An air heating device based on a ceramic heater

Abstract

The utility model provides an air heating device based on ceramic heater relates to air heating technical field, contains columnar casing, this columnar casing is built -in with the heater that becomes from ceramic substrate series connection, the both ends of this columnar casing are connected with air inlet end seat and air outlet end seat respectively, the air outlet end seat contains air inlet and air outlet, and is equipped with low pressure vortex chamber between air inlet and air outlet, this low pressure vortex chamber is built -in with vortex generator, it adopts ceramic ceramic heater instead of traditional electric heating wire heater, not only has realized the improvement of heat source from " line " to " plane " change, greatly improved heat exchange efficiency, and utilize ceramic heater excellent material performance can improve the heat energy utilization rate and temperature precision control, in addition, ceramic heater adopts high temperature sintering process preparation, and its stability and cleanliness satisfy the requirement of semiconductor and photovoltaic industry, simultaneously, utilize low pressure vortex chamber on the air outlet end seat can increase the upstream airflow velocity and uniformity.

Description

Technical Field

[0001] This utility model relates to the field of air heating technology, specifically an air heating device based on a ceramic heater. Background Technology

[0002] In the modern manufacturing process of semiconductor devices and photovoltaic cells, extremely stringent requirements are placed on the temperature control of the production environment. Not only is it necessary to maintain a constant temperature and humidity in the cleanroom space, but heated clean air or inert gas must also be used as the process medium in many specific process steps, such as wafer baking after coating, drying after wet cleaning, and curing and sintering of thin films.

[0003] Currently, the most common air heating solution on the market is an electric heater based on resistance heating wires. Its basic working principle is to heat the air molecules in contact with the wire using Joule heat, and then carry the heat away through airflow. However, this traditional heating wire method has significant inherent defects, resulting in low thermal efficiency, mainly in the following aspects: Since the heating wire mainly relies on thermal radiation to transfer energy, and air is a poor conductor of heat, it makes the process of heat diffusion from the heating wire to the main airflow extremely difficult. This results in the local temperature of the heating wire being far higher than the target temperature of the airflow, causing a large amount of energy to be wasted in the form of radiation and convection on the internal components of the heater and the surrounding environment.

[0004] To achieve the set outlet air temperature, the heating wire often needs to be heated to an extremely high temperature. This not only exacerbates the ineffective loss of energy, but also poses a risk of generating particulate matter due to the carbonization of adsorbed organic pollutants at high temperatures, which threatens the extremely high cleanliness required for semiconductor and photovoltaic production.

[0005] Metal heating wires and their supporting structures have large heat capacity and high thermal inertia, resulting in slow system response. Both heating and cooling are delayed, making it difficult to achieve rapid and precise temperature control and failing to meet the requirements of precision manufacturing processes for dynamic temperature response.

[0006] Based on the above analysis, there is an urgent need to design a new air heating solution to solve the above technical problems and meet the urgent needs of the semiconductor and photovoltaic industries for efficient, clean and precise thermal management. Utility Model Content

[0007] The purpose of this invention is to provide an air heating device based on a ceramic heater, so as to solve at least one of the drawbacks of the prior art when using heating wire for air heating, namely, low heat diffusion efficiency, serious energy waste, risk of air pollution, and insufficient temperature control accuracy.

[0008] To achieve the above objectives, this utility model provides the following technical solution: An air heating device based on a ceramic heater includes a cylindrical shell containing a heater composed of multiple ceramic substrates connected in series. One end of the cylindrical shell is connected to an air inlet seat, and the other end is connected to an air outlet seat. The air outlet seat includes an air inlet and an air outlet, and a low-pressure vortex cavity is provided between the air inlet and the air outlet. The low-pressure vortex cavity contains a vortex generator, which can increase the upstream airflow velocity and mix the air before discharge.

[0009] As a preferred embodiment, the vortex generator is a convex hull disposed on the side of the low-pressure vortex cavity near the air outlet and coaxial with the upstream air passage. The convex hull is any one of teardrop shape, semi-ellipse shape or semi-circle shape.

[0010] As a preferred embodiment, the low-pressure vortex cavity is larger than the inlet and outlet, and includes a front cavity and a rear cavity that are connected to each other. The outlet includes multiple outlets, which are disposed on the outside of the front cavity and surround the outer periphery of the convex bulge.

[0011] As a preferred embodiment, the ceramic substrate is a cylinder adapted to the columnar shell structure, and has multiple sets of through holes parallel to the axis of the columnar shell, which together form an air passage.

