Grinding sand recovery cooling device

Abstract

The utility model discloses a kind of grinding sand recovery cooling devices, including outer bucket, water pump, filter screen, cooling water providing device, microcomputer controller and two groups of temperature sensors.The utility model, its double-spiral cooling structure makes cooling water form spiral flow path in cavity, significantly prolongs heat exchange time, cooperates microcomputer control electric control proportional valve and carries out dynamic flow distribution, solves the uneven cooling problem caused by traditional step-by-step processing.At the same time, the second cooling cavity in central cooling cylinder cooperates first cooling cavity, third cooling cavity, and the synergistic effect enables bidirectional heat dissipation of radial and axial in the flow process of high-temperature mortar, avoids the influence of local overheating on the performance of grinding sand, effectively maintains the physical stability of grinding sand.

Description

Technical Field

[0001] This utility model relates to the field of grinding technology, and in particular to a grinding sand recovery and cooling device. Background Technology

[0002] In wafer grinding processes, the recycling of abrasive directly impacts processing costs and finished product quality. Traditional open recycling systems face three major technical bottlenecks: First, direct recirculation of high-temperature slurry (typically 60-80℃) accelerates abrasive aging, leading to decreased cutting force; second, if mixed wafer debris is not effectively removed, it will cause secondary scratches on the wafer surface; and third, conventional natural cooling methods take several hours, severely restricting production line cycle time. Existing technologies mostly employ a step-by-step processing mode—first coarse filtration through a vibrating screen, then transfer to an independent cooling tower for cooling. This discrete design not only occupies space but also causes slurry component separation due to multiple transfers. Especially for advanced wafer grinding processes below 5nm, traditional systems struggle to maintain the stability of abrasive particle size distribution, directly affecting wafer planarization. Furthermore, pressure fluctuations caused by intermittent filtration can lead to unstable slurry supply system pressure, affecting the working accuracy of the grinding head.

[0003] Therefore, it is necessary to install a grinding sand recovery and cooling device to cool the mortar quickly and uniformly. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a grinding sand recovery and cooling device.

[0005] To achieve the above objectives, this utility model adopts the following technical solution: a grinding sand recovery and cooling device, comprising an outer barrel, a water pump, a filter screen, a cooling water supply device, a microcomputer controller, and two sets of temperature sensors. A top plate is fixedly connected to the upper end of the outer barrel. A cover plate is rotatably connected to the inner side wall of the top plate via a hinge. An inner barrel is fixedly connected to the lower wall of the top plate. A first cooling chamber is formed between the circumferential outer wall of the inner barrel and the inner side wall of the outer barrel. A central cooling cylinder is fixedly connected to the lower inner wall of the inner barrel, located at the center of the top view projection. A second cooling chamber is provided on the inner side wall of the central cooling cylinder. The lower inner wall of the outer barrel and the lower inner wall of the inner barrel... A third cooling chamber is formed between the outer and inner tubs. The outer tub has a first water inlet pipe and a second water inlet pipe fixedly connected to it in a vertical arrangement near the upper wall. The first water inlet pipe is connected to the interior of the first cooling chamber. The end of the second water inlet pipe facing the outer tub passes through the side wall of the outer tub and the side wall of the inner tub in sequence and is connected to the interior of the second cooling chamber. The ends of the first and second water inlet pipes away from the outer tub are connected to the outlet of the cooling water supply device. A drain connector is fixedly connected to the outer tub near the bottom. The drain connector is connected to the interior of the third cooling chamber. The end of the drain connector away from the outer tub is connected to the return end of the cooling water supply device.

[0006] As a further description of the above technical solution:

[0007] A first spiral partition is fixedly connected between the outer circumferential wall of the inner barrel and the inner sidewall of the outer barrel.

[0008] As a further description of the above technical solution:

[0009] A fixed column is fixedly connected to the inner wall of the central cooling cylinder. A second spiral baffle is fixedly connected between the outer wall of the fixed column and the inner wall of the central cooling cylinder. A connecting pipe for connecting the second cooling chamber and the third chamber is fixedly connected to the lower wall of the inner cylinder. A spiral guide vane for guiding cooling water tangentially into the third cooling chamber is added to the inner wall of the connecting pipe.

[0010] As a further description of the above technical solution:

[0011] Two sets of return water baffles are fixedly connected to the lower inner wall of the outer barrel, and the cooling water flow channel is formed inside the third cooling chamber through the two sets of return water baffles.

[0012] As a further description of the above technical solution:

[0013] The ends of the first water inlet pipe and the second water inlet pipe that are away from the outer tub are connected to an electronically controlled proportional valve. The end of the electronically controlled proportional valve that is away from the first water inlet pipe and the second water inlet pipe is provided with a water inlet connector. The end of the water inlet connector that is away from the electronically controlled proportional valve is connected to the water outlet of the cooling water supply device.

