 523, a second functional pattern 524, and a third functional pattern 525. The first functional pattern 523 is located in the first sub-light-emitting layer 501, the second functional pattern 524 is located in the second sub-light-emitting layer 502, and the third functional pattern 525 is located in the third sub-light-emitting layer 503.

[0193] For example, the first functional pattern 523 includes a light-emitting pattern 521 located in the display area C1, and also includes a second pattern 522 located in the non-detection area C3. The second functional pattern 524 includes a light-emitting pattern 521 located in the display area C1, and also includes a second pattern 522 located in the non-detection area C3. The third functional pattern 525 includes a light-emitting pattern 521 located in the display area C1, and also includes a second pattern 522 located in the non-detection area C3.

[0194] like Figure 24 As shown, at least one first functional pattern 523, at least one second functional pattern 524, and at least one third functional pattern 525 adjacent to each other constitute a functional unit 52A. Multiple functional units 52A are arranged into multiple functional unit columns 52A1.

[0195] The first sub-pattern 511, the second sub-pattern 512, and the third sub-pattern 513 are arranged in a column with different functional unit columns 52A1.

[0196] This allows for a larger spacing between adjacent first patterns 51, making it easier to detect the position of the first pattern 51.

[0197] In some examples, such as Figure 24 As shown, the functional unit column 52A1 where the first sub-pattern 511 is located is adjacent to the functional unit column 52A1 where the second sub-pattern 512 is located.

[0198] In other examples, at least one functional unit column 52A1 is provided between the functional unit column 52A1 where the first sub-pattern 511 is located and the functional unit column 52A1 where the second sub-pattern 512 is located.

[0199] For example, one or more functional unit columns 52A1 are provided between the functional unit column 52A1 where the first sub-pattern 511 is located and the functional unit column 52A1 where the second sub-pattern 512 is located.

[0200] In some examples, the display panel 100 also has a non-detection area C3.

[0201] like Figure 14 As shown, in the functional unit column 52A1 where the first sub-pattern 511 is located, the functional unit column 52A1 where the second sub-pattern 512 is located, and the functional unit column 52A1 where the third sub-pattern 513 is located, at least one is located in the display area C1, and at least one is located in the non-detection area C3.

[0202] For example, such as Figure 14 As shown, the functional unit column 52A1 where the second sub-pattern 512 is located is in the display area C1, and the functional unit column 52A1 where the first sub-pattern 511 is located and the functional unit column 52A1 where the third sub-pattern 513 is located are in the non-detection area C3.

[0203] For example, such as Figure 24 As shown, the functional unit column 52A1 where the first sub-pattern 511 is located, the functional unit column 52A1 where the second sub-pattern 512 is located, and the functional unit column 52A1 where the third sub-pattern 513 is located are all located in the display area C1.

[0204] For example, the functional unit column 52A1 where the first sub-pattern 511 is located, the functional unit column 52A1 where the second sub-pattern 512 is located, and the functional unit column 52A1 where the third sub-pattern 513 is located are all located in the non-detection area C3.

[0205] Therefore, the positions of the corresponding first patterns 51 can be arranged as needed, so that the area occupied by the detection area C2 is relatively small, which is conducive to realizing the narrow bezel design of the display panel.

[0206] For example, such as Figure 24 As shown, multiple functional units 52A are arranged in multiple functional unit rows 52A2.

[0207] The first sub-pattern 511, the second sub-pattern 512, and the third sub-pattern 513 are arranged in the same functional unit row 52A2, and the functional unit row 52A2 containing the first sub-pattern 511, the second sub-pattern 512, and the third sub-pattern 513 is located in the non-detection area C3.

[0208] Therefore, the size occupied by the first pattern 51 in the column direction Y is smaller, and the size of the detection area C2 of the display panel in the column direction Y is smaller, which is beneficial to realizing the narrow bezel design of the display panel.

