High-precision high-dustproof self-lubricating linear module device

Abstract

The utility model discloses a high accuracy high dustproof self -lubricating linear module device, including the bottom plate, the upper end welding of bottom plate has two side plates and two steel sheets, two the steel sheet and two side plates are mutually welded, the adjacent side of two the side plate is rotatably connected with the threaded rod in common, is connected with the moving block on the threaded rod, the upper end fixed connection of moving block has the placement platform, two the side plate's upper end is equipped with the adsorption steel band, two the side plate's upper end is equipped with the magnetic stripe, be equipped with the through channel in the placement platform, be equipped with a plurality of conveying rollers in the through channel. The device can automatically inject the lubricating oil to the threaded rod, thereby lubricating the threaded rod and the moving block, and through the setting of V type block and sponge block, make the lubricating oil dripping on the threaded rod be collected and lubricate the guide groove.

Description

Technical Field

[0001] This utility model relates to the field of linear module technology, and in particular to a high-precision, dustproof, self-lubricating linear module device. Background Technology

[0002] In semiconductor production lines, linear motion modules serve as core transmission components in critical stages such as chip manufacturing, wafer inspection, and packaging testing. They directly participate in high-precision operations like photolithography alignment, wafer handling, and precision welding. Their performance has a decisive impact on semiconductor product yield, production efficiency, and equipment stability. The semiconductor manufacturing environment places extremely stringent requirements on equipment precision, cleanliness, and reliability. Micron-level or even nanometer-level positioning errors, minute dust contamination, or brief equipment downtime can all lead to the scrapping of an entire batch of wafers, causing huge economic losses. Therefore, the industry has an urgent need for high-precision transmission, long-term dust protection, and maintenance-free lubrication for linear motion modules. Traditional linear module devices face significant technical limitations in semiconductor production line applications: Firstly, regarding lubrication and maintenance, semiconductor production workshops are mostly cleanroom environments, and the traditional method of manually adding lubricating oil periodically has serious drawbacks. Manual operation is prone to introducing external contaminants, and precise control of lubricating oil is extremely difficult—overfilling will cause oil evaporation to generate particulate matter that pollutes the cleanroom air and adheres to the wafer surface, forming defects; underfilling will cause dry friction between the threaded rod and the moving block friction pair, leading to transmission accuracy drift and failing to meet the nanometer-level positioning accuracy requirements of core equipment such as lithography equipment. Secondly, as a supporting structure for the moving block, the lubrication status of the guide groove directly affects the smoothness of movement. However, in traditional modules, the lubrication systems of the guide groove and the threaded rod are independent and require separate maintenance. In a semiconductor production line operating continuously 24 hours a day, frequent manual maintenance not only interrupts the production process and increases downtime costs, but may also damage the precise fit of the modules due to operational errors during maintenance, further exacerbating precision loss. Simultaneously, corrosive substances such as photoresist residue and chemical vapors in semiconductor workshops easily react with traditional lubricating greases, leading to lubrication failure and component corrosion, shortening the module's lifespan.

[0003] Therefore, it is necessary to design a high-precision, dustproof, and self-lubricating linear module device to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a high-precision, dustproof, self-lubricating linear module device. This device can automatically inject lubricating oil into the threaded rod, thereby lubricating the threaded rod and the moving block. Furthermore, through the setting of V-blocks and sponge blocks, the lubricating oil dripping from the threaded rod is collected and used to lubricate the guide groove.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A high-precision, dustproof, self-lubricating linear module device includes a base plate. Two side plates and two steel plates are welded to the upper end of the base plate. The two steel plates are welded to the two side plates. A threaded rod is rotatably connected to adjacent sides of the two side plates. A movable block is threaded onto the threaded rod. A placement platform is fixedly connected to the upper end of the movable block. Adsorption steel strips are provided at the upper ends of the two side plates. Magnetic strips are embedded at the upper ends of the two side plates. A through channel is provided within the placement platform. Multiple conveying rollers are provided within the through channel. The adsorption steel strip passes through the through channel. Protrusions are provided on both the front and rear sides of the movable block. Guide grooves are provided on adjacent sides of the two side plates. The two protrusions are slidably connected to the guide grooves.

[0006] Preferably, a gearbox is fixedly connected to the left side of the steel plate located on the left side, a drive motor is installed on the right side of the gearbox, the output shaft of the drive motor is fixedly connected to the input end of the gearbox, and the threaded rod is fixedly connected to the output end of the gearbox.

