A new type of convex-cavity oil diffusion pump

Abstract

The utility model discloses a novel convex cavity type oil diffusion pump, include: convex cavity type pump body, the utility model has the beneficial effects is: the inside fixed frame is installed in the inboard of top connecting cover through bolt, provides stable support and rotation space for rotating rod, and the outside of rotating rod is fixed with the inside rotating disc, and the outside still has the fixed joint of worm wheel, the inside fixed frame is rotated and is provided with the worm wheel engagement of worm in, and worm wheel is connected with top connecting cover rotation, and this structure is engaged through worm wheel and worm, can accurate control inside rotating disc's rotation angle and speed, carries out integral regulation to the position of multiple air cylinder equidistance fixed on inside rotating disc, has guaranteed the uniformity of gas passing through, the inside fixed joint of convex cavity type pump body has the oil tank, installs multiple heaters in the oil tank, is used for storing pump oil and provides working medium, and multiple heaters can even effective heating of pump oil, make it reach suitable evaporation temperature formation oil vapor fast, maintains normal stable pumping work of oil diffusion pump.

Description

Technical Field

[0001] This utility model relates to the field of oil diffusion pump technology, specifically a novel convex cavity type oil diffusion pump. Background Technology

[0002] Oil diffusion pumps, as an important high vacuum generating device, have a wide and critical application in many fields such as electronics, vacuum coating, semiconductor manufacturing, and aerospace. They use high-speed oil vapor jets to carry gas molecules to achieve pumping and obtain high or ultra-high vacuum environments. However, traditional oil diffusion pumps do not have the function of regulating the control of gas passage. After the gas enters the pump body, it is difficult to achieve uniform distribution and passage, which can easily cause poor local effects and affect the pumping efficiency and vacuum level of the entire pump. Utility Model Content

[0003] The purpose of this invention is to provide a novel cavity-type oil diffusion pump to solve the problem mentioned in the background art that traditional oil diffusion pumps do not have the function of regulating the control of gas passage. After the gas enters the pump body, it is difficult to achieve uniform distribution and passage, which can easily cause poor local effects and affect the pumping efficiency and vacuum degree of the entire pump.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a novel cavity-type oil diffusion pump, comprising:

[0005] Convex cavity type pump body;

[0006] A bottom fixed cylinder seat is set inside the convex cavity type pump body. A pump core is set on the top of the bottom fixed cylinder seat, and a first umbrella-shaped nozzle is set on the top of the pump core.

[0007] The second umbrella-shaped nozzle is located on top of the first umbrella-shaped nozzle, and the top of the second umbrella-shaped nozzle is provided with the third umbrella-shaped nozzle.

[0008] Top connecting cover, which is installed on the top of the convex cavity type pump body;

[0009] A side connecting pipe is fixed inside the top connecting cover, and a filter screen is installed inside the side connecting pipe.

[0010] An inner rotating disk is rotatably mounted inside the top connecting cover, and multiple vent cylinders are fixedly connected at equal intervals inside the inner rotating disk.

[0011] A rotating part is disposed inside the top connecting cover and is connected to the inner rotating disk.

[0012] As a preferred embodiment of this utility model: the rotating part includes an inner fixed frame, a rotating rod, a worm wheel, and a worm. The inner fixed frame is bolted to the inner side of the top connecting cover. The rotating rod is rotatably arranged inside the inner fixed frame. The outer side of the rotating rod is fixedly connected to the inner rotating disk. The worm wheel is fixedly connected to the outer side of the rotating rod. The worm is rotatably arranged inside the inner fixed frame. The worm meshes with the worm wheel and is rotatably connected to the top connecting cover.

[0013] As a preferred embodiment of this utility model: a side fixing bracket is installed on the outer side of the top connecting cover by bolts, and a servo motor is installed on one side of the side fixing bracket by bolts, and the output end of the servo motor is fixedly connected to the worm gear.

[0014] As a preferred embodiment of this utility model: an oil tank is fixedly connected inside the convex cavity pump body, and multiple heaters are installed inside the oil tank.

[0015] As a preferred embodiment of this utility model: an air outlet pipe is provided on one side of the convex cavity pump body, and three external support wheel frames are equidistantly arranged on the outer side of the convex cavity pump body.

[0016] As a preferred embodiment of this utility model, one end of the side connecting pipe is fitted with a connecting air pipe by bolts.

