A temperature measuring device for a sputtering machine with a composite current collector

Abstract

The utility model relates to the field of temperature measuring device, concretely relates to a kind of composite current collector sputtering machine temperature measuring device, including including: support body, support body is parallel to the establishment of over roller axial direction, for the support installation of device whole, including strip support, the side of strip support close to over roller is all set with the camber of same arc face with over roller curvature;The utility model is through the framework of multiple point arrangement plus synchronous movement, both can realize the fixed continuous monitoring of key point, can also complete the whole film width range without missing temperature scanning, through the combined design of protection cylinder plus directional air curtain, actively isolate the pollution of dust to lens, ensure the long-term stable transmission of infrared signal, to obtain accurate, reliable, continuous temperature data, to solve the multiple point temperature measurement difficult to install in the prior art, measurement accuracy is susceptible to pollution interference, leading to infrared temperature measurement signal attenuation and distortion, cannot obtain real, accurate, continuous temperature data problem.

Description

Technical Field

[0001] This utility model relates to the field of dustproof temperature measuring devices, specifically to a temperature measuring device for a composite current collector sputtering machine. Background Technology

[0002] In the magnetron sputtering coating process, atomic sputtering and film deposition are achieved by bombarding the target material with high-energy particles. When bombarding the film surface, due to the uneven distribution of plasma and the different energies of the bombardment, the film surface temperature is unevenly distributed. As a result, wrinkles may appear in the uneven temperature positions when the film is transported in the roller system.

[0003] To verify the effect of temperature non-uniformity on wrinkles, multiple temperature measuring instruments need to be installed inside the sputtering machine. However, existing roll-to-roll coating machines cannot install multi-point temperature measuring devices due to the small vacuum chamber space, dense distribution of rollers, and the need to avoid interfering with the film path. The measurement accuracy is easily affected by contamination: metal or compound dust generated during sputtering can easily contaminate the optical lens of the temperature measuring instrument, causing attenuation and distortion of the infrared temperature measurement signal, making it impossible to obtain true, accurate, and continuous temperature data.

[0004] Therefore, it is necessary to invent a temperature measuring device for a composite current collector sputtering machine to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a temperature measurement device for a composite current collector sputtering machine. Through a multi-point arrangement and synchronous movement architecture, it can achieve both fixed and continuous monitoring of key points and complete temperature scanning across the entire film width. The combination design of a protective cylinder and a directional air curtain actively isolates dust from the lens, ensuring long-term stable transmission of infrared signals. This results in accurate, reliable, and continuous temperature data, solving the problems in existing technologies where it is difficult to install multi-point temperature measurement, measurement accuracy is easily affected by contamination, leading to attenuation and distortion of infrared temperature measurement signals, and the inability to obtain true, accurate, and continuous temperature data.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a temperature measuring device for a composite current collector sputtering machine, comprising:

[0007] A support body is provided, which is parallel to the axial direction of the roller and is used to support and install the entire device. It includes a strip bracket, and the side of the strip bracket near the roller has an arc surface with the same curvature as the roller. A gap is left between the support body and the roller.

[0008] A lifting assembly, located inside the support body, includes a lifting bracket, with an electric actuator at the bottom of the lifting bracket to drive its lifting and lowering, and a linear slide rail installed on the inner side of the lifting bracket.

[0009] A sliding assembly, installed inside the lifting bracket, includes a movable frame, and a slider is installed on the side of the movable frame, the slider cooperating with a linear slide rail;

[0010] Multiple dustproof components are installed on the top of the moving frame and are evenly distributed along the axial direction of the roller. These components include an infrared thermometer and a protective cylinder. The open end of the protective cylinder extends to a position close to the moving film surface and is spaced apart to form a non-contact gap. An air curtain device is provided on the side wall of the protective cylinder.