[0209] In some examples, in the same light-emitting layer 50, along the row or column direction of multiple functional patterns 52, the size of the first pattern 51 is equal to that of the functional pattern 52.

[0210] For example, such as Figure 13 As shown, the first sub-pattern 511 in the first pattern 51 and the first functional pattern 523 in the functional pattern 52 are both located in the first sub-light-emitting layer 501. The first sub-pattern 511 and the first functional pattern 523 have the same size in the row direction X and the same size in the column direction Y. Optionally, if the first sub-pattern 511 and the first functional pattern 523 have the same shape in their orthographic projection onto the plane of the substrate, then the areas of their orthographic projections onto the plane of the substrate are equal.

[0211] For example, such as Figure 13As shown, the second sub-pattern 512 in the first pattern 51 and the second functional pattern 524 in the functional pattern 52 are both located in the second sub-light-emitting layer 502. The second sub-pattern 512 and the second functional pattern 524 have the same size in the row direction X and the same size in the column direction Y. Optionally, if the shapes of the orthographic projections of the second sub-pattern 512 and the second functional pattern 524 onto the plane of the substrate are the same, then the areas of the orthographic projections of the second sub-pattern 512 and the second functional pattern 524 onto the plane of the substrate are equal.

[0212] For example, such as Figure 13 As shown, the third sub-pattern 513 in the first pattern 51 and the third functional pattern 525 in the functional pattern 52 are both located in the third sub-light-emitting layer 503. The third sub-pattern 513 and the third functional pattern 525 have the same dimensions in the row direction X and the same dimensions in the column direction Y. Optionally, if the shapes of the orthographic projections of the third sub-pattern 513 and the third functional pattern 525 onto the plane of the substrate are the same, then the areas of the orthographic projections of the third sub-pattern 513 and the third functional pattern 525 onto the plane of the substrate are equal.

[0213] Therefore, it is convenient to prepare the first pattern 51 and the corresponding functional pattern 52 in the same light-emitting layer.

[0214] It is understandable that, due to factors such as the angle of the evaporation source of the luminescent material and the bonding state between the mask and the display panel to be evaporated, the outward expansion of the evaporated material will inevitably occur during the actual evaporation process. The evaporated material expands into the shadow area outside the area directly opposite the opening in the mask. The evaporated material in this shadow area is prone to connecting or overlapping with other evaporated materials of different colors, which can easily lead to color mixing.

[0215] In the embodiments of this disclosure, in the same light-emitting layer 50, along the row or column direction of multiple functional patterns 52, the size of the first pattern 51 and the functional pattern 52 are equal, so that the area of ​​the first pattern 51 and the corresponding functional pattern 52 are equal or nearly equal. Thus, by detecting the size or area of ​​the first pattern 51, the degree of expansion of the first pattern 51 during the vapor deposition process can be obtained, and the degree of expansion of the first pattern 51 can be used to reflect the degree of expansion of the functional pattern 52. This allows for monitoring of the expansion phenomenon of the functional patterns in the display area, and based on this, the vapor deposition process can be controlled to adjust the vapor deposition accuracy.

[0216] The following is about Figure 9 , Figure 19 , Figure 23 The structure of the mask plate shown and the corresponding display panel formed therefrom is explained.

[0217] Figure 10B To utilize Figure 10A A structural diagram of the display panel formed by the mask in the middle. Figure 11B To utilize Figure 11A A structural diagram of the display panel formed by the mask in the middle. Figure 12B To utilize Figure 12A A structural diagram of the display panel formed by the mask in the middle. Figure 13 To utilize Figure 10A The mask in Figure 11A The mask and Figure 12A A structural diagram of the display panel formed by the mask plate in the middle. Figure 14 Also for use Figure 10A The mask in Figure 11A The mask and Figure 12A A structural diagram of the display panel formed by the mask plate in the middle. Figure 16 It can be Figure 12A Another structural diagram of the mask plate in the image. Figure 17 and Figure 18 All can be Figure 14 A structural diagram of the central display panel.