[0012] As a preferred embodiment, the two adjacent ceramic substrates are fixed together by a metal clamp, and a flexible thermally conductive pad is provided between the ceramic substrate and the metal clamp.

[0013] As a preferred embodiment, the thermal pad is a mica sheet or a thermally conductive silicone pad.

[0014] As a preferred embodiment, the cylindrical housing, the air inlet end seat, and the air outlet end seat are connected by a screw. The screw is disposed between the cylindrical housings of the heater, and its two ends extend to the outside of the air inlet end seat and the air outlet end seat, respectively.

[0015] As a preferred embodiment, the cylindrical shell includes an inner reflective layer, a heat insulation layer, and an outer protective layer.

[0016] Compared with the prior art, the beneficial effects of this utility model are: This solution uses a ceramic heater instead of a traditional electric heating wire heater, which not only improves the heat source from "line" to "surface" and greatly enhances heat exchange efficiency, but also improves thermal energy utilization and precise temperature control by utilizing the excellent material properties of the ceramic heater. In addition, the ceramic heater is made by high-temperature sintering process, and its stability and cleanliness meet the requirements of the semiconductor and photovoltaic industries.

[0017] This design features a low-pressure vortex chamber on the air outlet end cap. This low-pressure vortex chamber can create a low-pressure airflow, thereby generating a pressure difference in the air duct. This pressure difference can be used to increase the upstream airflow velocity, causing the airflow heated by the heater to flow more quickly toward the air outlet. This not only increases the airflow rate in the air duct but also mixes the heated airflow, ensuring that the discharged airflow has a uniform temperature, thus achieving uniform heating of the air.

[0018] The air outlet on the air outlet end cap contains multiple evenly distributed air outlets. Meanwhile, the vortex generator is a convex bulge set on the low-pressure vortex cavity near the air outlet side and coaxial with the upstream air passage. After the high-speed hot airflow enters the low-pressure vortex cavity, it is impacted by the convex bulge, causing it to disperse and swirl around the convex bulge to mix with the hot airflow. At the same time, the mixed hot airflow will form a uniform airflow on the surface of the convex bulge and be ejected from multiple air outlets, thereby achieving consistent temperature and airflow at each air outlet.

[0019] This proposed air heating device has a compact structure and occupies little space. Attached Figure Description

[0020] Figure 1 This is a front view structural diagram of the air heating device based on a ceramic heater provided by this utility model.

[0021] Figure 2 This is a schematic diagram of the main structure of the air outlet end seat provided by this utility model.

[0022] Figure 3 This is an exploded structural diagram of the air outlet end seat provided by this utility model.

[0023] Figure 4 This is a schematic diagram of the main structure of the air inlet end seat provided by this utility model.

[0024] Figure 5 This is a schematic diagram of the internal structure of the air heating device based on a ceramic heater provided by this utility model.

[0025] Figure 6 This is a cross-sectional structural diagram of the air heating device based on a ceramic heater provided by this utility model.

[0026] Figure 7 This is a schematic diagram of the structure of the metal clamping component and the thermal pad provided by this utility model.

[0027] Figure Labels

[0028] 10 is a cylindrical shell; 11 is a ceramic substrate; 111 is a through hole; 12 is a metal clamping part; 13 is a thermal pad; 14 is a screw; 20 is an air inlet end seat; 30 is an air outlet end seat; 31 is an air inlet; 32 is an air outlet; 33 is a low-pressure vortex cavity; 331 is an eddy current generator; 332 is a front cavity; 333 is a rear cavity; 40 is a terminal block. Detailed Implementation

[0029] The present invention will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be emphasized that the following description is merely exemplary and not intended to limit the scope and application of the present invention.

[0030] This embodiment provides an air heating device based on a ceramic heater, such as... Figure 1-4 As shown, the heating device includes a cylindrical housing 10, which houses a heater (hereinafter referred to as a ceramic heater) composed of multiple ceramic substrates 11 connected in series. A terminal block 40 is provided on the cylindrical housing 10. One end of the cylindrical housing 10 is connected to an air inlet seat 20, and the other end is connected to an air outlet seat 30. The air inlet seat 20 and the air outlet seat 30 can be connected to the cylindrical housing 10 via flanges, internal or external threads, screws 14, or other structures. In this embodiment, it is preferable to tightly connect the air inlet seat 20, the air outlet seat 30, and the cylindrical housing 10 using a screw 14. It is understood that a sealing gasket can be provided at the mating end to improve sealing. In this embodiment, the air inlet seat 20... The main structure is 0, and its size is smaller than that of the air outlet seat 30 and the columnar shell 10. The air outlet seat 30 is a variable diameter columnar structure, which includes an air inlet 31 and an air outlet 32, and a low-pressure vortex cavity 33 is provided between the air inlet 31 and the air outlet 32. In this embodiment, the size of the low-pressure vortex cavity 33 is larger than that of the air inlet 31 and the air outlet 32. The low-pressure vortex cavity 33 has a built-in vortex generator 331. Under the action of the vortex generator 331, a low-pressure environment will be formed, thereby forming a pressure difference in the air passage. This pressure difference can be used to increase the upstream airflow velocity, so that the airflow heated by the ceramic heater can quickly enter the low-pressure vortex cavity 33, mix in the low-pressure vortex cavity 33, and then be discharged.