[0007] Preferably, a liquid injection pipe is fixedly connected to the front side of the placement platform, and a storage cylinder is fixedly connected to the upper end of the liquid injection pipe. The liquid injection pipe communicates with the inner bottom of the storage cylinder. A fixing frame is fixedly connected to the front side of the storage cylinder, and a first pneumatic rod is fixedly connected to the inner top of the fixing frame. A piston is fixedly connected to the telescopic end of the first pneumatic rod. The piston is slidably and sealingly connected to the inner wall of the storage cylinder. A spraying pipe is fixedly connected to the right side of the moving block. The liquid injection pipe communicates with the spraying pipe, and multiple liquid outlets are provided at the lower end of the spraying pipe.

[0008] Preferably, the bottom of the storage cylinder is connected to a refueling pipe, and the refueling pipe is equipped with a valve.

[0009] Preferably, a V-shaped block is fixedly connected to the right side of the movable block, and two fixed blocks are fixedly connected to the right side of the movable block. A second pneumatic rod is fixedly connected to the opposite sides of the two fixed blocks. A movable block is fixedly connected to the telescopic ends of the two second pneumatic rods, and a sponge block is fixedly connected to the opposite sides of the two movable blocks.

[0010] Preferably, the shapes of the two sponge blocks are adapted to the shape of the guide groove, and the two ends of the V-shaped block are located at the upper end of the sponge block.

[0011] Compared with existing technologies, the advantages of this device are: Compared with existing technologies, the automatic lubrication system, which consists of a liquid injection pipe, a storage cylinder, a first pneumatic rod, and a piston, can stably deliver lubricating oil to the spray pipe and evenly spray it onto the threaded rod through the liquid outlet. This effectively avoids the problems of uneven oil injection and cumbersome operation during manual lubrication, reduces the impact of human factors on the lubrication effect, and improves the reliability and convenience of lubrication. Compared with existing technologies, the method uses V-blocks to collect lubricating oil dripping from the threaded rod, and uses a sponge block that matches the shape of the guide groove to absorb the collected lubricating oil. The guide groove is lubricated during the movement of the moving block, so that the lubricating oil that might otherwise be wasted can be fully utilized. This not only conforms to the concept of energy conservation and environmental protection, but also reduces lubrication costs. Compared with existing technologies, this device combines automatic lubrication of the threaded rod with secondary lubrication of the guide groove, avoiding the problem of independent lubrication of different parts and poor effect in traditional lubrication methods. It can simultaneously meet the long-term lubrication needs of the threaded rod and the guide groove, reduce mechanical wear, help maintain the high precision and stability of the device, and extend its service life. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of a high-precision, dustproof, self-lubricating linear module device proposed in this utility model; Figure 2 for Figure 1 Enlarged structural diagram at point A in the middle; Figure 3 for Figure 1 Half-section view in the middle; Figure 4 for Figure 1 A cross-sectional view from the right side.

[0013] In the diagram: 1. Base plate, 2. Side plate, 3. Adsorption steel belt, 5. Drive motor, 6. Gearbox, 7. Placement platform, 8. Storage cylinder, 9. Fixing frame, 10. Oil filling pipe, 11. First pneumatic rod, 12. Piston, 13. Injection pipe, 14. Threaded rod, 15. Fixing block, 16. Second pneumatic rod, 17. Sponge block, 18. Moving block, 19. Spraying pipe, 20. V-shaped block, 21. Rectangular block. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0015] Reference Figures 1-4A high-precision, dustproof, self-lubricating linear module device includes a base plate 1 made of high-strength alloy steel. Two side plates 2 and two steel plates 4 are welded to the upper end of the base plate 1. The two steel plates 4 are located at the left and right ends of the base plate 1 and are welded to the two side plates 2 to form a stable rectangular frame structure. Threaded rods 14 are rotatably connected to adjacent sides of the two side plates 2 via bearings. The outer surface of the threaded rods 14 is machined with precision trapezoidal threads. Moving blocks 18 are threadedly connected to the threaded rods 14. The moving blocks 18 have internal threaded holes that match the threaded rods 14. The upper end of the moving blocks 18 is fixed by bolts. A placement platform 7 is provided, which is used to support the workpiece or equipment to be transferred. The upper ends of the two side plates 2 are provided with adsorption steel strips 3, and magnetic strips are embedded in the upper ends of the two side plates 2. The magnetic strips and the adsorption steel strips 3 are magnetically attracted to each other to ensure the tension of the steel strips. The placement platform 7 is provided with a through channel, and multiple conveying rollers are provided in the through channel. The adsorption steel strips 3 pass through the through channel. The front and rear sides of the moving block 18 are provided with protrusions, which are made of wear-resistant cast iron. The adjacent sides of the two side plates 2 are provided with guide grooves. The inner walls of the guide grooves are precision ground. The two protrusions are slidably connected to the guide grooves to ensure that the moving block 18 moves smoothly in a straight line.

