A quartz tube leak detection device

Abstract

The utility model relates to quartz tube leakproofness detection technical field, specifically disclose a quartz tube leakproofness detection device, including bottom plate and quartz tube body, the upside of bottom plate is provided with movable clamping sealing mechanism and water injection pressurizing mechanism, movable clamping sealing mechanism includes the vertical plate and fixed plate of fixed connection in the upper end of bottom plate, the right -hand member of vertical plate is installed with first electric push rod, and the output of first electric push rod penetrates vertical plate and is installed with pressure sensor, and the left end of pressure sensor is installed with moving plate, through the disc of second electric push rod and seal ring drive down, with piston principle pressurizes water, finally, operating personnel can observe whether the surface has water leakage in the process of rotating quartz tube body, can determine the overall leakproofness of quartz tube, and can accurately position its specific position of leakage, thereby providing great convenience for problem tracing, process improvement and substandard product reinspection.

Description

Technical Field

[0001] This utility model relates to the field of quartz tube sealing performance testing technology, and specifically discloses a quartz tube sealing performance testing device. Background Technology

[0002] Quartz tubes, as a key material possessing excellent high-temperature resistance, corrosion resistance, and high light transmittance, are widely used in tube furnace equipment in fields such as semiconductor industry, photovoltaic manufacturing, and materials science. In these applications, a type of quartz tube open at both ends is widely used as the core reaction chamber, connected to the furnace body via flanges at both ends to create a closed, high-temperature process environment. The airtight integrity of this quartz tube chamber is crucial; any minute leak will allow external air to intrude, not only contaminating the high-purity process atmosphere and causing product spoilage, but also potentially posing safety hazards.

[0003] Existing leak detection technologies commonly employ methods such as differential pressure testing or pressure decay testing. These methods primarily determine the presence of leaks by filling a quartz tube with compressed gas and monitoring changes in its internal pressure. While these methods can effectively identify the macroscopic result of a leak in the quartz tube, they cannot pinpoint the exact location of the leak, posing significant challenges to problem tracing, process improvement, and re-inspection of defective products.

[0004] Therefore, a quartz tube sealing test device is needed to solve the above problems. Utility Model Content

[0005] This invention proposes a quartz tube sealing test device, which can determine the overall sealing performance of the quartz tube body and locate the specific location of the leak, thus providing great convenience for problem tracing, process improvement and re-inspection of non-conforming products.

[0006] This utility model is implemented as follows: a quartz tube sealing test device includes a base plate and a quartz tube body, and a movable clamping sealing mechanism and a water injection pressurization mechanism are provided on the upper side of the base plate. The movable clamping and sealing mechanism includes a vertical plate and a fixed plate fixedly connected to the upper part of the base plate. A first electric actuator is installed at the right end of the vertical plate. The output end of the first electric actuator passes through the vertical plate and is equipped with a pressure sensor. A movable plate is installed at the left end of the pressure sensor. A rotating shaft is rotatably connected to the left end of the movable plate through an embedded bearing. A rotating tube is rotatably connected to the outer wall of the fixed plate through a through bearing. A clamping seat is fixedly connected to the opposite side of the rotating tube and the rotating shaft. A sealing gasket is embedded on the opposite side of the two clamping seats. The quartz tube body abuts between the two sealing gaskets. The water injection and pressurization mechanism includes a sealing rotary joint. A transparent box is fixedly connected to the upper end of the fixed plate. The transparent box and the fixed end of the sealing rotary joint are connected through a bend pipe. The rotating pipe is connected to the rotating end of the sealing rotary joint. A cylinder is connected to the upper end of the transparent box. A second electric actuator is installed at the upper end of the cylinder. The output end of the second electric actuator extends into the cylinder and is fixedly connected to a disc. Two sealing rings that abut against the inner wall of the cylinder are embedded in the outer wall of the disc through two grooves. A water filling pipe with a manual valve is connected to the outer wall of the transparent box.

[0007] In a preferred embodiment of the quartz tube sealing test device of this utility model, two sliding rods are fixedly connected to the right end of the moving plate, and both sliding rods penetrate the vertical plate and are slidably connected to the vertical plate.

[0008] As a preferred embodiment of the quartz tube sealing test device of this utility model, an operation panel and a controller are installed on the right end of the vertical plate.

[0009] As a preferred embodiment of the quartz tube sealing test device of this utility model, an injection hole communicating with the interior of the rotating tube is provided through the left end of the left clamping seat.

