Piezoelectric liquid pump and electronic device

Abstract

The application relates to the technical field of pumping liquid, and proposes a piezoelectric liquid pump and electronic equipment. The piezoelectric liquid pump comprises a driving assembly, a first supporting plate, a valve plate connected with the first supporting plate, a second supporting plate and a bottom plate connected with the second supporting plate. The driving assembly comprises a piezoelectric vibrator and a cavity plate provided with a through hole. The piezoelectric vibrator covers one side of the through hole to form a pump cavity. The bottom plate is provided with a liquid inlet and a liquid outlet which are in communication with the pump cavity. The valve plate is provided with at least a first one-way valve and a second one-way valve. The first supporting plate is provided with a first flow guide hole and a second flow guide hole. The second supporting plate is provided with a third flow guide hole and a fourth flow guide hole. The second flow guide hole comprises a plurality of through holes or / and the third flow guide hole comprises a plurality of through holes. A valve plate of the first one-way valve can cover the third flow guide hole, and a valve plate of the second one-way valve can cover the second flow guide hole. The piezoelectric liquid pump can realize the coexistence of high flow and high back pressure, and the comprehensive performance of the piezoelectric liquid pump is improved.

Description

Technical Field

[0001] This application relates to the field of pump technology, and in particular to a piezoelectric hydraulic pump and electronic device. Background Technology

[0002] Piezoelectric pumps are a new type of fluid transport device that uses piezoelectric vibrators as drivers. They are widely used in electronic devices such as medical devices, laboratory instruments, and consumer electronics.

[0003] However, traditional piezoelectric pumps still have shortcomings that need to be addressed. For example, there is a traditional trade-off between the flow rate and back pressure of a piezoelectric pump. The flow rate of the piezoelectric pump is used to represent the amount of liquid that the piezoelectric pump can deliver per unit time. This trade-off can be specifically expressed as follows: increasing the back pressure of the piezoelectric pump usually leads to a decrease in the flow rate; conversely, increasing the flow rate usually leads to a decrease in the back pressure. This significantly limits the overall performance of the piezoelectric pump. Utility Model Content

[0004] In view of this, embodiments of this application provide a piezoelectric hydraulic pump and electronic device to solve the problem that piezoelectric pumps in the prior art cannot simultaneously achieve "high flow rate" and "high back pressure".

[0005] The first aspect of this application discloses a piezoelectric hydraulic pump, comprising: a drive assembly, a first support plate, a valve plate, a second support plate, and a base plate; the drive assembly includes a piezoelectric vibrator and a cavity plate, the cavity plate having a through hole, the piezoelectric vibrator covering one side of the through hole to form a pump cavity, the piezoelectric vibrator being used to vibrate to change the volume of the pump cavity; the first support plate is connected to the cavity plate; the valve plate is connected to the first support plate; the second support plate is disposed on the side of the valve plate opposite to the drive assembly; the base plate is connected to the second support plate, the base plate having an inlet and an outlet, the inlet communicating with the pump cavity, and the outlet communicating with the pump cavity; In the valve plate, there are at least two one-way valves, including a first one-way valve and a second one-way valve. The first one-way valve is a one-way valve corresponding to the liquid inlet, and the second one-way valve is a one-way valve corresponding to the liquid outlet. The first support plate has a first guide hole corresponding to the liquid inlet and a second guide hole corresponding to the liquid outlet. The second support plate has a third guide hole corresponding to the liquid inlet and a fourth guide hole corresponding to the liquid outlet. The second guide hole includes multiple through holes, and / or the third guide hole includes multiple through holes. The valve plate of the first one-way valve can cover the third guide hole, and the valve plate of the second one-way valve can cover the second guide hole.

