A sintering jig and sintering furnace for ceramic copper clad plate

Abstract

The utility model relates to the technical field of ceramic copper clad plate sintering, more particularly to a kind of sintering jig and sintering furnace of ceramic copper clad plate, and sintering jig includes top plate and bottom plate, support block is equipped on bottom plate, the side of support block one is the inclined side that can support base plate, inclined side can be with the side of base plate abut, support block has several, the inclined side of several support blocks is used to support base plate together, top plate can be covered on bottom plate.The setting of sintering jig top plate makes that the ash that falls in sintering hearth can directly fall on top plate, can avoid falling in sintering hearth to ceramic copper clad plate, and copper defect, pimple and other adverse phenomena appear on the surface of ceramic copper clad plate;The setting of sintering jig bottom plate support block inclined plane makes that ceramic copper clad plate can still be provided with stable support by inclined side for ceramic copper clad plate after deformation, can avoid the problem that ceramic copper clad plate appears deviation on jig.

Description

Technical Field

[0001] This utility model relates to the technical field of ceramic substrate sintering, and more specifically, to a sintering fixture and sintering furnace for copper-clad ceramic plates. Background Technology

[0002] Copper-clad ceramic substrates (DBCs) serve as carriers for numerous microelectronic devices, and currently, most commercially available DBCs are made of copper-clad alumina ceramic. The manufacturing process of DBCs requires various sintering fixtures, which serve to limit and support the ceramic and copper sheets.

[0003] However, the substrate may deform during sintering. This deformation can lead to instability in the center of gravity, causing the product to misalign on the fixture. This results in uneven heating of the ceramic substrate, leading to unstable product performance. Furthermore, ash from the furnace can easily fall onto the product during sintering, contaminating its surface. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of existing technologies in the sintering process, such as the ash falling from the furnace into the product and the substrate being deformed and misaligned on the fixture. This invention provides a sintering fixture and sintering furnace for ceramic copper-clad laminates. This solution can prevent the ash falling from the furnace into the substrate during the sintering process and can also prevent the substrate from being deformed and misaligned on the fixture.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0006] A sintering fixture for a ceramic copper-clad laminate is provided, comprising a top plate and a bottom plate. The bottom plate has support blocks, one side of which is an inclined side capable of supporting a substrate. This inclined side abuts against the side edge of the substrate. Several support blocks are provided, and the inclined sides of these blocks collectively support the substrate. The top plate can be fitted onto the bottom plate. The end of the inclined side away from the bottom plate slopes away from the ceramic copper-clad laminate, meaning the inclined side of the support block is configured such that the cross-sectional area of ​​the top is smaller than the cross-sectional area of ​​the bottom.

[0007] When using the sintering fixture for the ceramic copper-clad laminate of this utility model, the ceramic copper-clad laminate to be sintered is first placed on the bottom plate of the fixture, and then the top plate of the fixture is placed on the bottom plate of the fixture to clamp the ceramic copper-clad laminate to be sintered between the top plate and the bottom plate. Then the fixture is placed in the sintering furnace to sinter the ceramic copper-clad laminate.

[0008] When the copper-clad ceramic sheet to be sintered is placed on the base plate of the fixture, the edge of the bottom surface of the copper-clad ceramic sheet abuts against the inclined side of the support block. During the sintering process, if the copper-clad ceramic sheet undergoes significant deformation, the abutment position between the bottom edge of the copper-clad ceramic sheet and the inclined side of the support block can change; that is, the point where the copper-clad ceramic sheet abuts against the inclined side slides downwards on the inclined side. Even after the copper-clad ceramic sheet slides downwards on the inclined side, because the bottom edge of the copper-clad ceramic sheet still abuts against the inclined side of the support block, the support block can still provide stable support for the copper-clad ceramic sheet, preventing the copper-clad ceramic sheet from shifting off the fixture.

[0009] The top plate of the sintering fixture of this invention allows ash from the sintering furnace to fall directly onto the top plate, preventing it from falling onto the copper-clad ceramic sheet and causing defects such as copper defects or lumps on the surface of the copper-clad ceramic sheet. The inclined plane on the bottom plate support block of the sintering fixture allows the support block to still provide stable support for the copper-clad ceramic sheet even if it deforms, thus preventing the copper-clad ceramic sheet from shifting on the fixture.