[0218] For example, such as Figure 9 and Figure 14 As shown, the functional unit 52A in the display panel includes a first functional pattern 523, a second functional pattern 524 and a third functional pattern 525. Multiple third functional patterns 525 are arranged in a column, and multiple first functional patterns 523 and multiple second functional patterns 524 are arranged alternately along the column direction Y.

[0219] Figure 9 In this process, the thickness of the mask body 354 in the mask plate is set to approximately 30 μm. Four detection areas C2 are set at the four apex positions of each display area C1. This mask plate is used for evaporating a display motherboard containing six display panels. Accordingly, a total of 24 detection areas C2 are set in this mask plate.

[0220] refer to Figure 14 Along the row direction X, the area corresponding to the detection area C has two rows of functional units 52A2, and along the column direction Y, the area corresponding to the detection area C has two columns of functional units 52A1.

[0221] refer to Figure 10A For a detection area C2 in the mask for vapor deposition of the first color, five grooves 330 and one first opening 340 are provided. The resulting luminescent layer of the first color in the display panel can be referenced... Figure 10BIn the detection area C2 of the display panel, a first sub-pattern 511 is formed. The area surrounding the first sub-pattern 511 is the area corresponding to the groove, where no light-emitting material is deposited, and no deposited pattern is formed, facilitating the detection of the position of the first sub-pattern 511. (Reference) Figure 11A For a detection area C2 in the mask for vapor-depositing the second color, five grooves 330 and one first opening 340 are provided. The resulting luminescent layer of the second color in the display panel can be referenced... Figure 11B In the detection area C2 of the display panel, a second sub-pattern 512 is formed. One side of the second sub-pattern 512 is the area corresponding to the groove, where no light-emitting material is deposited, and no deposited pattern is formed, facilitating the detection of the position of the second sub-pattern 512. (Reference) Figure 12A For a detection area C2 in the mask for vapor-depositing the third color, seven grooves 330 and a first opening 340 are provided. The resulting luminescent layer of the third color in the display panel can be referenced... Figure 12B In the detection area C2 of the display panel, a third sub-pattern 513 is formed. One side of the third sub-pattern 513 is the area corresponding to the groove, where no light-emitting material is deposited, and no deposited pattern is formed, facilitating the detection of the position of the third sub-pattern 513. Furthermore, combined with... Figure 14 The first opening 340 in each mask is located in a different functional unit column 52A1, and the distance between each first pattern 51 and the adjacent functional pattern 52 is greater than or equal to 50μm.

[0222] refer to Figure 17 The positioning part 302 in this display panel is rectangular in shape, with a dimension of approximately 10 μm along the row direction and approximately 30 μm along the column direction. The positioning part 302 is not connected to the pixel driving circuit. (Reference) Figure 15 The groove 330 in the mask can be formed using a half-etching process. The depth of the groove 330 is less than the thickness of the mask, but the depth of the groove 330 can be greater than or equal to half the thickness of the mask. Therefore, a larger amount of luminescent material can be deposited in the groove 330.

[0223] Figure 20 , Figure 21 and Figure 22 All of them are used Figure 19 The diagram shows the structure of the display panel formed by the mask plate.

[0224] refer to Figure 20The functional unit 52A in the display panel includes a first functional pattern 523, two second functional patterns 524, and a third functional pattern 525. Within the same functional unit 52A, the two second functional patterns 524 are arranged in a row, and the first functional pattern 523 and the third functional pattern 525 are arranged in a column. Along the row direction X, the area corresponding to the detection area C has two rows of functional units 52A2, and along the column direction Y, the area corresponding to the detection area C has two columns of functional units 52A1.

[0225] refer to Figure 20 The thickness of the mask body 354 in the mask plate is set to approximately 25 μm. Four detection areas C2 are set at the four corners of each display area C1. This mask plate is used for evaporating the display motherboard containing six display panels. Accordingly, a total of 24 detection areas C2 are set in this mask plate.