[0006] The beneficial effects of the piezoelectric hydraulic pump provided in this application embodiment are as follows: The piezoelectric hydraulic pump in this application embodiment includes: a drive assembly, a first support plate, a valve plate, a second support plate, and a base plate. The drive assembly includes a piezoelectric vibrator and a cavity plate. The cavity plate has a through hole, and the piezoelectric vibrator covers one side of the through hole to form a pump cavity. The piezoelectric vibrator is used to vibrate to change the volume of the pump cavity. The first support plate is connected to the cavity plate. The valve plate is connected to the first support plate. The second support plate is disposed on the side of the valve plate opposite to the drive assembly. The base plate is connected to the second support plate. The base plate has an inlet and an outlet. The inlet is connected to the pump cavity, and the outlet is connected to the pump cavity. Each valve plate is provided with at least two check valves, including a first check valve and a second check valve. The first check valve is a check valve corresponding to the liquid inlet, and the second check valve is a check valve corresponding to the liquid outlet. The first support plate is provided with a first guide hole corresponding to the liquid inlet and a second guide hole corresponding to the liquid outlet. The second support plate is provided with a third guide hole corresponding to the liquid inlet and a fourth guide hole corresponding to the liquid outlet. The second guide hole includes multiple through holes and / or the third guide hole includes multiple through holes. The valve plate of the first check valve can cover the third guide hole, and the valve plate of the second check valve can cover the second guide hole. When the volume of the pump chamber increases, the pressure inside the pump chamber decreases, thereby driving the first check valve to open, allowing liquid to flow into the pump chamber sequentially from the inlet, the third guide hole, the first check valve, and the first guide hole (at this time, the second check valve is closed); when the volume of the pump chamber decreases, the pressure inside the pump chamber increases, thereby driving the second check valve to open, allowing liquid to flow out of the piezoelectric hydraulic pump sequentially from the pump chamber, the second guide hole, the second check valve, the fourth guide hole, and the outlet (at this time, the first check valve is closed). When the third guide hole includes multiple through holes, within the limited space of the piezoelectric hydraulic pump (support plate), the diameter of each through hole constituting the third guide hole in the second support plate of the piezoelectric hydraulic pump of this application is relatively small; when the second guide hole includes multiple through holes, the diameter of each through hole constituting the second guide hole in the first support plate of the piezoelectric hydraulic pump of this application is relatively small. Because the diameter of each through-hole constituting the third flow guide orifice and / or the diameter of each through-hole constituting the second flow guide orifice in the piezoelectric hydraulic pump of this application is small, the back pressure of the piezoelectric hydraulic pump can be effectively increased. Furthermore, since the third flow guide orifice and / or the second flow guide orifice of the piezoelectric hydraulic pump of this application are composed of multiple through-holes, i.e., the number of through-holes corresponding to the third flow guide or / or the second flow guide orifice is greater than one, the flow rate of the piezoelectric hydraulic pump can be effectively increased. Therefore, the piezoelectric hydraulic pump in the embodiments of this application can achieve both "high flow rate" and "high back pressure," significantly improving the overall performance of the piezoelectric hydraulic pump.

[0007] In some embodiments, the second guide hole includes a plurality of through holes, and the plurality of through holes constituting the second guide hole are uniformly distributed, symmetrically distributed, or non-uniformly distributed; or / and the third guide hole includes a plurality of through holes, and the plurality of through holes constituting the third guide hole are uniformly distributed, symmetrically distributed, or non-uniformly distributed.

[0008] In some embodiments, the symmetrical distribution of the plurality of through holes constituting the second flow guide hole includes: the plurality of through holes constituting the second flow guide hole being symmetrically distributed in a rectangular shape, an annular shape, or a honeycomb shape; the symmetrical distribution of the plurality of through holes constituting the third flow guide hole includes: the plurality of through holes constituting the third flow guide hole being symmetrically distributed in a rectangular shape, an annular shape, or a honeycomb shape.

[0009] In some embodiments, the inlet includes a plurality of through holes, and the outlet includes a plurality of through holes.

[0010] In some embodiments, the plurality of through holes constituting the liquid inlet are uniformly distributed, symmetrically distributed, or non-uniformly distributed; the plurality of through holes constituting the liquid outlet are uniformly distributed, symmetrically distributed, or non-uniformly distributed.

[0011] In some embodiments, the symmetrical distribution of the plurality of through holes constituting the liquid inlet includes: the plurality of through holes constituting the liquid inlet being symmetrically distributed in a rectangular shape, an annular shape, or a honeycomb shape; the symmetrical distribution of the plurality of through holes constituting the liquid outlet includes: the plurality of through holes constituting the liquid outlet being symmetrically distributed in a rectangular shape, an annular shape, or a honeycomb shape.

[0012] In some embodiments, the third guide hole includes a plurality of through holes, the liquid inlet includes a plurality of through holes, the distribution of the plurality of through holes constituting the liquid inlet is the same as the distribution of the plurality of through holes constituting the third guide hole, the plurality of through holes constituting the liquid inlet is located directly below the plurality of through holes constituting the third guide hole, and the diameter of each through hole constituting the liquid inlet is the same as the diameter of each through hole constituting the third guide hole.

[0013] In some embodiments, the second guide hole includes a plurality of through holes, the liquid outlet includes a plurality of through holes, and the distribution of the plurality of through holes constituting the third guide hole, the distribution of the plurality of through holes constituting the second guide hole, the distribution of the plurality of through holes constituting the liquid inlet, and the distribution of the plurality of through holes constituting the liquid outlet are the same. The aperture of each through hole constituting the third guide hole, the aperture of each through hole constituting the second guide hole, the aperture of each through hole constituting the liquid inlet, and the aperture of each through hole constituting the liquid outlet are the same.

[0014] In some embodiments, the second flow guide hole includes a plurality of through holes, and the diameter of each through hole constituting the second flow guide hole is in the range of 0.1 mm to 0.8 mm; or / and, the third flow guide hole includes a plurality of through holes, and the diameter of each through hole constituting the third flow guide hole is in the range of 0.1 mm to 0.8 mm.

[0015] A second aspect of this application provides an electronic device comprising the aforementioned piezoelectric pump.

[0016] The electronic device employs any one or more embodiments of the piezoelectric pump described above, and thus has the beneficial effects of the embodiments described above, which will not be elaborated further here.

[0017] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is an exploded structural diagram of a piezoelectric hydraulic pump provided in some embodiments of this application.