[0010] Furthermore, the inclined side of the support block is an inclined plane or an inclined arc surface. When the inclined side of the support block is an inclined plane or an inclined arc surface, the contact between the inclined side and the ceramic copper-clad laminate is a line contact, that is, the contact point between the inclined side and the ceramic copper-clad laminate is a straight line segment. In this case, the support block can provide more stable support for the ceramic copper-clad laminate.

[0011] Furthermore, the inclined side of the support block is spherical. When the inclined side of the support block is spherical, the contact between the inclined side and the ceramic copper-clad laminate is a point contact, that is, the contact point between the inclined side and the ceramic copper-clad laminate is a single contact point. At this time, the contact area between the support block and the ceramic copper-clad laminate is renewed, and the damage to the ceramic copper-clad laminate is less when it is removed from the fixture after sintering.

[0012] Furthermore, one side of the support block adjacent to the inclined side is a vertical plane, and the vertical plane has graduations along the vertical direction. When the operator places the ceramic copper-clad laminate on the base plate, the position of the ceramic copper-clad laminate on the inclined plane can be obtained through the graduations on the vertical plane. After sintering, the operator again obtains the position of the ceramic copper-clad laminate on the inclined plane after deformation through the graduations on the vertical plane. By comparing the two graduations, the operator can determine the warpage of the sintered ceramic copper-clad laminate. After obtaining the sintering warpage of the ceramic copper-clad laminate, it is then determined whether its warpage is within the normal range. If it is, the operator can determine that the ceramic copper-clad laminate has no quality problems; if not, a second inspection is required to further determine whether there are any quality problems with the ceramic copper-clad laminate.

[0013] Furthermore, the support blocks are linearly arranged along the four sides of the base plate, with several support blocks on each side. The presence of support blocks on all four sides ensures that when the ceramic-coated copper plate is placed on the base plate, its four sides are supported by the inclined sides of the support blocks, resulting in better support. The number of support blocks on each side can be adjusted according to the actual length of each side of the base plate.

[0014] Furthermore, the base plate is provided with a sliding groove, the axis of which is perpendicular to the edge of the base plate. The support block can be fixed on the sliding groove and is slidably connected to it. The support block can slide along the sliding groove, meaning its position on the base plate is adjustable. This adjustable position allows the base plate to support more ceramic copper-clad laminates of different sizes, thus broadening the applicability of the fixture.

[0015] Furthermore, it also includes a locking bolt. The slide groove is a T-shaped groove, and a slider is provided inside the slide groove. The slider is slidably connected to the slide groove. The support block has a connecting part, and the locking bolt passes through the connecting part and is threadedly connected to the slider. The slider is located at the bottom of the slide groove. Because the slide groove is a T-shaped groove, the slider cannot be disengaged from the slide groove through the top. The connecting part is located on the sides of the support block except for the inclined side. The bottom surface of the connecting part is flush with the bottom surface of the support block. After the locking bolt passes through the connecting part, it can be threadedly connected to the slider. When the locking bolt is tightened, the slide groove is clamped by the slider and the support block, so that the support block is fixed on the slide groove. When the locking bolt is not tightened, the slider can drive the support block to slide within the slide groove.

[0016] Furthermore, the base plate is also provided with a support column, the height of which is greater than the height of the support block. The bottom surface of the top plate is provided with a positioning hole, into which the support column can extend. When the top plate is closed on the base plate, the support column extends into the positioning hole, which can limit the position of the top plate closed on the base plate and prevent the top plate from falling off the base plate during the sintering process.

[0017] Furthermore, the base plate is also provided with an air-blocking groove. When the sintering fixture is used to sinter single-sided ceramic copper-clad laminates, the air-blocking groove on the base plate can increase the air intake of the sintering fixture and further reduce the weight of the fixture.

[0018] Furthermore, the edge of the base plate is provided with a baffle strip to block airflow. The baffle strip is fixedly installed on the base plate, and its top surface is flush with the top surface of the support block. The baffle strip can effectively control the amount of airflow entering the fixture, thereby controlling the oxygen content in the airflow and ensuring the sintering effect of the copper-clad laminate.