[0226] refer to Figure 20 For a detection area C2 in the mask for the first color vapor deposition, six grooves 330 are provided. Figure 20 The dashed box indicates the position corresponding to the groove 330 in the display panel and a first opening 340, forming a first sub-pattern 511 in the display panel. The area surrounding the first sub-pattern 511 is the area corresponding to the groove, where no light-emitting material is deposited and no pattern is formed, facilitating the detection of the position of the first sub-pattern 511. For a detection area C2 in a mask for depositing the second color, 13 grooves 330 and a first opening 340 are provided. A second sub-pattern 512 is formed in the display panel, where one side is the area corresponding to the groove, where no light-emitting material is deposited and no pattern is formed, facilitating the detection of the position of the second sub-pattern 512. For a detection area C2 in a mask for depositing the third color, 6 grooves 330 and a first opening 340 are provided, forming a third sub-pattern 513 in the display panel. One side of the third sub-pattern 513 is the area corresponding to the groove, where no light-emitting material is deposited and no pattern is formed, facilitating the detection of the position of the third sub-pattern 513. The first opening 340 in each mask is located in a different functional unit column 52A1, and the distance between each first pattern 51 and the adjacent functional pattern 52 is greater than or equal to 50 μm. The distance between two adjacent third openings 41 is about 20 μm.

[0227] refer to Figure 22 The positioning part 302 in the display panel is rectangular in shape, with a dimension of about 10μm along the row direction and about 30μm along the column direction.

[0228] Figure 24 , Figure 25 and Figure 26 All of them are used Figure 23The diagram shows the structure of the display panel formed by the mask plate.

[0229] refer to Figure 24 The functional unit 52A in the display panel includes a first functional pattern 523, a second functional pattern 524, and a third functional pattern 525. Within the same functional unit 52A, the first functional pattern 523, the second functional pattern 524, and the third functional pattern 525 are arranged in a column. Along the row direction X, a row of functional units 52A2 is provided in the area corresponding to the detection area C. Along the column direction Y, three columns of functional units 52A1 are provided in the area corresponding to the detection area C.

[0230] refer to Figure 23 The thickness of the mask body 354 in the mask plate is set to approximately 30 μm. Four detection areas C2 are set at the four corners of each display area C1. This mask plate is used for evaporating the display motherboard containing four display panels. Accordingly, a total of 16 detection areas C2 are set in this mask plate.

[0231] refer to Figure 24 For a detection area C2 in a mask for depositing the first color, two grooves 330 and a first opening 340 are provided, forming a first sub-pattern 511 in the display panel. One side of the first sub-pattern 511 is the area corresponding to the groove, where no light-emitting material is deposited, and no deposited pattern is formed, facilitating the detection of the position of the first sub-pattern 511. For a detection area C2 in a mask for depositing the second color, two grooves 330 and a first opening 340 are provided, forming a second sub-pattern 512 in the display panel. One side of the second sub-pattern 512 is the area corresponding to the groove, where no light-emitting material is deposited, and no deposited pattern is formed, facilitating the detection of the position of the second sub-pattern 512. For a detection area C2 in a mask for depositing the third color, two grooves 330 and a first opening 340 are provided, forming a third sub-pattern 513 in the display panel. One side of the third sub-pattern 513 is the area corresponding to the groove, where no light-emitting material is deposited, and no deposited pattern is formed, facilitating the detection of the position of the third sub-pattern 513. The first opening 340 in each mask is located in a different functional unit column 52A1, and the distance between each first pattern 51 and the adjacent functional pattern 52 is greater than or equal to 50 μm. The distance between two adjacent third openings 41 is 30 μm to 40 μm.

[0232] refer to Figure 26 The positioning part 302 in the display panel is rectangular in shape, with a dimension of about 10μm along the row direction and about 30μm along the column direction.