[0016] The left side of the steel plate 4 on the left is fixedly connected to the gearbox 6 by bolts. The gearbox 6 has a set of meshing reduction gears inside, which can reduce the speed of the drive motor 5 and increase the output torque. The drive motor 5 is installed on the right side of the gearbox 6. The drive motor 5 is a servo motor, which can achieve precise speed and direction control. The output shaft of the drive motor 5 is fixedly connected to the input end of the gearbox 6 through a coupling. The threaded rod 14 is fixedly connected to the output end of the gearbox 6 through a coupling.

[0017] The front of the placement platform 7 is fixedly connected to an injection pipe 13, which is made of corrosion-resistant copper. A storage cylinder 8, made of transparent acrylic, is fixedly connected to the upper end of the injection pipe 13 to facilitate observation of the remaining lubricating oil level. The injection pipe 13 communicates with the bottom of the storage cylinder 8. A mounting bracket 9, L-shaped in structure, is fixedly connected to the front of the storage cylinder 8. A first pneumatic rod 11 is fixedly connected to the top inner part of the mounting bracket 9. The first pneumatic rod 11 is connected to an external air source and can extend and retract. The extendable end of the first pneumatic rod 11 is fixedly connected to… There is a piston 12, and a rubber sealing ring is fitted on the outer surface of the piston 12. The piston 12 is slidably connected to the inner wall of the storage cylinder 8. A spray pipe 19 is fixedly connected to the right side of the moving block 18. Multiple liquid outlets are evenly distributed at the lower end of the spray pipe 19, which can evenly spray lubricating oil onto the threaded rod 14. The injection pipe 13 is connected to the spray pipe 19. Multiple liquid outlets are provided at the lower end of the spray pipe 19. A refill pipe 10 is connected to the bottom of the storage cylinder 8. A valve is provided on the refill pipe 10. The valve can control the opening and closing of the refill pipe 10, which facilitates the replenishment of lubricating oil into the storage cylinder 8.

[0018] The right side of the movable block 18 is fixedly connected to a V-shaped block 20, with the opening of the V-shaped block 20 facing the threaded rod 14 to facilitate the collection of dripping lubricating oil. Two fixed blocks 15 are fixedly connected to the right side of the movable block 18, symmetrically distributed on both sides of the V-shaped block 20. A second pneumatic rod 16 is fixedly connected to the opposite side of each of the two fixed blocks 15. The second pneumatic rod 16 can adjust the pressure between the sponge block 17 and the guide groove. The telescopic ends of the two second pneumatic rods 16 are fixedly connected to the movable block 18, and the opposite side of each of the two movable blocks 18 is fixedly connected to the sponge block 17. The sponge block 17 contains multiple pores that can absorb and store lubricating oil. The shape of the two sponge blocks 17 is adapted to the shape of the guide groove to ensure comprehensive lubrication of the guide groove. The two ends of the V-shaped block 20 are located at the upper end of the sponge block 17, so that the lubricating oil collected by the V-shaped block 20 can flow into the sponge block 17.