[0019] This utility model also provides a sintering furnace for ceramic copper-clad laminates, including a furnace body, a feeding device and a sintering fixture. The sintering fixture is a sintering fixture for ceramic copper-clad laminates as described above. The sintering fixture is located on the feeding device, and the feeding device can feed the sintering fixture into the inner cavity of the furnace body.

[0020] In a direction parallel to the movement of the feeding device, there are several rows of sintering fixtures, and the rows of sintering fixtures are arranged alternately.

[0021] On the orthographic projection plane perpendicular to the direction of movement of the feeding device, the sintering fixture located in the middle of the feeding device is the central sintering fixture; the sintering fixtures located on both sides of the feeding device are the side sintering fixtures. In the vertical direction, the height of the sintering fixture decreases sequentially from the central sintering fixture to the side sintering fixture, and the height difference between two adjacent rows of sintering fixtures is 0.3cm-0.5cm.

[0022] The sintering fixtures are arranged in a staggered pattern, meaning that in the direction parallel to the movement of the feeding device, the fixtures are offset from each other, and no two sintering fixtures overlap. In the direction perpendicular to the movement of the feeding device, the height of the sintering fixtures decreases sequentially from the middle sintering fixture to the side sintering fixtures, with the sintering fixture located in the middle of the sintering furnace being higher than the sintering fixtures located on the sides of the sintering furnace.

[0023] During operation, the airflow diffusion rate at the edges of the sintering furnace is faster than that in the center. Therefore, in this invention, the sintering fixture located in the center of the furnace is higher than those located on either side, ensuring a more consistent airflow effect on the fixture. The fixtures are staggered in the direction parallel to the feeding device's movement, preventing overlap and avoiding the formation of straight airflow channels, thus improving the sintering effect. Experiments have shown that a height difference of 0.3cm-0.5cm between adjacent rows of sintering fixtures further enhances the consistency of airflow action on the fixture.

[0024] Furthermore, the feeding device includes several conveyor belts, each conveyor belt having a row of sintering fixtures, and the height difference between two adjacent conveyor belts is 0.3cm-0.5cm. The 0.3cm-0.5cm height difference between adjacent rows of sintering fixtures is achieved through the height difference between adjacent conveyor belts.

[0025] Furthermore, the feeding device is a conveyor belt, and several rows of pads are provided on the conveyor belt in a direction perpendicular to the movement of the feeding device. The height difference between two adjacent rows of pads is 0.3cm-0.5cm. The height difference between adjacent rows of sintering fixtures is achieved by the height difference between different pads.

[0026] Furthermore, the feeding device is a conveyor belt, and in the direction perpendicular to the movement of the feeding device, the thickness difference of the bottom plate of two adjacent rows of sintering fixtures is 0.3cm-0.5cm. The height difference of 0.3cm-0.5cm between adjacent rows of sintering fixtures is achieved by the thickness difference of the bottom plate in different rows of fixtures.

[0027] Compared with the prior art, the beneficial effects of this utility model are:

[0028] The top plate of the sintering fixture of this invention allows ash from the sintering furnace to fall directly onto the top plate, preventing it from falling onto the copper-clad ceramic sheet and causing defects such as copper defects or lumps on the surface of the copper-clad ceramic sheet. The inclined plane on the bottom plate support block of the sintering fixture allows the support block to still provide stable support for the copper-clad ceramic sheet even if it deforms, thus preventing the copper-clad ceramic sheet from shifting on the fixture.

[0029] In the sintering furnace for copper-clad ceramic sheets of this invention, the sintering fixture located in the middle of the furnace is higher than the sintering fixtures located on both sides of the furnace, ensuring that the airflow on the fixtures is more consistent. In the direction parallel to the movement of the feeding device, the fixtures are staggered, with no two sintering fixtures overlapping, avoiding the formation of straight airflow channels between the fixtures and resulting in better sintering performance. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the internal structure of a sintering fixture for a ceramic copper-clad laminate.

