Embedded temperature measuring device for sputtering machine with composite current collector

Abstract

The utility model relates to temperature measuring device technical field, concretely is a kind of embedded composite current collector sputtering machine temperature measuring device, it mainly includes base, the top of base is fixedly connected with mounting plate, the top of mounting plate is fixedly connected with temperature sensor, the top of positioning groove is provided with the protective cover connected by protection component, the outside of protective cover is connected by fastening component Synchronous pressing plate. The embedded composite current collector sputtering machine temperature measuring device of the application is provided with protective cover outside temperature sensor, protective cover is first pressed into the inside of positioning groove by limiting baffle and rotates ninety degrees, flexible extruding block in the inside of protective cover is flexible extrusion limiting to temperature sensor at this time, the outside of multiple temperature sensors is operated in the same way, then again by pressing synchronous pressing plate downwards, let multiple clamping blocks carry out synchronous clamping positioning, improve the overall stability of multiple temperature sensors after positioning, ensure the accuracy of temperature measurement data.

Description

Technical Field

[0001] This utility model relates to the field of temperature measuring device technology, specifically to an embedded composite current collector sputtering machine temperature measuring device. Background Technology

[0002] In the composite current collector sputtering coating process, atomic sputtering and film deposition are achieved by bombarding the target material with high-energy particles. When bombarding the film surface, due to the uneven distribution of plasma and the different energies of the bombardment, the film surface temperature is unevenly distributed, which needs to be monitored by a temperature measuring device.

[0003] During the transfer of the composite film via guide rollers, the gaps between the rollers are small. Embedded installation can achieve uniform temperature measurement. However, with the vibration of the mechanical equipment, the positions of the multiple temperature sensor modules mounted at the top may shift, causing the temperature measurement distance between the temperature sensors and the composite film to change. This results in a certain error in the measured temperature, which in turn leads to inaccurate analysis results on the impact of subsequent temperature changes on the quality of the composite film. This will have a certain impact on the production efficiency and quality of coated products, and optimization and improvement are needed. Utility Model Content

[0004] The purpose of this invention is to provide an embedded composite current collector sputtering machine temperature measuring device to solve the problem that the temperature measuring device mentioned in the background art is easily affected by the installation position offset, resulting in inaccurate detection of the surface temperature of the composite film, which affects the subsequent product production quality and production efficiency.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an embedded composite current collector sputtering machine temperature measuring device, comprising: a base, a mounting plate fixedly connected to the top of the base, a temperature sensor fixedly connected to the top of the mounting plate, and further comprising an overall positioning assembly and a removal and replacement assembly.

[0006] The overall positioning component is disposed on the top of the mounting plate. The overall positioning component includes a positioning groove. A protective cover is disposed on the top of the positioning groove and connected by a protective component. A synchronous pressure plate is connected to the outside of the protective cover by a fastening component.

[0007] The removal and replacement component is located at the bottom of the base. The removal and replacement component includes a positioning plate. A fixed inclined block is provided on the inner side of the positioning plate. A movable inclined block is provided on the inner side of the fixed inclined block through an elastic snap-fit ​​component.

[0008] Preferably, the positioning groove is disposed inside the top wall of the mounting plate, and elastic reset members are fixedly connected to both ends of the inner side of the positioning groove. A dustproof baffle that is slidably connected to the top of the elastic reset member is connected to the positioning groove.

[0009] Preferably, the protective component includes a glass baffle fixedly connected to the top of the protective cover, a flexible extrusion block fixedly connected to the inner wall of the protective cover, a snap-fit ​​block fixedly connected to the outer wall of the protective cover, and a limit baffle fixedly connected to the bottom of the protective cover.

[0010] Preferably, the fastening assembly includes a slot opened on the inner side of the synchronous pressure plate, a fixed connecting member fixedly connected to the bottom end of the synchronous pressure plate, an elastic buffer member provided on the outer side of the fixed connecting member, a positioning connecting member connected to the inner side of the fixed connecting member, and guide limiting plates that are slidably connected to the fixed connecting member fixedly connected to both sides of the mounting plate.

