Electron probe sample stage and metal ball sample wear scar analysis apparatus

Abstract

The present disclosure provides an electron probe sample stage and a metal ball sample wear scar analysis device, the electron probe sample stage comprising a stage body and a placement plate; the stage body is provided with a through hole penetrating in the height direction; the top surface of the placement plate is provided with a first groove, and the slot of the first groove is circular; the placement plate is used for placing metal ball samples, and the first groove is used for accommodating part of the metal ball samples; the placement plate is arranged in the through hole in a lifting manner, so that the metal ball samples placed on the placement plate can be lifted in the through hole.

Description

Technical Field

[0001] This disclosure relates to the field of lubricant product performance evaluation technology, and in particular to an electron probe sample stage and a metal ball sample wear scar analysis device. Background Technology

[0002] Electron probe microanalysis (EPMA) has a low detection limit in micro-area analysis, making it a commonly used analytical method in metal research. Its principle involves irradiating the sample surface with a finely focused high-energy electron beam, and then detecting the characteristic X-rays emitted by the elements after irradiation using a spectrometer, thereby analyzing the elemental content and distribution within a specific region. It is currently widely used in alloy, mineral, and cultural relic research. In the petrochemical industry, the oxidative corrosion stability of lubricating oil is crucial for the mechanical transmission system; the four-ball friction and wear test is commonly used to evaluate the wear and corrosion of lubricating oil. In diesel fuel lubrication performance evaluation, the high-frequency reciprocating friction and wear test (HFRR method) is widely used as the standard test method for evaluating diesel fuel lubricity. The SRV high-frequency linear vibration friction and wear tester has been widely applied in tribological research, lubricant material development, and mechanical material evaluation.

[0003] The metal balls used in these tests are typically steel balls ranging from a few millimeters to 2 cm in diameter, usually made of chromium alloy bearing steel GCR15A or AISI 52110 steel, etc. The diameter of the wear scar is about 1 mm. The commonly used analytical method is a combination of scanning electron microscopy (SEM) and energy-dispersive spectroscopy (EDS) (SEM-EDS). However, due to the detection limit and error of energy-dispersive spectroscopy, some trace elements cannot be detected or the deviation is large. In contrast, electron probe microanalysis (EPMA) can overcome the above-mentioned defects of SEM-EDS analysis technology because it uses a spectroscopic detection system. Moreover, by selecting appropriate standards, it can also perform accurate quantitative analysis of elements at the wear scar.

[0004] However, existing EPMA equipment uses a planar sample stage, which limits the applicable sample sizes and cannot guarantee the horizontal placement of non-planar sample test surfaces, thus affecting experimental results. For example, it is difficult to fix spherical or large samples. When using existing EPMA equipment for analysis, the metal spheres often need to be cut to fit the planar sample stage, which can easily cause secondary contamination and significantly reduce analytical efficiency. If the metal spheres are adhered to the planar sample stage with conductive adhesive, the small connection points make them susceptible to attraction from the magnetic field above the electron microscope tube during analysis, potentially causing them to stick to the EPMA pole pieces and increasing the risk of damage to the analytical instrument. Summary of the Invention

[0005] A primary objective of this disclosure is to overcome at least one of the deficiencies of the prior art described above, and to provide an electron probe sample stage capable of stably fixing metal sphere samples and suitable for testing metal sphere samples of various sizes.

[0006] To achieve the above objectives, the present disclosure adopts the following technical solution:

[0007] According to one aspect of this disclosure, an electron probe sample stage is provided, disposed in a metal ball sample wear scar analysis device. The electron probe sample stage includes a stage body and a placement plate. The stage body is provided with a through hole extending along the height direction. The top surface of the placement plate is provided with a first groove, the opening of the first groove being circular. The placement plate is used to place a metal ball sample, and the first groove is used to accommodate a portion of the metal ball sample. The placement plate is vertically and vertically disposed in the through hole, so that the metal ball sample placed on the placement plate can move up and down within the through hole.

[0008] According to one embodiment of this disclosure, the cross-sectional shape of the first groove is an arc shape, and the angle of the corresponding central angle of the arc shape is less than or equal to 180°.

[0009] According to one embodiment of this disclosure, the stage body is provided with a plurality of through holes, and the electron probe sample stage includes a plurality of placement plates, which are respectively disposed in the plurality of through holes.

