Optical inspection apparatus for chip surface defects

Abstract

The utility model relates to chip detection equipment technical field, concretely is the optical detection equipment of chip surface defect, including work table, work table top outer wall rotationally installed has detection subassembly, work table top outer wall edge department fixedly connected with the detection frame of L shape structure, and detection frame bottom outer wall fixedly connected with detection probe, and detection probe is located the top of detection subassembly, work table bottom outer wall is provided with the recess, and the inner wall mounting of recess has the drive mechanism of drive detection subassembly, the utility model's beneficial effect is through setting detection subassembly on the work table, and the cooperation between detection subassembly and drive mechanism in the work table, facilitate the continuous detection of detection probe to chip, and set up limiting component in drive mechanism, and the setting of limiting component is convenient for the rotation of detection disc, improves the stability of detection disc, avoids the situation that chip detects and appears to shake.

Description

Technical Field

[0001] This utility model relates to the field of chip inspection equipment technology, specifically to an optical inspection device for chip surface defects. Background Technology

[0002] A chip is a miniature circuit that integrates a large number of electronic components (such as transistors, resistors, capacitors, etc.) on a semiconductor material (such as silicon). It is the core component of modern electronic devices and is widely used in computers, mobile phones, automobiles and other fields. Surface defects of chips directly affect their performance and reliability. Common defect types and their causes are as follows: Particle contamination - Particles ranging from tens of nanometers to hundreds of micrometers may remain on the wafer surface. These particles mainly come from contaminants in processes such as etching, polishing and cleaning. These particles can block the lithography light, resulting in incomplete patterns and causing short circuits or open circuits.

[0003] Chip testing requires the use of optical equipment, but current optical equipment can only test a limited number of chips at a time, which leads to a decrease in chip testing efficiency. Utility Model Content

[0004] The purpose of this invention is to provide an optical inspection device for chip surface defects, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an optical inspection device for chip surface defects, comprising a worktable, an inspection component rotatably mounted on the top outer wall of the worktable, an L-shaped inspection frame fixedly connected to the edge of the top outer wall of the worktable, and an inspection probe fixedly connected to the bottom outer wall of the inspection frame, with the inspection probe located above the inspection component, and a groove formed on the bottom outer wall of the worktable, with a drive mechanism for driving the inspection component installed on the inner wall of the groove.

[0006] Preferably, the detection component includes a detection disk rotatably connected to the outer wall of the top of the workbench, and the outer wall of the top of the detection disk has a plurality of equally spaced circularly distributed chip slots.

[0007] Preferably, the driving mechanism includes a second gear rotatably connected to the inner wall of the top of the groove, and one end of the transmission shaft of the second gear is fixedly connected to the detection disk. A servo motor is fixedly connected to one side of the inner wall of the groove, and a first gear is fixedly connected to the output shaft of the servo motor. The first gear and the second gear mesh.

[0008] Preferably, a limiting component is installed on one inner wall of the groove, and the limiting component includes a limiting box fixedly connected to the inner wall of the groove. An opening is provided on one outer wall of the limiting box, and a drive seat is slidably connected to the inner wall of the opening. A limiting rack is fixedly connected to one end of the drive seat, and the limiting rack and a gear mesh.

[0009] Preferably, the inner wall of the limiting box is fixedly connected to two mounting rods, and the outer walls of the two mounting rods are each sleeved with a spring. An armature is fixedly connected to one side of the outer wall of the drive seat, and an electromagnet is fixedly connected to one side of the inner wall of the limiting box.

[0010] Preferably, the top outer wall of the workbench has two symmetrically arranged arc-shaped grooves, and the inner walls of the two arc-shaped grooves are rotatably connected to rollers. A control panel is fixedly connected to one side outer wall of the workbench, and the control panel is electrically connected to the servo motor and the electromagnet.