[0031] Specifically, this embodiment uses a ceramic heater instead of a traditional electric heating wire heater. This not only improves the heat source from a "line" to a "surface," greatly enhancing heat exchange efficiency, but also utilizes the superior material properties of the ceramic heater to improve thermal energy utilization and precise temperature control. Furthermore, the ceramic heater is manufactured using a high-temperature sintering process, ensuring its stability and cleanliness meet the requirements of the semiconductor and photovoltaic industries. In addition, this embodiment provides a low-pressure vortex cavity 33 on the air outlet 30. This low-pressure vortex cavity 33 can form a low-pressure airflow, thereby creating a pressure difference in the air passage. This pressure difference can increase the upstream airflow velocity, allowing the airflow heated by the heater to flow more rapidly towards the air outlet 32. This not only increases the airflow rate in the air passage but also mixes the heated airflow, ensuring a uniformly heated airflow and thus achieving uniform heating of the air.

[0032] In a preferred embodiment, the vortex generator 331 is a convex bulge disposed on the side of the low-pressure vortex cavity 33 near the air outlet 32 ​​and coaxial with the upstream air duct. In this embodiment, the upstream air duct mainly refers to the air inlet 31 of the air outlet seat 30. In other words, the convex bulge is disposed at the center of the inner side of the low-pressure vortex cavity 33. The convex bulge can be any one of teardrop shape, semi-ellipse shape, or semi-circle shape. In this embodiment, a semi-circle shape is preferred. Figure 3 As shown, the outer surface of the semi-circular convex hull is streamlined, and the hot airflow can form a vortex airflow under the action of the semi-circular convex hull.

[0033] In a preferred embodiment, the low-pressure vortex cavity 33 is larger than the inlet 31 and outlet 32, and includes a front cavity 332 and a rear cavity 333 that are connected to each other. The front cavity 332 and the rear cavity 333 can be bonded, welded, or sleeved together using high-temperature resistant adhesive to form the low-pressure vortex cavity 33. Multiple outlets 32 are provided on the outside of the front cavity 332 and surround the outer periphery of the convex bulge; that is, the convex bulge is provided on the inner side of the front cavity 332. Figure 3 As shown, this design structure enables the hot airflow to form a vortex around the convex bulge and mix before being discharged through the air outlet 32. In this embodiment, an extension pipe is preferably provided at the air outlet, that is, the air outlet 32 ​​is a tubular structure.

[0034] In a preferred embodiment, the ceramic substrate 11 is a cylinder adapted to the structure of the columnar shell 10, and has multiple sets of through holes 111 parallel to the axis of the columnar shell 10, such as... Figure 6As shown in the figure, the ceramic substrate 11 includes at least three sets of ceramic bases connected in series. It can be understood that the corresponding through holes 111 on the three sets of ceramic bases should be connected to form an air passage. In this embodiment, the ceramic substrate 11 is an integral structure formed by sintering ceramic to 600-800°C and then spraying electrothermal film coating onto its surface for sintering and carbonization.

[0035] In a preferred embodiment, two adjacent ceramic substrates 11 are fixed together by a metal clamping member 12, and a flexible thermally conductive pad 13 is provided between the ceramic substrate 11 and the metal clamping member 12, such as... Figure 5-6 The figure shows a schematic diagram of the internal structure of the air heating device provided in this embodiment. As can be seen from the figure, the heat-conducting pad 13 is clamped between two adjacent ceramic substrates 11 and its size is slightly larger than the diameter of the ceramic substrate 11. Thus, when the metal clamping member 12 is clamped at the joint of two adjacent ceramic substrates 11, the heat-conducting pad 13 can be located between the metal clamping member 12 and the ceramic substrate 11. In this way, on the one hand, it can compensate for the difference in the coefficient of thermal expansion between the ceramic substrate 11 and the metal clamping member 12, and prevent the ceramic substrate 11 from breaking due to direct contact with it. On the other hand, it can fill the microscopic uneven gaps between the metal clamping member 12 and the ceramic substrate 11, and improve heat conduction.