[0017] Compared with the prior art, the beneficial effects of this utility model are as follows: The inner fixed frame of this utility model is installed on the inner side of the top connecting cover by bolts, providing stable support and rotation space for the rotating rod. The outer side of the rotating rod is fixedly connected to the inner rotating disk, and a worm gear is also fixedly connected to the outer side. A worm gear meshing with the worm gear is rotatably arranged inside the inner fixed frame. The worm gear is rotatably connected to the top connecting cover. This structure, through the meshing of the worm gear and the worm gear, can precisely control the rotation angle and speed of the inner rotating disk, and make overall adjustments to the positions of multiple vents fixedly at equal intervals on the inner rotating disk, ensuring the uniformity of gas passage. The convex cavity pump body has an oil tank fixedly connected inside, and multiple heaters are installed inside the oil tank to store pump oil and provide working medium. Multiple heaters can uniformly and effectively heat the pump oil, so that it can quickly reach the appropriate evaporation temperature to form oil vapor, maintain the normal and stable pumping operation of the oil diffusion pump, and improve working efficiency and performance stability. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the pump core structure of this utility model;

[0020] Figure 3 This is a schematic diagram of the top connecting cover structure of this utility model;

[0021] Figure 4This is a schematic diagram of the internal structure of the internal fixing frame of this utility model;

[0022] Figure 5 This is a schematic diagram of the oil tank and heater structure of this utility model;

[0023] Figure 6 This is a schematic diagram of the internal rotating disc and ventilator structure of this utility model.

[0024] In the diagram: 1. Convex cavity pump body; 2. Air outlet pipe; 3. Pump core; 4. No. 1 umbrella-shaped nozzle; 5. No. 2 umbrella-shaped nozzle; 6. Top connecting cover; 7. Side connecting pipe; 8. Filter screen; 9. Connecting air pipe; 10. Inner fixed frame; 11. Rotating rod; 12. Worm gear; 13. Worm; 14. Side fixed bracket; 15. Servo motor; 16. Inner rotating disk; 17. Air vent; 18. Outer support wheel frame; 19. Oil tank; 20. Heater; 21. Bottom fixed cylinder seat; 22. No. 3 umbrella-shaped nozzle. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figures 1 to 6 This utility model provides a technical solution: a novel convex cavity type oil diffusion pump, comprising: a convex cavity type pump body 1; a bottom fixed cylinder seat 21 disposed inside the convex cavity type pump body 1, a pump core 3 fixedly connected to the top of the bottom fixed cylinder seat 21, a first umbrella-shaped nozzle 4 disposed on the top of the pump core 3; a second umbrella-shaped nozzle 5 disposed on the top of the first umbrella-shaped nozzle 4, and a third umbrella-shaped nozzle 22 disposed on the top of the second umbrella-shaped nozzle 5; a top connecting cover 6 installed on the top of the convex cavity type pump body 1 by bolts; a side connecting pipe 7 fixedly connected inside the top connecting cover 6, and a filter screen 8 installed inside the side connecting pipe 7 by bolts; an inner rotating disk 16 rotatably disposed inside the top connecting cover 6, and a plurality of vent cylinders 17 fixedly connected at equal intervals inside the inner rotating disk 16; a rotating part disposed inside the top connecting cover 6, and the rotating part connected to the inner rotating disk 16.