[0014] As a further description of the above technical solution:

[0015] The bottom of the outer barrel is rotatably connected to four sets of casters.

[0016] As a further description of the above technical solution:

[0017] The upper wall of the cover plate is provided with a water inlet and a water outlet. The filter screen is located on the inner side wall of the water inlet, the water pump is located on the water outlet, and the two sets of temperature sensors are respectively located on the inner side wall of the inner barrel and the outer circumferential wall of the central cooling cylinder.

[0018] This utility model has the following beneficial effects:

[0019] Compared with existing technologies, this abrasive sand recovery and cooling device features a double-helix cooling structure that creates a spiral flow path for the cooling water within the chamber, significantly extending the heat exchange time. Combined with a microcomputer-controlled proportional valve for dynamic flow distribution, it solves the problem of uneven cooling caused by traditional step-by-step processing. Simultaneously, the second cooling chamber in the central cooling cylinder, along with the first and third cooling chambers, works synergistically to achieve bidirectional heat dissipation of the high-temperature mortar during flow, both radially and axially. This avoids the impact of localized overheating on the performance of the abrasive sand and effectively maintains its physical stability. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the grinding sand recovery and cooling device proposed in this utility model;

[0021] Figure 2 This is a schematic diagram of the connection structure between the inner barrel and the first spiral partition of a grinding sand recycling and cooling device proposed in this utility model.

[0022] Figure 3 This is a partial sectional view of the connection structure between the outer and inner barrels of a grinding sand recovery and cooling device proposed in this utility model.

[0023] Figure 4 This is a top view schematic diagram of the internal structure of the outer barrel of a grinding sand recovery and cooling device proposed in this utility model.

[0024] Legend:

[0025] 1. Outer tub; 2. Casters; 3. Top plate; 4. Cover plate; 5. Central cooling cylinder; 6. First water inlet pipe; 7. Second water inlet pipe; 8. Electrically controlled proportional valve; 9. Water inlet connector; 10. Drain connector; 11. Inner tub; 12. First spiral baffle; 13. Fixing column; 14. Second spiral baffle; 15. Return water baffle. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Reference Figures 1 to 4The present invention provides a grinding sand recycling and cooling device, which includes an outer barrel 1, a water pump, a filter screen, a cooling water supply device, a microcomputer controller and two sets of temperature sensors. The upper end of the outer barrel 1 is fixedly connected to a top plate 3. The inner side wall of the top plate 3 is rotatably connected to a cover plate 4 through a hinge. The upper wall of the cover plate 4 is provided with a water inlet and a water outlet. The filter screen is set on the inner side wall of the water inlet and the water pump is set on the water outlet.

[0028] To ensure that the cooling water can form a spiral flow path to prolong the heat exchange time, an inner barrel 11 is fixedly connected to the lower wall of the top plate 3. A first cooling chamber is formed between the outer circumferential wall of the inner barrel 11 and the inner side wall of the outer barrel 1. A central cooling cylinder 5 is fixedly connected to the lower inner wall of the inner barrel 11 and located at the center of the top projection. A second cooling chamber is provided on the inner side wall of the central cooling cylinder 5. A third cooling chamber is formed between the lower inner wall of the outer barrel 1 and the lower wall of the inner barrel 11. Two sets of temperature sensors are respectively set on the inner side wall of the inner barrel 11 and the outer circumferential wall of the central cooling cylinder 5. A fixed column 13 is fixedly connected to the inner side wall of the central cooling cylinder 5. A second spiral baffle 14 is fixedly connected between the outer wall of the fixed column 13 and the inner side wall of the central cooling cylinder 5. A connecting pipe for connecting the second cooling chamber and the third chamber is fixedly connected to the lower wall of the inner barrel 11. A spiral guide vane for guiding the cooling water tangentially into the third cooling chamber is added to the inner side wall of the connecting pipe. A first spiral baffle 12 is fixedly connected between the outer circumferential wall of the inner barrel 11 and the inner side wall of the outer barrel 1.

[0029] Both the second spiral baffle 14 and the first spiral baffle 12 adopt an involute design. Through the above structure, the cooling water forms a spiral flow path in the first cooling chamber and the second cooling chamber. With the help of the microcomputer controller, the opening of the electronically controlled proportional valve 8 is dynamically adjusted according to the feedback signals of the two sets of temperature sensors to achieve precise control of the cooling water flow rate and solve the problem of uneven cooling caused by traditional step-by-step processing.