[0019] The functional principle of this utility model can be explained through the following operation: In terms of transmission drive, the device is powered by a drive motor 5, whose output shaft transmits power to a gearbox 6. After speed change through the internal gear structure of the gearbox 6, the threaded rod 14 is driven to rotate. The threaded rod 14 is connected to the moving block 18 by a thread. When the threaded rod 14 rotates, the moving block 18 is constrained by the guide grooves on the adjacent sides of the two side plates 2 (the protrusions on the front and rear sides of the moving block 18 slide along the guide grooves), which converts the rotational motion of the threaded rod 14 into a smooth movement in a straight line, thereby driving the upper placement platform 7 to achieve precise positioning and movement, ensuring high precision in the transmission process. When the lubrication system is in operation, lubricating oil is pre-stored in the storage cylinder 8. The piston 12 is pushed by the telescopic end of the first pneumatic rod 11, which is fixed by the fixing bracket 9, to slide in a sealed manner on the inner wall of the storage cylinder 8. When lubrication is required, the piston 12 squeezes the lubricating oil downwards. The lubricating oil is delivered to the spray pipe 19 on the right side of the moving block 18 through the injection pipe 13, and then evenly sprayed onto the threaded rod 14 through multiple outlets at the lower end of the spray pipe 19, realizing automatic and precise lubrication of the threaded contact part between the threaded rod 14 and the moving block 18. At the same time, the lubricating oil that is not fully absorbed on the threaded rod 14 is collected by the V-shaped block 20 on the right side of the moving block 18. The second pneumatic rod 16 on the two fixing blocks 15 on the right side of the moving block 18 can push the sponge block 17 to fit against the inner wall of the guide groove. The collected lubricating oil is absorbed by the sponge block 17. During the movement of the moving block 18, the sponge block 17 moves synchronously with it, continuously lubricating the guide groove, realizing the secondary utilization of the lubricating oil. In terms of dust prevention, the adsorption steel belts 3 at the upper ends of the two side plates 2 work together with the embedded magnetic strips to form a protective barrier, which can isolate some dust and impurities in the air. The conveying rollers in the through channel inside the placement platform 7 assist the adsorption steel belts 3 to run smoothly, reducing the possibility of impurities entering the internal guide groove and threaded rod 14 and other key components of the device.

[0020] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A high-precision, dustproof, self-lubricating linear module device, comprising a base plate (1), characterized in that: The upper end of the base plate (1) is welded with two side plates (2) and two steel plates (4). The two steel plates (4) are welded to the two side plates (2). The adjacent sides of the two side plates (2) are rotatably connected with threaded rods (14). The threaded rods (14) are threaded with moving blocks (18). The upper end of the moving blocks (18) is fixedly connected with a placement platform (7). The upper ends of the two side plates (2) are provided with adsorption steel strips (3). The upper ends of the two side plates (2) are embedded with magnetic strips. The placement platform (7) is provided with a through channel. The through channel is provided with multiple conveying rollers. The adsorption steel strips (3) pass through the through channel. The front and rear sides of the moving blocks (18) are provided with protrusions. The adjacent sides of the two side plates (2) are provided with guide grooves. The two protrusions are slidably connected to the guide grooves.

2. The high-precision, high-dustproof, self-lubricating linear module device according to claim 1, characterized in that: A gearbox (6) is fixedly connected to the left side of the steel plate (4) located on the left side. A drive motor (5) is installed on the right side of the gearbox (6). The output shaft of the drive motor (5) is fixedly connected to the input end of the gearbox (6). The threaded rod (14) is fixedly connected to the output end of the gearbox (6).

3. The high-precision, high-dustproof, self-lubricating linear module device according to claim 1, characterized in that: A liquid injection pipe (13) is fixedly connected to the front side of the placement platform (7). A storage cylinder (8) is fixedly connected to the upper end of the liquid injection pipe (13). The liquid injection pipe (13) is connected to the inner bottom of the storage cylinder (8). A fixing frame (9) is fixedly connected to the front side of the storage cylinder (8). A first pneumatic rod (11) is fixedly connected to the inner top of the fixing frame (9). A piston (12) is fixedly connected to the telescopic end of the first pneumatic rod (11). The piston (12) is slidably connected to the inner wall of the storage cylinder (8). A spray pipe (19) is fixedly connected to the right side of the moving block (18). The liquid injection pipe (13) is connected to the spray pipe (19). The lower end of the spray pipe (19) is provided with multiple liquid outlets.

4. The high-precision, high-dustproof, self-lubricating linear module device according to claim 3, characterized in that: The bottom of the storage cylinder (8) is connected to a refueling pipe (10), and a valve is provided on the refueling pipe (10).

5. A high-precision, dustproof, self-lubricating linear module device according to claim 1, characterized in that: A V-shaped block (20) is fixedly connected to the right side of the movable block (18), and two fixed blocks (15) are fixedly connected to the right side of the movable block (18). A second pneumatic rod (16) is fixedly connected to the opposite side of the two fixed blocks (15), and a movable block (18) is fixedly connected to the telescopic end of the two second pneumatic rods (16). A sponge block (17) is fixedly connected to the opposite side of the two movable blocks (18).

6. The high-precision, high-dustproof, self-lubricating linear module device according to claim 5, characterized in that: The shapes of the two sponge blocks (17) are adapted to the shape of the guide groove, and the two ends of the V-shaped block (20) are located at the upper end of the sponge block (17).

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