[0020] The markings in the diagram mean:

[0021] 10. Piezoelectric hydraulic pump; 101. Drive assembly; 102. First support plate; 103. Valve plate; 104. Second support plate; 105. Base plate;

[0022] 1011, Piezoelectric vibrator; 1012, Cavity plate; 10121, Through hole; 1051, Liquid inlet; 1052, Liquid outlet; 1031, First check valve; 1032, Second check valve; 1021, First guide hole; 1022, Second guide hole; 1041, Third guide hole; 1042, Fourth guide hole; 10111, Piezoelectric ceramic layer; 10112, Metal substrate; 1013, Plastic layer. Detailed Implementation

[0023] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion.

[0025] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0026] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0027] In the description of the embodiments in this application, the terms "or / and" and "or / and" are merely descriptions of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. In addition, the character " / " in this document generally indicates that the related objects before and after are in an "or" relationship.

[0028] In the description of the embodiments of this application, the term "multiple" refers to two or more (including two), similarly, "multiple sets" refers to two or more (including two sets), and "multiple pieces" refers to two or more (including two pieces).

[0029] In the description of the embodiments of this application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0030] In the description of the embodiments of this application, unless otherwise expressly specified and limited, technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.

[0031] Currently, traditional piezoelectric pumps consist of multiple stacked plates (e.g., a first support plate, a valve plate, a second support plate, and a base plate). The base plate typically has an inlet and an outlet, both of which are single-hole structures. The traditional first support plate and the traditional second support plate each have a corresponding single hole. These, combined with a valve on the valve plate, form a liquid channel. However, there is a traditional trade-off between the flow rate and back pressure of this type of piezoelectric pump. The flow rate represents the amount of liquid the pump can deliver per unit time. This trade-off manifests as follows: increasing the back pressure usually leads to a decrease in flow rate; conversely, increasing the flow rate usually leads to a decrease in back pressure. In other words, existing piezoelectric pumps cannot simultaneously achieve both high flow rate and high back pressure, which significantly limits their overall performance.

[0032] To address the problem that existing piezoelectric pumps cannot simultaneously achieve both "high flow rate" and "high back pressure," the first aspect of this application provides a piezoelectric hydraulic pump.

[0033] Please see Figure 1 This application proposes a piezoelectric hydraulic pump 10, which includes a drive assembly 101, a first support plate 102, a valve plate 103, a second support plate 104, and a base plate 105.

[0034] The drive assembly 101 includes a piezoelectric vibrator 1011 and a cavity plate 1012. The cavity plate 1012 has a through hole 10121. The piezoelectric vibrator 1011 covers one side of the through hole 10121 to form a pump cavity. The piezoelectric vibrator 1011 is used to vibrate to change the volume of the pump cavity. A first support plate 102 is connected to the cavity plate 1012. A valve plate 103 is connected to the first support plate 102 and is provided with at least two one-way valves. A second support plate 104 is provided on the side of the valve plate 103 away from the drive assembly 101. A base plate 105 is connected to the second support plate 104 and is provided with an inlet 1051 and an outlet 1052. The inlet 1051 is connected to the pump cavity, and the outlet 1052 is connected to the pump cavity.

[0035] The valve plate 103 is provided with at least two check valves, which can be active or passive valves. The at least two check valves include a first check valve 1031 and a second check valve 1032. The first check valve 1031 is a check valve corresponding to the inlet 1051, and the second check valve 1032 is a check valve corresponding to the outlet 1052. The first support plate 102 is provided with a first guide hole 1021 corresponding to the inlet 1051 and a guide hole 1032 corresponding to the outlet 1051. The second guide hole 1022 is corresponding to 52. The second support plate 103 is provided with a third guide hole 1041 corresponding to the liquid inlet 1051 and a fourth guide hole 1042 corresponding to the liquid outlet 1052. The second guide hole 1022 includes multiple through holes and / or the third guide hole 1041 includes multiple through holes. The valve plate of the first one-way valve 1031 can cover the third guide hole 1041, and the valve plate of the second one-way valve 1032 can cover the second guide hole 1022.

[0036] Understandably, the drive assembly 101 includes a piezoelectric vibrator 1011 and a cavity plate 1012. The cavity plate 1012 is provided with a through hole 10121. The piezoelectric vibrator 1011 covers one side of the through hole 10121 to form a pump cavity. The piezoelectric vibrator 1011 is a structure with piezoelectric effect. When an electric field is applied, the piezoelectric vibrator 1011 will deform, that is, the piezoelectric vibrator 1011 will vibrate, so that the volume of the pump cavity will change, thereby causing the liquid to flow in the piezoelectric liquid pump 10.

[0037] For example, the drive assembly 101 is positioned above the first support plate 102, and the first support plate 102, valve plate 103, second support plate 104, and base plate 105 are stacked sequentially. When the piezoelectric vibrator 1011 expands and deforms away from the valve plate 103 under the action of the electric field, the volume of the pump chamber increases, resulting in a decrease in pressure within the pump chamber, causing liquid to be drawn into the pump chamber from the inlet 1051; when the piezoelectric vibrator 1011 expands and deforms towards the valve plate 103 under the action of the electric field, the volume of the pump chamber decreases, resulting in an increase in pressure within the pump chamber, causing liquid to flow out from the outlet 1052.

