A mask substrate inspection device

Abstract

The utility model discloses a mask plate substrate visual inspection device relates to the field of semiconductor manufacturing technology, including visual inspection platform, detection module and clamping module, and detection module includes the adjustable light source device of visual inspection platform top, clamping module includes the moving frame of being connected to visual inspection platform, the mechanical arm of being connected to moving frame and the clamp of being connected to the one end of mechanical arm away from moving frame, and the clamp is used for clamping mask plate substrate, and the clamp can rotate around the axis of mechanical arm to adjust the included angle of mask plate substrate and horizontal plane, and moving frame can drive mechanical arm to move, is used for urging mask plate substrate moves between adjustable light source device and visual inspection platform to detect mask plate substrate. Can rotate around the axis of mechanical arm through the clamp to adjust the included angle of mask plate substrate and horizontal plane, makes mask plate substrate turn over, can solve the problem that the deviation of detection result in the prior art through manual mask plate substrate turns over, and then effectively ensures the accuracy of detection result.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a mask substrate visual inspection device. Background Technology

[0002] In the semiconductor manufacturing industry, photomasks are key tools used to transfer circuit patterns onto wafers. The surface quality of the photomask substrate directly affects the performance and reliability of the chip, and thus relates to the manufacturing precision and yield of semiconductor devices. Therefore, accurate visual inspection of the photomask substrate is of paramount importance.

[0003] Existing visual inspection methods involve manual or auxiliary equipment to visually inspect photomask substrates, checking key indicators such as surface defects, pattern integrity, and alignment accuracy. However, existing visual inspection devices often require manual operation when rotating samples at different angles for observation, which can easily introduce defects such as microscopic particles, significantly affecting the surface quality of the photomask substrate. Furthermore, human factors can easily lead to deviations in the inspection results.

[0004] Therefore, how to solve the problem of deviation in detection results caused by manually flipping the mask substrate in the existing technology, and thus effectively ensure the accuracy of the detection results, is a technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0005] The purpose of this invention is to provide a mask substrate visual inspection device that can solve the problem of deviation in inspection results caused by manually flipping the mask substrate in the prior art, thereby effectively ensuring the accuracy of the inspection results.

[0006] To achieve the above objectives, this utility model provides a mask substrate visual inspection device, including an inspection stage, a detection module, and a clamping module. The detection module includes an adjustable light source device located above the inspection stage. The clamping module includes a movable frame connected to the inspection stage, a robotic arm connected to the movable frame, and a clamp connected to the end of the robotic arm away from the movable frame. The clamp is used to clamp the mask substrate, and the clamp can rotate around the axis of the robotic arm to adjust the angle between the mask substrate and the horizontal plane. The movable frame can drive the robotic arm to move, thereby driving the mask substrate to move between the adjustable light source device and the inspection stage for inspection.

[0007] In one possible implementation, the camera assembly is also included. The camera assembly includes a rotating mechanism connected to the inspection stage, a support rod connected to the rotating mechanism, and a camera connected to the end of the support rod away from the rotating mechanism. The support rod is used to space the camera from the photomask substrate. The rotating mechanism is rotatable relative to the inspection stage to drive the camera to swing in the vertical plane for multi-directional shooting.

[0008] In one possible implementation, the strut includes a first support section and a second support section connected to each other. The end of the first support section opposite to the second support section is connected to a rotating mechanism, and the end of the second support section opposite to the first support section is connected to a camera via a steering mechanism. The steering mechanism is used to adjust the angle between the optical axis direction of the camera and the extension direction of the second support section.

[0009] In one possible implementation, a purging module is also included. The purging module includes a gas pipeline and a first gas filter, a second gas filter, and a nozzle arranged sequentially along the extension direction of the gas pipeline. The first gas filter is used to connect to a purging gas source to filter the purging gas; the second gas filter is used to filter the gas filtered by the first gas filter; and the nozzle is used to spray the gas filtered by the second gas filter onto the surface of the photomask substrate for purging.

[0010] In one possible implementation, the purging module further includes a pressure control valve disposed between the purging gas source and the first gas filter, for adjusting the purging gas pressure.

[0011] In one possible implementation, the purging module also includes a foot-operated valve for starting or stopping the purging module.

