An ultra-high vacuum RGA gas analysis system

Abstract

The utility model discloses a kind of ultrahigh vacuum RGA gas analysis systems, the utility model includes mechanical pump, air-pumping pipeline, molecular pump, ultrahigh vacuum cavity, RGA mass spectrometer, ionization gauge, adjustable micro leakage valve, stop valve. Among them, mechanical pump is connected with molecular pump by air-pumping pipeline, molecular pump is located below ultrahigh vacuum cavity, RGA mass spectrometer is installed at the elongated pipeline flange of ultrahigh vacuum cavity;Ionization gauge is installed above ultrahigh vacuum cavity by bolt, for measuring the high vacuum degree in cavity;Adjustable micro leakage valve is connected with the ultrahigh vacuum cavity by bolt, adjustable micro leakage valve gas inlet end is connected with the gas outlet end of stop valve, gas enters ultrahigh vacuum cavity after passing through adjustable micro leakage valve gas inlet end and stop valve.The utility model can reduce energy consumption and the use of pure oxygen by accurately determining the component composition of residual substance under incomplete vacuum environment, to reduce cost.

Description

Technical Field

[0001] This utility model relates to the field of industrial gas distribution system technology, specifically an ultra-high vacuum RGA gas analysis system. Background Technology

[0002] In industrial applications, RGA (Real Gas Analysis) enables real-time monitoring of gas composition and pressure changes within vacuum chambers, ensuring process stability and reliability. This is crucial for industries such as semiconductor manufacturing and precision machining. RGA gas analysis plays a vital role in gas distribution systems, not only ensuring gas purity and composition but also optimizing process flows, improving production efficiency, and significantly impacting environmental protection and fault diagnosis.

[0003] Although RGA has significant advantages in gas analysis, RGA systems require operation in high vacuum environments (typically below 10^-5 Torr), which increases system complexity and cost. Furthermore, background gases in the vacuum system can interfere with the detection of the target gas, affecting the accuracy of the analytical results. Utility Model Content

[0004] The purpose of this invention is to provide an ultra-high vacuum RGA gas analysis system. By accurately measuring the composition of residual substances under incomplete vacuum conditions, RGA can reduce energy consumption and the use of pure oxygen, thereby reducing costs.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0006] An ultra-high vacuum RGA gas analysis system includes: a mechanical pump, a pumping pipe, a molecular pump, an ultra-high vacuum chamber, an RGA mass spectrometer, an ionization gauge, an adjustable microleak valve, and a shut-off valve;

[0007] The mechanical pump is connected to the molecular pump through the evacuation pipe. The molecular pump is located below the ultra-high vacuum chamber. The RGA mass spectrometer is installed at the flange of the extended pipe of the ultra-high vacuum chamber.

[0008] The ionization gauge is bolted to the top of the ultra-high vacuum chamber and is used to measure the high vacuum level inside the chamber.

[0009] The adjustable micro-leakage valve is connected to the ultra-high vacuum chamber by bolts. The inlet end of the adjustable micro-leakage valve is connected to the outlet end of the shut-off valve. Gas enters the ultra-high vacuum chamber after passing through the inlet end of the adjustable micro-leakage valve and the shut-off valve.

[0010] By adjusting the adjustable micro-leak valve, the vacuum level inside the ultra-high vacuum chamber can be adjusted to a suitable working condition.

[0011] According to the above technical solution, a resistance gauge and a gas filling valve are installed at the air intake of the mechanical pump. The resistance gauge is used to measure the rough vacuum degree, and the gas filling valve is used to fill the ultra-high vacuum chamber with gas to restore it to atmospheric pressure after the ultra-high vacuum RGA gas analysis system has finished working.

[0012] According to the above technical solution, given that the gas in the gas distribution system may be toxic or explosive, an exhaust connector has been added to the exhaust port of the mechanical pump to facilitate waste gas treatment.

[0013] According to the above technical solution, the ultra-high vacuum chamber is equipped with an observation window for monitoring whether the filament of the RGA mass spectrometer is lit normally.

[0014] According to the above technical solution, an ultra-high vacuum chamber heating belt is provided at the upper end of the ultra-high vacuum chamber. The ultra-high vacuum chamber heating belt is bolted to the ultra-high vacuum chamber through a heating belt pressure plate to ensure the fixation of the ultra-high vacuum chamber heating belt.

[0015] According to the above technical solution, a heating band is covered around the ultra-high vacuum chamber, and the heating band is fixed with Velcro. The ultra-high vacuum chamber is baked at a high temperature of 150-250°C using the heating band. This process helps to reduce the sources of gas release within the ultra-high vacuum chamber, thereby increasing the vacuum level to achieve an ultra-high vacuum state.

[0016] According to the above technical solution, the molecular pump is wrapped with a molecular pump heating band, which is fixed by Velcro.

[0017] Compared with the prior art, the beneficial effects achieved by this utility model are: when performing residual gas measurement under ultra-high vacuum, the RGA uses a lattice ion source with an extremely low gas release rate, which can perform very accurate gas analysis.

[0018] This invention can monitor the gas composition and pressure changes within a vacuum chamber in real time. By analyzing the composition and proportion of residual gas, it can quickly identify the cause of malfunctions, such as air leaks, virtual leaks, and other contaminants, enabling timely prevention and handling, and avoiding adverse effects and damage to various industrial production processes.

