Chip microcavity gas component analyzer

Abstract

The utility model discloses a kind of chip microcavity inner gas component analyzers, comprising: vacuum chamber (1), is provided with air inlet pipeline (5), air extraction pipeline (6) and air outlet pipeline (7);Steel needle (2), fixedly set in the bottom center of vacuum chamber (1);And push rod (3), vertically set in the just above of steel needle (2), and with the top wall of vacuum chamber (1) slidable seal setting;Push rod (3) lower end is provided with the clamping groove for fixing chip sample (10).According to the chip microcavity inner gas component analyzer of the utility model, the entire chip can be placed in the inside of vacuum chamber, can ensure that no matter how to exert pressure or destroy to chip, external gas will not produce interference, greatly improve the stability of sample detection.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a chip microcavity gas composition analyzer. Background Technology

[0002] The US-made ORS system is used to analyze gases such as water vapor, oxygen, nitrogen, fluorides, and potential VOCs within the microcavities of chips. This system currently has three problems:

[0003] (1) The chip sample is outside the sampling vacuum chamber. During actual operation, due to the pressure applied to the chip by the steel needle, it is very likely to cause warping and deformation of the chip seal and other parts exposed to the atmosphere, which may cause microcracks or even breakage. This will cause the external environment to enter the micro-cavity, making the test results inaccurate.

[0004] (2) The method of sealing the chip sample with the test vacuum chamber using an O-ring also has potential risks. Under pressure, if the steel needle applies pressure to penetrate the chip, the lateral force transmitted to the O-ring is not evenly distributed, and there is a potential for micro-leakage at the O-ring.

[0005] (3) The design of the device increases the opening of the vacuum system and the piston, which greatly increases the possibility of minor air leakage during the test process. Utility Model Content

[0006] In order to solve one or more of the problems in the prior art, the purpose of this utility model is to provide a novel chip microcavity gas composition analyzer.

[0007] A chip-based microcavity gas composition analyzer according to this utility model includes:

[0008] The vacuum chamber is equipped with an inlet pipe, an exhaust pipe, and an outlet pipe;

[0009] A steel needle is fixedly positioned at the center of the bottom of the vacuum chamber; and

[0010] The push rod is vertically positioned directly above the steel needle and is slidably sealed to the top wall of the vacuum chamber; the lower end of the push rod is provided with a slot for fixing the chip sample.

[0011] In specific cases, it also includes a vacuum pump, which is connected to the air extraction pipeline.

[0012] In specific cases, it also includes a mass spectrometer, which is connected to the gas outlet pipeline.

[0013] In specific cases, it also includes a sample heating unit.

[0014] In a preferred embodiment, the sample heating unit includes a heating wire disposed at the bottom of the slot.

[0015] In a preferred embodiment, the sample heating unit includes an infrared heating device, and a glass window is provided on the vacuum chamber. The infrared heating device heats the chip sample in the vacuum chamber in the air through the glass window.

[0016] According to the present invention, a chip microcavity gas composition analyzer can place the entire chip inside a vacuum chamber, which can ensure that no matter how much pressure or damage is applied to the chip (even in extreme cases, complete rupture of the chip), the external gas will not cause interference. Furthermore, it eliminates the need for O-rings to seal the chip sample and the vacuum chamber, greatly improving the stability of sample detection. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the chip microcavity gas composition analyzer according to this utility model. Detailed Implementation

[0018] The chip-based microcavity gas composition analyzer of this invention is described in detail below with reference to the accompanying drawings. In the drawings, the same reference numerals represent the same or similar structures.

[0019] See Figure 1 The chip-based microcavity gas composition analyzer of this invention mainly includes a vacuum chamber 1, a steel needle 2, a push rod 3, a vacuum pump 8, and a mass spectrometer 9. The vacuum chamber 1 is equipped with an inlet pipe 5, a evacuation pipe 6, and an outlet pipe 7. The inlet pipe 5 is connected to an inert gas source; the evacuation pipe 6 is connected to the vacuum pump 8; and the outlet pipe 7 is connected to the mass spectrometer 9.

[0020] The steel needle 2 is fixedly positioned at the center of the bottom of the vacuum chamber 1. The push rod 3 is vertically positioned directly above the steel needle and is slidably sealed to the top wall of the vacuum chamber 1. The lower end of the push rod 3 is provided with a slot for fixing the chip sample 10. The push rod 3 is connected to a drive device (e.g., a hydraulic motor). During the detection process, the downward movement of the push rod 3 causes the chip sample 10 to be squeezed against the steel needle 2, releasing the gas inside the microcavity.

[0021] Specifically, the chip microcavity gas composition analyzer according to this utility model further includes a sample heating unit. In one specific embodiment, the sample heating unit includes a heating wire 4, which is disposed at the bottom of the slot. The heating wire 4 is connected to an external power source via a wire, which is disposed in the push rod 3. The heating wire 4 directly heats the chip sample 10. In another specific embodiment, the sample heating unit includes an infrared heating device. A glass window is provided on the vacuum chamber 1, and the infrared heating device heats the chip sample 10 inside the vacuum chamber 1 through the glass window.

[0022] The embodiments described above and shown in the figures are merely exemplary. Under the guidance of this invention, those skilled in the art can make various changes or modifications. For example, the absorbent layer can be combined and superimposed in various ways. All these modifications do not depart from the protection scope of this invention.

Claims

1. A chip-based microcavity gas composition analyzer, characterized in that, include: The vacuum chamber (1) is equipped with an inlet pipe (5), an exhaust pipe (6) and an outlet pipe (7); A steel needle (2) is fixedly installed at the center of the bottom of the vacuum chamber (1); and The push rod (3) is vertically positioned directly above the steel needle (2) and is slidably sealed to the top wall of the vacuum chamber (1); the lower end of the push rod (3) is provided with a slot for fixing the chip sample (10).

2. The chip microcavity gas composition analyzer according to claim 1, characterized in that, It also includes a vacuum pump (8), which is connected to the air extraction pipeline (6).

3. The chip microcavity gas composition analyzer according to claim 1, characterized in that, It also includes a mass spectrometer (9), which is connected to the gas outlet pipeline (7).

4. The chip microcavity gas composition analyzer according to claim 1, characterized in that, It also includes a sample heating unit.

5. The chip microcavity gas composition analyzer according to claim 4, characterized in that, The sample heating unit includes a heating wire (4) disposed at the bottom of the slot.

6. The chip microcavity gas composition analyzer according to claim 4, characterized in that, The sample heating unit includes an infrared heating device. A glass window is provided on the vacuum chamber (1). The infrared heating device heats the chip sample (10) in the vacuum chamber (1) in the air through the glass window.

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