A horizontally movable magnetron target and vacuum coating equipment

Abstract

The utility model relates to a kind of horizontally movable magnetron target and vacuum coating equipment, the structure of the horizontally movable magnetron target includes water and electricity connection structure, including the water and electricity connection cover body of lower end opening, power connector and water connector are provided on the water and electricity connection cover body;Translation template is sealedly connected with the lower end port of water and electricity connection cover body, long circular hole-shaped adjusting cavity is opened in the inside of translation template, adjusting slot is opened in one or two straight line segment side walls of adjusting cavity, and the lower end surface of translation template is used for and the sealed connection of vacuum chamber top plate;Target pipe, its upper end is provided with clamping joint, and is clamped in adjusting slot by clamping joint;Target head is directly or indirectly connected in the lower end of target pipe. The position of target pipe and target head can be horizontally adjusted, the center distance of magnetron target from vacuum cavity can be changed, the problem that magnetron target cannot be adjusted center distance under traditional condition is solved, then improve coating uniformity and stability, and damage to sealing structure can be avoided.

Description

Technical Field

[0001] This utility model relates to an air sputtering coating equipment, specifically a horizontally movable magnetron target and vacuum coating equipment. Background Technology

[0002] Magnetron targets are key equipment in vacuum sputtering coating processes, which must be carried out within a vacuum chamber. In related vacuum coating equipment, multiple circular targets are typically used as core components. The movement position of the target directly determines the uniformity and adhesion of the coating result, affecting coating quality, production efficiency, and product consistency.

[0003] Currently, most circular targets in common cavity-type equipment on the market can only be manually adjusted up and down, but not horizontally. This design has the following main problems: the seal is easily damaged, and adjusting the circular target head will damage the fluororubber ring used to seal the target tube during adjustment; when users want to adjust the center distance of the circular target head to a specific position, they are limited by the fixed horizontal position of the target tube in the vacuum chamber, making it impossible to adjust the center distance, accurately adjust the sputtering range, waste materials, and meet different user needs. Utility Model Content

[0004] The purpose of this invention is to provide a horizontally movable magnetron target and vacuum coating equipment to solve the problem that the target tube of existing vacuum coating equipment has a fixed horizontal position and the target head center distance cannot be adjusted.

[0005] This invention is achieved as follows: a horizontally movable magnetically controlled target, comprising... A water and electricity connection structure includes a water and electricity connection cover with an opening at the lower end, and a power connector and a water connector are provided on the water and electricity connection cover; The translation template is sealed to the lower port of the water and electricity connection cover. An elongated oval-shaped adjustment cavity is provided inside the translation template. An adjustment slot is provided on one or two straight sections of the side wall of the adjustment cavity. The lower end face of the translation template is used to seal to the top plate of the vacuum chamber. The target tube has a snap-fit ​​connector at its upper end, which is snapped into the adjustment slot. The target head is directly or indirectly connected to the lower end of the target tube.

[0006] As a further improvement of this utility model, a cover flange is provided at the lower port of the water and electricity connection cover, a template flange is provided on the outside of the translation template, a first sealing ring is provided on the contact surface between the cover flange and the template flange, and a second sealing ring is provided on the lower end face of the template flange.

[0007] As a further improvement of this utility model, the target tube has a circular cross-section, and its diameter is less than or equal to the diameter of the arc segment at the end of the adjustment cavity.

[0008] As a further improvement of this utility model, the adjusting slot includes a slot body and protrusions. The slot body is opened along the side wall of the straight section of the adjusting cavity. Several protrusions are evenly arranged on the inner edge of the slot body along the length direction of the slot body. The locking connector is engaged in the gap between two adjacent protrusions.

[0009] As a further improvement of this utility model, the card connector has a T-shaped structure.

[0010] As a further improvement of this utility model, the lower end of the target tube and the target head are connected by an angle adjustment mechanism.

[0011] As a further improvement of this utility model, the angle adjustment mechanism includes a bellows, a first adjustment plate, and a second adjustment plate. The upper and lower ends of the bellows are respectively connected to the lower end of the target tube and the upper end of the target head through flanges. The first adjustment plate is fixedly connected to the flange at the upper end of the bellows, and the second adjustment plate is fixedly connected to the flange at the lower end of the bellows. The first adjustment plate and the second adjustment plate are rotatably connected. The first adjustment plate and the second adjustment plate are respectively provided with fan-shaped adjustment holes and positioning pins corresponding to the adjustment holes.