[0011] Compared with the prior art, the beneficial effects of this utility model are: by setting a detection component on the worktable, the cooperation between the detection component and the drive mechanism in the worktable facilitates the continuous detection of the chip by the detection probe. Furthermore, by setting a limiting component in the drive mechanism, the rotation of the detection disk is restricted, which improves the stability of the detection disk and avoids shaking during chip detection. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the workbench and testing tray structure of this utility model; Figure 3 This is a bottom view of the workbench structure of this utility model; Figure 4 This is a schematic diagram of the limiting box, drive seat, and limiting rack structure of this utility model; Figure 5 This is a schematic diagram of the mounting rod, spring, and electromagnet structure of this utility model.

[0013] The components represented by each number in the attached diagram are listed below: 1. Workbench; 2. Detection assembly; 3. Control panel; 4. Detection plate; 5. Chip slot; 6. Detection frame; 7. Detection probe; 8. Roller; 9. Groove; 10. Servo motor; 11. Gear 1; 12. Gear 2; 13. Limit assembly; 14. Limit box; 15. Drive base; 16. Limit rack; 17. Spring; 18. Armature; 19. Electromagnet; 20. Mounting rod. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] This utility model provides a technical solution: like Figures 1-5 The optical inspection device for chip surface defects shown includes a worktable 1, an inspection component 2 rotatably mounted on the top outer wall of the worktable 1, an L-shaped inspection frame 6 fixedly connected to the edge of the top outer wall of the worktable 1, and an inspection probe 7 fixedly connected to the bottom outer wall of the inspection frame 6, with the inspection probe 7 located above the inspection component 2. A groove 9 is provided on the bottom outer wall of the worktable 1, and a drive mechanism for driving the inspection component 2 is installed on the inner wall of the groove 9.

[0016] In this embodiment, the detection component 2 on the top of the workbench 1 facilitates the placement of the chip, the detection probe 7 on the detection rack 6 facilitates the detection of surface defects of the chip, and a driving mechanism is set in the groove 9 to directly drive the detection component 2 to rotate, which facilitates continuous detection of the chip.

[0017] like Figures 1-2 The detection assembly 2 shown includes a detection disk 4 rotatably connected to the top outer wall of the worktable 1, and the top outer wall of the detection disk 4 has multiple equally spaced circularly distributed chip slots 5.

[0018] In this embodiment, the multiple chip slots 5 on the detection disk 4 facilitate the placement of multiple chips, and the detection disk 4 can be switched to detect chips when it rotates, thereby realizing continuous chip detection.

[0019] like Figures 3-4 The drive mechanism shown includes a second gear 12 rotatably connected to the inner wall of the top of the groove 9, and one end of the transmission shaft of the second gear 12 is fixedly connected to the detection disk 4. A servo motor 10 is fixedly connected to one side of the inner wall of the groove 9, and a first gear 11 is fixedly connected to the output shaft of the servo motor 10. The first gear 11 and the second gear 12 mesh. A limit assembly 13 is installed on one side of the inner wall of the groove 9, and the limit assembly 13 includes a limit box 14 fixedly connected to the inner wall of the groove 9. An opening is opened on one side of the outer wall of the limit box 14, and a drive seat 15 is slidably connected to the inner wall of the opening. One end of the drive seat 15 is fixedly connected to a limit rack 16, and the limit rack 16 meshes with the second gear 12.

[0020] In this embodiment, when the chip is being tested, the servo motor 10 drives the gear 11 to rotate. When the gear 11 rotates, it drives the gear 2 to rotate. When the gear 2 rotates, it directly drives the detection disk 4 to rotate. When the detection disk 4 rotates, it switches the chip being tested, thereby realizing continuous chip testing.

[0021] like Figures 3-5The inner wall of the limit box 14 shown has two mounting rods 20 fixedly connected, and the outer walls of the two mounting rods 20 are each sleeved with a spring 17. An armature 18 is fixedly connected to one side of the outer wall of the drive seat 15, and an electromagnet 19 is fixedly connected to one side of the inner wall of the limit box 14.