[0031] Figure 2 A schematic diagram of the structure of a sintering fixture for a ceramic copper-clad laminate;

[0032] Figure 3 A schematic diagram of the top plate of a sintering fixture for a ceramic copper-clad laminate;

[0033] Figure 4 A schematic diagram of the base plate of a second embodiment of a sintering fixture for a ceramic copper-clad laminate;

[0034] Figure 5 A schematic diagram of the support block of a sintering fixture for a ceramic copper-clad laminate;

[0035] Figure 6This is a schematic diagram of the support block in Embodiment 3 of a sintering fixture for a ceramic copper-clad laminate;

[0036] Figure 7 A schematic diagram of the slider and locking bolt of a sintering fixture for a ceramic copper-clad laminate;

[0037] Figure 8 This is a schematic diagram of the structure of a sintering furnace for ceramic copper-clad laminates;

[0038] Figure 9 This is a schematic diagram of the feeding device of a sintering furnace for ceramic copper-clad laminates from the perspective of part A.

[0039] Figure 10 This is a structural schematic diagram of the feeding device of a sintering furnace for a ceramic copper-clad laminate, viewed from part B.

[0040] Figure 11 This is a schematic diagram of the structure from part B of Embodiment Six of a feeding device for a sintering furnace of a ceramic copper-clad laminate.

[0041] Figure 12 This is a structural schematic diagram from part B of Embodiment Seven of a feeding device for a sintering furnace of a ceramic copper-clad laminate.

[0042] In the attached diagram: 1. Top plate; 2. Bottom plate; 3. Support block; 301. Inclined side; 302. Vertical side; 321. Scale; 303. Connecting part; 201. Slide groove; 4. Sliding block; 5. Locking bolt; 202. Support column; 203. Stop bar; 101. Positioning hole; 6. Furnace body; 7. Feeding device; 8. Pad block. Detailed Implementation

[0043] The present invention will be further described below with reference to specific embodiments. The accompanying drawings are for illustrative purposes only, representing schematic diagrams rather than actual physical objects, and should not be construed as limiting the scope of this patent. To better illustrate the embodiments of the present invention, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0044] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0045] Example 1

[0046] This embodiment is a first embodiment of a sintering fixture for a ceramic copper-clad laminate, such as... Figures 1-3 As shown, the system includes a top plate 1 and a bottom plate 2. A support block 3 is provided on the bottom plate 2. One side of each support block 3 is an inclined side 301 that can support a substrate. The inclined side 301 can abut against the side edge of the substrate. There are several support blocks 3, and the inclined sides 301 of these support blocks 3 work together to support the substrate on the bottom plate 2. The top plate 1 can cover the bottom plate 2. The end of the inclined side 301 away from the bottom plate 2 is inclined away from the ceramic copper-clad laminate, meaning that the inclined side 301 on the support block 3 is designed such that the cross-sectional area of ​​the top is smaller than the cross-sectional area of ​​the bottom of the support block 3.

[0047] Specifically, the base plate 2 is also provided with a support column 202, the height of which is greater than the height of the support block 3. The bottom surface of the top plate 1 is provided with a positioning hole 101, and the support column 202 can extend into the positioning hole 101.

[0048] Specifically, the edge of the base plate 2 is also provided with a baffle 203 to block the airflow. The baffle 203 is fixedly installed on the base plate 2, and the top surface of the baffle 203 is flush with the top surface of the support block 3.

[0049] The working principle or process of this embodiment is as follows:

[0050] When the copper-clad ceramic sheet to be sintered is placed on the base plate 2 of the fixture, the edge of the bottom surface of the copper-clad ceramic sheet abuts against the inclined side 301 of the support block 3. After the copper-clad ceramic sheet to be sintered is placed on the base plate 2 of the fixture, the top plate 1 is placed on top of the base plate 2. When the top plate 1 is placed on top of the base plate 2, the support column 202 extends into the positioning hole 101. During the sintering process of the copper-clad ceramic sheet, if the copper-clad ceramic sheet undergoes significant deformation, the abutment position between the bottom edge of the copper-clad ceramic sheet and the inclined side 301 of the support block 3 can change, that is, the position on the copper-clad ceramic sheet that abuts against the inclined side 301 slides downward on the inclined side 301. After the copper-clad ceramic sheet slides downward on the inclined side 301, since the bottom edge of the copper-clad ceramic sheet still abuts against the inclined side 301 of the support block 3, the support block 3 can still provide stable support for the copper-clad ceramic sheet.