[0030] Two sets of temperature sensors are respectively installed on the inner wall of the inner tank 11 (monitoring the temperature of the mortar near the inner wall of the inner tank 11) and on the outer wall of the central cooling cylinder 5 (monitoring the temperature of the mortar near the central cooling cylinder 5), and their signal output terminals are connected to the signal input terminals of the microcomputer controller. Through the above structure, the microcomputer controller can obtain the temperature data of the cooling system in real time, providing a basis for the adjustment of the electronically controlled proportional valve 8 and ensuring the stability of the cooling process;

[0031] To achieve multi-stage distribution and coordinated heat dissipation of cooling water, a first water inlet pipe 6 and a second water inlet pipe 7 are fixedly connected vertically on the outer wall of the outer tub 1 near the upper wall. The first water inlet pipe 6 is connected to the interior of the first cooling chamber. The end of the second water inlet pipe 7 facing the outer tub 1 passes through the side wall of the outer tub 1 and the side wall of the inner tub 11 in sequence and is connected to the interior of the second cooling chamber. The ends of the first water inlet pipe 6 and the second water inlet pipe 7 away from the outer tub 1 are both connected to the outlet of the cooling water supply device. A drain connector 10 is fixedly connected to the outer wall of the outer tub 1 near the bottom. The drain connector 10 is connected to the interior of the third cooling chamber. The end of the drain connector 10 away from the outer tub 1 is connected to the return end of the cooling water supply device. The ends of the first water inlet pipe 6 and the second water inlet pipe 7 away from the outer tub 1 are connected to an electrically controlled proportional valve 8. An inlet connector 9 is provided at the end of the electrically controlled proportional valve 8 away from the first water inlet pipe 6 and the second water inlet pipe 7. The end of the inlet connector 9 away from the electrically controlled proportional valve 8 is connected to the outlet of the cooling water supply device.

[0032] The first inlet pipe 6 and the second inlet pipe 7 are connected to the cooling water supply device via an electrically controlled proportional valve 8. The first inlet pipe 6 supplies water to the first cooling chamber, and the second inlet pipe 7 supplies water to the second cooling chamber. The drain connector 10 returns the cooling water from the third cooling chamber to the cooling water supply device. Through this structure, the cooling water supply device, the electrically controlled proportional valve 8, and the three cooling chambers form a closed-loop cooling system. Combined with a microcomputer controller, this dynamically distributes the cooling water flow, ensuring balanced cooling efficiency in each cooling chamber.

[0033] In order to optimize the flow path of cooling water in the third cooling chamber, two sets of return water baffles 15 are fixedly connected to the lower inner wall of the outer barrel 1, and the cooling water flow channel is formed inside the third cooling chamber through the two sets of return water baffles 15.

[0034] Two sets of return water baffles 15, fixedly connected to the lower inner wall of the outer barrel 1, divide the third cooling chamber into an S-shaped flow channel, the cross-sectional width of which gradually decreases along the flow direction. Through the above structure, the cooling water forms a stable laminar flow state in the third cooling chamber, improving heat exchange efficiency and avoiding the occurrence of cooling water short-circuiting.

[0035] To facilitate equipment movement and positioning, four sets of casters 2 are rotatably connected to the bottom of the outer barrel 1;

[0036] The four sets of casters 2 rotatably connected to the bottom of the outer tub 1 are industrial-grade casters with brakes, and the wheel diameter is 80mm. This structure allows the equipment to move flexibly on-site and be reliably fixed by the brakes when needed, meeting the usage requirements under different working conditions.

[0037] Working principle: Both the second spiral baffle 14 and the first spiral baffle 12 adopt an involute design. Through the above structure, the cooling water forms a spiral flow path in the first cooling chamber and the second cooling chamber. With the help of the microcomputer controller, the opening of the electronically controlled proportional valve 8 is dynamically adjusted according to the feedback signals of the two sets of temperature sensors to achieve precise control of the cooling water flow rate, which solves the problem of uneven cooling caused by traditional step-by-step processing. The two sets of temperature sensors are respectively installed on the inner wall of the inner barrel 11 (monitoring the temperature of the mortar near the inner wall of the inner barrel 11) and the outer wall of the central cooling cylinder 5 (monitoring the temperature of the mortar near the central cooling cylinder 5). Their signal output terminals are connected to the signal input terminals of the microcomputer controller. Through the above structure, the microcomputer controller can acquire the temperature data of the cooling system in real time, providing a basis for the adjustment of the electronically controlled proportional valve 8 and ensuring the stability of the cooling process. The first water inlet pipe 6 and the second water inlet pipe 7 are connected to the cooling water supply device through the electronically controlled proportional valve 8, wherein the first water inlet pipe 6 supplies water to the first cooling chamber and the second water inlet pipe 7 supplies water to the second cooling chamber. The drain connector 10 returns the cooling water from the third cooling chamber to the cooling water supply device. Through the above structure, the cooling water supply device, the electronically controlled proportional valve 8, and the three cooling chambers form a closed-loop cooling system, which, together with the microcomputer controller, realizes the dynamic distribution of cooling water flow and ensures the balanced cooling efficiency of each cooling chamber. The two sets of return water baffles 15 fixedly connected to the lower inner wall of the outer barrel 1 divide the third cooling chamber into an S-shaped flow channel, the cross-sectional width of which gradually decreases along the flow direction. Through the above structure, the cooling water forms a stable laminar flow state in the third cooling chamber, improving the heat exchange efficiency and avoiding the occurrence of cooling water short circuit. The four sets of universal wheels 2 rotatably connected to the bottom of the outer barrel 1 are industrial-grade universal wheels with brake devices, and the wheel diameter is 80mm. With the above structure, the equipment can be moved flexibly at the work site and reliably fixed by the braking device when needed, meeting the usage requirements under different working conditions.