[0011] By employing a multi-point deployment and synchronous movement architecture, it is possible to achieve both fixed and continuous monitoring of key points and complete temperature scanning across the entire membrane width, generating a comprehensive temperature distribution cloud map that provides data support for process optimization and quality control.

[0012] Preferably, a first mounting head is installed at one end of the strip bracket, and a wire harness tube is provided at the bottom of the first mounting head, the wire harness tube being in communication with the interior of the strip bracket.

[0013] Preferably, a second mounting head is slidably connected to the other end of the strip bracket, a fixing rod is fixedly connected inside the second mounting head, an insertion hole that mates with the fixing rod is opened at the end of the strip bracket, a threaded rod is rotatably connected inside the second mounting head, and a threaded hole that mates with the threaded rod is opened at the end of the strip bracket.

[0014] Preferably, the lifting bracket is slidably connected to the strip bracket, both ends of the lifting bracket are fixedly connected to the supporting side plates, the top of the lifting bracket is provided with a slot, the inner side wall of the slot is fixedly connected to a protrusion, and the bottom of the protrusion is fixedly connected to a linear slide rail.

[0015] Preferably, both ends of the lifting bracket are fixedly connected to a fixing block, and an electric push rod is installed inside the strip bracket. The output end of the electric push rod is fixedly connected to one of the fixing blocks, and a limit rod is slidably connected inside the other fixing block. The bottom of the limit rod is fixedly connected to the inner bottom of the strip bracket.

[0016] Preferably, the movable frame has grooves on both sides, the grooves cooperate with the protrusions, and a protective plate is fixedly connected to the top of the movable frame. The protective plate covers the empty groove, and the length of the protective plate is greater than the length of the empty groove.

[0017] Preferably, the dustproof component further includes a base, which is fixedly connected to the protective plate. The base has a through hole inside. The infrared thermometer is fixedly connected to the base, and a glass protective cover is threadedly connected to the top of the infrared thermometer.

[0018] Preferably, the protective cylinder is threaded to the base, and the inner side of the open end of the protective cylinder is machined with an inclined opening.

[0019] Preferably, the air curtain device includes an air outlet pipe that communicates with a through hole. The inner side of the protective cylinder has multiple air inlets. The interior of the protective cylinder also has an air storage tank that communicates with the air inlets. The inner side of the protective cylinder has an annular inclined groove and an air outlet groove. The air outlet groove communicates with the air storage tank through the inclined groove. The air outlet pipe is connected to a high-purity nitrogen gas source, and the gas flow rate is adjusted by a flow controller. The blowing direction of the air outlet groove is set to form an acute angle with the inner wall of the protective cylinder and faces the opening direction of the inclined groove.

[0020] Preferably, a compression ring is fixedly connected to the outer side of the infrared thermometer, a pressure block is fixedly connected to the inner side of the protective cylinder, and a sealing ring is provided between the compression ring and the pressure block.

[0021] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0022] 1. Through a multi-point layout and synchronous movement architecture, it can achieve both fixed and continuous monitoring of key points and complete temperature scanning of the entire membrane width without omissions, generating a complete temperature distribution cloud map, which provides data support for process optimization and quality control.

[0023] 2. An arc surface with the same curvature as the roller is opened on the side of the strip support near the roller. A gap is left between the strip support and the roller, and the protective cylinder is close to the film material and the distance can be adjusted. This can avoid interference problems caused by installation errors or thermal expansion, thereby ensuring the stability of equipment operation and temperature measurement accuracy.

[0024] 3. The overall length of the device can be extended or shortened, making it easy to adjust and install according to the installation space of the sputtering machine cavity, thus expanding its application range. In addition, the protective cylinder is close to the film material, which can reduce the possibility of impurities entering the protective cylinder, and it is easy to store when not in use.