[0012] This utility model also discloses a vacuum coating device, including a vacuum chamber, on which a horizontally movable magnetron target as described above is provided on the top plate of the vacuum chamber.

[0013] A lifting and rotating substrate stage is provided on the bottom plate of the vacuum chamber.

[0014] This invention provides a horizontally movable magnetron sputtering target. The position of the target tube and target head can be horizontally adjusted by connecting the snap-fit ​​connector at the upper end of the target tube to the slot on the translation template. This allows for changing the center distance between the magnetron sputtering target and the vacuum chamber, solving the problem of traditional magnetron sputtering targets not being able to adjust their center distance, thereby improving the uniformity and stability of the coating. Furthermore, because the position of the target tube is directly adjusted, the sealing method changes from the original target tube sealing to a sealing ring fixed to the outer ring of the translation template, avoiding damage to the sealing structure during position adjustment.

[0015] This invention allows for adjustment of the target head's angle via an angle adjustment mechanism.

[0016] The vacuum coating equipment of this invention adopts the above-mentioned horizontally movable magnetron target, which can adjust the center distance of the magnetron target. At the same time, the source-substrate distance between the magnetron target and the substrate stage can be adjusted by lifting and rotating the substrate stage. The horizontally movable magnetron target, the angle adjustment mechanism and the lifting and rotating substrate stage work together to adjust the center distance of the target head, the angle of the target head and the source-substrate distance between the target head and the substrate stage, thereby controlling the height, spacing and angle of the target head sputtering, and controlling the uniformity of the coating. Attached Figure Description

[0017] Figure 1 This is a structural diagram of the horizontally movable magnetic target of this utility model.

[0018] Figure 2 This is a cross-sectional view of the horizontally movable magnetic target of this utility model.

[0019] Figure 3 yes Figure 1 Top view.

[0020] Figure 4 yes Figure 1 AA view.

[0021] Figure 5 This is a structural diagram of the translation template of this utility model.

[0022] Figure 6 yes Figure 5 BB view.

[0023] Figure 7 This is a structural diagram of the vacuum coating equipment of this utility model.

[0024] In the diagram: 1. Water and electricity connection structure; 2. Translation template; 3. Target tube; 4. Angle adjustment mechanism; 5. Target head; 6. Vacuum chamber; 7. Lifting and rotating substrate stage; 8. First sealing ring; 9. Second sealing ring; 1-1. Water and electricity connection cover; 1-2. Power connector; 1-3. Water connector; 1-4. Cover flange; 2-1. Adjustment cavity; 2-2. Template flange; 2-3. Adjustment slot; 2-3-1. Groove; 2-3-2. Protrusion; 3-1. Clip connector; 4-1. Bellows; 4-2. First adjustment plate; 4-3. Second adjustment plate; 4-4. Adjustment hole; 4-5. Positioning pin. Detailed Implementation

[0025] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0026] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] Example 1 This embodiment is a horizontally movable magnetically controlled target, whose structure mainly includes a water and electricity connection structure 1, a translation template 2, a target tube 3, and a target head 5.

[0028] In the vacuum coating equipment, the target head 5 is located inside the vacuum chamber 6. The water and electricity connection structure 1 is located above the top plate of the vacuum chamber 6. The target tube 3 passes through the top plate of the vacuum chamber 6 and connects the water and electricity connection structure 1 and the target head 5. The power cord and cooling water pipe of the target head 5 pass through the target tube 3 and are connected to the external power supply and water pipe through the water and electricity connection structure 1.

[0029] The water and electricity connection structure 1 specifically includes a water and electricity connection cover 1-1 with an opening at the lower end. A power connector 1-2 and a water connector 1-3 are installed on the top plate of the water and electricity connection cover 1-1. Both the power connector 1-2 and the water connector 1-3 are existing structures, enabling quick connection of the power cord and water pipe. There is a certain distance between the top plate and the lower end of the water and electricity connection cover 1-1 to accommodate the installation of different power connectors 1-2 and water connectors 1-3. The power connector 1-2 and the water connector 1-3 pass through the top plate of the water and electricity connection cover 1-1 and form a sealed connection with it.

[0030] A translation template 2 is provided below the water and electricity connection structure 1. The upper end face of the translation template 2 is sealed to the lower end of the water and electricity connection cover 1-1, while the lower end face of the translation template 2 is sealed to the top plate of the vacuum chamber 6. The inner cavity of the water and electricity connection cover 1-1 is connected to the inner cavity of the vacuum chamber 6 to form a sealed cavity.