[0012] In one possible implementation, the detection module further includes:

[0013] The support frame is connected to the inspection table at one end and to the adjustable light source device at the other end, which is used to fix the inspection table and the adjustable light source device relatively.

[0014] A foot switch is connected to an adjustable light source device via a cable. The foot switch is used to control the adjustable light source device to turn on and off.

[0015] In one possible implementation, the robotic arm is connected to a stepper motor, the output shaft of which is connected to a gripper. The stepper motor is used to drive the gripper to rotate about the axis of the robotic arm.

[0016] In one possible implementation, the fixture includes two opposing jaws that can open and close relative to each other to hold the mask substrate.

[0017] In one possible implementation, an anti-slip structure is provided on the side of the grippers facing each other, the anti-slip structure being used to contact the position to be clamped on the mask substrate.

[0018] Compared with the prior art, the technical solution provided by this utility model has at least the following beneficial effects: After the fixture holds the mask substrate, the moving frame drives the robotic arm to move synchronously, moving the fixture and the mask substrate between the adjustable light source device and the inspection table. Under the light of the adjustable light source device, the side of the mask substrate facing the adjustable light source device is inspected. After the inspection of this side of the mask substrate is completed, the fixture can be rotated around the axis of the robotic arm to adjust the angle between the mask substrate and the horizontal plane, so that the mask substrate is flipped. Then, the moving frame drives the robotic arm to move synchronously, moving the fixture and the mask substrate between the adjustable light source device and the inspection table. Under the light of the adjustable light source device, the other side of the mask substrate is inspected. This can solve the problem of deviation in the inspection results caused by manually flipping the mask substrate in the prior art, thereby effectively ensuring the accuracy of the inspection results. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of the mask substrate visual inspection device provided in an embodiment of the present invention;

[0021] Figure 2 This is a schematic diagram of the purging module provided in an embodiment of the present utility model;

[0022] Figure 3 This is a schematic diagram of the structure of the mask substrate detection path provided in an embodiment of the present invention.

[0023] in:

[0024] 10 - Visual Inspection Table;

[0025] 100 - Detection module, 110 - Adjustable light source device, 120 - Support frame;

[0026] 200-Clamping module, 210-Robotic arm, 220-Gripper, 221-Gripper, 230-Moving frame;

[0027] 300 - Mask substrate;

[0028] 400 - Photo taking component, 410 - Rotation mechanism, 421 - First support section, 422 - Second support section, 430 - Camera, 440 - Steering mechanism;

[0029] 500 - Purge module, 510 - Gas pipeline, 520 - First gas filter, 530 - Second gas filter, 540 - Foot valve, 550 - Pressure control valve, 560 - Purge gas source, 570 - Nozzle. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] In the description of this utility model, it should be understood that the terms "upper", "lower", "left" and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the position or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations of this utility model.

[0033] The purpose of this invention is to provide a mask substrate visual inspection device that can solve the problem of deviation in inspection results caused by manually flipping the mask substrate in the prior art, thereby effectively ensuring the accuracy of the inspection results.

[0034] Please see Figure 1 To achieve the above objectives, this utility model provides a mask substrate 300 visual inspection device, including an inspection table 10, a detection module 100, and a clamping module 200. The detection module 100 includes an adjustable light source device 110 located above the inspection table 10. The clamping module 200 includes a movable frame 230 connected to the inspection table 10, a robotic arm 210 connected to the movable frame 230, and a clamp 220 connected to one end of the robotic arm 210 away from the movable frame 230. The clamp 220 is used to clamp the mask substrate 300, and the clamp 220 can rotate around the axis of the robotic arm 210 to adjust the angle between the mask substrate 300 and the horizontal plane. The movable frame 230 can drive the robotic arm 210 to move, thereby driving the mask substrate 300 to move between the adjustable light source device 110 and the inspection table 10 to inspect the mask substrate 300.