[0019] This invention helps optimize the purity inspection process, reduce waste in production, and utilize resources more effectively. By accurately determining the composition of residual substances under imperfect vacuum conditions, energy consumption and the use of pure oxygen can be reduced, thereby lowering costs. Real-time monitoring and simultaneous detection of potential leaks can reduce losses caused by errors, improve production efficiency, and further enhance economic benefits. Attached Figure Description

[0020] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0021] Figure 1 This is a schematic diagram of the structure of an ultra-high vacuum RGA gas analysis system according to this utility model. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] This utility model provides the following technical solution:

[0024] An ultra-high vacuum RGA gas analysis system includes: a mechanical pump 15, a gas extraction pipe 5, a molecular pump 14, an ultra-high vacuum chamber 13, an RGA mass spectrometer 3, an ionization gauge 10, an adjustable micro-leak valve 9, and a shut-off valve 1.

[0025] Mechanical pump 15 is connected to molecular pump 14 through evacuation pipe 5. Molecular pump 14 is located below ultra-high vacuum chamber 13. RGA mass spectrometer 3 is installed at the extension pipe flange of ultra-high vacuum chamber 13. Ultra-high vacuum chamber 13 is equipped with observation window 12 for monitoring whether the filament of RGA mass spectrometer 3 is lit normally.

[0026] The mechanical pump 15 is equipped with a resistance gauge 7 and a charging valve 6 at its suction port. The resistance gauge 7 is used to measure the rough vacuum level, while the charging valve 6 is used to charge the ultra-high vacuum chamber 13 to restore it to atmospheric pressure after the ultra-high vacuum RGA gas analysis system has finished operating. Furthermore, considering that the gases in the gas distribution system may be toxic or explosive, an exhaust connector 8 is provided at the exhaust port of the mechanical pump 15 to facilitate waste gas treatment. The molecular pump 14 is wrapped with a molecular pump heating belt 4, which is secured using Velcro.

[0027] The ionization gauge 10 is bolted to the top of the ultra-high vacuum chamber 13 and is used to measure the high vacuum level inside the chamber.

[0028] The adjustable micro-leakage valve 9 is connected to the ultra-high vacuum chamber 13 by bolts. The inlet end of the adjustable micro-leakage valve 9 is connected to the outlet end of the shut-off valve 1. The gas enters the ultra-high vacuum chamber 13 after passing through the inlet end of the adjustable micro-leakage valve 9 and the shut-off valve 1.

[0029] The upper end of the ultra-high vacuum chamber 13 is equipped with an ultra-high vacuum chamber heating belt 2, which is bolted to the ultra-high vacuum chamber 13 via a heating belt pressure plate 11. The ultra-high vacuum chamber 13 is surrounded by a heating belt. The heating belt is used to bake the ultra-high vacuum chamber 13 at a high temperature of 150–250°C. This process helps to reduce the outgassing sources within the ultra-high vacuum chamber 13, thereby increasing the vacuum level to achieve an ultra-high vacuum state.

[0030] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0031] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An ultra-high vacuum RGA gas analysis system, characterized in that, include: Mechanical pump (15), vacuum pipe (5), molecular pump (14), ultra-high vacuum chamber (13), RGA mass spectrometer (3), ionization gauge (10), adjustable micro-leak valve (9), shut-off valve (1); The mechanical pump (15) is connected to the molecular pump (14) through the gas extraction pipe (5). The molecular pump (14) is located below the ultra-high vacuum chamber (13). The RGA mass spectrometer (3) is installed at the extension pipe flange of the ultra-high vacuum chamber (13). The ionization gauge (10) is bolted to the top of the ultra-high vacuum chamber (13) and is used to measure the high vacuum level inside the chamber. The adjustable micro-leak valve (9) is connected to the ultra-high vacuum chamber (13) by bolts. The inlet end of the adjustable micro-leak valve (9) is connected to the outlet end of the shut-off valve (1). Gas enters the ultra-high vacuum chamber (13) after passing through the inlet end of the adjustable micro-leak valve (9) and the shut-off valve (1).

2. The ultra-high vacuum RGA gas analysis system according to claim 1, characterized in that, The mechanical pump (15) is equipped with a resistance gauge (7) and a gas filling valve (6) at its air intake port. The resistance gauge (7) is used to measure the rough vacuum level, and the gas filling valve (6) is used to fill the ultra-high vacuum chamber (13) with gas after the ultra-high vacuum RGA gas analysis system has finished working to restore it to atmospheric pressure.

3. The ultra-high vacuum RGA gas analysis system according to claim 1, characterized in that, The mechanical pump (15) has an exhaust connector (8) at its exhaust port to facilitate waste gas treatment.

4. The ultra-high vacuum RGA gas analysis system according to claim 1, characterized in that, The ultra-high vacuum chamber (13) is equipped with an observation window (12) for monitoring whether the filament of the RGA mass spectrometer (3) is lit normally.

5. The ultra-high vacuum RGA gas analysis system according to claim 1, characterized in that, At the upper end of the ultra-high vacuum cavity (13), an ultra-high vacuum cavity heating belt (2) is provided, and the ultra-high vacuum cavity heating belt (2) is bolted to the ultra-high vacuum cavity (13) through a heating belt pressure plate (11).

6. The ultra-high vacuum RGA gas analysis system according to claim 1, characterized in that, The ultra-high vacuum cavity (13) is surrounded by a heating band.

7. The ultra-high vacuum RGA gas analysis system according to claim 1, characterized in that, The molecular pump (14) is wrapped by a molecular pump heating band (4), which is fixed by a Velcro closure.

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