[0010] According to one embodiment of this disclosure, at least two of the placement plates have different first grooves; and / or, at least two of the placement plates have the same first groove.

[0011] According to one embodiment of this disclosure, the wall of the through hole is provided with an internal thread, and the periphery of the placement plate is provided with an external thread. The internal thread and the external thread are screwed together so that the placement plate can move up and down in the through hole when it is rotated.

[0012] According to one embodiment of this disclosure, the bottom surface of the placement plate is provided with a second groove, the opening of the second groove being polygonal or elliptical; wherein, the second groove can cooperate with an adjustment fixture, the adjustment fixture having an adjustment end that matches the shape of the opening of the second groove, and when the adjustment end extends into the second groove, the adjustment fixture can drive the placement plate to rotate.

[0013] According to one embodiment of this disclosure, the electron probe sample stage further includes a lower baffle; the lower baffle is disposed on the bottom surface of the stage body, and the lower baffle is provided with a lifting adjustment operation hole, the position of the lifting adjustment operation hole is arranged corresponding to the position of the through hole, and the diameter of the lifting adjustment operation hole is smaller than the diameter of the through hole, so that the part of the lower baffle without the lifting adjustment operation hole covers part of the bottom opening of the through hole, thereby preventing the placement plate from coming out of the bottom opening of the through hole.

[0014] According to one embodiment of this disclosure, the electron probe sample stage further includes an upper baffle; the upper baffle is detachably disposed on the top surface of the stage body, the upper baffle is provided with a test hole, the position of the test hole corresponds to the position of the through hole, and the diameter of the test hole is smaller than the diameter of the smallest metal ball sample placed on the placement plate in the corresponding through hole, so that the part of the upper baffle without the test hole covers part of the top opening of the through hole, preventing the metal ball sample from falling out of the top opening of the through hole.

[0015] According to one embodiment of the present disclosure, the electron probe sample stage further includes a sliding seat; the sliding seat is disposed on the bottom surface of the stage body, and the sliding seat includes a connecting plate connected to the stage body and a protrusion protruding downward from the connecting plate. The protrusion is used to slide in cooperation with a slide rail provided on the base of the metal ball sample wear mark analysis device, so that the electron probe sample stage can slide into or out of the base.

[0016] Another primary objective of this disclosure is to overcome at least one of the deficiencies of the prior art described above and to provide a metal ball sample wear scar analysis device employing the aforementioned electron probe sample stage.

[0017] To achieve the above objectives, the present disclosure adopts the following technical solution:

[0018] According to another aspect of this disclosure, a metal ball sample wear scar analysis apparatus is provided, which includes the electron probe sample stage proposed in this disclosure and described in the above embodiments.

[0019] As can be seen from the above technical solution, the advantages and positive effects of the electron probe sample stage and metal ball sample wear scar analysis equipment proposed in this disclosure are as follows:

[0020] The electron probe sample stage disclosed herein includes a stage body and a placement plate. The stage body has a through hole extending along its height. The top surface of the placement plate has a first groove with a circular opening. The placement plate is used to place a metal ball sample, and the first groove is used to accommodate a portion of the metal ball sample. The placement plate is vertically movable within the through hole, allowing the metal ball sample placed on the placement plate to move up and down within the through hole. Through the above structural design, this disclosure utilizes the circular opening of the first groove to accommodate a portion of the metal ball sample, ensuring that the metal ball sample and the placement plate make line or surface contact when placed on the placement plate. This increases the contact area of ​​the metal ball sample when placed on the placement plate, improving its stability and reliability. It eliminates the need to cut the metal ball sample, avoiding secondary contamination that could affect the test results. Furthermore, the vertically movable design of the placement plate allows for the lifting and lowering of the metal ball sample within the through hole, thus meeting the placement needs of metal ball samples of various sizes and expanding its application range. Attached Figure Description

[0021] The various objectives, features, and advantages of this disclosure will become more apparent from the following detailed description of preferred embodiments of the disclosure taken in conjunction with the accompanying drawings. The drawings are merely illustrative illustrations of the disclosure and are not necessarily drawn to scale. In the drawings, the same reference numerals always denote the same or similar parts. Wherein:

[0022] Figure 1 This is a schematic diagram of an electron probe sample stage according to an exemplary embodiment;

[0023] Figure 2 yes Figure 1 Top view;

[0024] Figure 3 yes Figure 1 A schematic plan view of the upper baffle is shown;

[0025] Figure 4 yes Figure 1 The diagram shows the structure of the placement plate;

[0026] Figure 5 yes Figure 1 A schematic diagram of the appearance of the placement plate is shown;

[0027] Figure 6 yes Figure 1 A bottom view.