[0011] Preferably, the elastic snap-fit ​​assembly includes an adjustment groove opened at one end of the inner side of the base, a rotating connector is rotatably connected to the inner side of the adjustment groove, elastic connectors are connected to both sides of the rotating connector, and the movable inclined block is fixedly connected to the bottom end of the rotating connector.

[0012] Preferably, the positioning plate is slidably connected to the bottom end of the base, one end of the positioning plate is fixedly connected to a limit slot, a positioning screw hole is provided inside one wall of the positioning plate, a pull ring is fixedly connected to the middle of one side of the base, and positioning blocks that are adapted to the positioning screw hole are fixedly connected to both ends of one side of the base.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] Firstly, this invention features a protective cover on the outside of the temperature sensor. The protective cover is first pressed into the positioning groove by a limiting baffle and rotated 90 degrees. At this time, the flexible extrusion block on the inside of the protective cover flexibly extrudes and limits the temperature sensor. The same operation is performed on the outside of multiple temperature sensors. Then, by pressing down on the synchronous pressure plate, the multiple slots on the inside of the synchronous pressure plate synchronously engage and position the snap-fit ​​blocks on the outside of the protective cover. This improves the overall integrity of the multiple temperature sensors after positioning, thereby improving the stability of the overall installation and ensuring the accuracy of the temperature measurement data.

[0015] Secondly, this utility model also adds a slidable positioning plate to the bottom of the base. To facilitate the removal and maintenance of the base, the screws connected to the positioning screw holes on the inner side of the positioning block can be unscrewed. Then, the pull ring can be grasped and the base can be pulled outward. At this time, the movable inclined block will be compressed after being subjected to pressure, and the movable inclined block will rotate with the connection of the rotating connecting piece and slide out from the top of the fixed inclined block, releasing the lock of the relative sliding of the positioning plate and the base. This facilitates the convenient and stable installation and removal of the base, and improves the efficiency of maintenance and repair. Attached Figure Description

[0016] Figure 1This is a three-dimensional structural diagram of the present invention;

[0017] Figure 2 This is a three-dimensional structural diagram of the base and positioning plate of this utility model separated;

[0018] Figure 3 This is a three-dimensional structural diagram of the internal structure of the base of this utility model;

[0019] Figure 4 This utility model Figure 3 Enlarged structural diagram at point A in the middle;

[0020] Figure 5 This is a three-dimensional structural diagram of the internal structure of the protective cover of this utility model;

[0021] Figure 6 This is a partial cross-sectional three-dimensional structural diagram of the mounting plate of this utility model.

[0022] In the diagram: 1. Base; 2. Mounting plate; 201. Positioning groove; 202. Guide limit plate; 203. Elastic reset component; 204. Dustproof baffle; 3. Synchronous pressure plate; 301. Slot; 302. Fixed connector; 303. Elastic buffer; 304. Positioning connector; 4. Temperature sensor; 5. Protective cover; 501. Glass baffle; 502. Limiting baffle; 503. Snap-fit ​​block; 504. Flexible extrusion block; 6. Adjustment groove; 601. Rotating connector; 602. Elastic connector; 603. Movable inclined block; 7. Positioning plate; 701. Limiting slot; 702. Fixed inclined block; 703. Positioning screw hole; 8. Pull ring; 9. Positioning block. Detailed Implementation

[0023] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0024] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0025] like Figure 1 - Figure 6 As shown, this application provides an embedded composite current collector sputtering machine temperature measurement device, including: a base 1, a mounting plate 2 fixedly connected to the top of the base 1, and a temperature sensor 4 fixedly connected to the top of the mounting plate 2;

[0026] The top of the mounting plate 2 is provided with an overall positioning component, which includes a positioning groove 201. The top of the positioning groove 201 is provided with a protective cover 5 connected by a protective component. The outer side of the protective cover 5 is connected by a synchronous pressure plate 3 through a fastening component.