[0025] 4. The glass protective cover protects the lens of the infrared thermometer from contamination and prevents it from being blocked, thus affecting the detection effect. Nitrogen gas is sprayed out through the outlet pipe via a nitrogen gas source and outlet pipe to form an outward overflowing air curtain barrier in front of the infrared thermometer lens. The combination of the protective cylinder and the directional air curtain actively isolates dust from contaminating the lens, ensuring long-term stable transmission of infrared signals, thereby obtaining accurate, reliable, and continuous temperature data. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0027] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0028] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0029] Figure 3 For the present utility model Figure 2 Enlarged structural diagram at point A in the middle;

[0030] Figure 4 This is a schematic diagram of the connection structure between the strip bracket and the second mounting head of this utility model;

[0031] Figure 5 This is an exploded structural diagram of the support body and lifting assembly of this utility model;

[0032] Figure 6 This is a schematic diagram of the connection structure between the lifting component and the sliding component of this utility model;

[0033] Figure 7 This is a cross-sectional structural diagram of the lifting component of this utility model;

[0034] Figure 8 This is a cross-sectional structural diagram of the sliding component of this utility model;

[0035] Figure 9 This is a schematic cross-sectional view of the dustproof component of this utility model;

[0036] Figure 10 For the present utility model Figure 9 Enlarged structural diagram at point B;

[0037] Figure 11 This is a schematic cross-sectional view of the protective cylinder of this utility model;

[0038] Figure 12 This is a schematic diagram of the connection structure between the electric actuator 2 and the moving frame of this utility model.

[0039] Explanation of reference numerals in the attached figures:

[0040] 001. Support body; 002. Lifting assembly; 003. Sliding assembly; 004. Dustproof assembly;

[0041] 101. Strip bracket; 102. First mounting head; 103. Cable harness tube; 105. Second mounting head; 106. Fixing rod; 107. Threaded rod; 108. Threaded hole; 109. Insertion hole;

[0042] 201. Lifting bracket; 202. Support side plate; 203. Hollow groove; 204. Protrusion; 205. Linear slide rail; 206. Fixing block; 207. Electric actuator one; 208. Limiting rod; 209. Electric actuator two; 210. Support plate;

[0043] 301. Movable frame; 302. Groove; 303. Slider; 304. Protective plate;

[0044] 401. Base; 402. Through hole; 403. Infrared thermometer; 404. Glass protective cover; 405. Protective cylinder; 406. Air inlet; 407. Air storage tank; 408. Inclined groove; 409. Air outlet groove; 410. Pressing block; 411. Extrusion ring. Detailed Implementation

[0045] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0046] This utility model provides, for example Figure 1-11 The temperature measuring device for a composite current collector sputtering machine shown includes:

[0047] Support body 001 is set parallel to the axial direction of the roller and is used to support the overall installation of the device. It includes a strip bracket 101. The side of the strip bracket 101 near the roller has an arc surface with the same curvature as the roller. A gap is left between the strip bracket 101 and the roller to avoid interference problems caused by installation errors or thermal expansion, thereby ensuring the stability of equipment operation and temperature measurement accuracy.

[0048] The lifting assembly 002 is located inside the support body 001 and includes a lifting bracket 201. The bottom of the lifting bracket 201 is provided with a first driving device to drive it to lift and lower, and a second driving device is installed on the inner side of the lifting bracket 201.

[0049] The sliding component 003 is installed inside the lifting bracket 201 and includes a movable frame 301. A slider 303 is installed on the side of the movable frame 301 and the slider 303 cooperates with the linear slide rail 205.

[0050] Multiple dustproof components 004 are installed on the top of the moving frame 301 and distributed along the axial direction of the roller. They include a temperature measuring module and a protective cylinder 405. The open end of the protective cylinder 405 extends to a position close to the moving film surface and forms a non-contact gap with it. An air curtain device is provided on the side wall of the protective cylinder 405.