[0010] As a preferred embodiment of the quartz tube sealing performance testing device of this utility model, a connecting cover is fixedly connected to the outer wall of the sealing rotary joint, and the connecting cover is fixedly connected to the left end of the fixing plate.

[0011] As a preferred embodiment of the quartz tube sealing test device of this utility model, two vent holes are provided through the upper end of the cylinder.

[0012] As a preferred embodiment of the quartz tube sealing test device of this utility model, the upper end of the water inlet pipe is connected to a water inlet hopper.

[0013] The beneficial effects of this utility model are: The operator places the quartz tube body between two clamping seats, ensuring that the two sealing gaskets fit tightly against both ends of the quartz tube body to form a sealed inner cavity. Water is then injected into the transparent box. The water enters the interior of the quartz tube body through the bend, sealing rotary joint, rotating tube, and injection hole. The second electric actuator pushes the disc with the sealing ring downwards, pressurizing the water using a piston principle. Finally, the operator can observe whether there is water leakage on the surface while rotating the quartz tube body. This allows the operator to determine the overall sealing performance of the quartz tube and accurately locate the specific location of the leak, thus greatly facilitating problem tracing, process improvement, and re-inspection of non-conforming products. Attached Figure Description

[0014] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0015] Figure 1 This is a front sectional view of the overall structure of the quartz tube sealing performance testing device of this utility model; Figure 2 This is a structural diagram of the transparent box of this utility model; Figure 3 This is a structural diagram of the disc portion of this utility model; Figure 4 This is a structural diagram of the clamping seat and sealing gasket of this utility model.

[0016] The markings in the diagram are: 1. Base plate; 2. Vertical plate; 3. First electric actuator; 4. Pressure sensor; 5. Moving plate; 6. Rotating shaft; 7. Slide rod; 8. Rotating tube; 9. Clamping seat; 10. Sealing gasket; 11. Connecting cover; 12. Sealing rotary joint; 13. Transparent box; 14. Bend; 15. Cylinder; 16. Disc; 17. Sealing ring; 18. Second electric actuator; 19. Water filling pipe; 20. Water filling hopper; 21. Injection hole; 22. Quartz tube body; 23. Fixing plate. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and specific embodiments to aid in understanding its content. Unless otherwise specified, the methods used in this invention are conventional methods; the raw materials and apparatus used, unless otherwise specified, are conventional commercially available products.

[0018] Please see Figure 1-4 A quartz tube sealing performance testing device includes a base plate 1 and a quartz tube body 22. The upper side of the base plate 1 is provided with a movable clamping sealing mechanism and a water injection pressurization mechanism. The movable clamping and sealing mechanism includes a vertical plate 2 and a fixed plate 23 fixedly connected to the upper end of the base plate 1. A first electric push rod 3 is installed at the right end of the vertical plate 2. The output end of the first electric push rod 3 passes through the vertical plate 2 and is equipped with a pressure sensor 4. A movable plate 5 is installed at the left end of the pressure sensor 4. A rotating shaft 6 is rotatably connected to the left end of the movable plate 5 through an embedded bearing. A rotating tube 8 is rotatably connected to the outer wall of the fixed plate 23 through a through bearing. A clamping seat 9 is fixedly connected to the opposite side of the rotating tube 8 and the rotating shaft 6. A sealing gasket 10 is embedded on the opposite side of the two clamping seats 9. The quartz tube body 22 abuts between the two sealing gaskets 10. The water injection and pressurization mechanism includes a sealing rotary joint 12, a transparent box 13 fixedly connected to the upper end of a fixed plate 23, a bend 14 connecting the transparent box 13 and the fixed end of the sealing rotary joint 12, a rotating pipe 8 connected to the rotating end of the sealing rotary joint 12, a cylinder 15 connected to the upper end of the transparent box 13, a second electric actuator 18 installed at the upper end of the cylinder 15, the output end of the second electric actuator 18 extending into the cylinder 15 and fixedly connected to a disc 16, two sealing rings 17 embedded in the outer wall of the disc 16 through two grooves and abutting against the inner wall of the cylinder 15, and a water filling pipe 19 with a manual valve connected to the outer wall of the transparent box 13.