[0031] An elongated oblong adjustment cavity 2-1 is provided inside the translation template 2. The adjustment cavity 2-1 extends through the entire translation template 2 from top to bottom. The outer ring of the translation template 2 is the template flange 2-2.

[0032] The cross-section of the water and electricity connection cover 1-1 is also an elongated oval structure. A cover flange 1-4 is provided at the lower end of the water and electricity connection cover 1-1. The cover flange 1-4 is the same shape and size as the template flange 2-2. Several connection holes are opened on the cover flange 1-4 and the template flange 2-2 respectively. After the bolt passes through the connection holes on the cover flange 1-4 and the template flange 2-2, it is connected to the top plate of the vacuum chamber 6.

[0033] To ensure the airtightness between the water and electricity connection cover 1-1, the sliding template 2, and the top plate of the vacuum chamber 6, a first sealing ring 8 is provided on the contact surface between the cover flange 1-4 and the template flange 2-2, and a second sealing ring 9 is provided on the lower end face of the template flange 2-2. These sealing rings ensure the airtightness of the flange connection surfaces. With this structure, adjusting the position of the target tube 3 will not affect the sealing structure, thus avoiding damage to the sealing structure during adjustment.

[0034] The target tube 3 is a circular tube structure. The diameter of the target tube 3 is less than or equal to the diameter of the arc segment at the end of the adjustment cavity 2-1, so that the end of the target tube 3 is located inside the adjustment cavity 2-1 and can move horizontally along the length of the adjustment cavity 2-1.

[0035] An adjustment slot 2-3 is provided on the straight section side wall of the adjustment cavity 2-1, and a clamping connector 3-1 is provided on the upper outer wall of the target tube 3. The clamping connector 3-1 is clamped in the adjustment slot 2-3.

[0036] To ensure the stability of the connection, adjustment slots 2-3 are generally provided on the straight section sidewalls on both sides of the adjustment cavity 2-1. Correspondingly, clamping connectors 3-1 are provided on both sides of the upper end of the target tube 3. The two clamping connectors 3-1 are respectively clamped into the adjustment slots 2-3 on both sides.

[0037] The adjustment slot 2-3 has a specific structure including a slot body 2-3-1 and protrusions 2-3-2. The slot body 2-3-1 is opened along the side wall of the straight section of the adjustment cavity 2-1. Several protrusions 2-3-2 are evenly arranged along the length of the slot body 2-3-1 on the inner edge of the slot body 2-3-1. A gap is formed between two adjacent protrusions 2-3-2. The locking connector 3-1 is locked in the gap between two adjacent protrusions 2-3-2.

[0038] The clamp connector 3-1 can be a T-shaped structure. The rear end of the clamp connector 3-1 is located in the gap between the protrusions 2-3-2, and the front end of the clamp connector 3-1 is located inside the groove 2-3-1. The end of the clamp connector 3-1 contacts the outer edge of the groove 2-3-1, and both clamp connectors 3-1 simultaneously contact the side wall of the groove 2-3-1, which can restrict the rotation of the target tube 3.

[0039] The spacing between two adjacent gaps can be set to 5mm, and the minimum distance that the target tube 3 and the target body move along the adjustment cavity 2-1 is 5mm.

[0040] The target head 5 is generally a circular target head 5, which is directly or indirectly connected to the lower end of the target tube 3.

[0041] To facilitate the adjustment of the angle of the target head 5, an angle adjustment mechanism 4 is provided between the lower end of the target tube 3 and the target head 5.

[0042] The angle adjustment mechanism 4 specifically includes a bellows 4-1, a first adjustment plate 4-2, and a second adjustment plate 4-3. The upper and lower ends of the bellows 4-1 are connected to the lower end of the target tube 3 and the upper end of the target head 5 respectively via flanges. The first adjustment plate 4-2 is fixedly connected to the flange at the upper end of the bellows 4-1, and the second adjustment plate 4-3 is fixedly connected to the flange at the lower end of the bellows 4-1. The first adjustment plate 4-2 and the second adjustment plate 4-3 are rotatably connected by a pin. The first adjustment plate 4-2 and the second adjustment plate 4-3 are respectively provided with fan-shaped adjustment holes 4-4 and positioning pins 4-5 corresponding to the adjustment holes 4-4. There are several adjustment holes 4-4, which are evenly distributed around the pins.

[0043] When adjusting the angle, the target head 5 and the second adjusting plate 4-3 are rotated around the pin shaft by a certain angle. The positioning pin 4-5 corresponds to one of the adjusting holes 4-4. The positioning pin 4-5 is inserted into the adjusting hole 4-4 to fix the angle of the target head 5.