[0027] The bottom of the base 1 is provided with a removal and replacement component, which includes a positioning plate 7. The inner side of the positioning plate 7 is provided with a fixed inclined block 702, and the inner side of the fixed inclined block 702 is provided with a movable inclined block 603 connected by an elastic snap-fit ​​component.

[0028] In a preferred embodiment, the positioning groove 201 is disposed inside the top wall of the mounting plate 2. Both ends of the inner side of the positioning groove 201 are fixedly connected to elastic reset members 203. The top of the elastic reset member 203 is connected to a dustproof baffle 204 that slides through the positioning groove 201. During the installation of the temperature sensor 4, a protective cover 5 is required to protect it from dust and ensure temperature measurement accuracy. The shape of the upper surface of the positioning groove 201 matches the bottom cross-section of the protective cover 5 and the limiting baffle 502. The shape of the dustproof baffle 204 matches the limiting baffle 502. The baffle 502 fits into the positioning groove 201, which is set as an annular groove in the middle. When the limiting baffle 502 is inserted into the positioning groove 201, it presses down the dustproof baffle 204. After pressing down to a certain distance, the limiting baffle 502 can be rotated and adjusted in the annular groove. After the limiting baffle 502 rotates away from the pressing baffle 204, the dustproof baffle 204 will be reset by the elastic force of the elastic reset member 203 after losing pressure. The upper surface of the dustproof baffle 204 springs up and is flush with the upper surface of the mounting plate 2, thus protecting the positioning groove 201 from dust.

[0029] In a preferred embodiment, the protective component includes a glass baffle 501 fixedly connected to the top of the protective cover 5, a flexible extrusion block 504 fixedly connected to the inner wall of the protective cover 5, a snap-fit ​​block 503 fixedly connected to the outer wall of the protective cover 5, and a limit baffle 502 fixedly connected to the bottom of the protective cover 5. The glass baffle 501 is bonded to the top of the protective cover 5 and is replaceable. After the protective cover 5 drives the limit baffle 502 through the positioning groove 201, it rotates 90 degrees. At this time, the snap-fit ​​block 503 is tightly attached to the upper surface of the mounting plate 2. After rotation, the limit baffle 502 and the snap-fit ​​block 503 are respectively snapped into the inner side of the annular groove and the upper side of the top wall of the mounting plate 2, forming a clamping. The flexible extrusion block 504 is disposed on the inner side of the protective cover 5. The flexible extrusion block 504 is arc-shaped. When the protective cover 5 is fitted over the outside of the temperature sensor 4, the flexible extrusion block 504 flexibly extrudes the outside of the temperature sensor 4 to achieve the protective effect and also has a certain positioning function.

[0030] In a preferred embodiment, the fastening assembly includes a slot 301 formed on the inner side of the synchronous pressure plate 3, a fixing connector 302 fixedly connected to the bottom end of the synchronous pressure plate 3, an elastic buffer 303 provided on the outer side of the fixing connector 302, a positioning connector 304 connected to the inner side of the fixing connector 302, and guide limiting plates 202 fixedly connected to both sides of the mounting plate 2 and slidably connected to the fixing connector 302. The guide limiting plates 202 have through holes, the fixing connector 302 passes through the through holes, and the elastic buffer 303 is located on the pressure plate 3. Between the guide limiting plate 202 and the guide limiting plate 202, after all the protective covers 5 are synchronously snapped together, the synchronous pressure plate 3 is pressed down, so that the multiple slots 301 on the inner side of the synchronous pressure plate 3 are respectively snapped into the snapping blocks 503 on the outer side of each protective cover 5, and the protective covers 5 are synchronously limited. When the synchronous pressure plate 3 is pressed down, the fixing connector 302 slides in the through hole of the guide limiting plate 202. After being pressed down to the bottom, the positioning connector 304 is fixed to the outside of the mounting plate 2 by screws, so as to perform multiple synchronous positioning of multiple temperature sensors 4 and improve the stability of installation.

