Heat exchange structure, heat exchanger and chemical source bottle system

Abstract

The utility model discloses a heat exchange structure, heat exchanger and chemical source bottle system. Heat exchange structure includes heat medium space, spiral flow guide plate and a plurality of baffle, spiral flow guide plate sets up in heat medium space, a plurality of baffle interval fixed setting are in the upper surface, lower surface of spiral flow guide plate, the baffle of being located on the upper surface and the baffle of being located on the lower surface staggered distribution, the interval D between a plurality of baffles of being located on the same surface of spiral flow guide plate =(1 / 5~1 / 3)H, and, the baffle is obliquely arranged, and the oblique angle 0 of baffle is 25~60 DEG, and the oblique angle 0 is the included angle between the length direction of baffle and the tangent plane of the connecting position of baffle and spiral flow guide plate, and H is the pitch of spiral flow guide plate. The utility model discloses through introducing flow guide structure etc. in chemical source bottle system, makes its anti -environmental interference ability stronger, and chemical source temperature is more stable, and steam pressure is more stable.

Description

Technical Field

[0001] This utility model specifically relates to a heat exchange structure, a heat exchanger, and a chemical source bottle system, belonging to the field of semiconductor manufacturing technology. Background Technology

[0002] CVD (Chemical Vapor Deposition) is a chemical reaction process. The chemical source in this process needs to be heated, mainly for the following reasons:

[0003] 1) Activation of reactant gases: Under high temperature conditions, one or more reactant gases introduced into the reaction chamber are activated. Heating methods typically include resistance wire heating, hot air system heating, plasma excitation or flame radiation, or no heating. These activation methods increase the chemical reactivity of the reactant gases, making them more likely to undergo chemical reactions.

[0004] 2) Increased reaction rate: Heating can accelerate the movement of gas molecules and increase the frequency of collisions between them, thereby increasing the rate of chemical reactions.

[0005] 3) Meet the vapor pressure requirements of CVD reaction conditions: At the deposition temperature, the reactants must have a sufficiently high vapor pressure. If the reactants volatilize very little at room temperature, they need to be heated to volatilize, in order to ensure that enough reactant gas enters the reaction chamber for reaction. The stability of the chemical source vapor pressure is crucial to the stability of the process.

[0006] A simplified diagram of a commonly used resistance wire heating device in existing technology is shown below. Figure 1 As shown, this resistance wire heating device has the following disadvantages:

[0007] 1) High heat loss and low energy utilization: When heating, only the heat from the inner surface (the part in close contact with the object being heated) of the heating coil wound with resistance wire is conducted to the object being heated, while most of the heat from the outside is lost to the air, resulting in low heating efficiency; similarly, it will also lead to uneven heat distribution inside the chemical source.

[0008] 2) When the resistance wire is heated, it will dissipate a lot of heat to the surrounding environment, causing the ambient temperature to rise. This not only affects the production environment and the staff, but may also require additional cooling equipment (such as air conditioning) to lower the temperature, resulting in secondary waste of energy.

[0009] 3) If the resistance wire operates at high temperature, it is prone to burnout due to high-temperature aging, so its service life is relatively short and it needs to be replaced and repaired frequently.

[0010] 4) Due to the large heat loss, the heating of the resistance wire is also relatively slow, which is very unfavorable for temperature control. There will be a certain difference and lag between the actual temperature of the chemical source and the temperature of the heating wire.

[0011] 5) Resistance heating is generally only suitable for heating objects, but cannot cool them.

[0012] 6) Thermocouples generally measure the temperature of the surface of the source bottle, which differs significantly from the actual temperature of the chemical source liquid, and also exhibits a large temperature lag. Utility Model Content

[0013] The main objective of this invention is to provide a heat exchange structure, heat exchanger, and chemical source bottle system to overcome the shortcomings of the prior art.

