Lens detection device

Abstract

The application relates to a lens detection device, which comprises a marking piece, a light source, a detection piece and a first adjusting assembly, the marking piece is provided with a test mark; the light source is used for illuminating the test mark, the marking piece is located between the light source and a to-be-detected lens, the to-be-detected lens is used for imaging the test mark illuminated by the light source; the detection piece is used for detecting the image formed by the to-be-detected lens, and the detection piece is located on the side of the to-be-detected lens away from the marking piece; and the first adjusting assembly is used for adjusting the position and the inclination angle of the detection piece, so that the detection piece receives the image formed by the to-be-detected lens. The lens detection device provided by the application can detect the indexes of the to-be-detected lens by detecting the image formed by the to-be-detected lens, and the first adjusting assembly can adapt to different measurement requirements.

Description

Technical Field

[0001] This application relates to the technical field of optical inspection, specifically to a lens inspection device. Background Technology

[0002] Lenses are primarily used for optical imaging and precision measurement in semiconductor devices, and are key components ensuring the functionality of the equipment. However, in actual manufacturing processes, errors can occur in the lens's specifications and image quality, potentially affecting the normal operation of the equipment. Utility Model Content

[0003] This application provides a lens detection device, including: The marker is equipped with test markings; A light source is used to illuminate the test mark, the mark is located between the light source and the lens under test, and the lens under test is used to image the test mark illuminated by the light source. A detection element is used to detect the image formed by the lens under test. The detection element is located on the side of the lens under test that is away from the marker. A first adjustment component is used to adjust the position and tilt angle of the detection element so that the detection element receives the image formed by the lens under test.

[0004] According to one embodiment of this application, the lens detection device further includes a bracket, and the light source, the marker, and the lens to be tested are all mounted on the bracket.

[0005] According to one embodiment of this application, the first adjustment component includes a first displacement adjustment member and a first angle adjustment member. The first angle adjustment member is connected between the first displacement adjustment member and the detection member. The first displacement adjustment member is used to adjust the position of the detection member in the XYZ direction, and the first angle adjustment member is used to adjust the tilt angle of the detection member.

[0006] According to one embodiment of this application, the lens detection device further includes a second adjustment component, which is mounted on the bracket and is used to adjust the position and tilt angle of the lens to be tested.

[0007] According to one embodiment of this application, the second adjustment component includes a second displacement adjustment member and a second angle adjustment member. The second displacement adjustment member is connected between the bracket and the second angle adjustment member, and the second angle adjustment member is connected between the second displacement adjustment member and the lens under test. The second displacement adjustment member is used to adjust the position of the lens under test in the Z direction, and the second angle adjustment member is used to adjust the tilt angle of the lens under test.

[0008] According to one embodiment of this application, the second displacement adjuster and the bracket are detachably connected, and the second displacement adjuster is configured to be connected to multiple positions of the bracket in the Z direction to adjust the position of the second displacement adjuster relative to the bracket in the Z direction.

[0009] According to one embodiment of this application, the lens detection device further includes a third displacement adjustment member connected between the bracket and the marker. The third displacement adjustment member is used to adjust the position of the marker in the XYZ direction. The third displacement adjustment member and the bracket are detachably connected. The third displacement adjustment member is configured to be connected to multiple positions of the bracket in the Z direction to adjust the position of the third displacement adjustment member relative to the bracket in the Z direction.

[0010] According to one embodiment of this application, the lens detection device further includes a fourth displacement adjustment member connected between the bracket and the light source. The fourth displacement adjustment member is used to adjust the position of the light source in the Y direction. The fourth displacement adjustment member and the bracket are detachably connected. The fourth displacement adjustment member is configured to be connected to multiple positions of the bracket in the X direction to adjust the position of the fourth displacement adjustment member relative to the bracket in the X direction.

