A four-position online adjustment sputtering target coating machine

Abstract

A kind of four orientation online adjustment sputtering target's coating machine, it is related to vacuum coating machine field, including machine body and four groups of opposite sputtering target installed in machine body, the center shaft is arranged on the machine body, the middle part of the center shaft has mounting seat, the suspension frame is arranged on the mounting seat by one-way rotating shaft, the bottom of the center shaft is provided with pre-sputtering baffle, the end of the pre-sputtering baffle is provided with pulley, for cooperation with machine body, and rotate around the center shaft, the front end of the sputtering target has hanging buckle, for cooperation with suspension frame, the rear end of sputtering target is provided with intercommunication rod, the intercommunication rod passes through machine body, and extends to the outside of machine body;By four groups of sputtering target that four square distribution is presented, cooperate with the independent online adjustment structure of electric cylinder driving intercommunication rod, process adjustment period is greatly shortened, time cost and artificial cost are reduced, the continuity of coating production and scale production efficiency are significantly improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating machines, and in particular to a coating machine with a four-position online adjustable sputtering target. Background Technology

[0002] Traditional multi-directional sputtering equipment requires adjusting the target angle and position to suit different workpieces or coating requirements, which usually necessitates stopping the machine to break the vacuum (or opening a special adjustment chamber door), requiring repeated manual operation and wasting time and resources. Some traditional multi-directional sputtering equipment requires the angle to be adjusted before the coating process begins, but this limits the sputtering range of the target, affecting the quality of the coated film. Furthermore, impurities may interfere with the coating process during the pre-sputtering stage. To address these issues, a coating machine with four-directional online adjustment of the sputtering target is proposed. Utility Model Content

[0003] The purpose of this invention is to solve the problem that existing multi-directional sputtering devices usually need to be stopped to break the vacuum when adapting to different workpieces or coating requirements, and that impurities may interfere with the coating of the sputtering target during the pre-sputtering stage.

[0004] The present invention adopts the following technical solution:

[0005] A coating machine with four-position online adjustable sputtering targets includes a machine body and four sets of opposing sputtering targets installed inside the machine body. The machine body is provided with a central shaft, and a mounting base is provided in the middle of the central shaft. A suspension frame is provided on the mounting base via a one-way rotating shaft. A pre-sputtering baffle is provided at the bottom of the central shaft, and a pulley is provided at the end of the pre-sputtering baffle for cooperating with the machine body and rotating around the central shaft. The front end of the sputtering target has a hook for cooperating with the suspension frame. A connecting rod is provided at the rear end of the sputtering target. The connecting rod passes through the machine body and extends to the outside of the machine body. An electric cylinder is provided outside the connecting rod for adjustment. The sputtering target is mounted on an adjustment seat installed on the inner wall of the machine body. Furthermore, the sputtering targets are in four groups and are distributed in a square. The sputtering targets are selected from one or more of planar targets and rotating targets. Different sputtering targets use different target materials, so that multifunctional or multilayer composite films can be prepared in a single process without frequent target material changes. Furthermore, the electric cylinder is mounted on the outer wall of the machine body via a rotating shaft, and the output end of the electric cylinder is mounted on one end of the connecting rod via a rotating shaft. The part of the connecting rod located outside the machine body is provided with a bellows, and the bellows is connected to the machine body via a sealing flange to ensure that the machine body is kept sealed. Furthermore, the sputtering target is mounted on an adjusting seat via a rotating shaft, and the angle is adjusted via the adjusting seat and a linkage rod driven by an electric cylinder. Furthermore, the central shaft is located in the middle of the machine body, at the center of the four sputtering targets, and its upper part extends out of the machine body and is driven to rotate by the drive motor above the machine body. A mounting base is fixedly installed in the middle of the central shaft, and a suspension frame is installed on the mounting base. The two are connected by a one-way rotating shaft. The suspension frame is cross-shaped in general, and the two horizontal sides are used to cooperate with the hooks of the sputtering targets to support the sputtering targets. Furthermore, one end of the pre-sputtering baffle is fixedly connected to the bottom of the central shaft, and the other end is provided with a pulley. The body has an annular slide at a position flush with the pre-sputtering baffle. The pulley cooperates with the slide to support the pre-sputtering baffle. The pre-sputtering baffle rotates around the central shaft driven by the drive motor. Furthermore, the pre-sputtering baffle is located on the lower surface of the sputtering target and its width is wider than the width of the sputtering target. It is used to block the sputtering target in the early stage of sputtering and reduce the interference of impurities.