[0014] To achieve the aforementioned objectives, the technical solution adopted by this utility model includes:

[0015] The first aspect of this utility model embodiment provides a heat exchange structure, including:

[0016] The heat medium space is used to contain the heat exchange medium;

[0017] A spiral guide plate is disposed within the heat medium space, forming a spiral flow channel that guides the flow of the heat exchange medium. The spiral guide plate has an upper surface and a lower surface, which serve as the flow channel walls of the spiral flow channel.

[0018] Multiple baffles are fixedly disposed at intervals on the upper surface and the lower surface of the spiral guide plate;

[0019] The baffles on the upper surface and the baffles on the lower surface are staggered. The distance between multiple baffles on the same surface of the spiral guide plate is D = (1 / 5 to 1 / 3)H. The baffles are inclined, and the inclination angle θ of the baffles is 25° to 60°. The inclination angle θ is the angle between the length direction of the baffle and the tangent plane at the connection position between the baffle and the spiral guide plate. H is the pitch of the spiral guide plate.

[0020] In a typical implementation, the tilt angle θ of the baffle is 25° to 45°.

[0021] In another more typical embodiment, the tilt angle θ of the baffle is 45° to 60°.

[0022] Furthermore, the multiple baffles located on the same surface of the spiral guide plate have the same tilt direction.

[0023] Furthermore, the upper surface and the lower surface are flat surfaces, or the upper surface and the lower surface are wavy surfaces, and the period of the wavy surface is λ = k. λ ·Dh ·Re -0.2 k λ k is the correction factor. λ The amplitude A of the wavy surface is 0.8 to 1.2, and satisfies: A / D h =0.15 - 0.03·log 10 (Re), the helix angle θ of the helical guide plate c With respect to the radius of curvature R of the wavy surface c Satisfy: θ c =35°+10°·sin(2πR) c / λ), Rc=λ 2 / 8A+A / 2,D h Where is the hydraulic diameter and Re is the Reynolds number.

[0024] Furthermore, the baffle is detachably connected to the spiral guide plate; for example, the baffle is fixed to the spiral guide plate via a threaded connector.

[0025] Furthermore, the baffle includes a connecting part and a main body part arranged in sequence. The upper and lower surfaces of the spiral guide plate are provided with fixing grooves. The connecting part of the baffle is embedded in the fixing groove and fixedly connected to the spiral guide plate. The tilt angle θ is the angle between the length direction of the main body part and the tangent plane at the position of the fixing groove.

[0026] Furthermore, the length L of the baffle satisfies:

[0027]

[0028] Where Re is the Reynolds number, Re = ρvH / μ, ρ is the density of the heat exchange medium, μ is the viscosity of the heat exchange medium, v is the flow rate of the heat exchange medium, and C is a correction factor, usually taken as 1 to 3.

[0029] Furthermore, the surface of the spiral guide plate and / or the baffle is provided with micropores that penetrate through it, and the diameter of the micropores is 1mm to 3mm.

[0030] Furthermore, the spiral guide plate has a helix angle of 15° to 60°.

[0031] Furthermore, the helix angle of the spiral guide plate is 15° to 30°, or the helix angle of the spiral guide plate is 45° to 60°.

[0032] A second aspect of this utility model provides a heat exchanger, including a heat exchange mechanism, a mold temperature controller, and a medium circulation pipeline. The mold temperature controller is connected to the heat exchange mechanism via the medium circulation pipeline, forming a circulation loop for the heat exchange medium to circulate. The heat exchange mechanism includes the heat exchange structure.

[0033] A third aspect of this utility model provides a chemical source bottle system, comprising: a chemical source bottle, and the heat exchange structure or the heat exchanger, wherein the heat exchange structure is disposed outside the chemical source bottle, and the heat medium space is thermally connected to the chemical source bottle.

[0034] Furthermore, the heat medium space and the chemical source bottle are integrated.

[0035] Compared with the prior art, the advantages of this utility model include:

[0036] The chemical source bottle system provided by this invention has stronger resistance to environmental interference, more stable chemical source temperature, and more stable vapor pressure.