[0011] According to one embodiment of this application, the bracket includes a first frame and a second frame disposed opposite to each other, and a first arm and a second arm disposed opposite to each other. The first arm is connected between one end of the first frame and one end of the second frame, and the second arm is connected between the other end of the first frame and the other end of the second frame. The light source is mounted on the first frame, the detection element is disposed close to the second frame, the lens to be tested is mounted on the first arm, and the marker is mounted on the second arm.

[0012] According to one embodiment of this application, the first frame and the first arm and the second arm are detachably connected, and the first frame is configured to be connected to multiple positions of the first arm and the second arm in the Z direction to adjust the position of the first frame relative to the first arm and the second arm in the Z direction.

[0013] The lens inspection device provided in this application can detect the parameters of the lens under test by detecting the image formed by the lens under test. The setting of the first adjustment component can facilitate the receiving of the image formed by the lens under test by the detection component, so that the lens inspection device can adapt to different measurement needs. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the structure of an embodiment of the lens detection device of this application; Figure 2 This is a schematic diagram of another embodiment of the lens detection device of this application. Detailed Implementation

[0016] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It should be particularly noted that the following embodiments are for illustrative purposes only and do not limit the scope of the application. Similarly, the following embodiments are only some, not all, embodiments of the present application, and all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of the present application.

[0017] The terms "first," "second," and "third" used in the embodiments of this application are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. All directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationships and movement of components in a specific posture (as shown in the figures). If the specific posture changes, the directional indication will also change accordingly. The terms "comprising" and "having," and any variations thereof, in the embodiments of this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or components inherent to these processes, methods, products, or devices.

[0018] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0019] This application provides a lens detection device 10, such as... Figure 1 and Figure 2 As shown, the lens inspection device 10 includes a light source 110, a marker 120, a detection element 140, and a first adjustment assembly 141. The marker 120 has test marks. The light source 110 illuminates the test marks, and the marker 120 is located between the light source 110 and the lens under test 130. The lens under test 130 images the test marks illuminated by the light source 110. The detection element 140 detects the image formed by the lens under test 130 and is located on the side of the lens under test 130 away from the marker 120. The first adjustment assembly 141 adjusts the position and tilt angle of the detection element 140 so that the detection element 140 receives the image formed by the lens under test 130. The lens inspection device 10 can be used for optical imaging and precision measurement in semiconductor devices. When observing objects using an optical system, the image quality will slightly decrease due to unavoidable aberrations and diffraction phenomena. In addition, actual lenses will not perfectly match the design data, and manufacturing errors, assembly errors, and alignment errors in optical components will reduce the overall imaging performance of the system. The lens testing device 10 in this application is applicable to the testing of lenses 130 of different specifications. The testing component 140 receives and tests the image formed by the lens 130 under test, and then analyzes the magnification, distortion, field curvature, wavelet aberration, and other parameters and imaging quality of the lens 130 under test, so as to make the imaging of the lens 130 under test more stable and reliable. The first adjustment component 141 is set to facilitate the receiving of the image formed by the lens 130 under test by the testing component 140, so as to adapt to different testing scenarios.

[0020] In some embodiments, the marker 120 can be a mask, which can be a selected image, graphic, or object to occlude the area being processed in order to control the image processing process. The test mark on the marker 120 is light-transmitting, and the area around the test mark is reflective. The light source 110 illuminates the marker 120, and the light passes through the test mark and forms an image similar to the test mark through the lens 130 under test.

[0021] In some embodiments, the detection element 140 includes an image quality detection module, which compares the image formed by the lens under test 130 with the test mark to determine the lens specifications and imaging quality of the lens under test 130.

[0022] In some embodiments, the lens inspection device 10 further includes a bracket 150, on which the light source 110, the marker 120, and the lens to be tested 130 are all mounted. The bracket 150 makes the structure of the lens inspection device 10 simpler and more compact, and the spatial arrangement of the various components is more regular and concentrated, which helps to reduce the space occupied by the lens inspection device 10 and improve the inspection efficiency.