[0038] Understandably, the first support plate 102, valve plate 103, second support plate 104, and base plate 105 are stacked sequentially. It can be considered that the first support plate 102 is located above the valve plate 103, the second support plate 104 is located below the valve plate 103, the base plate 105 is located below the second support plate 104, the first guide hole 1021 is located above the first one-way valve 1031, the third guide hole 1041 is located below the first one-way valve 1031, the second guide hole 1022 is located above the second one-way valve 1032, and the fourth guide hole 1042 is located below the second one-way valve 1032. The third guide hole 1041 is used to provide a limit when the first check valve 1031 is closed; the second guide hole 1022 is used to provide a limit when the second check valve 1032 is closed; the first guide hole 1021 is used to provide movement space for the valve plate of the first check valve 1031 (for example, the valve plate of the first check valve 1031 can extend into the first guide hole 1021), and the fourth guide hole 1042 is used to provide movement space for the valve plate of the second check valve 1032 (for example, the valve plate of the second check valve 1032 can extend into the fourth guide hole 1042). The shape, position, and size of the first guide hole 1021 must meet the movement requirements of the valve plate of the first check valve 1031, and the shape, position, and size of the fourth guide hole 1042 must meet the movement requirements of the valve plate of the second check valve 1032.

[0039] The beneficial effects of the piezoelectric hydraulic pump provided in this application embodiment are as follows: The piezoelectric hydraulic pump in this application embodiment includes: a drive assembly, a first support plate, a valve plate, a second support plate, and a base plate. The drive assembly includes a piezoelectric vibrator and a cavity plate. The cavity plate has a through hole, and the piezoelectric vibrator covers one side of the through hole to form a pump cavity. The piezoelectric vibrator is used to vibrate to change the volume of the pump cavity. The first support plate is connected to the cavity plate. The valve plate is connected to the first support plate. The second support plate is disposed on the side of the valve plate opposite to the drive assembly. The base plate is connected to the second support plate. The base plate has an inlet and an outlet. The inlet is connected to the pump cavity, and the outlet is connected to the pump cavity. Each valve plate is provided with at least two check valves, including a first check valve and a second check valve. The first check valve is a check valve corresponding to the liquid inlet, and the second check valve is a check valve corresponding to the liquid outlet. The first support plate is provided with a first guide hole corresponding to the liquid inlet and a second guide hole corresponding to the liquid outlet. The second support plate is provided with a third guide hole corresponding to the liquid inlet and a fourth guide hole corresponding to the liquid outlet. The second guide hole includes multiple through holes and / or the third guide hole includes multiple through holes. The valve plate of the first check valve can cover the third guide hole, and the valve plate of the second check valve can cover the second guide hole. When the volume of the pump chamber increases, the pressure inside the pump chamber decreases, thereby driving the first check valve to open, allowing liquid to flow into the pump chamber sequentially from the inlet, the third guide hole, the first check valve, and the first guide hole (at this time, the second check valve is closed); when the volume of the pump chamber decreases, the pressure inside the pump chamber increases, thereby driving the second check valve to open, allowing liquid to flow out of the piezoelectric hydraulic pump sequentially from the pump chamber, the second guide hole, the second check valve, the fourth guide hole, and the outlet (at this time, the first check valve is closed). When the third guide hole includes multiple through holes, in the limited space of the piezoelectric hydraulic pump (support plate), the diameter of each through hole constituting the third guide hole in the second support plate of the piezoelectric hydraulic pump of this application is necessarily smaller than the diameter of a single hole corresponding to the inlet in a conventional second support plate; when the second guide hole includes multiple through holes, the diameter of each through hole constituting the second guide hole in the first support plate of the piezoelectric hydraulic pump of this application is necessarily smaller than the diameter of a single hole corresponding to the outlet in a conventional first support plate. Because the diameter of each through-hole constituting the third flow guide orifice and / or the diameter of each through-hole constituting the second flow guide orifice in the piezoelectric hydraulic pump of this application is small, the back pressure of the piezoelectric hydraulic pump can be effectively increased. Furthermore, since the third flow guide orifice and / or the second flow guide orifice of the piezoelectric hydraulic pump of this application are composed of multiple through-holes, i.e., the number of through-holes corresponding to the third flow guide or / or the second flow guide orifice is greater than one, the flow rate of the piezoelectric hydraulic pump can be effectively increased. Therefore, the piezoelectric hydraulic pump in the embodiments of this application can achieve both "high flow rate" and "high back pressure," significantly improving the overall performance of the piezoelectric hydraulic pump.

[0040] Understandably, this application does not limit the shape of the through-hole described herein. By way of example and not limitation, the shape of the through-hole described herein may be any of the following: circular, rectangular, or rhomboid.