[0035] After the fixture 220 clamps the mask substrate 300, the moving frame 230 drives the robotic arm 210 to move synchronously, moving the fixture 220 and the mask substrate 300 between the adjustable light source device 110 and the inspection table 10. Under the light source of the adjustable light source device 110, the side of the mask substrate 300 facing the adjustable light source device 110 is inspected. After the inspection of this side of the mask substrate 300 is completed, the fixture 220 can rotate around the axis of the robotic arm 210 to adjust the mask substrate 300. The angle between 0° and the horizontal plane causes the mask substrate 300 to flip. Then, the moving frame 230 drives the robotic arm 210 to move, so as to move the fixture 220 and the mask substrate 300 between the adjustable light source device 110 and the inspection table 10. Under the light source of the adjustable light source device 110, the other side of the mask substrate 300 can be inspected. This can solve the problem of deviation in the inspection results caused by manually flipping the mask substrate 300 in the prior art, and thus effectively ensure the accuracy of the inspection results.

[0036] Understandably, the robotic arm 210 can extend and retract along its own axis to move the gripper 220 left and right along its axis. The moving frame 230 can move the robotic arm 210 in a horizontal plane perpendicular to its axis. The moving frame 230 can also move the robotic arm 210 in a height direction perpendicular to the horizontal plane. Specifically, by moving the robotic arm 210 in the height direction via the moving frame 230, the distance between the mask substrate 300 and the adjustable light source device 110 can be adjusted to ensure that the mask substrate 300 is adjusted within a preset distance. The detection is performed within a height range. The moving frame 230 can drive the robotic arm 210 to move in a horizontal plane perpendicular to the axis of the robotic arm 210. Specifically, the moving frame 230 can drive the robotic arm 210 to move forward and backward, in coordination with the extension and retraction of the robotic arm 210 in its own axis direction, so as to drive the mask substrate 300 to move horizontally within a preset height range, so that the mask substrate 300 moves along a preset trajectory, such as an S-shaped path, so that each area of ​​the mask substrate 300 passes through the same position for detection in sequence. The moving frame 230 is a relatively mature existing technology and will not be described in detail here.

[0037] In one possible implementation, an automatic box opener can be integrated into the robotic arm 210. Upon receiving a computer command, the automatic box opener can automatically open the carrier box lid. The robotic arm 210 is connected to a stepper motor, which is a high-precision stepper motor. The output shaft of the stepper motor is connected to a clamp 220, which drives the clamp 220 to rotate around the axis of the robotic arm 210. The clamp 220 includes two opposing grippers 221, which can open and close relative to each other to hold the mask substrate 300. An anti-slip structure is provided on the opposite side of the grippers 221, which is used to contact the position of the mask substrate 300 to be clamped. By opening and moving the two grippers 221 to the position of the mask substrate 300, and then closing them, the mask substrate 300 is clamped. The anti-slip structure, which contacts the position of the mask substrate 300 to be clamped, prevents the mask substrate 300 from sliding or falling. The anti-slip structure can be, but is not limited to, anti-slip strips or anti-slip textures. Stepper motors enable precise angle control, ensuring the stability of fixture 220 during rotation. Operators can input rotation commands via the control panel, and the stepper motors rotate fixture 220 accordingly. The rotation angle can be set according to the detection requirements of the mask substrate 300, for example, rotation from 0° to 180°, with a 180° rotation completed within 0.5 seconds. Through a combination of horizontal movement, vertical movement, and rotation around the axis of the robotic arm 210, the mask substrate 300 can be fully exposed to the detection field of view during inspection. For example, see attached... Figure 3 From left to right, the detection methods are: front area, back area, and side area of ​​the mask substrate 300. For the front and back areas of the mask substrate 300, detection is performed using position A as the detection starting point and line B (S-shaped path) as the preset detection line. For the side and back areas of the mask substrate 300, detection is performed using position A as the detection starting point and line B (loop path) as the preset detection line. It should be noted that the area of ​​the mask substrate 300 held by the gripper 221 is a detection blind zone. After completing the detection of other areas by holding the same mask substrate 300 with the gripper 221, the previously detected area of ​​the mask substrate 300 can be re-clamped to complete the detection of the blind zone.