[0027] It should be noted that in this embodiment, gas enters the side connecting pipe 7 through the connecting pipe 9. A filter screen 8 is installed inside the side connecting pipe 7. The filter screen 8 filters the incoming gas, removing impurities and preventing them from entering the pump body and damaging its components, thus ensuring stable pump operation. An inner rotating disk 16 is provided inside the top connecting cover 6. Multiple air cylinders 17 are equidistantly fixed inside the inner rotating disk 16. The rotating part drives the inner rotating disk 16 to rotate. The rotating part consists of an inner fixed frame 10, a rotating rod 11, a worm gear 12, and a worm 13. The inner fixed frame 10 is bolted to the inside of the top connecting cover 6, providing stable support and rotation space for the rotating rod 11. The outer side of the rotating rod 11 is fixedly connected to the inner rotating disk 16. A worm gear 12 is fixedly connected to the outer side. A worm 13 that meshes with the worm gear 12 is rotatably installed inside the inner fixed frame 10. The worm 13 is rotatably connected to the top connecting cover 6. A servo motor 15 is installed on the outer side of the top connecting cover 6 through the side fixed bracket 14. The output end of the servo motor 15 is fixedly connected to the worm 13. After the servo motor 15 is started, it precisely controls the rotation speed and angle of the output end, driving the worm 13 to rotate. The worm 13 drives the worm gear 12 that it meshes with to rotate, thereby causing the rotating rod 11 and the inner rotating disk 16 to rotate. The position of multiple air cylinders 17 on the inner rotating disk 16 is adjusted as a whole to ensure the uniformity of gas passage. A pump core 3 is fixedly connected to the top of the bottom fixed cylinder seat 21. A first umbrella-shaped nozzle 4 and a second umbrella-shaped nozzle 5 are arranged sequentially on the top of the pump core 3. No. 5 and No. 3 umbrella-shaped nozzle 22 are connected to the pump body 1, which contains an oil tank 19. Multiple heaters 20 are installed inside the oil tank 19. Heated by the heaters 20 at the bottom of the oil tank 19, the light distillate oil reaches its evaporation temperature and evaporates on the outer layer, entering the low-vacuum working nozzle. Some light distillate oil that fails to evaporate floats to the surface due to its lower density. Due to the restriction of the outer vapor conduit, this portion of the distillate still enters the low-vacuum working nozzle after evaporation. The heavy distillate oil, which does not reach its evaporation temperature in the outer vapor conduit, flows from the outer layer through the gap between the bottom of the pot to the center of the oil pot to evaporate and enter the high-vacuum working nozzle. The light and heavy distillate oil vapors are thus supplied separately to the low-vacuum and high-vacuum working nozzles. The process is fractionation. The oil vapor ejected from the injection nozzle is not sufficiently cooled in the front stage, and the light fraction in the vapor is not completely condensed and is removed by the front pump. This cycle continues, and the light fraction in the pump oil becomes less and less, while the proportion of heavy fraction becomes more and more, and the pump oil gradually becomes purer. This process is purification. Under the action of the pump core 3 and the umbrella-shaped nozzles of each stage, the oil vapor generates a high-speed airflow. When the gas passes through the umbrella-shaped nozzles of each stage, the high-speed oil vapor airflow draws the gas out of the pump and discharges it through the outlet pipe 2 set on one side of the convex cavity pump body 1, so that a stable vacuum environment is formed in the pump and the pumping process is continuous. Three external support wheel frames 18 are equidistantly arranged on the outside of the convex cavity pump body 1, and the external support wheel frames 18 provide stable support for the pump body.

[0028] The bottom section of the pump is the same as that of the inlet flange, except that the pump cavity is enlarged at the bottom of the inlet flange. Since the convex cavity expands the pumping space and increases the nozzle's conduction capacity, the pumping speed can be greatly improved without increasing the pump port size. The pump wall cooling uses spiral copper tube brazing or is made into a water jacket to ensure the stable operation of the pump body during the working process.

[0029] The third umbrella-shaped nozzle 22 of this pump serves as the final injection stage. It adopts an injection nozzle structure that first gradually narrows and then gradually expands, and works in conjunction with a diffuser to increase the pumping speed while increasing the maximum permissible outlet pressure of the pump.

[0030] In one embodiment, such as Figure 4 As shown, the rotating part includes an inner fixed frame 10, a rotating rod 11, a worm gear 12, and a worm 13. The inner fixed frame 10 is bolted to the inner side of the top connecting cover 6. The rotating rod 11 is rotatably arranged inside the inner fixed frame 10. The outer side of the rotating rod 11 is fixedly connected to the inner rotating disk 16. The worm gear 12 is fixedly connected to the outer side of the rotating rod 11. The worm 13 is rotatably arranged inside the inner fixed frame 10. The worm 13 meshes with the worm gear 12 and is rotatably connected to the top connecting cover 6.

[0031] It should be noted that in this embodiment, the inner fixed frame 10 provides stable support and rotation space for the rotating rod 11. The rotating rod 11 is connected to the inner rotating disk 16 to realize the rotation function of the inner rotating disk 16. By using the meshing connection of the worm gear 12 and the worm 13, the rotation angle and speed of the inner rotating disk 16 can be precisely controlled, and the position of each ventilator 17 can be adjusted as a whole, thus providing gas uniformity.

[0032] In one embodiment, such as Figures 1 to 4 As shown, a side fixing bracket 14 is bolted to the outside of the top connecting cover 6, and a servo motor 15 is bolted to one side of the side fixing bracket 14. The output end of the servo motor 15 is fixedly connected to the worm gear 13.

[0033] It should be noted that in this embodiment, the side fixing bracket 14 provides a stable mounting position for the servo motor 15, ensuring that the servo motor 15 will not be displaced due to vibration or other reasons during operation. The servo motor 15 can accurately control the rotation speed and angle of the output end. By being fixedly connected to the worm gear 13, it can accurately drive the worm gear 13 to rotate, thereby driving the worm wheel 12 and the inner rotating disk 16 to rotate. At the same time, a protective net is set on the outside of the servo motor 15 to protect the servo motor 15.