[0037] Traditional resistance heating can only heat the chemical source and cannot cool it, while the chemical source bottle system provided by this utility model can not only heat the chemical source, but also cool it.

[0038] Traditional resistance heating cannot achieve rapid heating and cooling, while the chemical source bottle system provided by this invention can achieve faster heating and cooling through a heat exchanger.

[0039] The chemical source bottle system provided by this utility model introduces a flow guiding structure, which allows the heat exchange medium to have a large contact area with the chemical source bottle, thereby achieving higher thermal efficiency and more uniform heating of the chemical source.

[0040] The heating effect of the heat exchange medium in the chemical source bottle system provided by this invention is minimally affected by the environment, the chemical source has extremely high thermal stability, and the process has excellent repeatability. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 This is a simplified diagram of a commonly used resistance wire heating device in existing technology;

[0043] Figure 2 This is a schematic diagram of a chemical source bottle system provided in a typical embodiment of this utility model;

[0044] Figure 3 This is a schematic diagram of the chemical source bottle and heat exchange mechanism provided in a typical embodiment of this utility model;

[0045] Figure 4 This is a schematic diagram of the chemical source bottle in a typical embodiment of this utility model;

[0046] Figure 5 This is a schematic diagram of the structure of a heat exchange mechanism outside a chemical source bottle provided in a typical embodiment of this utility model;

[0047] Figure 6 This is a top view of a heat exchange mechanism on the outside of a chemical source bottle, provided in a typical embodiment of this utility model.

[0048] Figure 7a This is a partial structural schematic diagram of the spiral guide plate provided in a typical embodiment of this utility model;

[0049] Figure 7b This is a schematic diagram of the assembly structure of the spiral guide plate and the baffle provided in a typical embodiment of this utility model;

[0050] Figure 7c This is a schematic diagram of the assembly structure of the spiral guide plate and the baffle provided in a typical embodiment of this utility model;

[0051] Figure 8a This is a side view of the baffle in a typical embodiment of this utility model;

[0052] Figure 8b This is a top view of the baffle in a typical embodiment of this utility model;

[0053] Figure 9a This is a side view of the flow guiding structure in a typical embodiment of this utility model;

[0054] Figure 9b This is a top view of the flow guiding structure in a typical embodiment of this utility model;

[0055] Figure 10 This is a schematic diagram of the structure of the wave-shaped guide plate in a typical embodiment of this utility model. Detailed Implementation

[0056] In view of the shortcomings of the prior art, the inventors of this case, through long-term research and extensive practice, have proposed the technical solution of this utility model. The following will further explain and illustrate the technical solution, its implementation process, and its principles in conjunction with the accompanying drawings and specific implementation examples.

[0057] In a more typical implementation scheme, please refer to Figure 2 A highly stable chemical source bottle system capable of rapid heating and cooling includes a chemical source bottle 3008, a heat exchange mechanism 3007, a mold temperature controller 3031, and a medium circulation pipeline 3032. The heat exchange mechanism 3007 is located outside the chemical source bottle 3008 and is thermally connected to the chemical source bottle 3008. The mold temperature controller 3031 is connected to the heat exchange mechanism 3007 via the medium circulation pipeline 3032, forming a circulation loop for the circulation of the heat exchange medium. The mold temperature controller 3031 is used to provide the heat exchange medium and to heat or cool the heat exchange medium, and to drive the heat exchange medium to circulate within the circulation loop, thereby achieving heat exchange with the chemical source inside the chemical source bottle 3008 through the heat exchange medium. The heat exchange medium, together with the heat exchange mechanism 3007, the mold temperature controller 3031, and the medium circulation pipeline 3032, forms a circulating heat exchange system. The heat exchange medium is in close contact with the chemical source bottle 3008 over a large area, and the liquid chemical source 3011 is in close contact with the chemical source bottle 3008 over a large area. This can achieve rapid heating and cooling effects and effectively reduce the hysteresis effect caused by temperature conduction.