[0023] In some embodiments, the detection element 140 is mounted on the bracket 150, and the first adjustment component 141 is connected between the detection element 140 and the bracket 150, so that the lens detection device 10 is modularized to facilitate the handling and installation of the lens detection device 10.

[0024] In some embodiments, the detection element 140 is mounted on the optical platform, the support 150 is also mounted on the optical platform, and the first adjustment component 141 is connected between the detection element 140 and the optical platform.

[0025] In some embodiments, the support 150 may be generally rectangular. In some other embodiments, the support 150 may also be cylindrical, prism, frustum, or other similar shapes.

[0026] In some embodiments, the bracket 150 includes a first frame 151 and a second frame 152 disposed opposite to each other, and a first arm 153 and a second arm 154 disposed opposite to each other. The first arm 153 is connected between one end of the first frame 151 and one end of the second frame 152, and the second arm 154 is connected between the other end of the first frame 151 and the other end of the second frame 152. A light source 110 is mounted on the first frame 151, a detection element 140 is disposed close to the second frame 152, a lens under test 130 is mounted on the first arm 153, and a marker 120 is mounted on the second arm 154. The light source 110, the marker 120, the lens under test 130, and the detection element 140 are respectively mounted on different sides of the bracket 150, so that their respective displacement adjustments have sufficient space and avoid mutual interference.

[0027] In some embodiments, the first frame 151 and the second frame 152 may be rectangular in shape, and the first arm 153 and the second arm 154 are respectively connected to the two opposite sides of the first frame 151. There may be two first arms 153 and two second arms 154, and the first arms 153 and the second arms 154 are respectively connected to the four corners of the first frame 151 and the four corners of the second frame 152. The first frame 151, the second frame 152, the first arm 153, and the second arm 154 together form a cuboid with 12 sides.

[0028] In some other embodiments, the detection element 140 is mounted on the second frame 152, and the first adjustment component 141 is connected between the detection element 140 and the second frame 152.

[0029] In some embodiments, the first adjustment component 141 includes a first displacement adjustment member 142 and a first angle adjustment member 143. The first angle adjustment member 143 is connected between the first displacement adjustment member 142 and the detection member 140. The first displacement adjustment member 142 is used to adjust the position of the detection member 140 in the XYZ direction, and the first angle adjustment member 143 is used to adjust the tilt angle of the detection member 140.

[0030] In some embodiments, the first displacement adjustment member 142 adjusts the position of the detection member 140 by adjusting the position of the first angle adjustment member 143. The first displacement adjustment member 142 is a three-dimensional adjustment platform, which can adjust the position of the detection member 140 in three-dimensional space so that the position of the detection member 140 can be adapted to the focal length of the lens 130 under test. The first angle adjustment member 143 is a dual-axis manual tilting stage, which can adjust the pitch angle of the detection member 140.

[0031] In some embodiments, on the two sides of the second frame 152 that are connected, one side extends in the X direction and the other side extends in the Y direction, and the first arm 153 extends in the Z direction.

[0032] In some embodiments, the X and Y directions are perpendicular to each other, and the Z direction is perpendicular to the plane containing the X and Y directions. In some other embodiments, the X and Y directions may also form an angle, which can be 45° to 90°, and the shape of the second frame 152 can be prism-shaped. The Z direction may also form an angle with the plane containing the X and Y directions.

[0033] In some embodiments, the first displacement adjuster 142 and the optical platform are detachably connected. The first displacement adjuster 142 is configured to be connected to multiple positions of the optical platform in the XY direction to adjust the position of the first displacement adjuster 142 relative to the bracket 150 in the X and Y directions.

[0034] In some embodiments, this application can achieve coarse adjustment of the detection element 140 in the horizontal direction by adjusting the relative position of the first displacement adjustment member 142 and the optical platform to initially position the detection element 140. Adjusting the first displacement adjustment member 142 can achieve high-precision adjustment of the position of the detection element 140 in the XYZ directions. By combining coarse and fine adjustments, this application can expand the adjustment range of the detection element 140's position, improve adjustment accuracy, and simultaneously increase adjustment efficiency.