[0006] The beneficial effects of this utility model are: By using four sets of sputtering targets arranged in a square, and in conjunction with an independent online adjustment structure driven by an electric cylinder, the sputtering target angle can be adjusted online steplessly without stopping the machine or breaking the vacuum. This solves the industry pain point that traditional equipment must stop the machine and break the vacuum to adjust the target angle, relying on repetitive manual operation. It significantly shortens the process adjustment cycle, reduces time and labor costs, and significantly improves the continuity and scale production efficiency of coating production. The angle of each sputtering target is dynamically adjusted in real time according to process requirements throughout the coating process. This breaks the limitation of traditional equipment that can only complete the angle pre-adjustment before startup, greatly expands the sputtering range of the sputtering target, eliminates the sputtering blind zone, and can optimize the core indicators such as film thickness uniformity, density, stress distribution and crystal orientation online, significantly improving the coating quality. It can fully adapt to the preparation process requirements of high-precision optical films, functional composite films and other high-end films. The rotatable pre-sputtering baffle driven by the central axis can form a full-coverage shield during the pre-sputtering stage of the four sets of sputtering targets, effectively intercepting contaminants such as oxide layers and attached impurities on the target surface, completely avoiding secondary sputtering contamination of the substrate and film layer by impurities in the pre-sputtering stage, greatly reducing particle defects and contamination problems in the film layer, significantly improving the purity, light transmittance, conductivity and other key properties of the film layer, and effectively improving the product yield. The four sputtering targets can be independently selected as planar or rotating targets, and can be equipped with different types of target materials. This enables step-by-step sputtering in a single coating process, and the preparation of multifunctional films or multi-layer composite films can be completed without frequent shutdowns to change target materials. This greatly expands the process adaptability of the equipment, shortens the preparation cycle of complex films, and enhances the equipment's multi-scenario application capabilities. The vacuum dynamic sealing structure, which combines bellows and sealing flanges, maintains a high vacuum environment within the coating machine throughout the entire process of online angle adjustment of the sputtering target, completely avoiding vacuum leakage during adjustment and ensuring long-term stability of the sputtering coating process. Simultaneously, the entire equipment is compact, with four independently controllable target adjustment mechanisms that operate stably and reliably. The combination of a cross-shaped suspension frame and a unidirectional rotating shaft provides stable auxiliary support for the sputtering target, ensuring structural stability and positioning accuracy during angle adjustment. Attached Figure Description

[0007] Figure 1 This is a schematic diagram of the overall structure of a coating machine for a four-position online adjustable sputtering target, which is a utility model. Figure 2 This is a top view schematic diagram of a coating machine for a four-position online adjustable sputtering target, which is a utility model. Figure 3 This is a partial structural schematic diagram of a coating machine for a four-position online adjustable sputtering target, according to a utility model. Figure 4 This invention relates to a coating machine for a four-position online adjustable sputtering target. Figure 3 Schematic diagram of structure A in the middle; Figure 5 A schematic diagram of the pulley and slide rail structure of a coating machine for a four-position online adjustable sputtering target, which is a utility model. In the diagram: 1. Body; 2. Central shaft; 3. Mounting base; 4. One-way rotating shaft; 5. Suspension frame; 6. Pre-spray baffle; 7. Pulley; 8. Slide rail; 9. Drive motor; 10. Spray target; 11. Hook; 12. Connecting rod; 13. Bellows; 14. Electric cylinder; 15. Adjustment seat. Detailed Implementation