[0028] The annotations in the attached figures are explained as follows:

[0029] 100. Platform;

[0030] 110. Through hole;

[0031] 200. Placement board;

[0032] 210. First groove;

[0033] 220. External thread;

[0034] 230. Second groove;

[0035] 300. Sliding seat;

[0036] 310. Connecting plate;

[0037] 311. Lifting adjustment control hole;

[0038] 312. Screw;

[0039] 320. Protrusion;

[0040] 400. Upper baffle;

[0041] 410. Test well;

[0042] 420. Numbering and identification;

[0043] 430. Screws. Detailed Implementation

[0044] Typical embodiments embodying the features and advantages of this disclosure will be described in detail in the following description. It should be understood that this disclosure can have various variations in different embodiments without departing from the scope of this disclosure, and the descriptions and drawings therein are illustrative in nature and not intended to limit this disclosure.

[0045] In the following description of various exemplary embodiments of this disclosure, reference is made to the accompanying drawings, which form part of this disclosure, and which illustrate by way of example different exemplary structures, systems, and steps that can implement various aspects of this disclosure. It should be understood that other specific embodiments of the components, structures, exemplary devices, systems, and steps may be used, and structural and functional modifications may be made without departing from the scope of this disclosure. Furthermore, while the terms “above,” “between,” “within,” etc., may be used in this specification to describe different exemplary features and elements of this disclosure, these terms are used herein only for convenience, such as the orientation according to the examples described in the accompanying drawings. Nothing in this specification should be construed as requiring a specific three-dimensional orientation of the structure to fall within the scope of this disclosure.

[0046] See Figure 1The diagram illustrates a representative structural schematic of the electron probe sample stage proposed in this disclosure, where some internal structures (such as through-holes 110) are shown in dashed lines. In this exemplary embodiment, the electron probe sample stage proposed in this disclosure is described using an application in a metal ball sample wear scar analysis apparatus. It will be readily understood by those skilled in the art that various modifications, additions, substitutions, deletions, or other changes may be made to the specific embodiments described below to apply the relevant designs of this disclosure to other types of analytical apparatus; these changes remain within the scope of the principles of the electron probe sample stage proposed in this disclosure.

[0047] like Figure 1 As shown, in one embodiment of this disclosure, the electron probe sample stage proposed in this disclosure is disposed in a metal ball sample wear scar analysis device, and includes a stage body 100 and a placement plate 200. See also... Figures 2 to 6 , Figure 2 China representatively shows Figure 1 Top view; Figure 3 A schematic plan view of the upper baffle 400 is shown in the figure. Figure 4 A schematic diagram of the structure of the placement plate 200 is shown in the figure.

[0048] Figure 5 A schematic diagram of the appearance of the placement plate 200 is shown in the figure. Figure 6 China representatively shows Figure 1 The above figures show a bottom view. The structure, connection methods, and functional relationships of the main components of the electron probe sample stage proposed in this disclosure will be described in detail below with reference to the figures.