[0233] The above description is merely a specific embodiment of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A photomask, characterized in that, The mask has a functional area; the functional area includes a display area and at least one detection area, the detection area being located at the top corner of the display area; The mask plate includes a functional part, which includes: a first opening, a plurality of second openings and a plurality of grooves; the plurality of second openings are arranged in multiple rows and columns; at least one second opening is located in the display area, and the plurality of grooves and the first opening are located in the detection area.

2. The mask plate according to claim 1, wherein, The functional area also includes a non-detection area; the non-detection area is located on at least one side of the display area and is adjacent to the detection area; At least one of the second openings is located in the non-detection area.

3. The mask plate according to claim 2, wherein, Along the row direction of the plurality of second openings, the spacing between adjacent first openings and second openings is greater than or equal to the spacing between two adjacent second openings; Along the column direction of the plurality of second openings, the spacing between adjacent first openings and second openings is greater than or equal to the spacing between two adjacent second openings.

4. The mask plate according to claim 2 or 3, wherein, The mask is configured to vapor-deposit a luminescent material of a first color; The first opening is in the same column as a column of second openings in the display area; and / or, the first opening in the mask is in the same row as a row of second openings in the non-detection area.

5. The mask plate according to claim 2 or 3, wherein, The mask is configured to vapor-deposit a second color of luminescent material; The first opening is located in the same column as a column of second openings located in the non-detection area; and / or, the first opening is located in the same row as a row of second openings located in the non-detection area.

6. The mask plate according to claim 1, wherein, The shape of the first opening projected onto the plane of the mask plate, the shape of the second opening projected onto the plane of the mask plate, and the shape of the groove projected onto the plane of the mask plate are the same.

7. The mask plate according to claim 1, wherein, The dimensions of the first opening projected onto the plane of the mask plate along the row direction of the plurality of second openings, the dimensions of the second opening projected onto the plane of the mask plate along the row direction, and the dimensions of the groove projected onto the plane of the mask plate along the row direction are equal or approximately equal.

8. The mask plate according to claim 1, wherein, The number of detection areas is multiple, and the multiple detection areas are respectively located at the four top corners of the display area; Along the row direction of the plurality of second openings, the first openings in the detection areas at two adjacent apex positions of the display area are symmetrically distributed with respect to the first center line; and the areas occupied by the plurality of grooves in the detection areas at two adjacent apex positions are symmetrically distributed with respect to the first center line. The first center line is the center line of the display area extending along the column direction of the plurality of second openings.

9. A display panel, wherein, The display panel has a display area and at least one detection area; the detection area is located at the top corner of the display area. The display panel includes a light-emitting layer; the light-emitting layer includes a first pattern and multiple functional patterns arranged at intervals; the multiple functional patterns are arranged in multiple rows and columns, at least one of the functional patterns is used for emitting light and is located in the display area; the first pattern is located in the detection area.

10. The display panel according to claim 9, wherein, The display panel also has a non-detection area; the non-detection area is located on at least one side of the display area and is adjacent to the detection area; The functional pattern includes a light-emitting pattern and a second pattern; the functional pattern located in the display area is the light-emitting pattern; the second pattern in the functional pattern is located in the non-detection area.

11. The display panel according to claim 9, wherein, Along the row direction of the arrangement of the plurality of functional patterns, the spacing between adjacent first patterns and functional patterns is greater than or equal to the spacing between two adjacent functional patterns; Along the column direction of the arrangement of the plurality of functional patterns, the spacing between adjacent first patterns and functional patterns is greater than or equal to the spacing between two adjacent functional patterns.

12. The display panel according to claim 9, wherein, The display panel further includes: an anode layer and a defining layer stacked together; the light-emitting layer is located on the side of the defining layer away from the anode layer; The anode layer includes multiple anodes and multiple positioning parts; The plurality of anodes are located in the display area; the defining layer includes a plurality of third openings located in the display area, one of the third openings exposing at least a portion of an anode; the orthographic projection of one of the third openings onto the plane of the anode layer is located within the orthographic projection range of a light-emitting pattern onto the plane of the anode layer; The plurality of positioning parts are located in the detection area, and positioning parts are respectively provided on the adjacent two sides of the first pattern.