[0008] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0009] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0010] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0011] Example 1 This invention provides a coating machine with a four-position online adjustable sputtering target, including a body 1 and four sets of opposing sputtering targets 10 installed inside the body 1. The body 1 provides a sealed coating working space and a stable installation support base for the entire coating equipment, ensuring the installation accuracy and operational stability of each functional component. The four sets of opposing sputtering targets 10 are respectively matched with metal, oxide, nitride, and alloy targets, which can prepare multifunctional or multilayer composite films in a single process. Online control eliminates the need for frequent target changes. The angle of the sputtering target 10 is adjusted by breaking the vacuum. Each target position is equipped with an anti-cross-contamination structure to ensure the purity of the film. The large-coverage sputtering target 10 can also ensure sufficient film deposition on lenses and can cover the entire area to be coated on large-sized or irregularly shaped workpieces. A central shaft 2 is mounted on the body 1, and a mounting base 3 is located in the middle of the central shaft 2. A suspension frame 5 is mounted on the mounting base 3 via a one-way rotating shaft 4. A pre-sputtering baffle 6 is located at the bottom of the central shaft 2, and a pulley 7 is located at the end of the pre-sputtering baffle 6. The pulley 7 is used to cooperate with the body 1 and can drive the pre-sputtering baffle 6 to rotate around the central shaft 2. The pulley 7 can significantly reduce the frictional resistance during the rotation of the pre-sputtering baffle 6, ensuring the smoothness of the rotation and the accuracy of position control. At the same time, it provides stable rolling support for the outer end of the pre-sputtering baffle 6, avoiding swaying and shaking during rotation. A hook 11 is located at the front end of the sputtering target 10. The hook 11 is used to cooperate with the suspension frame 5 to realize the front end of the sputtering target 10. For rapid positioning and auxiliary support, a connecting rod 12 is provided at the rear end of the sputtering target 10. The connecting rod 12 passes through the machine body 1 and extends to the outside of the machine body 1. An electric cylinder 14 is provided outside the connecting rod 12 for adjustment. The electric cylinder 14 serves as the power actuator for angle adjustment and can achieve precise stroke closed-loop control through an external controller. In turn, the connecting rod 12 drives the sputtering target 10 to complete online angle adjustment. Dynamic adjustment of the target surface angle can be achieved without stopping the machine, which fully adapts to the process requirements of different coating stages. The sputtering target 10 is mounted on an adjustment seat 15 installed on the inner wall of the machine body 1. The adjustment seat 15 provides a stable rotation support fulcrum for the sputtering target 10, ensuring the rotation accuracy and positional stability of the sputtering target 10 during angle adjustment. The sputtering targets 10 are arranged in four groups in a square pattern, which can realize synchronous sputtering of the substrate in all directions, eliminate the sputtering blind zone, and greatly improve the uniformity of the film thickness. The sputtering targets 10 can be one or more of planar targets and rotating targets. Different sputtering targets 10 can be used with different target materials, which can realize the preparation of multifunctional films or multi-layer composite films in a single process without frequent shutdowns to change target materials, greatly shortening the production cycle and improving the process adaptability and production efficiency of the equipment. The four groups of sputtering targets 10 divide the vacuum chamber into four parts. Each sputtering target 10 can be adjusted for angle, gas ratio and sputtering independently. The external sputtering target 10 angle adjustment device of the electric cylinder 14 of the magnetron vacuum coating machine is controlled online on the host computer to control the deposition of different film layers without breaking the vacuum of the chamber for adjustment. The two different types of sputtering targets 10 also enable the