[0035] In some embodiments, the first displacement adjustment member 142 and the optical platform are detachably connected by bolts. When the bolts are removed, the first displacement adjustment member 142 and the optical platform can move relative to each other. When the bolts are tightened, the first displacement adjustment member 142 can be fixedly connected to different positions on the optical platform. In some other embodiments, the first displacement adjustment member 142 and the optical platform can also be detachably connected by snap-fit, magnetic connection, or other directional means.

[0036] In some embodiments, a connector is connected between the first displacement adjustment member 142 and the first angle adjustment member 143, and the first angle adjustment member 143 and the detection member 140 are also connected by a connector.

[0037] In some embodiments, the lens testing device 10 further includes a second adjustment component 131, which is mounted on the bracket 150 and connected between the bracket 150 and the lens 130 under test. The second adjustment component 131 is used to adjust the position and tilt angle of the lens 130 under test. The second adjustment component 131 can achieve precise adjustment of the pose and working distance of the lens 130 under test to simulate various usage scenarios of the lens 130 under test.

[0038] In some embodiments, the second adjustment component 131 includes a second displacement adjustment member 132 and a second angle adjustment member 133. The second displacement adjustment member 132 is connected between the bracket 150 and the second angle adjustment member 133, and the second angle adjustment member 133 is connected between the second displacement adjustment member 132 and the lens under test 130. The second displacement adjustment member 132 is used to adjust the position of the lens under test 130 in the Z direction, and the second angle adjustment member 133 is used to adjust the tilt angle of the lens under test 130.

[0039] In some embodiments, the second displacement adjustment member 132 is a precision manual linear slide, the slide rail of which extends along the Z direction, and the lens under test 130 is slidably connected to the slide rail of the linear slide. The second angle adjustment member 133 is a dual-axis manual tilting stage, which can adjust the pitch angle of the lens under test 130 by adjusting the tilting stage.

[0040] In some embodiments, a first clamp 134 is provided between the second angle adjustment member 133 and the lens under test 130. The first clamp 134 is used to clamp and fix the lens under test 130, and the first clamp 134 can be adapted to different models of the lens under test 130 so as to facilitate the replacement of different lenses under test 130 for testing.

[0041] In some embodiments, the first clamp 134 may be ring-shaped, and one end of the lens 130 to be tested may be inserted into the first clamp 134. Bolts are provided around the first clamp 134. By tightening the bolts, the bolts abut against the periphery of the lens 130 to be tested, thereby fixing the lens 130 to be tested. There may be multiple first clamps 134 to clamp the lens 130 to different positions and prevent the lens 130 to be tested from shaking.

[0042] In some other embodiments, the second displacement adjustment member 132 can be an electrically driven linear slide, and the first clamp 134 can be in the shape of a vise or a claw.

[0043] In some embodiments, the second displacement adjuster 132 and the bracket 150 are detachably connected, and the second displacement adjuster 132 is configured to be connected to multiple positions of the bracket 150 in the Z direction to adjust the position of the second displacement adjuster 132 relative to the bracket 150 in the Z direction.

[0044] In some embodiments, a first mounting member 135 is connected between the second displacement adjusting member 132 and the bracket 150. The second displacement adjusting member 132 is connected to the first mounting member 135, and the first mounting member 135 and the bracket 150 are detachably connected. The first mounting member 135 and the bracket 150 can be connected by bolts.

[0045] In some embodiments, the first mounting member 135 is connected between two first arms 153. The first mounting member 135 can be fixed at multiple positions of the first arm 153 in the Z direction. By adjusting the position of the first mounting member 135 fixed to the first arm 153, the lens to be tested 130 can be initially positioned in the Z direction. By adjusting the second displacement adjustment member 132, the position of the lens to be tested 130 in the Z direction can be adjusted with high precision.