[0019] In this embodiment: First, the operator moves the quartz tube body 22 so that its end fits against the sealing gasket 10 of the left clamping seat 9. Then, the first electric actuator 3 is activated, and its output end pushes the moving plate 5 to the left, simultaneously moving the rotating shaft 6, the right clamping seat 9, and the right sealing gasket 10 to the left. This tightly presses both ends of the quartz tube body 22 against the two sealing gaskets 10, forming a sealed inner cavity. During this process, the pressure sensor 4 monitors the pressure in real time and transmits the signal to the controller. The controller then controls the movement of the first electric actuator 3 to ensure reliable sealing and prevent damage to the quartz tube body 22.

[0020] Next, water is injected into the transparent box 13 through the water inlet pipe 19 and the water inlet 20. The water will enter the interior of the quartz tube body 22 through the bend pipe 14, the sealing rotary joint 12, the rotating pipe 8, and the injection hole 21 until the liquid level rises to the interior of the transparent box 13, at which point the water injection stops. Then, the manual valve of the water inlet pipe 19 is closed, and the second electric actuator 18 is activated to push the disc 16 downward within the cylinder 15. The sealing ring 17 on the disc 16 ensures that no gas leakage occurs during the downward movement. This action is like a piston compressing air, pressurizing the water in the transparent box 13, the bend pipe 14, the sealing rotary joint 12, the rotating pipe 8, the injection hole 21, and the quartz tube body 22.

[0021] Then, the operator can directly observe whether there is water leakage on the surface of the quartz tube body 22. While maintaining pressure, the quartz tube body 22 can be manually rotated, which will cause the two clamping seats 9 to rotate with the rotating shaft 6 and the rotating tube 8 respectively, so that the surface of the quartz tube body 22 can be fully observed to see whether there is water leakage.

[0022] The above methods can determine the overall sealing performance of the quartz tube body 22 and pinpoint the specific location of the leak, thus greatly facilitating problem tracing, process improvement, and re-inspection of defective products.

[0023] As a technical optimization of this utility model, two sliding rods 7 are fixedly connected to the right end of the movable plate 5. Both sliding rods 7 pass through the vertical plate 2 and are slidably connected to the vertical plate 2.

[0024] In this embodiment: Since the two sliding rods 7, which are fixedly connected to the moving plate 5, pass through the upright plate 2 and are slidably connected to the upright plate 2, the movement of the moving plate 5 is stable and without deviation.

[0025] As a technical optimization of this utility model, an operation panel and controller are installed on the right end of the upright plate 2.

[0026] In this embodiment: the operation panel is used to receive instructions from the operator, and the controller receives the instructions and controls the operation of the first electric actuator 3 and the second electric actuator 18; the controller is also responsible for receiving the signal fed back by the pressure sensor 4 and controlling the action of the first electric actuator 3 according to the feedback signal.

[0027] As a technical optimization of this utility model, an injection hole 21 communicating with the interior of the rotating tube 8 is provided through the left end of the left clamping seat 9.

[0028] In this embodiment: by providing an injection hole 21, water inside the rotating tube 8 can enter the interior of the quartz tube body 22.

[0029] As a technical optimization of this utility model, a connecting cover 11 is fixedly connected to the outer wall of the sealing rotary joint 12, and the connecting cover 11 is fixedly connected to the left end of the fixing plate 23.

[0030] In this embodiment: by setting the connecting cover 11, the sealing rotary joint 12 is fixedly installed on the left side of the fixing plate 23.

[0031] As a technical optimization of this utility model, two ventilation holes are provided through the upper end of the cylinder 15.

[0032] In this embodiment: by providing a vent, the space above the disk 16 of the cylinder 15 can be connected with the atmosphere.

[0033] As a technical optimization of this utility model, the upper end of the water inlet pipe 19 is connected to the water inlet hopper 20.

[0034] In this embodiment: by setting up a water inlet 20, water can be easily added into the water inlet pipe 19.

[0035] The working principle and usage process of this utility model are as follows: First, the operator moves the quartz tube body 22 so that the end of the quartz tube body 22 is in contact with the sealing gasket 10 of the left clamping seat 9. Then, the first electric actuator 3 is activated, and its output end pushes the moving plate 5 to the left, which in turn drives the rotating shaft 6, the right clamping seat 9, and the right sealing gasket 10 to the left, thereby pressing both ends of the quartz tube body 22 tightly against the two sealing gaskets 10 to form a sealed inner cavity. During this process, the pressure sensor 4 can monitor the pressure in real time and transmit the signal to the controller. The controller controls the action of the first electric actuator 3 to ensure reliable sealing and avoid damaging the quartz tube body 22.