coating machine to adapt to more coating processes and improve the utilization rate of target materials. The electric cylinder 14 is mounted on the outer wall of the machine body 1 via a rotating shaft. It can adaptively adapt to the angle changes of the electric cylinder 14 during the driving process, avoid mechanism interference during the movement, and ensure the smooth transmission of power throughout the process. The output end of the electric cylinder 14 is mounted on one end of the connecting rod 12 via a rotating shaft. It can convert the linear extension and retraction of the electric cylinder 14 into the lever lifting of the connecting rod 12, thereby driving the sputtering target 10 to complete the angle deflection. The rotating shaft connection can adaptively compensate for the relative angle changes during the movement, eliminate dead points in the movement, and avoid the mechanism from jamming and failing. The part of the connecting rod 12 located outside the body 1 is equipped with a bellows 13. The bellows 13 is connected to the body 1 through a sealing flange. The bellows 13 and the sealing flange cooperate to form a reliable vacuum dynamic sealing structure, which can maintain a high vacuum sealing state inside the body 1 throughout the entire operation of the connecting rod 12, avoid vacuum leakage during angle adjustment, ensure the high vacuum working conditions required for magnetron sputtering coating, and effectively protect the moving parts of the connecting rod 12, preventing contaminants such as target material debris and plasma byproducts from entering the moving gap during the coating process, thus ensuring the service life and long-term operational stability of the mechanism. The sputtering target 10 is mounted on the adjusting seat 15 via a rotating shaft. The rotational support of the adjusting seat 15, in conjunction with the drive of the connecting rod 12 driven by the electric cylinder 14, enables precise stepless adjustment of the angle of the sputtering target 10. The adjustment process is smooth and has high positioning accuracy. It can be dynamically adjusted online according to the coating process requirements without stopping the machine to break the vacuum, greatly improving the flexibility and efficiency of process adjustment. The central shaft 2 is located in the middle of the body 1 and at the center of the four sputtering targets 10. The upper part of the central shaft 2 extends out of the body 1 and is driven to rotate by the drive motor 9 above the body 1. This enables precise control of the rotation speed and angle of the central shaft 2, providing controllable power input for the rotation of the suspension frame 5 and the pre-sputtering baffle 6. A mounting base 3 is fixedly installed in the middle of the central shaft 2. A suspension bracket 5 is installed on the mounting base 3. The two are connected by a one-way rotating shaft 4. The suspension bracket 5 is cross-shaped in general. The two horizontal sides are used to cooperate with the hooks 11 of the sputtering target 10. It can provide protective support for the four sets of sputtering targets 10 in the pre-sputtering process. One end of the pre-sputtering baffle 6 is fixedly connected to the bottom of the central shaft 2 and can rotate synchronously with the central shaft 2 to achieve precise position switching. The other end is equipped with a pulley 7. An annular slide rail 8 is provided at the position of the body 1 flush with the pre-sputtering baffle 6. The pulley 7 and the slide rail 8 cooperate to provide stable rolling support for the pre-sputtering baffle 6, greatly reducing rotational friction, and at the same time preventing the pre-sputtering baffle 6 from sagging, swaying or shaking, thus improving its safety performance. The pre-sputtering baffle 6 is located on the lower surface of the sputtering target 10. Its width is wider than that of the sputtering target 10. It can form a full-coverage effective blockage on the sputtering surface of the sputtering target 10 in the early stage of sputtering, completely intercepting the oxide layer, impurities and other materials that fall off the surface of the target material during the pre-sputtering stage. This avoids impurities from sputtering and depositing on the substrate surface, causing film contamination and particle defects, greatly reducing the interference of impurities on the coating process, and improving the purity and key performance indicators of the film.