[0051] The beneficial effects of this embodiment are as follows:

[0052] The top plate 1 of the sintering fixture in this embodiment allows the ash falling from the sintering furnace to fall directly onto the top plate 1, preventing it from falling onto the ceramic copper-clad laminate and causing defects such as copper defects or lumps on the surface of the ceramic copper-clad laminate. The inclined plane on the support block 3 of the bottom plate 2 of the sintering fixture allows the support block 3 to still provide stable support for the ceramic copper-clad laminate through the inclined side 301 after deformation, thus preventing the ceramic copper-clad laminate from being misaligned on the fixture.

[0053] When the top plate 1 is placed on the bottom plate 2, the support column 202 extends into the positioning hole 101, which can limit the top plate 1 placed on the bottom plate 2 and prevent it from falling off the bottom plate 2 during sintering. The baffle 203 can effectively control the amount of airflow entering the fixture, thereby controlling the oxygen content in the airflow and ensuring the sintering effect of the copper-clad laminate.

[0054] Example 2

[0055] This embodiment is a second embodiment of a sintering fixture for a ceramic copper-clad laminate, such as... Figure 1 , Figure 4 , Figure 5 and Figure 7 As shown, this embodiment further defines the structure of the support block 3 based on embodiment one.

[0056] Specifically, the inclined side 301 of the support block 3 is an inclined plane or an inclined arc surface.

[0057] Specifically, one side of the support block 3 adjacent to the inclined side 301 is a vertical plane, and a scale 321 is provided on the vertical plane along the vertical direction.

[0058] Specifically, the support blocks 3 are arranged linearly along the four sides of the base plate 2, and each side of the base plate 2 is provided with several support blocks 3.

[0059] Specifically, a groove 201 is provided on the edge of the base plate 2, and the axis of the groove 201 is perpendicular to the edge of the base plate 2. The support block 3 can be fixed on the groove 201, and the support block 3 is slidably connected to the groove 201. A locking bolt 5 is also included. The groove 201 is a T-shaped groove, and a slider 4 is provided inside the groove 201. The slider 4 is slidably connected to the groove 201. The support block 3 is provided with a connecting part 303, and the locking bolt 5 passes through the connecting part 303 and is threadedly connected to the slider 4. The slider 4 is located at the bottom of the groove 201. Because the groove 201 is a T-shaped groove, the slider 4 cannot detach from the groove 201 through the top of the groove 201. The connecting part 303 is located on the other sides of the support block 3 except for the inclined side 301. The bottom surface of the connecting part 303 is flush with the bottom surface of the support block 3. The locking bolt 5 passes through the connecting part 303 and can be threadedly connected to the slider 4. When the locking bolt 5 is tightened, the slider 4 and the support block 3 clamp the slide groove 201, so that the support block 3 is fixed on the slide groove 201. When the locking bolt 5 is not tightened, the slider 4 can drive the support block 3 to slide in the slide groove 201.

[0060] The beneficial effects of this embodiment are as follows:

[0061] When the inclined side 301 of the support block 3 is an inclined plane or an inclined arc surface, the contact between the inclined side 301 and the ceramic copper-clad laminate is a line contact, that is, the contact point between the inclined side 301 and the ceramic copper-clad laminate is a straight line segment. At this time, the support block 3 can provide more stable support for the ceramic copper-clad laminate.

[0062] The setting of graduation 321 on the vertical plane makes it easier for operators to obtain the warpage of the sintered ceramic copper-clad laminate through the branch pipe.

[0063] Support blocks 3 are provided on all four sides of the base plate 2. That is, when the ceramic copper-clad laminate is placed on the base plate 2, the inclined side 301 of the support block 3 supports all four sides of the ceramic copper-clad laminate, which provides better support for the ceramic copper-clad laminate.

[0064] The support block 3 can slide along the slide groove 201, that is, the position of the support block 3 on the base plate 2 is adjustable. The adjustable position of the support block 3 on the base plate 2 allows the base plate 2 to support more ceramic copper-clad plates of different sizes, and the application range of the fixture is wider.

[0065] Example 3

[0066] This embodiment is a third embodiment of a sintering fixture for a ceramic copper-clad laminate, such as... Figure 6 As shown, the difference between this embodiment and Embodiment 2 is that the shape of the inclined side 301 of the support block 3 is different.