[0049] like Figure 1 and Figure 4As shown, in one embodiment of this disclosure, the platform 100 is provided with a through hole 110 extending along the height direction. The top surface of the placement plate 200 is provided with a first groove 210, the opening of which is circular. The placement plate 200 is used to place a metal ball sample, and the first groove 210 is used to accommodate a portion of the metal ball sample. The placement plate 200 is vertically and flexibly disposed within the through hole 110, allowing the metal ball sample placed on the placement plate 200 to move up and down within the through hole 110. Through the above structural design, this disclosure utilizes the circular opening of the first groove 210 to accommodate a portion of the metal ball sample, ensuring that the metal ball sample, when placed on the placement plate 200, has a line or surface contact with the placement plate 200. This increases the contact area of ​​the metal ball sample when placed on the placement plate 200, improving the stability and reliability of the metal ball sample when placed on the placement plate 200. It eliminates the need to cut the metal ball sample, avoiding secondary contamination that could affect the test results, and facilitates rapid and efficient analysis of the sample. Furthermore, this disclosure utilizes the height-adjustable design of the placement plate 200, enabling the metal ball sample placed on the placement plate 200 to move up and down within the through hole 110. This allows for the placement of metal ball samples of various sizes for testing, expanding the application range. Specifically, by adjusting the height of the placement plate 200 within the through hole 110, this disclosure can adjust the height of the metal ball sample within the through hole 110 according to its diameter, ensuring that the wear scar on the ball is at a suitable working distance, improving the accuracy of detection, and reducing errors during analysis.

[0050] It should be noted that, based on the relationship between the shape and size of the metal ball sample and the first groove 210, when the metal ball sample is placed on the placement plate 200, the metal ball sample may only contact the periphery of the groove opening of the first groove 210, that is, the part of the metal ball sample contained in the first groove 210 does not contact the groove wall of the first groove 210. In this case, the contact form between the metal ball sample and the placement plate 200 is line contact. Furthermore, based on the periphery of the groove opening of the first groove 210, the part of the metal ball sample contained in the first groove 210 may also contact the groove wall of the first groove 210. That is, the shape of the groove wall of the first groove 210 matches the spherical shape of the part of the metal ball sample contained in the first groove 210. For example, in the embodiment described below where "the cross-sectional shape of the first groove 210 is an arc shape", the diameter of the corresponding circle of the arc shape can be equal to the diameter of the metal ball sample. In this case, the contact form between the metal ball sample and the placement plate 200 is surface contact. As mentioned above, regardless of whether it is line contact or surface contact, compared to the point contact form when the spherical sample is placed on the flat plate structure in the existing design, this application can achieve the effect of increasing the contact area when the metal spherical sample is placed on the placement plate 200.

[0051] In one embodiment of this disclosure, the first groove 210 may be disposed at the center of the top surface of the placement plate 200, that is, the center of the corresponding circle of the groove opening of the first groove 210 coincides with the axis of the placement plate 200 and the through hole 110.

[0052] In one embodiment of this disclosure, the cross-sectional shape of the first groove 210 can be an arc shape, that is, the cavity space of the first groove 210 is partially spherical, and the angle of the corresponding central angle of the arc shape is less than or equal to 180°, so as to avoid the metal ball sample (i.e., the diameter of the metal ball sample is equal to the diameter of the corresponding circle of the arc shape) that matches the shape of the first groove 210 being unable to be fully placed into the first groove 210 or unable to be removed. In other embodiments of this disclosure, the cross-sectional shape of the first groove 210 can also be other shapes, such as inverted triangle, rectangle, inverted trapezoid, etc., and is not limited to this embodiment.

[0053] In one embodiment of this disclosure, the first groove 210 may be formed by milling the placement plate 200.

[0054] like Figure 1 and Figure 2 As shown, in one embodiment of this disclosure, the stage 100 may be provided with a plurality of through holes 110, such as, but not limited to, the four through holes 110 shown in the figures. Correspondingly, the electron probe sample stage may include a plurality of placement plates 200, which are respectively disposed in the plurality of through holes 110, that is, one placement plate 200 may be disposed in each through hole 110. Through the above structural design, this disclosure can simultaneously perform tests on multiple metal ball samples, increasing the number of samples injected in a single test, thereby improving test efficiency. In addition, since it is the same test, this disclosure can avoid the influence of differences in test conditions between different tests on the final test results when multiple tests are conducted separately, further improving accuracy. In other embodiments of this disclosure, the stage 100 may also be provided with only one through hole 110, or may be provided with two, three, five or more through holes 110, and is not limited to this embodiment.