[0041] In some embodiments, the piezoelectric vibrator 1011 includes a piezoelectric ceramic layer 10111 and a metal substrate 10112. The piezoelectric ceramic layer 10111 and the metal substrate 10112 are bonded together. The piezoelectric ceramic layer 10111 is disposed on the side of the metal substrate 10112 away from the valve plate 103. The metal substrate 10112 is directly or indirectly connected to the cavity plate 1012. The piezoelectric ceramic layer will deform under the action of an electric field, and this deformation will cause the metal substrate to deform.

[0042] By way of example and not limitation, the metal material corresponding to the metal substrate 10112 can be aluminum or copper. The center of the surface of the metal substrate 10112 that is in contact with the piezoelectric ceramic layer 10111, and the center of the surface of the piezoelectric ceramic layer 10111 that is in contact with the metal substrate 10112, are both on the central axis of the through hole 10121. This application does not limit the shape of the piezoelectric ceramic layer 10111 and the metal substrate 10112. For example, the surface of the piezoelectric ceramic layer 10111 that is in contact with the metal substrate 10112 can be circular or elliptical, and the surface of the metal substrate 10112 that is in contact with the piezoelectric ceramic layer 10111 can be circular, elliptical, or square.

[0043] In some embodiments, the area of ​​the surface of the piezoelectric ceramic layer 10111 that is in contact with the metal substrate 10112 is smaller than the area of ​​the cross-section of the through hole 10121. In this way, the vibration of the piezoelectric ceramic layer 10111 can be effectively prevented from being restricted by the through hole 10121.

[0044] In some embodiments, the drive assembly 101 further includes a plastic layer 1013 disposed between the metal substrate 10112 and the cavity plate 1012 to achieve insulation between the metal substrate 10112 and the cavity plate 1012.

[0045] Optionally, the second guide hole 1022 includes a plurality of through holes, and the plurality of through holes constituting the second guide hole 1022 are evenly distributed, symmetrically distributed, or unevenly distributed; or / and, the third guide hole 1041 includes a plurality of through holes, and the plurality of through holes constituting the third guide hole 1041 are evenly distributed, symmetrically distributed, or unevenly distributed.

[0046] In this embodiment, a uniform or symmetrical distribution of multiple through holes helps reduce or even avoid uneven stress distribution and deformation of the valve plate of the check valve, thus avoiding negative impacts on the opening / closing response characteristics and sealing effect of the check valve. When the multiple through holes are unevenly distributed, the unevenly distributed through holes can cooperate with the check valve to control the deflection of liquid flow.

[0047] In this document, "uniformly distributed through holes" means that the through holes are distributed at equal intervals. Conversely, "non-uniformly distributed through holes" means that the spacing between adjacent through holes is not entirely the same. Each adjacent through hole spacing refers to the distance between a single through hole and its adjacent through hole, where the adjacent through hole is the one closest to the single through hole. For example, the plurality of through holes includes through hole a1, through hole a2, through hole a3 and through hole a4, wherein the through hole closest to through hole a1 is through hole a2 (i.e., through hole a2 is the adjacent through hole of through hole a1), and the distance between through hole a1 and through hole a2 can be recorded as the adjacent through hole spacing L1. The through hole closest to through hole a3 is through hole a4 (i.e., through hole a4 is the adjacent through hole of through hole a3), and the distance between through hole a3 and through hole a4 can be recorded as the adjacent through hole spacing L2. The adjacent through hole spacing L1 and the adjacent through hole spacing L2 are not equal, that is, through holes a1, through hole a2, through hole a3 and through hole a4 are unevenly distributed.

[0048] As an example, and not a limitation, please refer to Figure 1 The plurality of through holes constituting the second guide hole 1022 includes 7 through holes, which are evenly distributed, i.e., uniformly distributed. The second one-way valve is a passive valve. The plurality of through holes constituting the third guide hole 1041 includes 7 through holes, which are evenly distributed, i.e. uniformly distributed. The first one-way valve is a passive valve. For example, the passive valve can be any of the following: umbrella valve, diaphragm valve, cantilever beam valve, wheel valve.

[0049] Furthermore, the symmetrical distribution of the multiple through holes constituting the second guide hole 1022 means that the multiple through holes constituting the second guide hole 1022 are symmetrically distributed on both sides of the first reference surface, the first reference surface being a surface perpendicular to the first support plate 102, and the central axis of the fourth guide hole 1042 being on the first reference surface; the symmetrical distribution of the multiple through holes constituting the third guide hole 1041 means that the multiple through holes constituting the third guide hole 1041 are symmetrically distributed on both sides of the second reference surface, the second reference surface being a surface perpendicular to the second support plate 103, and the central axis of the first guide hole 1021 being on the second reference surface.

[0050] In some embodiments, the symmetrical distribution of the plurality of through holes constituting the second guide hole 1022 includes: the plurality of through holes constituting the second guide hole 1022 being symmetrically distributed in a rectangular, annular, or honeycomb pattern; the symmetrical distribution of the plurality of through holes constituting the third guide hole 1041 includes: the plurality of through holes constituting the third guide hole 1041 being symmetrically distributed in a rectangular, annular, or honeycomb pattern.