[0067] Specifically, the inclined side 301 of the support block 3 is spherical, and there is no scale 321 on the support block 3.

[0068] The beneficial effects of this embodiment are as follows:

[0069] When the inclined side 301 of the support block 3 is spherical, the contact between the inclined side 301 and the ceramic copper-clad plate is a point contact, that is, the contact point between the inclined side 301 and the ceramic copper-clad plate is a contact point. At this time, the contact area between the support block 3 and the ceramic copper-clad plate is updated, and the damage to the ceramic copper-clad plate is less when it is removed from the fixture after sintering.

[0070] Other features, working principles, and beneficial effects of this implementation are consistent with those of Example 2.

[0071] Example 4

[0072] This embodiment is the fourth embodiment of a sintering fixture for ceramic copper-clad laminates. Based on the first embodiment, this embodiment is used for sintering ceramic copper-clad laminates on one side.

[0073] Specifically, the base plate is provided with a clearance groove.

[0074] The beneficial effects of this embodiment are as follows: the air-blocking groove on the base plate can increase the air intake of the sintering fixture and further reduce the weight of the fixture.

[0075] Other features, working principles, and beneficial effects of this implementation are consistent with those of Example 1.

[0076] Example 5

[0077] This embodiment is an example of a sintering furnace for ceramic copper-clad laminates, such as... Figures 8-10 As shown, it includes a furnace body 6, a feeding device 7, and a sintering fixture. The sintering fixture is a sintering fixture for a ceramic copper-clad plate as described in Examples 1 to 4. The sintering fixture is located on the feeding device 7. The feeding device 7 can feed the sintering fixture into the inner cavity of the furnace body 6. In the direction parallel to the movement of the feeding device 7, there are several rows of sintering fixtures, which are staggered on the feeding device 7.

[0078] On the orthographic projection plane perpendicular to the direction of movement of the feeding device 7, the sintering fixture located in the middle of the feeding device 7 is the middle sintering fixture; the sintering fixtures located on both sides of the feeding device 7 are the side sintering fixtures. In the vertical direction, the height of the sintering fixture decreases sequentially from the middle sintering fixture to the side sintering fixture, and the height difference between two adjacent rows of sintering fixtures is 0.3cm-0.5cm.

[0079] Specifically, the feeding device 7 is a conveyor belt, and the thickness difference of the base plate 2 of two adjacent rows of sintering fixtures is 0.3cm-0.5cm in the direction perpendicular to the movement of the feeding device 7.

[0080] The beneficial effects of this embodiment are as follows:

[0081] In this invention, the sintering fixture located in the middle of the sintering furnace is higher than the sintering fixtures located on both sides of the furnace, ensuring that the airflow on the fixtures is more consistent. In the direction parallel to the movement of the feeding device 7, the fixtures are staggered, with no two fixtures overlapping, avoiding the formation of straight airflow channels between the fixtures and resulting in better sintering performance.

[0082] The height difference between adjacent rows of sintering fixtures is achieved by varying the thickness of the base plate 2 in different rows of fixtures.

[0083] Example 6

[0084] This embodiment is another embodiment of a sintering furnace for ceramic copper-clad laminates, such as... Figure 11 As shown, the difference between this embodiment and embodiment four lies in the different ways of achieving a height difference between adjacent rows of sintering fixtures.

[0085] Specifically, the feeding device 7 is a conveyor belt. In the direction perpendicular to the movement of the feeding device 7, there are several rows of pads on the conveyor belt, and the height difference between two adjacent rows of pads is 0.3cm-0.5cm.

[0086] The beneficial effects of this embodiment are: by using the height difference between different pads, a height difference of 0.3cm-0.5cm can be achieved between adjacent rows of sintering fixtures, eliminating the need to process base plates of various thicknesses 2.

[0087] Other features, working principles, and beneficial effects of this implementation are consistent with those of Example 4.

[0088] Example 7

[0089] This embodiment is another embodiment of a sintering furnace for ceramic copper-clad laminates, such as... Figure 12 As shown, the difference between this embodiment and embodiment four lies in the different ways of achieving a height difference between adjacent rows of sintering fixtures.