[0038] In one possible implementation, the mask substrate 300 inspection device further includes an imaging component 400. The imaging component 400 includes a rotation mechanism 410 connected to the inspection stage 10, a support rod connected to the rotation mechanism 410, and a camera 430 connected to the end of the support rod away from the rotation mechanism 410. The support rod is used to space the camera 430 from the mask substrate 300. The rotation mechanism 410 can rotate relative to the inspection stage 10 to drive the camera 430 to swing in the vertical plane for multi-directional shooting. The swing range is similar to the swing range of a pendulum, and the camera 430 is at a height higher than the mask substrate 300. The swing range can be, but is not limited to, the range where the camera optical axis is at an angle of 0° to 60° with the vertical plane. Camera 430 employs an intelligent camera capable of real-time tracking of defects on the sample surface. It can move along a preset trajectory via the mask substrate 300, sequentially exposing different areas of the mask substrate 300 within its field of view; that is, the intelligent camera is fixed in position while the mask substrate 300 moves relative to it along the preset trajectory. Alternatively, the intelligent camera can swing vertically, sequentially exposing portions of the mask substrate 300 within its field of view; again, the mask substrate 300 is fixed in position while the intelligent camera moves relative to it along a swing trajectory. The intelligent camera automatically performs zoom operations (magnification or reduction) to capture defect details on the mask substrate 300. The intelligent camera can be connected to a terminal device to instantly archive detected defect images, facilitating subsequent traceability and analysis. This ensures full traceability of the inspection process, avoiding the problems of existing technologies where real-time monitoring and recording of visually inspected defects is impossible, leading to difficulties in timely detection, effective analysis, and processing. This, in turn, prevents reduced inspection efficiency and compromised quality control reliability.

[0039] Furthermore, the strut includes a first support section 421 and a second support section 422 connected together. The end of the first support section 421 facing away from the second support section 422 is connected to the rotating mechanism 410. The end of the second support section 422 facing away from the first support section 421 is connected to the camera 430 through the steering mechanism 440. The steering mechanism 440 is used to adjust the angle between the optical axis direction of the camera 430 and the extension direction of the second support section 422, so as to quickly adjust the pitch angle of the camera of the camera 430 according to the preset program or real-time detection requirements, so as to ensure that the mask substrate 300 can be photographed from different directions. Whether it is the front, back or side of the mask substrate 300, clear and accurate image information can be obtained, effectively avoiding blind spots or defects due to poor angle. The steering mechanism 440 is a relatively mature existing technology, which will not be described in detail here.

[0040] Please see Figure 2In one possible implementation, the mask substrate 300 inspection device further includes a purge module 500. The purge module 500 can be located on the side of the clamp 220 away from the robotic arm 210, opposite to the clamping module 200. The purge module 500 includes a gas pipeline 510, and a first gas filter 520, a second gas filter 530, and a nozzle 570 arranged sequentially along the extension direction of the gas pipeline 510. The first gas filter 520 is used to connect to the purge gas source 560 to filter the purge gas; the second gas filter 530 is used to filter the gas filtered by the first gas filter 520. Through the dual filtration of the first gas filter 520 and the second gas filter 530, the gas can be effectively filtered. To remove impurities from the air and ensure that the purging gas is clean, nozzle 570 sprays the gas filtered by the second gas filter 530 onto the surface of the mask substrate 300 for efficient purging, achieving a 99.9% removal rate for 0.0015μm particles. The purging module 500 also includes a foot-operated valve 540 and a pressure control valve 550. The pressure control valve 550 is located between the purging gas source 560 and the first gas filter 520 and is used to adjust the purging gas pressure. The foot-operated valve 540 is preferably located between the first gas filter 520 and the second gas filter 530. The foot-operated valve 540 is used to start or stop the purging module 500 with a single button, allowing for simultaneous inspection and cleaning, thus improving work efficiency.

[0041] In one possible implementation, the detection module 100 further includes a support frame 120 and a foot switch. One end of the support frame 120 is connected to the inspection table 10, and the other end is connected to the adjustable light source device 110, which is used to fix the inspection table 10 and the adjustable light source device 110 relatively. The optical axis of the adjustable light source device 110 is vertically downward, coinciding with the operator's horizontal line of sight. The illuminance of the light source can be steplessly adjusted, eliminating shadows according to the detection requirements and ensuring that the contrast of the surface defects of the mask substrate 300 reaches the optimal level, providing stable lighting conditions for detection. The foot switch is connected to the adjustable light source device 110 via a cable and is used to control the opening and closing of the adjustable light source device 110. The light source and gas valve adopt a foot-operated start switch, which frees the operator's hands and allows simultaneous control of the light source and purging function, achieving the effect of simultaneous purging and visual inspection, significantly improving detection efficiency and accuracy, and providing strong support for high-precision detection.