[0046] In some embodiments, the bracket 150 is provided with a positioning member 155, which abuts against one end of the first mounting member 135 near the second frame 152. The positioning member 155 can be used for positioning during the installation of the first mounting member 135 on the bracket 150, and can also improve the stability of the first mounting member 135.

[0047] In some embodiments, the first mounting member 135 is plate-shaped, and the second displacement adjustment member 132 is fixedly connected to the middle of the first mounting member 135.

[0048] In some embodiments, an adapter is connected between the second angle adjustment member 133 and the first clamp 134, and the adapter may be plate-shaped.

[0049] In some embodiments, the lens detection device 10 further includes a third displacement adjustment member 121, which is connected between the bracket 150 and the marker 120, and is used to adjust the position of the marker 120 in the XYZ direction.

[0050] In some embodiments, the third displacement adjustment member 121 is a three-dimensional adjustment platform, and the third displacement adjustment member 121 can adjust the position of the marker member 120 in three-dimensional space.

[0051] In some embodiments, the lens testing device 10 further includes a mounting platform 122 and a clamping clip, the clamping clip being used to clamp and fix the marker 120 to the mounting platform 122, the mounting platform 122 being connected to the third displacement adjustment member 121. The mounting platform 122 is provided with a through hole, and the position of the test mark on the marker 120 corresponds to the position of the through hole.

[0052] In some embodiments, the third displacement adjuster 121 and the bracket 150 are detachably connected, and the third displacement adjuster 121 is configured to be connected to multiple positions of the bracket 150 in the Z direction to adjust the position of the third displacement adjuster 121 relative to the bracket 150 in the Z direction.

[0053] In some embodiments, a second mounting member 124 is connected between the third displacement adjusting member 121 and the bracket 150. The third displacement adjusting member 121 is connected to the second mounting member 124, and the second mounting member 124 and the bracket 150 are detachably connected. The second mounting member 124 and the bracket 150 can be connected by bolts.

[0054] In some embodiments, the second mounting member 124 is connected between the two second arms 154. The second mounting member 124 can be fixed at multiple positions of the second arm 154 in the Z direction. By adjusting the position of the second mounting member 124 fixed to the second arm 154, the marker 120 can be initially positioned in the Z direction. By adjusting the third displacement adjustment member 121, the position of the marker 120 can be adjusted with high precision in the three-dimensional direction.

[0055] In some embodiments, the second mounting member 124 has a positioning member 155 at one end near the second frame 152. The positioning member 155 can be used for positioning during the installation of the second mounting member 124 on the bracket 150, and can also improve the stability of the second mounting member 124.

[0056] In some embodiments, the second mounting member 124 is plate-shaped, and the third displacement adjustment member 121 is fixedly connected to the middle of the second mounting member 124.

[0057] In some embodiments, the lens detection device 10 further includes a fourth displacement adjustment member 111, which is connected between the bracket 150 and the light source 110, and is used to adjust the position of the light source 110 in the Y direction.

[0058] In some embodiments, the fourth displacement adjustment member 111 includes a slidingly connected guide rail and a slider. The guide rail is fixedly connected to the bracket 150 and extends along the Y direction. The light source 110 is connected to the slider. By adjusting the position of the slider on the guide rail, the position of the light source 110 relative to the bracket 150 in the Y direction can be adjusted.

[0059] In some embodiments, the fourth displacement adjuster 111 and the bracket 150 are detachably connected, and the fourth displacement adjuster 111 is configured to be connected to multiple positions of the bracket 150 in the X direction to adjust the position of the fourth displacement adjuster 111 relative to the bracket 150 in the X direction.

[0060] In some embodiments, the guide rail of the fourth displacement adjustment member 111 and the first frame 151 are connected by bolts, and the guide rail is connected between two opposite sides of the first frame 151 in the Y direction. The guide rail can be fixed at multiple positions of the first frame 151 in the X direction. By adjusting the position of the guide rail fixed to the first frame 151, the position of the light source 110 in the X direction can be adjusted.