[0038] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A grinding sand recovery and cooling device, characterized in that: The system includes an outer tub (1), a water pump, a filter screen, a cooling water supply device, a microcomputer controller, and two sets of temperature sensors. A top plate (3) is fixedly connected to the upper end of the outer tub (1). A cover plate (4) is rotatably connected to the inner wall of the top plate (3) via a hinge. An inner tub (11) is fixedly connected to the lower wall of the top plate (3). A first cooling chamber is formed between the circumferential outer wall of the inner tub (11) and the inner wall of the outer tub (1). A central cooling cylinder (5) is fixedly connected to the lower inner wall of the inner tub (11) at the center of the top view projection. A second cooling chamber is provided on the inner wall of the central cooling cylinder (5). A third cooling chamber is formed between the lower inner wall of the outer tub (1) and the lower wall of the inner tub (11). The outer wall of the outer tub (1) and the cover plate (4) are fixedly connected to the inner wall of the cover plate (3). A first water inlet pipe (6) and a second water inlet pipe (7) are fixedly connected in a vertical arrangement near the upper wall. The first water inlet pipe (6) is connected to the interior of the first cooling chamber. The end of the second water inlet pipe (7) facing the outer barrel (1) passes through the side wall of the outer barrel (1) and the side wall of the inner barrel (11) in sequence and is connected to the interior of the second cooling chamber. The ends of the first water inlet pipe (6) and the second water inlet pipe (7) away from the outer barrel (1) are connected to the outlet of the cooling water supply device. A drain connector (10) is fixedly connected to the outer wall of the outer barrel (1) near the bottom. The drain connector (10) is connected to the interior of the third cooling chamber. The end of the drain connector (10) away from the outer barrel (1) is connected to the return end of the cooling water supply device.

2. The grinding sand recovery and cooling device according to claim 1, characterized in that: A first spiral partition (12) is fixedly connected between the outer circumferential wall of the inner barrel (11) and the inner side wall of the outer barrel (1).

3. The grinding sand recovery and cooling device according to claim 2, characterized in that: A fixed column (13) is fixedly connected to the inner wall of the central cooling cylinder (5). A second spiral baffle (14) is fixedly connected between the outer wall of the fixed column (13) and the inner wall of the central cooling cylinder (5). A connecting pipe for connecting the second cooling chamber and the third chamber is fixedly connected to the lower wall of the inner barrel (11). A spiral guide vane for guiding cooling water into the third cooling chamber tangentially is added to the inner wall of the connecting pipe.

4. The grinding sand recovery and cooling device according to claim 3, characterized in that: Two sets of return water baffles (15) are fixedly connected to the lower inner wall of the outer barrel (1), and the cooling water flow channel is formed inside the third cooling chamber through the two sets of return water baffles (15).

5. The grinding sand recovery and cooling device according to claim 4, characterized in that: The first water inlet pipe (6) and the second water inlet pipe (7) are connected together to an electrically controlled proportional valve (8) at the ends away from the outer barrel (1). The end of the electrically controlled proportional valve (8) away from the first water inlet pipe (6) and the second water inlet pipe (7) is provided with a water inlet connector (9). The end of the water inlet connector (9) away from the electrically controlled proportional valve (8) is connected to the outlet end of the cooling water supply device.

6. The grinding sand recovery and cooling device according to claim 5, characterized in that: The bottom of the outer barrel (1) is rotatably connected to four sets of casters (2).

7. The grinding sand recovery and cooling device according to claim 6, characterized in that: The cover plate (4) has an inlet and an outlet on its upper wall. The filter screen is located on the inner wall of the inlet, and the water pump is located on the outlet. The two sets of temperature sensors are located on the inner wall of the inner barrel (11) and the outer wall of the central cooling cylinder (5), respectively.

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