[0044] Example 2 This embodiment is a vacuum coating device, including a vacuum chamber 6. A horizontally movable magnetron target, as disclosed in one embodiment, is disposed on the top plate of the vacuum chamber 6. A translation template 2 and a water and electricity connection structure 1 are installed on the top plate of the vacuum chamber 6. The target tube 3 extends into the cavity of the vacuum chamber 6 through a through hole in the top plate of the vacuum chamber 6. The target head 5 is installed at the lower end of the target tube 3 through an angle adjustment mechanism 4.

[0045] In this embodiment, the vacuum chamber 6 has a cylindrical structure and adopts a three-target structure. That is, the inner cavity of the vacuum chamber 6 is a vertical cylindrical cavity, and three horizontally movable magnetic targets are installed on the vacuum chamber 6. The three magnetic targets are evenly distributed around the center of the vacuum chamber 6. The length direction of the adjustment cavity 2-1 of the three horizontally movable magnetic targets is the radial direction of the inner cavity of the vacuum chamber 6. When the position of the target tube 3 is adjusted along the adjustment cavity 2-1, the distance from the target head 5 to the center of the inner cavity of the vacuum chamber 6 can be adjusted.

[0046] In addition, a lifting and rotating substrate stage 7 is provided on the bottom plate of the vacuum chamber 6. The lifting and rotating substrate stage 7 is existing technology and can realize the lifting and rotation of the substrate stage.

[0047] In this embodiment, the horizontally movable magnetron target, the angle adjustment mechanism 4, and the lifting and rotating substrate stage 7 work together to adjust the distance from the target head 5 to the center of the vacuum chamber 6, the angle of the target head 5, and the distance between the target head 5 and the substrate stage, thereby enabling control over the sputtering height, spacing, and angle of the target head 5.

[0048] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A horizontally movable magnetically controlled target, characterized in that, include A water and electricity connection structure includes a water and electricity connection cover with an opening at the lower end, and a power connector and a water connector are provided on the water and electricity connection cover; The translation template is sealed to the lower port of the water and electricity connection cover. An elongated oval-shaped adjustment cavity is provided inside the translation template. An adjustment slot is provided on one or two straight sections of the side wall of the adjustment cavity. The lower end face of the translation template is used to seal to the top plate of the vacuum chamber. The target tube has a snap-fit ​​connector at its upper end, which is snapped into the adjustment slot. The target head is directly or indirectly connected to the lower end of the target tube.

2. The horizontally movable magnetically controlled target according to claim 1, characterized in that, A cover flange is provided at the lower port of the water and electricity connection cover, a template flange is provided on the outside of the translation template, a first sealing ring is provided on the contact surface between the cover flange and the template flange, and a second sealing ring is provided on the lower end face of the template flange.

3. The horizontally movable magnetically controlled target according to claim 1, characterized in that, The target tube has a circular cross-section, and its diameter is less than or equal to the diameter of the arc segment at the end of the adjustment cavity.

4. The horizontally movable magnetically controlled target according to claim 1, characterized in that, The adjustment slot includes a groove and protrusions. The groove is opened along the side wall of the straight section of the adjustment cavity. Several protrusions are evenly arranged on the inner edge of the groove along the length of the groove. The locking connector is engaged in the gap between two adjacent protrusions.

5. The horizontally movable magnetically controlled target according to claim 1, characterized in that, The connector has a T-shaped structure.

6. The horizontally movable magnetically controlled target according to claim 1, characterized in that, The lower end of the target tube and the target head are connected by an angle adjustment mechanism.

7. The horizontally movable magnetically controlled target according to claim 6, characterized in that, The angle adjustment mechanism includes a bellows, a first adjustment plate, and a second adjustment plate. The upper and lower ends of the bellows are connected to the lower end of the target tube and the upper end of the target head respectively through flanges. The first adjustment plate is fixedly connected to the flange at the upper end of the bellows, and the second adjustment plate is fixedly connected to the flange at the lower end of the bellows. The first adjustment plate and the second adjustment plate are rotatably connected. The first adjustment plate and the second adjustment plate are respectively provided with fan-shaped adjustment holes and positioning pins corresponding to the adjustment holes.

8. A vacuum coating apparatus, comprising a vacuum chamber, characterized in that, A horizontally movable magnetron target as described in any one of claims 1 to 7 is provided on the top plate of the vacuum chamber.

9. The vacuum coating equipment according to claim 8, characterized in that, A lifting and rotating substrate stage is provided on the bottom plate of the vacuum chamber.

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