[0036] As a preferred embodiment, the metal clamp 12 is a metal clamp, and the thermal pad 13 is a mica sheet or a thermally conductive silicone pad, such as... Figure 7 As shown.

[0037] In a preferred embodiment, the cylindrical housing 10, the air inlet end seat 20, and the air outlet end seat 30 are connected by a screw 14. The screw 14 is disposed between the cylindrical housings 10 of the heater, and its two ends extend to the outside of the air inlet end seat 20 and the air outlet end seat 30, respectively. Figure 6 As shown, this improves the compactness and aesthetics of the overall device structure.

[0038] As a preferred embodiment, the columnar shell 10 has thermal insulation properties. In this embodiment, the columnar shell 10 preferably includes an inner reflective layer, a heat insulation layer, and an outer protective layer. The inner reflective layer is mainly used to reflect heat and avoid heat transfer loss. In this embodiment, the inner reflective layer is preferably a polished aluminum plate. The heat insulation layer is located in the middle and is used to block heat transfer. It can be made of a material with low thermal conductivity. In this embodiment, rock wool is preferred. The outer protective layer is used to support and protect the inner reflective layer and the heat insulation layer. Its material is preferably an aluminum alloy profile.

[0039] The operating principle of the air heating device in this embodiment includes: Install the air heating device in the corresponding position of the fan, and start the fan and ceramic heater; A negative pressure is created in the air heating device by the fan. The external airflow first enters the cylindrical housing 10 through the air inlet seat 20. Since the cylindrical housing 10 has a built-in ceramic heater, the airflow entering the cylindrical housing 10 will be heated in the air passage of the ceramic heater and enter the low-pressure vortex cavity 33 with the negative pressure. After the high-speed hot airflow enters the low-pressure vortex cavity 33, it is impacted by the convex hull, which disperses it and makes it mix with the convex hull-shaped vortex airflow. At the same time, the mixed hot airflow will form a uniform airflow on the convex hull surface and be sprayed out from multiple air outlets 32, thereby achieving a consistent temperature and airflow at each air outlet 32.

[0040] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An air heating device based on a ceramic heater, characterized in that: It includes a cylindrical shell, which houses a heater composed of multiple ceramic substrates connected in series. One end of the cylindrical shell is connected to an air inlet seat, and the other end is connected to an air outlet seat. The air outlet seat includes an air inlet and an air outlet, and a low-pressure vortex cavity is provided between the air inlet and the air outlet. The low-pressure vortex cavity houses a vortex generator, which can increase the upstream airflow velocity and mix the air before discharge.

2. The air heating device based on a ceramic heater according to claim 1, characterized in that: The vortex generator is a convex hull located on the low-pressure vortex cavity near the air outlet and coaxial with the upstream air passage. The convex hull can be any one of teardrop shape, semi-ellipse or semi-circle.

3. The air heating device based on a ceramic heater according to claim 2, characterized in that: The low-pressure vortex cavity is larger than the inlet and outlet, and includes a front cavity and a rear cavity that are connected to each other. The outlet includes multiple outlets, which are arranged on the outside of the front cavity and surround the outer periphery of the convex bulge.

4. The air heating device based on a ceramic heater according to claim 1, characterized in that: The ceramic substrate is a cylinder adapted to the columnar shell structure, and it is provided with multiple sets of through holes parallel to the axis of the columnar shell, which form an air passage.

5. The air heating device based on a ceramic heater according to claim 1, characterized in that: The two adjacent ceramic substrates are fixed together by a metal clamp, and a flexible thermally conductive pad is provided between the ceramic substrate and the metal clamp.

6. The air heating device based on a ceramic heater according to claim 5, characterized in that: The thermal pad is a mica sheet or a thermally conductive silicone pad.

7. The air heating device based on a ceramic heater according to claim 1, characterized in that: The cylindrical housing, the air inlet end seat, and the air outlet end seat are connected by a screw. The screw is located between the cylindrical housings of the heater, and its two ends extend to the outside of the air inlet end seat and the air outlet end seat, respectively.

8. The air heating device based on a ceramic heater according to claim 1, characterized in that: The cylindrical shell includes an inner reflective layer, a heat insulation layer, and an outer protective layer.

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