[0036] Next, water is injected into the transparent box 13 through the water inlet pipe 19 and the water inlet 20. The water will enter the interior of the quartz tube body 22 through the bend pipe 14, the sealing rotary joint 12, the rotating pipe 8, and the injection hole 21 until the liquid level rises to the interior of the transparent box 13, at which point the water injection stops. Then, the manual valve of the water inlet pipe 19 is closed, and the second electric actuator 18 is activated to push the disc 16 downward within the cylinder 15. The sealing ring 17 on the disc 16 ensures that no gas leakage occurs during the downward movement. This action is like a piston compressing air, pressurizing the water in the transparent box 13, the bend pipe 14, the sealing rotary joint 12, the rotating pipe 8, the injection hole 21, and the quartz tube body 22.

[0037] Then, the operator can directly observe whether there is water leakage on the surface of the quartz tube body 22. While maintaining pressure, the quartz tube body 22 can be manually rotated, which will cause the two clamping seats 9 to rotate with the rotating shaft 6 and the rotating tube 8 respectively, so that the surface of the quartz tube body 22 can be fully observed to see whether there is water leakage.

[0038] The above methods can determine the overall sealing performance of the quartz tube body 22 and pinpoint the specific location of the leak, thus greatly facilitating problem tracing, process improvement, and re-inspection of defective products.

[0039] In the description of this utility model, it should be understood that the terms "left", "right", "up", "down", "top", "bottom", "front", "back", "inner", "outer", "back", "middle", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0040] However, the above description is merely a specific embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. Therefore, any substitution of equivalent components or equivalent changes and modifications made in accordance with the scope of protection of this utility model should still fall within the scope of the claims of this utility model.

Claims

1. A quartz tube sealing performance testing device, comprising a base plate (1) and a quartz tube body (22), characterized in that: The upper side of the base plate (1) is provided with a movable clamping and sealing mechanism and a water injection and pressurization mechanism; The movable clamping and sealing mechanism includes a vertical plate (2) and a fixed plate (23) fixedly connected to the upper end of the base plate (1). A first electric push rod (3) is installed on the right end of the vertical plate (2). The output end of the first electric push rod (3) passes through the vertical plate (2) and is equipped with a pressure sensor (4). A movable plate (5) is installed on the left end of the pressure sensor (4). A rotating shaft (6) is rotatably connected to the left end of the movable plate (5) through an embedded bearing. A rotating tube (8) is rotatably connected to the outer wall of the fixed plate (23) through a through bearing. A clamping seat (9) is fixedly connected to the opposite side of the rotating tube (8) and the rotating shaft (6). A sealing gasket (10) is embedded on the opposite side of the two clamping seats (9). The quartz tube body (22) abuts between the two sealing gaskets (10). The water injection and pressurization mechanism includes a sealing rotary joint (12), a transparent box (13) is fixedly connected to the upper end of the fixed plate (23), the transparent box (13) is connected to the fixed end of the sealing rotary joint (12) through a bend (14), the rotating pipe (8) is connected to the rotating end of the sealing rotary joint (12), the upper end of the transparent box (13) is connected to a cylinder (15), the upper end of the cylinder (15) is equipped with a second electric push rod (18), the output end of the second electric push rod (18) extends into the cylinder (15) and is fixedly connected to a disc (16), the outer wall of the disc (16) is provided with two sealing rings (17) that abut against the inner wall of the cylinder (15) through two grooves, and the outer wall of the transparent box (13) is connected to a water filling pipe (19) with a manual valve.

2. The quartz tube sealing performance testing device according to claim 1, characterized in that: Two sliding rods (7) are fixedly connected to the right end of the movable plate (5). Both sliding rods (7) pass through the upright plate (2) and are slidably connected to the upright plate (2).

3. The quartz tube sealing performance testing device according to claim 1, characterized in that: An operation panel and controller are installed on the right end of the upright plate (2).

4. The quartz tube sealing performance testing device according to claim 1, characterized in that: An injection hole (21) communicating with the interior of the rotating tube (8) is provided through the left end of the left clamping seat (9).

5. The quartz tube sealing performance testing device according to claim 1, characterized in that: The outer wall of the sealing rotary joint (12) is fixedly connected to a connecting cover (11), which is fixedly connected to the left end of the fixing plate (23).

6. The quartz tube sealing performance testing device according to claim 1, characterized in that: Two ventilation holes are provided through the upper end of the cylinder (15).

7. The quartz tube sealing performance testing device according to claim 1, characterized in that: The upper end of the water supply pipe (19) is connected to the water supply hopper (20).

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