[0061] In some embodiments, the lens inspection device 10 further includes a second clamp connected between the light source 110 and the fourth displacement adjustment member 111. The second clamp is used to hold and fix the light source 110, and the second clamp can be adapted to different models of light sources 110 to facilitate the formation of various test environments.

[0062] In some embodiments, an adapter is connected between the second clamp and the slider. The second clamp may be ring-shaped. One end of the light source 110 may be inserted into the second clamp. Bolts are provided around the second clamp. By tightening the bolts, the bolts abut against the periphery of the light source 110, thereby fixing the light source 110.

[0063] In some embodiments, the first frame 151 and the first arm 153 and the second arm 154 are detachably connected. The first frame 151 is configured to be fixed to multiple positions of the first arm 153 and the second arm 154 in the Z direction, so as to adjust the position of the first frame 151 relative to the first arm 153 and the second arm 154 in the Z direction, thereby adjusting the position of the light source 110 in the Z direction.

[0064] In some embodiments, the first frame 151 can be detachably connected to the first arm 153 and the second arm 154 by means of bolts, snap-fit, etc. This application achieves adjustment of the position of the light source 110 in the Z direction by adjusting the position of the first frame 151, adjustment of the position of the light source 110 in the X direction by adjusting the position of the fourth displacement adjustment member 111 relative to the first frame 151, and adjustment of the position of the light source 110 in the Y direction by adjusting the fourth displacement adjustment member 111, thereby achieving adjustment of the position of the light source 110 in the XYZ directions.

[0065] In some embodiments, the bracket 150 can be a 45*45mm aluminum profile. Aluminum profiles are alloy materials with aluminum as the main component. Aluminum rods are hot-melted and extruded to obtain aluminum materials with different cross-sectional shapes. Depending on the proportion of alloy added, the mechanical properties and application areas of the produced industrial aluminum profiles also differ. In some embodiments, the bracket 150 can also be made of stainless steel or other metals or metal alloys.

[0066] In some embodiments, the bracket 150 may be provided with a groove, and devices such as the first adjustment component 141 and the second adjustment component 131 can be connected to the bracket 150 by T-bolts inserted into the groove.

[0067] In some embodiments, the top, bottom, and side surfaces of the bracket 150 are hollow. For example, the bracket 150 is rectangular in shape, and all six sides of the bracket 150 are hollow, so as to facilitate the adjustment of the position and tilt angle of the light source 110, the marker 120, the lens under test 130, and the detection element 140.

[0068] In some other embodiments, the top and sides of the bracket 150 are provided with cover plates, and the bracket 150, the cover plates, and the optical platform form a sealed box, so that external natural light cannot affect the imaging of the lens 130 under test, thereby improving the accuracy of the test. In some embodiments, the bottom surface of the bracket 150 is also provided with a cover plate, and the bracket 150 and the cover plates form a sealed box.

[0069] In some embodiments, the first frame 151 and the second frame 152 are arranged in parallel, and the first frame 151 is located above the second frame 152 in the vertical direction. The extension directions of the first arm 153 and the second arm 154 are both vertical.

[0070] In some other embodiments, the first frame 151 and the second frame 152 are at the same height in the vertical direction, the first frame 151 is located in the horizontal direction of the second frame 152, and the extension directions of the first arm 153 and the second arm 154 are both horizontal.

[0071] The lens inspection device 10 provided in this application has a more compact structure due to the bracket 150, which helps to save space and improve inspection efficiency. The light source 110, marker 120, lens under test 130, and inspection piece 140 can be flexibly coarsely adjusted to adapt to different measurement needs. The first adjustment component 141 and the second adjustment component 131 can achieve precise adjustment of the position and working distance of the inspection piece 140 and the lens under test 130. The annular first clamp 134 and second clamp can be adapted to different models of light source 110 and lens under test 130. The lens inspection device 10 has a stable structure, is easy to use, is suitable for measurement needs of different postures, can provide a variety of test scenarios, and improves inspection accuracy.