[0058] Specifically, the mold temperature controller 3031, the medium circulation pipeline 3032, and the chemical source bottle 3008 are known in the art and can be commercially available equipment. For example, the mold temperature controller 3031 can be configured with a temperature range of -20℃ to 180℃. Specifically, the heat exchange medium can be selected according to the requirements of the chemical source properties, such as ultrapure water, liquid paraffin, glycerol, and fluorinated liquids. These substances are mainly selected based on the relevant properties of the chemical source and application conditions, such as the required temperature range of the chemical source, safety (for example, water reacts violently with trimethylaluminum, while we can choose liquid paraffin, which does not react with trimethylaluminum, as the heat exchange medium, making it safer to use), and process conditions. In addition, different dopants can be added to the medium to change its relevant properties and achieve different functions (for example, pure water has a boiling point of around 100℃, while introducing dopants into pure water can raise the boiling point of the liquid to a higher level to meet usage requirements).

[0059] As a typical chemical source bottle 3008, please refer to Figure 2 , Figure 3 and Figure 4As those skilled in the art know, the chemical source bottle 3008 is equipped with a top cover 3004, which includes a chemical source filling port 3017, a chemical source vapor outlet 3015, a level gauge, a thermometer 3006, and a spare interface 3001. Specifically, valves 3002 can be installed on the chemical source vapor outlet 3015 and the spare interface 3001. These valves can be pneumatic or manual. The valve on the chemical source vapor outlet 3015 can control the chemical source discharge time or discharge rate, and the valve on the spare interface 3001 can control the entry and exit of the corresponding substance. The thermometer effectively detects the temperature of the chemical source, and the level gauge accurately reflects the remaining amount of the chemical source. Specifically, the top cover 3004, chemical source filling port 3017, chemical source vapor outlet 3015, level gauge, thermometer 3006, spare interface 3001 and chemical source bottle 3008 can be set as an integrated structure; other components can be set as detachable components for easy replacement, maintenance and repair.

[0060] The following section will mainly introduce the specific structure of the heat exchange mechanism, which is the main improvement of this utility model.

[0061] For details, please refer to Figure 3 , Figure 5 and Figure 6 , Figure 9b The heat exchange mechanism 3007 includes a housing and a spiral guide plate 3020. The housing is disposed outside the chemical source bottle 3008 and is thermally conductively connected to the chemical source bottle 3008. The housing has a heat medium space 3012 inside, and the spiral guide plate 3020 is disposed within the heat medium space 3012. The spiral guide plate 3020 is connected to the housing and forms a flow channel 3022 with the heat medium space 3012 to guide the flow of the heat exchange medium. The spiral guide plate 3020 has an upper surface 30201 and a lower surface 30202. As the flow channel wall of flow channel 3022, the outer shell is provided with a heat exchange medium inlet 3009 and a heat exchange medium outlet 3013 connected to the medium circulation pipeline 3032. The heat exchange medium inlet 3009 and the heat exchange medium outlet 3013 can be configured as top inlet and bottom outlet or bottom inlet and top outlet. Connectors can be provided on the heat exchange medium inlet 3009 and the heat exchange medium outlet 3013 to connect to the medium circulation pipeline 3032. The connectors can be obtained commercially, and their specific structure and product model are not limited here.

[0062] Specifically, an inlet thermocouple 3018 can be installed at the heat exchange medium inlet 3009, and an outlet thermocouple 3019 can be installed at the heat exchange medium outlet 3013, respectively, to monitor the temperature of the heat exchange medium at the inlet and outlet. By installing multiple temperature sensors (thermocouples) at the heat medium inlet / outlet of the heat exchange mechanism 3007, and combining them with the thermometer installed on the chemical source bottle 3008, temperature gradients are eliminated through multi-point data fusion, i.e., the temperature difference between the inlet / outlet of the medium and the temperature difference of the chemical source inside the chemical source bottle 3008, ensuring the overall temperature uniformity of the chemical source. In addition, a closed-loop temperature feedback system can be set up, introducing a PID (proportional-integral-derivative) control algorithm. Through real-time data linkage between the mold temperature controller 3031 and the thermometer inside the chemical source bottle 3008, the temperature and flow rate of the heat exchange medium are dynamically adjusted to achieve higher temperature control accuracy. Of course, the temperature feedback system and the PID (proportional-integral-derivative) control algorithm can be obtained commercially.