[0031] In a preferred embodiment, the elastic snap-fit ​​assembly includes an adjustment groove 6 formed at one end of the inner side of the base 1. A rotating connector 601 is rotatably connected to the inner side of the adjustment groove 6. Elastic connectors 602 are connected to both sides of the rotating connector 601. One end of the elastic connector 602 is fixedly connected to the rotating connector 601, and the other end is fixedly connected to both sides of the inner side of the adjustment groove 6. The elastic connectors 602 on both sides have the same elasticity. When the movable inclined block 603 is not compressed, it will drive the rotating connector 601 to a vertical position, achieving the function of resetting. The movable inclined block 603 is fixedly connected to the bottom end of the rotating connector 601. The rotating connector 601 rotates inside the adjusting groove 6. When the positioning plate 7 slides with the base 1, one inclined surface of the movable inclined block 603 first contacts one inclined surface of the fixed inclined block 702. Then, under the action of pushing pressure, it drives the elastic connector 602 on the outer side to be compressed, so that the movable inclined block 603 rotates under the connection of the rotating connector 601, passing over the fixed inclined block 702. Then, after the movable inclined block 603 loses the squeezing force, the elastic connector 602 returns to its original position, and the other side of the movable inclined block 603 is in close contact with the other side of the fixed inclined block 702, thus achieving the effect of locking and pre-positioning.

[0032] In a preferred embodiment, the positioning plate 7 is slidably connected to the bottom end of the base 1. One end of the positioning plate 7 is fixedly connected to a limiting groove 701. The side of the base 1 is provided with a locking block corresponding to the limiting groove 701. A positioning screw hole 703 is provided inside one wall of the positioning plate 7. A pull ring 8 is fixedly connected to the middle of one side of the base 1. Both ends of one side of the base 1 are fixedly connected to positioning blocks 9 that are adapted to the positioning screw hole 703. When the base 1 slides and adjusts at the top of the positioning plate 7, the inner side is limited by the limiting groove 701 to ensure that the installation position of the base 1 will not deviate too much. The positioning block 9 is connected to the positioning screw hole 703 by a screw passing through it, which can reinforce the positioning plate 7 and the base 1 after pre-positioning. The pull ring 8 facilitates the operator to pull the base 1.

[0033] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0034] During the use of the embedded composite current collector sputtering machine temperature measuring device, the temperature measuring device is fixedly installed in the middle of the two guide rollers of the composite current collector sputtering machine. In order to improve the stability of the installation of multiple temperature sensors 4, the protective cover 5 and the limiting baffle 502 are first inserted into the interior of the matching positioning groove 201, and then rotated 90 degrees. At this time, the flexible extrusion block 504 on the inner side of the protective cover 5 performs flexible extrusion limiting on the temperature sensor 4. The same operation is performed on the outer side of multiple temperature sensors 4.

[0035] Subsequently, press down on the synchronous pressure plate 3 so that the multiple slots 301 on the inner side of the synchronous pressure plate 3 are respectively engaged in the locking blocks 503 on the outer side of each protective cover 5, thus synchronously limiting the protective cover 5. When the synchronous pressure plate 3 is pressed down, the fixing connector 302 slides inside the through hole of the guide limiting plate 202. After being pressed down to the bottom, the positioning connector 304 is fixed to the outside of the mounting plate 2 by screws, thus synchronously positioning multiple temperature sensors 4 and improving the stability of the installation.

[0036] When the temperature measuring device malfunctions and needs to be repaired, the screw connected to the positioning screw hole 703 inside the positioning block 9 can be unscrewed. Then, grasp the pull ring 8 and pull the base 1 outward. At this time, the movable inclined block 603 will be compressed after being subjected to pressure, causing the elastic connecting piece 602 on the other side of the force-bearing surface to be compressed. At this time, the movable inclined block 603 will rotate with the connection of the rotating connecting piece 601 and slide out from the top of the fixed inclined block 702, releasing the lock on the relative sliding of the positioning plate 7 and the base 1.