[0072] The above description is only a part of the embodiments of this application and does not limit the scope of protection of this application. Any equivalent device or equivalent process transformation made based on the content of this application specification and drawings, or directly or indirectly applied to other related technical fields, are similarly included in the patent protection scope of this application.

Claims

1. A lens inspection device, characterized in that, include: The marker is equipped with test markings; A light source is used to illuminate the test mark, the mark is located between the light source and the lens under test, and the lens under test is used to image the test mark illuminated by the light source. A detection element is used to detect the image formed by the lens under test. The detection element is located on the side of the lens under test that is away from the marker. A first adjustment component is used to adjust the position and tilt angle of the detection element so that the detection element receives the image formed by the lens under test.

2. The lens inspection device according to claim 1, characterized in that, The lens testing device also includes a bracket, on which the light source, the marker, and the lens to be tested are all mounted.

3. The lens inspection device according to claim 2, characterized in that, The first adjustment component includes a first displacement adjustment member and a first angle adjustment member. The first angle adjustment member is connected between the first displacement adjustment member and the detection member. The first displacement adjustment member is used to adjust the position of the detection member in the XYZ direction, and the first angle adjustment member is used to adjust the tilt angle of the detection member.

4. The lens inspection device according to claim 2, characterized in that, The lens testing device further includes a second adjustment component, which is mounted on the bracket and is used to adjust the position and tilt angle of the lens under test.

5. The lens inspection device according to claim 4, characterized in that, The second adjustment component includes a second displacement adjustment member and a second angle adjustment member. The second displacement adjustment member is connected between the bracket and the second angle adjustment member, and the second angle adjustment member is connected between the second displacement adjustment member and the lens under test. The second displacement adjustment member is used to adjust the position of the lens under test in the Z direction, and the second angle adjustment member is used to adjust the tilt angle of the lens under test.

6. The lens inspection device according to claim 5, characterized in that, The second displacement adjuster and the bracket are detachably connected. The second displacement adjuster is configured to be connected to multiple positions of the bracket in the Z direction to adjust the position of the second displacement adjuster relative to the bracket in the Z direction.

7. The lens inspection device according to claim 2, characterized in that, The lens detection device further includes a third displacement adjustment member connected between the bracket and the marker. The third displacement adjustment member is used to adjust the position of the marker in the XYZ direction. The third displacement adjustment member and the bracket are detachably connected. The third displacement adjustment member is configured to be connected to multiple positions of the bracket in the Z direction to adjust the position of the third displacement adjustment member relative to the bracket in the Z direction.

8. The lens inspection device according to claim 2, characterized in that, The lens detection device further includes a fourth displacement adjustment member connected between the bracket and the light source. The fourth displacement adjustment member is used to adjust the position of the light source in the Y direction. The fourth displacement adjustment member and the bracket are detachably connected. The fourth displacement adjustment member is configured to be connected to multiple positions of the bracket in the X direction to adjust the position of the fourth displacement adjustment member relative to the bracket in the X direction.

9. The lens inspection device according to claim 2, characterized in that, The bracket includes a first frame and a second frame arranged opposite to each other, and a first arm and a second arm arranged opposite to each other. The first arm is connected between one end of the first frame and one end of the second frame, and the second arm is connected between the other end of the first frame and the other end of the second frame. The light source is installed in the first frame, the detection element is arranged close to the second frame, the lens to be tested is installed in the first arm, and the marker is installed in the second arm.

10. The lens inspection device according to claim 9, characterized in that, The first frame and the first arm and the second arm are detachably connected. The first frame is configured to be connected to multiple positions of the first arm and the second arm in the Z direction to adjust the position of the first frame relative to the first arm and the second arm in the Z direction.

Images