[0051] The rectangular symmetrical distribution of the multiple through holes constituting the second flow guide hole 1022, as described herein, means that the lines connecting the centers of the multiple through holes constituting the second flow guide hole 1022 can form a rectangle and the axis of symmetry of the rectangle is located on the first reference plane; the annular symmetrical distribution of the multiple through holes constituting the second flow guide hole 1022, as described herein, means that the lines connecting the centers of the multiple through holes constituting the second flow guide hole 1022 can form an annulus and the axis of symmetry of the annulus is located on the first reference plane; the honeycomb symmetrical distribution of the multiple through holes constituting the second flow guide hole 1022, as described herein, means that the lines connecting the centers of the multiple through holes constituting the second flow guide hole 1022 can form a honeycomb shape and the axis of symmetry of the honeycomb shape is located on the first reference plane.

[0052] The rectangular symmetrical distribution of the multiple through holes constituting the third flow guide hole 1041, as described herein, means that the lines connecting the centers of the multiple through holes constituting the third flow guide hole 1041 can form a rectangle, and the axis of symmetry of the rectangle is located on the second reference plane; the annular symmetrical distribution of the multiple through holes constituting the third flow guide hole 1041, as described herein, means that the lines connecting the centers of the multiple through holes constituting the third flow guide hole 1041 can form an annulus, and the axis of symmetry of the annulus is located on the second reference plane; the honeycomb symmetrical distribution of the multiple through holes constituting the third flow guide hole 1041, as described herein, means that the lines connecting the centers of the multiple through holes constituting the third flow guide hole 1041 can form a honeycomb shape, and the axis of symmetry of the honeycomb shape is located on the second reference plane.

[0053] Optionally, the second guide hole 1022 includes a plurality of through holes, and the diameter of each through hole constituting the second guide hole 1022 is in the range of 0.1 mm to 0.8 mm; or / and, the third guide hole 1041 includes a plurality of through holes, and the diameter of each through hole constituting the third guide hole 1041 is in the range of 0.1 mm to 0.8 mm.

[0054] By way of example and not limitation, the second flow guide hole 1022 includes a plurality of through holes, the diameter of each through hole constituting the second flow guide hole 1022 being in the range of [0.1, 0.8] mm, and the diameter of each through hole constituting the second flow guide hole 1022 being the same; or / and, the third flow guide hole 1041 includes a plurality of through holes, the diameter of each through hole constituting the third flow guide hole 1041 being in the range of [0.1, 0.8] mm, and the diameter of each through hole constituting the third flow guide hole 1041 being the same.

[0055] Optionally, the liquid inlet 1051 includes multiple through holes, and the liquid outlet 1052 includes multiple through holes.

[0056] By way of example and not limitation, the liquid inlet 1051 includes a plurality of through holes, the diameter of each through hole constituting the liquid inlet 1051 being in the range of [0.1, 0.8] mm, and the diameter of each through hole constituting the liquid inlet 1051 being the same; the liquid outlet 1052 includes a plurality of through holes, the diameter of each through hole constituting the liquid outlet 1052 being in the range of [0.1, 0.8] mm, and the diameter of each through hole constituting the liquid outlet 1052 being the same.

[0057] As mentioned earlier, the "single-hole structure" of traditional piezoelectric pumps leads to high flow velocities when liquid enters and exits the pump chamber, easily forming turbulence and vortices, resulting in significant hydraulic losses and noise. In contrast, the "multi-hole structure" of the piezoelectric pump in this application disperses the liquid into multiple low-velocity, stable flows, making the liquid flow laminar and smoother, greatly reducing hydraulic losses and noise, and improving the working efficiency and stability of the piezoelectric pump. Furthermore, the localized reduction in flow velocity at the inlet effectively suppresses cavitation, improving the reliability and service life of the piezoelectric pump.

[0058] Understandably, when the check valve is closed, the valve plate is pressed tightly against the valve seat to form a seal. Since the diameter of each through hole forming a "porous structure" near the check valve is small, and according to the principles of fluid mechanics, small-diameter through holes can generate a stronger capillary force / surface tension effect, the combined effect of multiple small-diameter through holes can greatly enhance the sealing ability of the check valve.

[0059] In some embodiments, the plurality of through holes constituting the liquid inlet 1051 are uniformly distributed, symmetrically distributed, or non-uniformly distributed; the plurality of through holes constituting the liquid outlet 1052 are uniformly distributed, symmetrically distributed, or non-uniformly distributed.

[0060] As an example, and not a limitation, please refer to Figure 1 The liquid inlet 1051 consists of 7 through holes, which are evenly distributed. The liquid outlet 1052 consists of 7 through holes, which are evenly distributed.

[0061] In some embodiments, the symmetrical distribution of the plurality of through holes constituting the liquid inlet 1051 includes: the plurality of through holes constituting the liquid inlet 1051 being symmetrically distributed in a rectangular shape, an annular shape, or a honeycomb shape; the symmetrical distribution of the plurality of through holes constituting the liquid outlet 1052 includes: the plurality of through holes constituting the liquid outlet 1052 being symmetrically distributed in a rectangular shape, an annular shape, or a honeycomb shape.