[0063] Specifically, the outer shell can be a hollow cylindrical structure. The outer shell can wrap around the chemical source bottle 3008 and contact the chemical source bottle 3008 to achieve heat transfer between the two. The heat medium space 3012 can be understood as an interlayer space inside the outer shell itself. It should be noted that the part of the outer shell that is in direct contact with the chemical source bottle 3008 should have good thermal conductivity. Alternatively, the outer shell can be sealed to the chemical source bottle 3008 and enclose the chemical source bottle 3008 to form the heat medium space 3012. The spiral guide plate 3020 is connected to the outer shell and the chemical source bottle 3008, and the heat medium space 3012 is constructed as a flow channel 3022 that can guide the heat exchange medium to flow in a single direction to improve heat exchange efficiency.

[0064] Specifically, the effective structure / effective area of ​​the heat medium space 3012 is at least arranged around and encloses the chemical source bottle 3008. The effective structure / effective area of ​​the heat medium space 3012 is an annular or cylindrical structure. A spiral guide plate 3020 is arranged within the effective structure / effective area of ​​the heat medium space 3012. The spiral guide plate 3020 is a spiral structure arranged around the chemical source bottle 3008. The spiral guide plate 3020 is tightly fitted to the flow channel wall of the heat medium space 3012 in its width / radial direction, thus constructing the heat medium space 3012 as a spiral flow channel 3022, that is, the flow channel is also a spiral structure, to further improve heat exchange efficiency. As a preferred embodiment, the spiral guide plate 3020 is detachable. For example, the spiral guide plate 3020 can be detachably fixedly connected to the outer shell or the chemical source bottle 3008 through mortise and tenon structures, snap-fit ​​structures, or other detachable connection structures known in the art.

[0065] It should be noted that when the outer shell and the chemical source bottle 3008 enclose the heat medium space 3012, the outer shell and the chemical source bottle 3008 are in a sealed fit. Specifically, the outer shell and the chemical source bottle 3008 can achieve a sealed fit through structures / methods known in the art, such as sealing rings. The sealing fit between the spiral guide plate 3020 and the inner wall of the heat medium space 3012 is also known in the art and is not limited here. Specifically, a sealing ring 3005 can also be provided between the outer shell and the top cover 3004 of the chemical source bottle 3008 to maintain a sealed fit between the outer shell and the top cover 3004. Specifically, the outer shells of the chemical source bottle 3008 and the heat exchange mechanism 3007 are fixed and sealed by the locking bolts 3003 and the sealing rings 3005 on the top cover 3004 (understandably, the outer shell of the heat exchange mechanism 3007 is provided with threaded holes 3021 corresponding to the locking bolts 3003), which physically isolates the heat exchange medium from the chemical source, making it safer. The chemical source bottle 3008 and the heat exchange mechanism 3007 can be installed and disassembled independently, which is convenient for operation.

[0066] Please refer to the following for details. Figure 3 , Figure 5 , Figure 9a The structure of the spiral guide plate 3020 is based on the relationship between the helix angle (spiral angle) Ψ and the turbulent kinetic energy (TKE) (TKE∝sinθ). 2 (Ψ)·v 2 The helix angle (Ψ) and velocity (v) of the heat exchange medium are determined. A larger helix angle Ψ can increase turbulent kinetic energy, but it needs to be combined with velocity optimization. The optimization model is as follows:

[0067]

[0068] Among them, D h Let f be the hydraulic diameter, and f be the total friction coefficient between the heat exchange medium and the spiral guide plate and chemical source bottle. The increase in spiral angle leads to an increase in friction coefficient. It is necessary to use CFD (Computational-Fluid-Dynamics) simulation to balance TKE (Turbulent-Kinetic-Energy, which is half of the product of the turbulent velocity fluctuation variance and the fluid mass, used to describe the intensity of turbulent motion) and ΔP (pressure drop). The angle corresponding to the maximum value of TKE / ΔP is selected. AP refers to the pressure drop caused by friction, acceleration or other factors during fluid flow, showing the relationship between fluid kinetic energy and pipeline geometry and friction force F.