[0055] Based on the structural design of the stage 100 with multiple through holes 110 and the electron probe sample stage including multiple placement plates 200, in one embodiment of this disclosure, at least two of the placement plates 200 may have different first grooves 210. "Different" means that at least one of the sizes or shapes of the first grooves 210 is different. For example, the cross-sectional shape of the first grooves 210 of the two placement plates 200 may both be arc-shaped, but the corresponding central angles and corresponding circle diameters of the two first grooves 210 are not equal. Alternatively, the cross-sectional shape of the first grooves 210 of the two placement plates 200 may both be arc-shaped, and the corresponding central angles of the two first grooves 210 are equal, but the corresponding circle diameters are not equal. Furthermore, the cross-sectional shapes of the first grooves 210 of the two placement plates 200 may be different, for example, one is arc-shaped, and the other is rectangular or inverted triangular. Through the above structural design, this disclosure can simultaneously test metal ball samples of various sizes.

[0056] Based on the structural design of the stage 100 having multiple through holes 110 and the electron probe sample stage including multiple placement plates 200, in one embodiment of this disclosure, at least two of the placement plates 200 may have the same first groove 210. "Same" means that the first groove 210 is completely identical, that is, the size and shape of the first groove 210 are the same. Through the above structural design, this disclosure enables simultaneous testing of metal sphere samples of various sizes.

[0057] like Figure 1 and Figure 5 As shown, in one embodiment of this disclosure, the wall of the through hole 110 may be provided with an internal thread, and the periphery of the placement plate 200 may be provided with an external thread 220. The internal thread and the external thread 220 are screwed together, so that the placement plate 200 can rise and fall in the through hole 110 when rotated. Through the above structural design, this disclosure uses a threaded engagement structure to realize the lifting and lowering adjustment of the placement plate 200 in the through hole 110, which is simple in structure and convenient in operation. In other embodiments of this disclosure, other structures can also be used to realize the lifting and lowering of the placement plate 200. For example, a sliding track, slider, or other engagement structure can be provided between the placement plate 200 and the through hole 110, and an adjustable locking structure can be used to realize the locking and unlocking functions. As another example, a power drive structure can be provided to realize the lifting and lowering of the placement plate 200, such as a linear motor, electric actuator, etc., and is not limited to this embodiment.

[0058] like Figure 4As shown, based on the structural design of the placement plate 200 and the threaded engagement with the through hole 110, in one embodiment of this disclosure, the bottom surface of the placement plate 200 may be provided with a second groove 230. The opening of the second groove 230 is polygonal or elliptical, and of course, the second groove 230 can also be an irregular shape, as long as it is not circular. Accordingly, the second groove 230 can cooperate with an adjustment tool, which has an adjustment end that matches the shape of the opening of the second groove 230. When the adjustment end extends into the second groove 230, the adjustment tool can drive the placement plate 200 to rotate. For example, the opening of the second groove 230 can be rectangular, specifically a slender rectangle (i.e., a straight line), and correspondingly, the adjustment tool can be a flathead screwdriver. Through the above structural design, this disclosure facilitates the user to screw the placement plate 200 to adjust its lifting position.

[0059] like Figure 1 and Figure 6 As shown, in one embodiment of this disclosure, the electron probe sample stage may further include a lower baffle (e.g., the connecting plate 310 described below). The lower baffle is disposed on the bottom surface of the stage body 100 and has a lifting adjustment operation hole 311. The position of the lifting adjustment operation hole 311 corresponds to the position of the through hole 110, and the diameter of the lifting adjustment operation hole 311 is smaller than the diameter of the through hole 110, so that the portion of the lower baffle without the lifting adjustment operation hole 311 covers a portion of the bottom opening of the through hole 110. Through the above structural design, this disclosure can utilize the lower baffle to achieve the lower limit function of the placement plate 200, preventing the placement plate 200 from detaching from the bottom opening of the through hole 110. Simultaneously, the lifting adjustment operation hole 311 allows the user to rotate the placement plate 200 (e.g., a flathead screwdriver can pass through the lifting adjustment operation hole 311), preventing the bottom opening of the through hole 110 from being completely closed.

[0060] like Figure 6 As shown, based on the structural design of the electron probe sample stage including a lower baffle, in one embodiment of this disclosure, the lower baffle (e.g., the connecting plate 310 described below) can be detachably mounted on the bottom of the stage body 100, for example, by means of a connector (specifically, screw 312 shown in the figure). Through the above structural design, this disclosure facilitates the removal and separation of the lower baffle from the stage body 100 to achieve the function of maintenance or replacement of parts. In other embodiments of this disclosure, the lower baffle can also be fixedly connected to the bottom of the stage body 100, for example, by welding, and is not limited to this embodiment.