[0062] The rectangular symmetrical distribution of the multiple through holes constituting the liquid inlet 1051, as described herein, means that the lines connecting the centers of the multiple through holes constituting the liquid inlet 1051 can form a rectangle, and the axis of symmetry of the rectangle is located on the second reference plane; the annular symmetrical distribution of the multiple through holes constituting the liquid inlet 1051, as described herein, means that the lines connecting the centers of the multiple through holes constituting the liquid inlet 1051 can form an annulus, and the axis of symmetry of the annulus is located on the second reference plane; the honeycomb symmetrical distribution of the multiple through holes constituting the liquid inlet 1051, as described herein, means that the lines connecting the centers of the multiple through holes constituting the liquid inlet 1051 can form a honeycomb shape, and the axis of symmetry of the honeycomb shape is located on the second reference plane.

[0063] The rectangular symmetrical distribution of the multiple through holes constituting the liquid outlet 1052, as described herein, means that the lines connecting the centers of the multiple through holes constituting the liquid outlet 1052 can form a rectangle, and the axis of symmetry of the rectangle is located on the first reference plane; the annular symmetrical distribution of the multiple through holes constituting the liquid outlet 1052, as described herein, means that the lines connecting the centers of the multiple through holes constituting the liquid outlet 1052 can form an annulus, and the axis of symmetry of the annulus is located on the first reference plane; the honeycomb symmetrical distribution of the multiple through holes constituting the liquid outlet 1052, as described herein, means that the lines connecting the centers of the multiple through holes constituting the liquid outlet 1052 can form a honeycomb shape, and the axis of symmetry of the honeycomb shape is located on the first reference plane.

[0064] In some embodiments, the third guide hole 1041 includes a plurality of through holes, and the liquid inlet 1051 includes a plurality of through holes. The distribution of the plurality of through holes constituting the liquid inlet 1051 is the same as the distribution of the plurality of through holes constituting the third guide hole 1041. The plurality of through holes constituting the liquid inlet 1051 are located directly below the plurality of through holes constituting the third guide hole 1041, and the aperture of each through hole constituting the liquid inlet 1051 is the same as the aperture of each through hole constituting the third guide hole 1041.

[0065] As an example, and not a limitation, please refer to Figure 1 The third guide hole 1041 includes multiple through holes. The distribution of the multiple through holes constituting the liquid inlet 1051 is uniform. The distribution of the multiple through holes constituting the third guide hole 1041 is also uniform. That is, the distribution of the multiple through holes constituting the liquid inlet 1051 is the same as the distribution of the multiple through holes constituting the third guide hole 1041. The multiple through holes constituting the liquid inlet 1051 are located directly below the multiple through holes constituting the third guide hole 1041. The diameter of each through hole constituting the liquid inlet 1051 is the same as the diameter of each through hole constituting the third guide hole 1041. That is, there is a corresponding through hole directly below each through hole constituting the third guide hole 1041.

[0066] As an example and not a limitation, the distribution pattern may be at least one of the following: uniform distribution, symmetrical distribution, non-uniform distribution, and asymmetrical distribution.

[0067] In some embodiments, the third guide hole 1041 includes a plurality of through holes, the second guide hole 1022 includes a plurality of through holes, the liquid inlet 1051 includes a plurality of through holes, and the liquid outlet 1052 includes a plurality of through holes; the distribution of the plurality of through holes constituting the third guide hole 1041, the distribution of the plurality of through holes constituting the second guide hole 1022, the distribution of the plurality of through holes constituting the liquid inlet 1051, and the distribution of the plurality of through holes constituting the liquid outlet 1052 are the same, and the aperture of each through hole constituting the third guide hole 1041, the aperture of each through hole constituting the second guide hole 1022, the aperture of each through hole constituting the liquid inlet 1051, and the aperture of each through hole constituting the liquid outlet 1052 are the same.

[0068] As an example and not a limitation, the distribution of the multiple through holes constituting the third guide hole 1041, the distribution of the multiple through holes constituting the second guide hole 1022, the distribution of the multiple through holes constituting the liquid inlet 1051, and the distribution of the multiple through holes constituting the liquid outlet 1052 are all uniformly distributed.

[0069] A second aspect of this application provides an electronic device including the aforementioned piezoelectric pump 10.

[0070] The electronic device employs any one or more embodiments of the piezoelectric pump 10 described above, and thus has the beneficial effects of the above embodiments, which will not be elaborated further here.

[0071] As an example, and not a limitation, electronic devices are terminal devices that require heat dissipation, such as smartphones, tablets, laptops, wearable devices (e.g., smartwatches, augmented reality glasses, wristbands), in-vehicle smart terminals, action cameras, etc.

[0072] Understandably, electronic devices require liquid cooling systems to dissipate heat from their internal components. The inlet 1051 and outlet 1052 of the piezoelectric pump 10 are connected to pipes in the liquid cooling system. Based on the reciprocating vibration of the piezoelectric vibrator 1011, the volume of the pump chamber changes, causing liquid to flow into or out of the pump chamber, thereby achieving heat dissipation for the electronic device.