[0069] Specifically, in this embodiment of the invention, the helix angle Ψ of the spiral guide plate 3020 can be set to 15°–60°. A small helix angle of 15°–30° extends the heat exchange time, resulting in a longer flow path, suitable for low-flow-rate scenarios (such as high-viscosity liquid paraffin), ensuring sufficient heat exchange. Furthermore, it reduces pressure drop and turbulence intensity, avoiding pump power loss due to excessive resistance (pressure drop) in high-viscosity fluids. A large helix angle of 45°–60° enhances turbulence, suitable for low-viscosity media (such as water, fluorinated liquids, etc.), increasing the heat transfer coefficient by 20%–40%, enabling rapid response, shortening temperature lag time, and increasing the heating rate by more than 50%.

[0070] Please refer to this as one typical implementation plan. Figure 3 , Figure 5 , Figure 7c , Figure 9a The upper surface 30201 and lower surface 30202 of the spiral guide plate 3020 (defined with reference to the axial direction of the spiral guide plate 3020) are both flat surfaces. Furthermore, the upper surface 30201 and lower surface 30202 of the spiral guide plate 3020 are also provided with multiple baffles 3026. The baffles 3026 serve as a flow-disrupting structure and can be set as independent units. Depending on the mold temperature controller 3031 and the application scenario, the tilt angle θ of the baffle 3026, the length L of the baffle 3026, and the distance D between the baffles 3026 can all be designed according to the requirements of the application scenario. Different types of baffles 3026 can be selected according to the requirements of the application scenario. The tilt angle θ of the baffle 3026 is the angle between the length direction of the baffle 3026 and the tangent plane at the connection position between the baffle 3026 and the spiral guide plate 3020.

[0071] Please refer to the following for details. Figure 7a , Figure 7b , Figure 7c , Figure 8a and Figure 8bThe baffle 3026 can be detachably fixed to the spiral guide plate 3020 by screws 3027 or other fixing methods. Specifically, the upper surface 30201 and lower surface 30202 of the spiral guide plate 3020 are both provided with fixing grooves 3028. The baffle 3026 includes a connecting part 30262 and a main body part 30261 arranged in sequence. The connecting part 30262 of the baffle 3026 is embedded in the fixing groove 3028 and is fixedly connected to the spiral guide plate 3020. Specifically, the connecting part 30262 of the baffle 3026 is provided with a mounting hole 3029 through which a screw 3027 can pass. The top of the screw 3027 is flush with the top of the mounting hole 3029 or located in the mounting hole 3029. The inclination angle θ of the baffle 3026 is the included angle between the length direction of the main body part 30261 of the baffle 3026 and the tangent plane at the connection position between the baffle 3026 and the spiral guide plate 3020.

[0072] As a preferred embodiment, the surface of the connecting part is preferably flush with the upper / lower surface of the spiral guide plate 3020. The spiral guide plate 3020 can prevent the formation of an additional step between the baffle 3026 and the spiral guide plate 3020, which would increase the resistance to liquid flow. The main body 30261 of the baffle 3026 extends into the flow channel and is in clearance fit with the flow channel wall.

[0073] Specifically, the multiple baffles 3026 are spaced apart, and the multiple baffles 3026 located on the upper and lower surfaces of the spiral guide plate 3020 are staggered along the spiral direction of the spiral guide plate 3020. Specifically, the spacing D between the baffles 3026 is 1 / 5 to 1 / 3 of the flow channel height, and the baffles 3026 and the spiral guide plate 3020 form a certain inclined angle, which is the inclination angle θ. The inclination angle θ can be designed according to the type of medium. For example, the inclination angle θ can be set to 25° to 60°, or a mixed inclination angle can be used to avoid excessive flow resistance while improving turbulence and the effect of heat exchange system.