[0051] A first mounting head 102 is installed at one end of the strip bracket 101. A wire harness tube 103 is provided at the bottom of the first mounting head 102. The wire harness tube 103 is connected to the inside of the strip bracket 101 and is used to bundle the air outlet tube and wires inside. The inside of the strip bracket 101 is hollow to facilitate the placement of wire harnesses and air tubes. The first mounting head 102 and the second mounting head 105 can be installed with the sputtering machine cavity by screws.

[0052] The other end of the strip bracket 101 is slidably connected to a second mounting head 105. A fixing rod 106 is fixedly connected inside the first mounting head 102 and the second mounting head 105. Both ends of the strip bracket 101 are provided with insertion holes 109 that cooperate with the fixing rod 106. Both the first mounting head 102 and the second mounting head 105 are rotatably connected to threaded rods 107. Both ends of the strip bracket 101 are provided with threaded holes 108 that are threadedly engaged with the threaded rods 107. By turning the threaded rods 107 with a wrench, the threaded rods 107 rotate inside the first mounting head 102 or the second mounting head 105. Since the threaded rods 107 are threadedly engaged with the threaded holes 108, they can drive the first mounting head 102 and the second mounting head 105 to move closer to or further away from the strip bracket 101. The fixing rod 106 slides inside the insertion hole 109, which is convenient for limiting the position. The length of the support body 001 can be extended or shortened, which is convenient for adjusting the installation according to the installation space of the sputtering machine cavity and expanding the scope of application.

[0053] The lifting bracket 201 is slidably connected to the strip bracket 101. Both ends of the lifting bracket 201 are fixedly connected to the support side plates 202, which can limit the movement of the 201 during lifting. The top of the lifting bracket 201 is provided with a slot 203. The inner side wall of the slot 203 is fixedly connected to a protrusion 204. The second driving device is set as an electric push rod 209. The end of the moving frame 301 is fixedly connected to a stop plate 210. The output end of the electric push rod 209 is fixedly connected to the stop plate 210. The bottom of the protrusion 204 is fixedly connected to a linear slide rail 205. The two sides of the moving frame 301 are provided with grooves 302, which cooperate with the protrusions 204. The top of the moving frame 301 is fixedly connected to a protective plate 304, which covers the slot 203. The length of the protective plate 304 is greater than the length of the slot 203.

[0054] The abutment plate 210 can be pushed by the electric push rod 209. The abutment plate 210 drives the slider 303 on the moving frame 301 to move on the slide rail 205, thereby adjusting the position of the moving frame 301 so that all infrared thermometers 403 can move synchronously. The protrusion 204 cooperates with the groove 302 for easy positioning. The moving frame 301 always covers the empty groove 203 to prevent impurities from entering the interior of the empty groove 203. The accurate and comprehensive temperature data provided is the prerequisite for realizing closed-loop automatic control of sputtering processes such as target power, cooling system, and conveying speed. This enables real-time parameter adjustment, process stabilization, and improvement of product yield and consistency. This solution, through a multi-point arrangement and synchronous movement architecture, can achieve both fixed and continuous monitoring of key points and complete temperature scanning of the entire film width without omissions. It can generate a complete temperature distribution cloud map, providing data support for process optimization and quality control.

[0055] Both ends of the lifting bracket 201 are fixedly connected to fixed blocks 206. The first driving device is an electric push rod 207. The electric push rod 207 is installed inside the strip bracket 101. The output end of the electric push rod 207 is fixedly connected to one of the fixed blocks 206. The limit rod 208 is slidably connected inside the other fixed block 206. The bottom of the limit rod 208 is fixedly connected to the inner bottom of the strip bracket 101. By starting the electric push rod 207, the lifting bracket 201 is driven to rise and fall as a whole inside the strip bracket 101. The limit rod 208 slides inside the fixed block 206, which facilitates the limiting and allows the overall protective cylinder 405 to be close to the membrane material, which facilitates the adjustment of the distance and avoids interference problems caused by installation errors or thermal expansion. This ensures the stability of equipment operation and temperature measurement accuracy. In addition, the proximity of the protective cylinder 405 to the membrane material can reduce the possibility of impurities entering the protective cylinder 405.