13. The display panel according to claim 12, wherein, Among the plurality of positioning portions located on both sides of the first pattern, the distance between any one of the positioning portions and the first pattern is greater than or equal to the distance between two adjacent third openings.

14. The display panel according to claim 12, wherein, The number of the first pattern is multiple; The center line connecting at least two of the positioning portions located on the same side of the plurality of first patterns is parallel to the row direction of the plurality of functional patterns.

15. The display panel according to claim 9, wherein, The functional pattern includes a light-emitting pattern and a second pattern; The display panel further includes: an anode layer and a defining layer stacked together; the defining layer includes a plurality of third openings; The light-emitting layer includes a first sub-light-emitting layer, a second sub-light-emitting layer, and a third sub-light-emitting layer stacked together; The materials of the first sub-emissive layer, the second sub-emissive layer, and the third sub-emissive layer are different; The number of the first pattern is multiple, and the multiple first patterns include a first sub-pattern, a second sub-pattern, and a third sub-pattern; the first sub-pattern is located in the first sub-light-emitting layer, the second sub-pattern is located in the second sub-light-emitting layer, and the third sub-pattern is located in the third sub-light-emitting layer; Along the row or column direction of the arrangement of the plurality of functional patterns, the distance between any one of the first sub-pattern, the second sub-pattern, and the third sub-pattern and the adjacent second pattern or the light-emitting pattern is greater than or equal to the sum of the size of the set pattern and the distance between two adjacent third openings; The defined pattern is the smallest of the first sub-pattern, the second sub-pattern, and the third sub-pattern.

16. The display panel according to claim 15, wherein, Along the row or column direction of the arrangement of the plurality of functional patterns, the spacing between any two adjacent sub-patterns of the first sub-pattern, the second sub-pattern, and the third sub-pattern is greater than or equal to the sum of the size of the set pattern and the spacing between any two adjacent third openings.

17. The display panel according to claim 15, wherein, The plurality of functional patterns include a first functional pattern, a second functional pattern, and a third functional pattern; the first functional pattern is located in the first sub-light-emitting layer, the second functional pattern is located in the second sub-light-emitting layer, and the third functional pattern is located in the third sub-light-emitting layer; At least one first functional pattern, at least one second functional pattern, and at least one third functional pattern adjacent to each other constitute a functional unit; multiple functional units are arranged into multiple functional unit columns; The first sub-pattern, the second sub-pattern, and the third sub-pattern are arranged in a column with different functional unit columns.

18. The display panel according to claim 17, wherein, The functional unit column containing the first sub-pattern is adjacent to the functional unit column containing the second sub-pattern.

19. The display panel according to claim 17, wherein, At least one functional unit column is provided between the functional unit column where the first sub-pattern is located and the functional unit column where the second sub-pattern is located.

20. The display panel according to any one of claims 17 to 19, wherein, The display panel also has a non-detection area; Of the functional unit columns containing the first sub-pattern, the second sub-pattern, and the third sub-pattern, at least one is located in the display area, and at least one is located in the non-detection area.

21. The display panel according to claim 17, wherein, The display panel also has a non-detection area; The multiple functional units are arranged into multiple functional unit rows; The first sub-pattern, the second sub-pattern, and the third sub-pattern are arranged in a row with the same functional unit row, and the functional unit row containing the first sub-pattern, the second sub-pattern, and the third sub-pattern is located in the non-detection area.

22. The display panel according to claim 15, wherein, In the same light-emitting layer, along the row or column direction of the multiple functional patterns, the size of the first pattern is equal to that of the functional patterns.

23. A display device, characterized in that, The display device includes: a display panel as claimed in any one of claims 9 to 22, and a circuit board electrically connected to the display panel.

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