[0074] Specifically, the tilt angle θ and length L of the baffle 3026 are determined based on the Reynolds number Re = ρvH / μ, where ρ is the density of the heat exchange medium, μ is the viscosity of the heat exchange medium, v is the flow velocity of the heat exchange medium, H is the distance between adjacent spirals of the spiral guide plate 3020, and L = (Re^0.25·μ) / ρv·C, where C is a correction coefficient, usually taken as 1 to 3, which can be verified by experiments or CFD. The Reynolds number reflects the flow state (laminar or turbulent) and directly affects the selection of the tilt angle θ of the baffle 3026. Low Reynolds numbers (Re < 2000, laminar flow) require a large tilt angle θ (45° to 60°) to enhance fluid disturbance and break the laminar boundary layer; high Reynolds numbers (Re > 4000, turbulent flow) can use a smaller tilt angle θ (25° to 45°) to balance turbulence intensity and flow resistance.

[0075] As a preferred option, micropores penetrating through the spiral guide plate 3020 and baffle 3026 can be set on their surfaces according to the properties of the heat exchange medium. The pore diameter of the micropores is 1 to 3 mm, which can divide the flow channel and induce the heat exchange medium to mix laterally. Such a baffle 3026 design can avoid laminar flow, improve the heat exchange efficiency by 20% to 40%, and enhance the system temperature uniformity and response speed.

[0076] As another preferred option, please refer to Figure 10 Alternatively, the upper and lower surfaces of the spiral guide plate 3020 can be replaced with a wave-shaped structure, and its own protruding structure can replace the baffle as a turbulence structure to achieve the effect of mixing flow. Of course, the protruding structure of the upper and lower surfaces of the spiral guide plate 3020 and the baffle can be used together as a turbulence structure.

[0077] Specifically, the period λ = k of the wave-shaped surface λ ·D h ·Re -0.2 k λ k is the correction factor. λ The amplitude A of the wavy surface is 0.8 to 1.2, and satisfies: A / D h =0.15 - 0.03·log 10 (Re), the helix angle θ of the helical guide plate 3020 c With respect to the radius of curvature R of the wavy surface c Satisfy: θ c =35°+10°·sin(2πR) c / λ), Rc=λ 2 / 8A+A / 2,D hWhere is the hydraulic diameter and Re is the Reynolds number. The wave-shaped guide vane disrupts laminar flow and enhances turbulence through its periodic undulating structure. The wave period must be matched with the flow scale to maximize eddy generation. The wave amplitude determines the disturbance intensity and must balance turbulence enhancement with pressure drop. The helix angle controls the fluid rotation intensity, and the radius of curvature affects boundary layer separation.

[0078] The following effects can be achieved through the rational design and optimization of the overall structure: improved thermal efficiency, with the heat transfer coefficient increasing by 30%-80% and energy consumption reduced by more than 40%; improved temperature uniformity, with temperature fluctuations reduced from ±4.5℃ to ±0.5℃; accelerated dynamic response, with heating / cooling rates increased by 50%-70% and lag time shortened by 60%; and multi-scenario adaptability, covering the needs of different chemical sources (such as corrosive media and high and low temperature limits) through parameter combinations.

[0079] In this embodiment of the invention, the chemical source bottle, in conjunction with the external heat exchange mechanism, has a smaller outlet, an integrated structure, and the chemical source does not come into contact with the sealing ring, making it safer to use. Furthermore, the filling and cleaning process of the chemical source bottle is more convenient.

[0080] This invention greatly increases the contact area by immersing the chemical source bottle inside the heat exchange medium, achieving rapid heating and cooling, significantly increasing the thermal uniformity inside the chemical source, and effectively reducing the hysteresis effect of heat transfer.