[0037] After the internal structure of the temperature measuring device is inspected and repaired, the base 1 is pushed inward from the top of the positioning plate 7. At this time, one inclined surface of the movable inclined block 603 first contacts one inclined surface of the fixed inclined block 702. Then, under the action of the pushing pressure, the elastic connecting piece 602 on the outer side is compressed, so that the movable inclined block 603 rotates under the connection of the rotating connecting piece 601, passing over the fixed inclined block 702. Then, after the movable inclined block 603 loses the squeezing force, the elastic connecting piece 602 returns to its original position, and the other side of the movable inclined block 603 is in close contact with the other side of the fixed inclined block 702. At this time, the pre-positioning effect is achieved. Then, the positioning block 9 is connected to the positioning screw hole 703 through the screw inside, which can strengthen the positioning plate 7 and the base 1 after pre-positioning, and obtain a stable temperature measuring device.

[0038] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A temperature measuring device for an embedded composite current collector sputtering machine, comprising: A base (1), the top of which is fixedly connected to a mounting plate (2), and the top of which is fixedly connected to a temperature sensor (4), characterized in that it further includes: An overall positioning assembly is disposed at the top of the mounting plate (2). The overall positioning assembly includes a positioning groove (201). A protective cover (5) connected by a protective assembly is disposed at the top of the positioning groove (201). A synchronous pressure plate (3) is connected to the outside of the protective cover (5) by a fastening assembly. The replacement component is removed and disposed at the bottom end of the base (1). The replacement component includes a positioning plate (7), which is slidably connected to the base (1). A fixed inclined block (702) is provided on the inner side of the positioning plate (7), and a movable inclined block (603) is provided on the inner side of the fixed inclined block (702) by means of an elastic snap-fit ​​component. The positioning groove (201) is located inside the top wall of the mounting plate (2). Both ends of the inner side of the positioning groove (201) are fixedly connected to elastic reset members (203). The top end of the elastic reset member (203) is connected to a dustproof baffle (204) that is slidably connected to the positioning groove (201). The protective assembly includes a glass baffle (501) fixedly connected to the top end of the protective cover (5). A flexible extrusion block (504) is fixedly connected to the inner wall of the protective cover (5). A snap-fit ​​block (503) is fixedly connected to the outer wall of the protective cover (5). A limit baffle (502) is fixedly connected to the bottom end of the protective cover (5). The fastening assembly includes a slot (301) opened on the inner side of the synchronous pressure plate (3). A fixed connector (302) is fixedly connected to the bottom end of the synchronous pressure plate (3).

2. The embedded composite current collector sputtering machine temperature measuring device according to claim 1, characterized in that, An elastic buffer (303) is provided on the outer side of the fixed connector (302), and a positioning connector (304) is connected to the inner side of the fixed connector (302).

3. The embedded composite current collector sputtering machine temperature measuring device according to claim 1, characterized in that, The mounting plate (2) is fixedly connected to guide limiting plates (202) that are slidably connected to the fixed connecting member (302) on both sides.

4. The embedded composite current collector sputtering machine temperature measuring device according to claim 3, characterized in that, The elastic snap-fit ​​assembly includes an adjustment groove (6) opened at one end of the inner side of the base (1), a rotating connector (601) is rotatably connected to the inner side of the adjustment groove (6), and elastic connectors (602) are connected to both sides of the rotating connector (601). The movable inclined block (603) is fixedly connected to the bottom end of the rotating connector (601).

5. The embedded composite current collector sputtering machine temperature measuring device according to claim 1, characterized in that, The positioning plate (7) is slidably connected to the bottom end of the base (1). One end of the positioning plate (7) is fixedly connected to a limit slot (701). A positioning screw hole (703) is provided inside one wall of the positioning plate (7).

6. The embedded composite current collector sputtering machine temperature measuring device according to claim 5, characterized in that, A pull ring (8) is fixedly connected to the middle of one side of the base (1), and positioning blocks (9) that are adapted to the positioning screw holes (703) are fixedly connected to both ends of one side of the base (1).

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