[0073] The electronic device provided in this application embodiment can achieve heat dissipation through the piezoelectric hydraulic pump 10. Since the piezoelectric hydraulic pump 10 can achieve both "high flow rate" and "high back pressure", the overall performance of the piezoelectric hydraulic pump is greatly improved, thereby improving the working performance of the electronic device.

[0074] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A piezoelectric hydraulic pump, characterized in that, include: A drive assembly, comprising a piezoelectric vibrator and a cavity plate, wherein the cavity plate has a through hole, and the piezoelectric vibrator covers one side of the through hole to form a pump cavity, the piezoelectric vibrator being used to vibrate to cause a change in the volume of the pump cavity; A first support plate is connected to the cavity plate; A valve plate, which is connected to the first support plate; A second support plate is disposed on the side of the valve plate opposite to the drive assembly; A base plate is connected to the second support plate. The base plate is provided with an inlet and an outlet. The inlet is connected to the pump chamber, and the outlet is connected to the pump chamber. The valve plate is provided with at least two one-way valves, including a first one-way valve and a second one-way valve. The first one-way valve is a one-way valve corresponding to the liquid inlet, and the second one-way valve is a one-way valve corresponding to the liquid outlet. The first support plate is provided with a first guide hole corresponding to the liquid inlet and a second guide hole corresponding to the liquid outlet. The second support plate is provided with a third guide hole corresponding to the liquid inlet and a fourth guide hole corresponding to the liquid outlet. The second guide hole includes multiple through holes, and / or the third guide hole includes multiple through holes. The valve plate of the first one-way valve can cover the third guide hole, and the valve plate of the second one-way valve can cover the second guide hole.

2. The piezoelectric hydraulic pump according to claim 1, characterized in that, The second guide hole includes multiple through holes, and the multiple through holes constituting the second guide hole are evenly distributed, symmetrically distributed, or unevenly distributed; Or / and, the third guide hole includes multiple through holes, and the multiple through holes constituting the third guide hole are evenly distributed, symmetrically distributed, or unevenly distributed.

3. The piezoelectric hydraulic pump according to claim 2, characterized in that, The symmetrical distribution of the plurality of through holes constituting the second guide hole includes: the plurality of through holes constituting the second guide hole being symmetrically distributed in a rectangular shape, a ring shape, or a honeycomb shape. The symmetrical distribution of the multiple through holes constituting the third flow guide hole includes: the multiple through holes constituting the third flow guide hole being symmetrically distributed in a rectangular shape, a ring shape, or a honeycomb shape.

4. The piezoelectric hydraulic pump according to claim 1, characterized in that, The liquid inlet includes multiple through holes, and the liquid outlet includes multiple through holes.

5. The piezoelectric hydraulic pump according to claim 4, characterized in that, The multiple through holes constituting the liquid inlet are evenly distributed, symmetrically distributed, or unevenly distributed; the multiple through holes constituting the liquid outlet are evenly distributed, symmetrically distributed, or unevenly distributed.

6. The piezoelectric hydraulic pump according to claim 5, characterized in that, The symmetrical distribution of the plurality of through holes constituting the liquid inlet includes: the plurality of through holes constituting the liquid inlet being symmetrically distributed in a rectangular shape, a ring shape, or a honeycomb shape. The symmetrical distribution of the multiple through holes constituting the liquid outlet includes: the multiple through holes constituting the liquid outlet being symmetrically distributed in a rectangular shape, a ring shape, or a honeycomb shape.

7. The piezoelectric hydraulic pump according to claim 1, characterized in that, The third guide hole includes multiple through holes, and the liquid inlet includes multiple through holes. The distribution of the multiple through holes constituting the liquid inlet is the same as the distribution of the multiple through holes constituting the third guide hole. The multiple through holes constituting the liquid inlet are located directly below the multiple through holes constituting the third guide hole. The diameter of each through hole constituting the liquid inlet is the same as the diameter of each through hole constituting the third guide hole.

8. The piezoelectric hydraulic pump according to claim 7, characterized in that, The second guide hole includes multiple through holes, and the liquid outlet includes multiple through holes. The distribution of the multiple through holes constituting the third guide hole, the distribution of the multiple through holes constituting the second guide hole, the distribution of the multiple through holes constituting the liquid inlet, and the distribution of the multiple through holes constituting the liquid outlet are the same. The diameter of each through hole constituting the third guide hole, the diameter of each through hole constituting the second guide hole, the diameter of each through hole constituting the liquid inlet, and the diameter of each through hole constituting the liquid outlet are the same.

9. The piezoelectric hydraulic pump according to claim 1, characterized in that, The second flow guide hole includes a plurality of through holes, and the diameter of each through hole constituting the second flow guide hole is in the range of 0.1 mm to 0.8 mm; Alternatively, the third flow guide hole includes a plurality of through holes, and the diameter of each through hole constituting the third flow guide hole is in the range of 0.1 mm to 0.8 mm.

10. An electronic device, characterized in that, Including the piezoelectric hydraulic pump as described in any one of claims 1 to 9.

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