[0090] Specifically, the feeding device 7 includes several conveyor belts, each of which is equipped with a row of sintering fixtures, and the height difference between two adjacent conveyor belts is 0.3cm-0.5cm.

[0091] The beneficial effects of this embodiment are: by using the height difference between different conveyor belts, a height difference of 0.3cm-0.5cm is achieved between adjacent rows of sintering fixtures, eliminating the need to process base plates of various thicknesses 2.

[0092] Other features, working principles, and beneficial effects of this implementation are consistent with those of Example 4.

[0093] In the specific implementation of the above embodiments, the technical features can be combined in any non-contradictory way. For the sake of brevity, not all possible combinations of the above technical features are described. However, as long as the combination of these technical features is not contradictory, it should be considered to be within the scope of this specification.

[0094] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A sintering fixture for a ceramic copper-clad laminate, characterized in that, The system includes a top plate (1) and a bottom plate (2). The bottom plate (2) is provided with a support block (3). One side of the support block (3) is an inclined side (301) that can support the substrate. The inclined side (301) can abut against the side of the substrate. There are several support blocks (3). The inclined side (301) of several support blocks (3) are used to support the substrate together. The top plate (1) can cover the bottom plate (2).

2. The sintering fixture for a ceramic copper-clad laminate according to claim 1, characterized in that, The inclined side (301) of the support block (3) is an inclined plane or an inclined arc surface.

3. The sintering fixture for a ceramic copper-clad laminate according to claim 1, characterized in that, The inclined side (301) of the support block (3) is spherical.

4. The sintering fixture for a ceramic copper-clad laminate according to claim 2, characterized in that, The side of the support block (3) adjacent to the inclined side (301) is a vertical plane, and the vertical plane is provided with a scale (321) along the vertical direction.

5. A sintering fixture for a ceramic copper-clad laminate according to any one of claims 2-3, characterized in that, The bottom plate (2) has a sliding groove (201) on its edge. The axis of the sliding groove (201) is perpendicular to the edge of the bottom plate (2). The support block (3) can be fixed on the sliding groove (201). The support block (3) is slidably connected to the sliding groove (201).

6. The sintering fixture for a ceramic copper-clad laminate according to claim 5, characterized in that, It also includes a locking bolt (5), the slide groove (201) is a T-shaped groove, a slider (4) is provided in the slide groove (201), the slider (4) is slidably connected to the slide groove (201), the support block (3) is provided with a connecting part (303), and the locking bolt (5) passes through the connecting part (303) and is threadedly connected to the slider (4).

7. The sintering fixture for a ceramic copper-clad laminate according to claim 1, characterized in that, The base plate (2) is also provided with a support column (202), the height of the support column (202) is greater than the height of the support block (3), and the bottom surface of the top plate (1) is provided with a positioning hole (101), and the support column (202) can extend into the positioning hole (101).

8. The sintering fixture for a ceramic copper-clad laminate according to claim 1, characterized in that, The base plate (2) is also provided with a clearance groove.

9. The sintering fixture for a ceramic copper-clad laminate according to claim 1, characterized in that, The edge of the base plate (2) is also provided with a baffle (203) for blocking airflow. The baffle (203) is fixedly installed on the base plate (2), and the top surface of the baffle (203) is flush with the top surface of the support block (3).

10. A sintering furnace for ceramic copper-clad laminates, characterized in that, It includes a furnace body (6), a feeding device (7) and a sintering fixture, wherein the sintering fixture is a sintering fixture for a ceramic copper-clad plate as described in any one of claims 1-9, the sintering fixture is located on the feeding device (7), and the feeding device (7) can feed the sintering fixture into the inner cavity of the furnace body (6); In a direction parallel to the movement of the feeding device (7), there are several rows of sintering fixtures, which are staggered on the feeding device (7); On the orthographic projection plane perpendicular to the direction of movement of the feeding device (7), the sintering fixture located in the middle of the feeding device (7) is the middle sintering fixture; the sintering fixtures located on both sides of the feeding device (7) are the side sintering fixtures. In the vertical direction, the height of the sintering fixture decreases sequentially from the middle sintering fixture to the side sintering fixture, and the height difference between two adjacent rows of sintering fixtures is 0.3cm-0.5cm.

Images