[0056] The dustproof component 004 also includes a base 401, which is fixedly connected to the protective plate 304. The base 401 has a through hole 402 inside. The temperature measuring module is set as an infrared thermometer 403, which is fixedly connected to the base 401. The top of the infrared thermometer 403 is threadedly connected to a glass protective cover 404. The glass protective cover 404 can protect the lens of the infrared thermometer 403 from contamination and prevent the lens from being blocked, thus affecting the detection effect. The glass protective cover 404 is also removable and replaceable.

[0057] The protective cylinder 405 is threadedly connected to the base 401. The inner side of the open end of the protective cylinder 405 is machined with an inclined opening to better approach the membrane surface. The protective cylinder 405 is easy to disassemble and replace.

[0058] The air curtain device includes an air outlet pipe that is connected to a through hole 402. Multiple air inlets 406 are provided on the inner side of the protective cylinder 405. An air storage tank 407 connected to the air inlets 406 is also provided inside the protective cylinder 405. An annular inclined groove 408 and an air outlet groove 409 are provided on the inner side of the protective cylinder 405. The air outlet groove 409 is connected to the air storage tank 407 through the inclined groove 408. The air outlet pipe is connected to a high-purity nitrogen gas source and the gas flow rate is regulated by a flow controller. The blowing direction of the air outlet groove 409 is set to form an acute angle with the inner wall of the protective cylinder 405 and to face the opening direction of the inclined groove 408.

[0059] The user inputs nitrogen through a nitrogen source and outlet pipe via through-hole 402, and then through inlet 406 into the gas storage tank 407. From there, it enters through inclined slot 408 into outlet slot 409, where it is ejected to form an outward-flowing gas curtain barrier in front of the lens of the infrared thermometer 403. Nitrogen is a very stable inert gas. In the sputtering environment, it will not chemically react with the high-temperature target material, sputtered particles, the growing film, or the substrate (such as PET, PP, and other polymer materials). It is low-cost, compatible with the sputtering process, and the combined design of the protective cylinder and directional gas curtain actively isolates the lens from metal or compound dust generated during sputtering, ensuring long-term stable transmission of the infrared signal and thus obtaining accurate, reliable, and continuous temperature data.

[0060] An extrusion ring 411 is fixedly connected to the outside of the infrared thermometer 403, and a pressure block 410 is fixedly connected to the inside of the protective cylinder 405. A sealing ring is provided between the extrusion ring 411 and the pressure block 410. The pressure block 410 extrudes the extrusion ring 411, which can prevent the internal inert gas from leaking after the protective cylinder 405 is installed.

[0061] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A temperature measuring device for a composite current collector sputtering machine, characterized in that: include: Support body (001), the support body is set parallel to the axial direction of the roller and is used to support the entire device. It includes a strip bracket (101). The side of the strip bracket (101) near the roller is provided with an arc surface with the same curvature as the roller. A gap is left between the support body and the roller. The lifting assembly (002) is disposed inside the support body (001) and includes a lifting bracket (201). The bottom of the lifting bracket (201) is provided with a first driving device to drive it to lift and lower, and the inner side of the lifting bracket (201) is equipped with a second driving device. A sliding assembly (003) is installed inside the lifting bracket (201) and includes a movable frame (301), wherein a slider (303) is installed on the side of the movable frame (301); Multiple dustproof components (004) are installed on the top of the moving frame (301) and distributed along the axial direction of the roller. They include a temperature measuring module and a protective cylinder (405). The open end of the protective cylinder (405) extends to a position close to the moving film surface and forms a non-contact gap with it. An air curtain device is provided on the side wall of the protective cylinder (405).