[0022] In this embodiment, when the detection disk 4 is adjusted, the electromagnet 19 is energized and generates magnetism, directly attracting the armature 18 to move towards the electromagnet 19. At this time, the drive seat 15 compresses the springs 17 on the two mounting rods 20, thereby driving the limiting rack 16 away from the gear 2 12. At this time, the detection disk 4 rotates for adjustment. When the detection disk 4 is adjusted, the electromagnet 19 is de-energized and the two springs 17 are reset, directly pushing the drive seat 15 to extend, thus making the limiting rack 16 and the gear 2 12 mesh, ensuring the stability of the detection disk 4.

[0023] like Figures 1-2 The workbench 1 shown has two symmetrically arranged arc-shaped grooves on its top outer wall, and rollers 8 are rotatably connected to the inner walls of both arc-shaped grooves. A control panel 3 is fixedly connected to one side outer wall of the workbench 1, and the control panel 3 is electrically connected to the servo motor 10 and the electromagnet 19.

[0024] In this embodiment, the rollers 8 on the top of the workbench 1 provide auxiliary support for the detection plate 4, thus preventing the detection plate 4 from tilting after long-term use. The control panel 3 facilitates the control of the electrical components in the detection equipment.

[0025] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0026] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An optical inspection device for chip surface defects, comprising a stage (1), characterized in that: The top outer wall of the workbench (1) is rotatably mounted with a detection component (2). An L-shaped detection frame (6) is fixedly connected to the edge of the top outer wall of the workbench (1). A detection probe (7) is fixedly connected to the bottom outer wall of the detection frame (6). The detection probe (7) is located above the detection component (2). A groove (9) is opened on the bottom outer wall of the workbench (1). A drive mechanism for driving the detection component (2) is installed on the inner wall of the groove (9).

2. The optical inspection device for chip surface defects according to claim 1, characterized in that: The detection component (2) includes a detection disk (4) rotatably connected to the top outer wall of the workbench (1), and the top outer wall of the detection disk (4) is provided with multiple equally spaced circularly distributed chip slots (5).

3. The optical inspection device for chip surface defects according to claim 2, characterized in that: The driving mechanism includes a second gear (12) rotatably connected to the inner wall of the top of the groove (9), and one end of the transmission shaft of the second gear (12) is fixedly connected to the detection disk (4). A servo motor (10) is fixedly connected to one side of the inner wall of the groove (9), and a first gear (11) is fixedly connected to the output shaft of the servo motor (10). The first gear (11) and the second gear (12) mesh.

4. The optical inspection device for chip surface defects according to claim 3, characterized in that: A limiting component (13) is installed on one side of the inner wall of the groove (9), and the limiting component (13) includes a limiting box (14) fixedly connected to the inner wall of the groove (9). An opening is provided on one side of the outer wall of the limiting box (14), and a drive seat (15) is slidably connected to the inner wall of the opening. A limiting rack (16) is fixedly connected to one end of the drive seat (15), and the limiting rack (16) meshes with the gear two (12).

5. The optical inspection device for chip surface defects according to claim 4, characterized in that: The inner wall of the limiting box (14) is fixedly connected to two mounting rods (20), and the outer walls of the two mounting rods (20) are fitted with springs (17). An armature (18) is fixedly connected to one side of the outer wall of the drive seat (15), and an electromagnet (19) is fixedly connected to one side of the inner wall of the limiting box (14).

6. The optical inspection device for chip surface defects according to claim 5, characterized in that: The top outer wall of the workbench (1) has two symmetrically arranged arc-shaped grooves, and the inner walls of the two arc-shaped grooves are rotatably connected to rollers (8). A control panel (3) is fixedly connected to one side outer wall of the workbench (1), and the control panel (3) is electrically connected to the servo motor (10) and the electromagnet (19).

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