[0012] The pre-sputtering baffle 6 can automatically switch positions by rotating around the central shaft 2 driven by the drive motor 9. When the corresponding sputtering target 10 is in the pre-sputtering stage, it rotates to be below the sputtering surface of the sputtering target 10. At this time, the hook 11 of the sputtering target 10 is mounted on the horizontal side of the suspension frame 5. After the pre-sputtering is completed, the drive motor 9 drives the central shaft 2 and the pre-sputtering baffle 6 to rotate to the blank position. The sputtering target 10 performs coating treatment on the substrate below. After the sputtering target 10 is coated, the control cylinder 14 drives the sputtering target 10 to flip up, which drives the hook 11 on the target to be lifted off the suspension frame 5. The drive motor 9 drives the central shaft 2, the mounting frame and the suspension frame 5 to move to the position of the next sputtering target 10, and repeats the pre-sputtering and the above process.

[0013] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. The various components mentioned in this utility model are common technologies in the existing field. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A coating machine for a four-position online adjustable sputtering target, characterized in that, The system includes a body (1) and four sets of opposing sputtering targets (10) installed inside the body (1). A central shaft (2) is provided on the body (1). A mounting base (3) is located in the middle of the central shaft (2). A suspension bracket (5) is provided on the mounting base (3) via a one-way rotating shaft (4). A pre-sputtering baffle (6) is provided at the bottom of the central shaft (2). A pulley (7) is provided at the end of the pre-sputtering baffle (6) for engaging with the body (1). The sputtering target (10) is fitted together and rotates around the central axis (2). The front end of the sputtering target (10) has a hook (11) for fitting with the suspension frame (5). The rear end of the sputtering target (10) is provided with a connecting rod (12). The connecting rod (12) passes through the machine body (1) and extends to the outside of the machine body (1). An electric cylinder (14) is provided outside the connecting rod (12) for adjustment. The sputtering target (10) is mounted on an adjustment seat (15) installed on the inner wall of the machine body (1).

2. A coating machine for a four-position online adjustable sputtering target according to claim 1, characterized in that, The sputtering target (10) has four groups and is distributed in a square. The sputtering target (10) is selected from one or more of planar targets and rotating targets. Different sputtering targets (10) are selected from different target materials, so that multifunctional or multilayer composite films can be prepared in a single process without frequent target material changes.

3. A coating machine for a four-position online adjustable sputtering target according to claim 2, characterized in that, The electric cylinder (14) is mounted on the outer wall of the machine body (1) via a rotating shaft. The output end of the electric cylinder (14) is mounted on one end of the connecting rod (12) via a rotating shaft. The part of the connecting rod (12) located outside the machine body (1) is provided with a bellows (13). The bellows (13) is connected to the machine body (1) via a sealing flange to ensure that the machine body (1) is kept sealed.

4. A coating machine for a four-position online adjustable sputtering target according to claim 3, characterized in that, The sputtering target (10) is mounted on the adjusting seat (15) via a rotating shaft, and the angle is adjusted by the adjusting seat (15) and the linkage rod driven by the electric cylinder (14).

5. A coating machine for a four-position online adjustable sputtering target according to claim 4, characterized in that, The central shaft (2) is located in the middle of the body (1). The central shaft (2) is located in the center of the four sputtering targets (10). Its upper part extends out of the body (1) and is driven to rotate by the drive motor (9) above the body (1). A mounting base (3) is fixedly installed in the middle of the central shaft (2). A suspension frame (5) is installed on the mounting base (3). The two are connected by a one-way rotating shaft (4). The suspension frame (5) is cross-shaped in general. The two sides are used to cooperate with the hooks (11) of the sputtering targets (10) to support the sputtering targets (10).

6. A coating machine for a four-position online adjustable sputtering target according to claim 5, characterized in that, One end of the pre-sputtering baffle (6) is fixedly connected to the bottom of the central shaft (2), and the other end is provided with a pulley (7). The body (1) has an annular slide (8) at the position flush with the pre-sputtering baffle (6). The pulley (7) cooperates with the slide (8) to support the pre-sputtering baffle (6). The pre-sputtering baffle (6) rotates around the central shaft (2) driven by the drive motor (9).

7. A coating machine for a four-position online adjustable sputtering target according to claim 6, characterized in that, The pre-sputtering baffle (6) is located on the lower surface of the sputtering target (10), and its width is wider than that of the sputtering target (10). It is used to block the sputtering target (10) in the early stage of sputtering and reduce the interference of impurities.

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