2. The temperature measuring device for a composite current collector sputtering machine according to claim 1, characterized in that: The strip bracket (101) is equipped with a first mounting head (102) at one end, and a wire harness tube (103) is provided at the bottom of the first mounting head (102), and the wire harness tube (103) is connected to the inside of the strip bracket (101).

3. The temperature measuring device for a composite current collector sputtering machine according to claim 2, characterized in that: The other end of the strip bracket (101) is slidably connected to a second mounting head (105). The interior of the second mounting head (105) is fixedly connected to a fixing rod (106). The end of the strip bracket (101) is provided with an insertion hole (109) that mates with the fixing rod (106). The interior of the second mounting head (105) is rotatably connected to a threaded rod (107). The end of the strip bracket (101) is provided with a threaded hole (108) that mates with the threaded rod (107).

4. The temperature measuring device for a composite current collector sputtering machine according to claim 1, characterized in that: The lifting bracket (201) is slidably connected to the strip bracket (101). Both ends of the lifting bracket (201) are fixedly connected to the support side plates (202). The top of the lifting bracket (201) is provided with a slot (203). The inner side wall of the slot (203) is fixedly connected to a protrusion (204). The second driving device is set as an electric push rod (209). The bottom of the protrusion (204) is fixedly connected to a linear slide rail (205). The electric push rod (209) pushes the moving frame (301) to move along the linear slide rail (205).

5. The temperature measuring device for a composite current collector sputtering machine according to claim 4, characterized in that: The bottom of both ends of the lifting bracket (201) is fixedly connected to a fixing block (206). The first driving device is set as an electric push rod (207). The electric push rod (207) is installed inside the strip bracket (101). The output end of the electric push rod (207) is fixedly connected to one of the fixing blocks (206). The inside of the other fixing block (206) is slidably connected to a limit rod (208). The bottom of the limit rod (208) is fixedly connected to the inner bottom of the strip bracket (101).

6. The temperature measuring device for a composite current collector sputtering machine according to claim 4, characterized in that: The movable frame (301) has grooves (302) on both sides, and the grooves (302) cooperate with the protrusions (204). A protective plate (304) is fixedly connected to the top of the movable frame (301), and the protective plate (304) covers the empty groove (203). The length of the protective plate (304) is greater than the length of the empty groove (203).

7. The temperature measuring device for a composite current collector sputtering machine according to claim 1, characterized in that: The dustproof component (004) also includes a base (401), which is fixedly connected to the protective plate (304). The base (401) has a through hole (402) inside. The temperature measuring module is set as an infrared thermometer (403), which is fixedly connected to the base (401). The top of the infrared thermometer (403) is threadedly connected to a glass protective cover (404).

8. The temperature measuring device for a composite current collector sputtering machine according to claim 7, characterized in that: The protective cylinder (405) is threadedly connected to the base (401), and the inner side of the open end of the protective cylinder (405) is machined with an inclined opening.

9. The temperature measuring device for a composite current collector sputtering machine according to claim 8, characterized in that: The air curtain device includes an air outlet pipe that is connected to a through hole (402). The inner side of the protective cylinder (405) is provided with multiple air inlets (406). The interior of the protective cylinder (405) is also provided with an air storage tank (407) that is connected to the air inlets (406). The inner side of the protective cylinder (405) is provided with an annular inclined groove (408) and an air outlet groove (409). The air outlet groove (409) is connected to the air storage tank (407) through the inclined groove (408). The air outlet pipe is connected to a high-purity nitrogen gas source and the gas flow rate is adjusted by a flow controller. The blowing direction of the air outlet groove (409) is set to form an acute angle with the inner wall of the protective cylinder (405) and face the opening direction of the inclined groove (408).

10. The temperature measuring device for a composite current collector sputtering machine according to claim 9, characterized in that: An extrusion ring (411) is fixedly connected to the outer side of the infrared thermometer (403), and a pressure block (410) is fixedly connected to the inner side of the protective cylinder (405). A sealing ring is provided between the extrusion ring (411) and the pressure block (410).

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