[0081] This invention utilizes a variety of heat exchange media, allowing for the selection of appropriate media to meet diverse requirements. Furthermore, this invention can not only heat but also cool the chemical source, satisfying application needs in various scenarios.

[0082] It should be understood that the above embodiments are merely illustrative of the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A heat exchange structure, characterized in that, include: The heat medium space is used to contain the heat exchange medium. A spiral guide plate is disposed within the heat medium space. The spiral guide plate and the heat medium space enclose a spiral flow channel that guides the flow of the heat exchange medium. The spiral guide plate has an upper surface and a lower surface, which serve as the flow channel walls of the spiral flow channel. as well as Multiple baffles are fixedly disposed at intervals on the upper surface and the lower surface of the spiral guide plate; The baffles on the upper surface and the baffles on the lower surface are staggered. The distance between multiple baffles on the same surface of the spiral guide plate is D = (1 / 5 to 1 / 3)H. The baffles are inclined, and the inclination angle θ of the baffles is 25° to 60°. The inclination angle θ is the angle between the length direction of the baffle and the tangent plane at the connection position between the baffle and the spiral guide plate. H is the pitch of the spiral guide plate.

2. The heat exchange structure according to claim 1, characterized in that: The inclination angle θ of the baffle is 25° to 45°.

3. The heat exchange structure according to claim 1, characterized in that: The inclination angle θ of the baffle is 45° to 60°.

4. The heat exchange structure according to claim 1, 2, or 3, characterized in that: The upper and lower surfaces are flat. Alternatively, the upper surface and the lower surface may be wavy surfaces, with a period λ = k. λ ·D h ·Re -0.2 k λ k is the correction factor. λ The amplitude A of the wavy surface is 0.8 to 1.2, and satisfies: A / D h =0.15 - 0.03·log 10 (Re), the helix angle θ of the helical guide plate c With respect to the radius of curvature R of the wavy surface c Satisfy: θ c =35°+10°·sin(2πR) c / λ), Rc=λ 2 / 8A+A / 2,D h Where Re is the hydraulic diameter and Re is the Reynolds number; And / or, the multiple baffles located on the same surface of the spiral guide plate are tilted in the same direction.

5. The heat exchange structure according to claim 1, characterized in that: The baffle is detachably connected to the spiral guide plate; And / or, the baffle includes a connecting part and a main body part arranged in sequence, the upper surface and lower surface of the spiral guide plate are provided with fixing grooves, the connecting part of the baffle is embedded in the fixing groove and fixedly connected to the spiral guide plate, and the tilt angle θ is the angle between the length direction of the main body part and the tangent plane at the position of the fixing groove.

6. The heat exchange structure according to claim 1, characterized in that: The length L of the baffle satisfies: Where Re is the Reynolds number, Re = ρvH / μ, ρ is the density of the heat exchange medium, μ is the viscosity of the heat exchange medium, v is the flow rate of the heat exchange medium, and C is a correction factor, which takes values ​​from 1 to 3.

7. The heat exchange structure according to claim 1, characterized in that: The spiral guide plate has a helix angle of 15° to 60°. And / or, the helix angle of the spiral guide plate is 15° to 30°, or the helix angle of the spiral guide plate is 45° to 60°.

8. The heat exchange structure according to claim 1, characterized in that: The surface of the spiral guide plate and / or the baffle is further provided with micropores that penetrate through it, and the diameter of the micropores is 1mm to 3mm.

9. A heat exchanger, comprising a heat exchange mechanism, a mold temperature controller, and a medium circulation pipeline, wherein the mold temperature controller is connected to the heat exchange mechanism via the medium circulation pipeline, forming a circulation loop for the circulation of the heat exchange medium, characterized in that: The heat exchange mechanism includes the heat exchange structure described in any one of claims 1-8.

10. A chemical source bottle system, characterized in that, include: A chemical source bottle, and the heat exchange structure according to any one of claims 1-8, or the heat exchanger according to claim 9, wherein the heat exchange structure is disposed outside the chemical source bottle, and the heat medium space is thermally connected to the chemical source bottle.

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