[0034] In one embodiment, such as Figure 4 and Figure 5 As shown, an oil tank 19 is fixedly connected inside the convex cavity pump body 1, and multiple heaters 20 are installed inside the oil tank 19.

[0035] It should be noted that in this embodiment, the oil tank 19 is used to store pump oil, providing the necessary medium for the operation of the novel cavity-type oil diffusion pump. Multiple heaters 20 are installed inside the oil tank 19, which can uniformly and effectively heat the pump oil, enabling the pump oil to quickly reach a suitable evaporation temperature, ensuring that the pump oil can form oil vapor in a timely manner, thereby maintaining the normal and stable pumping operation of the oil diffusion pump and improving the pump's working efficiency and performance stability.

[0036] In one embodiment, such as Figures 1 to 5 As shown, an air outlet pipe 2 is provided on one side of the convex cavity pump body 1, and three external support wheel frames 18 are equidistantly arranged on the outer side of the convex cavity pump body 1.

[0037] It should be noted that, in this embodiment, the exhaust pipe 2 provides an exhaust channel for the gas extracted by the novel convex cavity oil diffusion pump, so that the gas inside the pump can be smoothly discharged, ensuring the formation of a stable vacuum environment inside the pump and maintaining the continuity of the pumping process.

[0038] In one embodiment, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 6 As shown, a connecting air pipe 9 is installed at one end of the side connecting pipe 7 by bolts.

[0039] It should be noted that in this embodiment, the connecting gas pipe 9 is installed at one end of the side connecting pipe 7 by bolts, which facilitates the connection of the new type of convex cavity oil diffusion pump with other equipment and allows gas to enter smoothly.

[0040] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0041] Furthermore, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include at least one of those features.

[0042] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0043] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A novel cavity-type oil diffusion pump, characterized in that, include: Convex cavity type pump body (1); Bottom fixing cylinder seat (21) is set inside the convex cavity type pump body (1). The top of the bottom fixing cylinder seat (21) is provided with a pump core (3). The top of the pump core (3) is provided with a first umbrella-shaped nozzle (4). The second umbrella-shaped nozzle (5) is located on top of the first umbrella-shaped nozzle (4), and the second umbrella-shaped nozzle (5) is located on top of the third umbrella-shaped nozzle (22). Top connecting cover (6) is installed on the top of the convex cavity type pump body (1); Side connecting pipe (7) is fixed inside the top connecting cover (6), and a filter screen (8) is installed inside the side connecting pipe (7); The inner rotating disk (16) is rotatably disposed inside the top connecting cover (6), and multiple air cylinders (17) are fixedly connected at equal intervals inside the inner rotating disk (16). A rotating part is disposed inside the top connecting cover (6) and is connected to the inner rotating disk (16).

2. The novel cavity-type oil diffusion pump according to claim 1, characterized in that: The rotating part includes an inner fixed frame (10), a rotating rod (11), a worm wheel (12), and a worm (13). The inner fixed frame (10) is bolted to the inner side of the top connecting cover (6). The rotating rod (11) is rotatably arranged inside the inner fixed frame (10). The outer side of the rotating rod (11) is fixedly connected to the inner rotating disk (16). The worm wheel (12) is fixedly connected to the outer side of the rotating rod (11). The worm (13) is rotatably arranged inside the inner fixed frame (10). The worm (13) meshes with the worm wheel (12). The worm (13) is rotatably connected to the top connecting cover (6).

3. A novel cavity-type oil diffusion pump according to claim 2, characterized in that: A side fixing bracket (14) is bolted to the outside of the top connecting cover (6), and a servo motor (15) is bolted to one side of the side fixing bracket (14). The output end of the servo motor (15) is fixed to the worm gear (13).

4. A novel cavity-type oil diffusion pump according to claim 1, characterized in that: The inside of the convex cavity pump body (1) is fixedly connected to an oil tank (19), and multiple heaters (20) are installed inside the oil tank (19).

5. A novel cavity-type oil diffusion pump according to claim 1, characterized in that: An air outlet pipe (2) is provided on one side of the convex cavity pump body (1), and three external support wheel frames (18) are provided at equal intervals on the outer side of the convex cavity pump body (1).

6. A novel cavity-type oil diffusion pump according to claim 1, characterized in that: One end of the side connecting pipe (7) is bolted to a connecting air pipe (9).

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