[0042] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0043] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0044] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principles of this utility model, and these improvements and modifications also fall within the protection scope of this utility model.

Claims

1. A photomask substrate visual inspection device, characterized in that, The device includes an inspection table (10), a detection module (100), and a clamping module (200). The detection module (100) includes an adjustable light source device (110) located above the inspection table (10). The clamping module (200) includes a movable frame (230) connected to the inspection table (10), a robotic arm (210) connected to the movable frame (230), and a clamp (220) connected to the end of the robotic arm (210) away from the movable frame (230). The clamp (220) is used to hold the mask substrate (300), and the clamp (220) can rotate about the axis of the robotic arm (210) to adjust the angle between the mask substrate (300) and the horizontal plane. The moving frame (230) can drive the robotic arm (210) to move, so as to drive the mask substrate (300) to move between the adjustable light source device (110) and the inspection stage (10) to inspect the mask substrate (300).

2. The mask substrate visual inspection device according to claim 1, characterized in that, It also includes a photographing component (400), which includes a rotating mechanism (410) connected to the inspection table (10), a support rod connected to the rotating mechanism (410), and a camera (430) connected to the end of the support rod away from the rotating mechanism (410). The support rod is used to space the camera (430) from the mask substrate (300). The rotating mechanism (410) can rotate relative to the inspection table (10) to drive the camera (430) to swing in the vertical plane for multi-directional shooting.

3. The mask substrate visual inspection device according to claim 2, characterized in that, The strut includes a first support section (421) and a second support section (422) connected to each other. The end of the first support section (421) opposite to the second support section (422) is connected to the rotating mechanism (410). The end of the second support section (422) opposite to the first support section (421) is connected to the camera (430) through a steering mechanism (440). The steering mechanism (440) is used to adjust the angle between the optical axis direction of the camera (430) and the extension direction of the second support section (422).

4. The mask substrate visual inspection device according to claim 1, characterized in that, It also includes a purging module (500), which includes a gas pipeline (510) and a first gas filter (520), a second gas filter (530) and a nozzle (570) arranged sequentially along the extension direction of the gas pipeline (510). The first gas filter (520) is used to connect to a purging gas source (560) to filter the purging gas; the second gas filter (530) is used to filter the gas filtered by the first gas filter (520); and the nozzle (570) is used to spray the gas filtered by the second gas filter (530) onto the surface of the mask substrate (300) for purging.

5. The mask substrate visual inspection device according to claim 4, characterized in that, The purging module (500) further includes a pressure control valve (550), which is disposed between the purging gas source (560) and the first gas filter (520) and is used to adjust the purging gas pressure.

6. The mask substrate visual inspection device according to claim 4, characterized in that, The purging module (500) also includes a foot pedal valve (540) for starting or stopping the purging module (500).

7. The mask substrate visual inspection apparatus according to any one of claims 1-6, characterized in that, The detection module (100) further includes: A support frame (120) is connected at one end to the inspection table (10) and at the other end to the adjustable light source device (110) for fixing the inspection table (10) and the adjustable light source device (110) relative to each other. A foot switch is connected to the adjustable light source device (110) via a cable. The foot switch is used to control the opening and closing of the adjustable light source device (110).

8. The mask substrate visual inspection apparatus according to any one of claims 1-6, characterized in that, The robotic arm (210) is connected to a stepper motor, the output shaft of which is connected to the clamp (220). The stepper motor is used to drive the clamp (220) to rotate around the axis of the robotic arm (210).

9. The mask substrate visual inspection apparatus according to any one of claims 1-6, characterized in that, The clamp (220) includes two opposing jaws (221) that can open and close relative to each other to hold the mask substrate (300).

10. The mask substrate visual inspection device according to claim 9, characterized in that, The gripper (221) has an anti-slip structure on the opposite side, which is used to contact the position to be clamped on the mask substrate (300).

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