[0061] like Figures 1 to 3As shown, in one embodiment of this disclosure, the electron probe sample stage further includes an upper baffle 400. The upper baffle 400 is detachably disposed on the top surface of the stage body 100. The upper baffle 400 is provided with a test hole 410, the position of which corresponds to the position of the through hole 110. The diameter of the test hole 410 is smaller than the diameter of the smallest metal ball sample placed on the placement plate 200 in the corresponding through hole 110, so that the portion of the upper baffle 400 without the test hole 410 covers a portion of the top opening of the through hole 110. Through this structural design, this disclosure can utilize the upper baffle 400 to achieve an upper limit function for the metal ball sample (i.e., the placement plate 200), preventing the metal ball sample from detaching from the top opening of the through hole 110. Simultaneously, the test hole 410 prevents the top opening of the through hole 110 from being completely closed, ensuring that the top of the metal ball sample can pass through the test hole 410 and remain flush with the stage body 100, thus ensuring normal experimental operation. In contrast, when using existing planar sample stages to test metal ball samples, the metal ball samples need to be adhered and fixed with conductive adhesive. However, due to the small connection points (e.g., point connections), the metal ball samples are easily attracted by the magnetic field above the electron microscope tube during analysis, causing them to be sucked upwards to the pole piece, increasing the risk of damage to the analytical instrument. This disclosure also allows for the adhesion and fixation of the metal ball samples using conductive adhesive before testing. Because this disclosure employs a design that increases the contact area between the metal ball samples and the placement plate 200, the adhesion and connection area between the adhered and fixed metal ball samples and the placement plate 200 is larger. Furthermore, combined with the upper limit function of the baffle 400, this disclosure effectively avoids the problem of the metal ball samples being displaced or even sucked upwards by the magnetic field above.

[0062] Based on the structural design of the electron probe sample stage, which also includes an upper baffle 400 and has a test hole 410, in one embodiment of this disclosure, the test hole 410 is a circular hole, and the axis of the test hole 410 passes through the center of the circle corresponding to the groove of the first groove 210. Furthermore, the axis of the test hole 410 can coincide with the axis of the through hole 110.

[0063] like Figure 2 and Figure 3As shown, based on the structural design of the electron probe sample stage, which also includes an upper baffle 400, in one embodiment of this disclosure, when the stage body 100 is provided with multiple through holes 110, that is, when the upper baffle 400 is provided with multiple test holes 410, the top surface of the upper baffle 400 can be provided with multiple numbered identifiers 420. The number of these numbered identifiers 420 is equal to the number of test holes 410 (i.e., through holes 110), and the multiple numbered identifiers 420 and the multiple test holes 410 are respectively arranged correspondingly. The so-called corresponding arrangement can be understood as the numbered identifier 420 and its corresponding test hole 410 being arranged adjacent to each other. Through the above structural design, this disclosure can use multiple numbered identifiers 420 for distinguishing purposes, making it convenient for users to quickly distinguish multiple metal ball samples and to accurately find the corresponding metal ball sample during the analysis process. For example, taking the platform 100 shown in the attached figure as an example, which includes four through holes 110, the upper baffle 400 is provided with four numbered labels 420. These four numbered labels 420 can be "1", "2", "3" and "4", or "①", "②", "③" and "④", or "a", "b", "c" and "d". Their specific forms are not limited, as long as they can be distinguished.

[0064] Based on the structural design of the electron probe sample stage, which also includes an upper baffle 400, in one embodiment of this disclosure, the upper baffle 400 can be made of one of copper, aluminum, or stainless steel, or other metal materials with good conductivity and no magnetism.

[0065] like Figures 1 to 3 As shown, in one embodiment of this disclosure, the upper baffle 400 can be detachably connected to the platform 100 by screws 430.

[0066] like Figure 1 and Figure 6 As shown, in one embodiment of this disclosure, the electron probe sample stage may further include a sliding seat 300. The sliding seat 300 is disposed on the bottom surface of the stage body 100. The sliding seat 300 includes a connecting plate 310 connected to the stage body 100 and a protrusion 320 protruding downward from the connecting plate 310. The protrusion 320 is used to slide in cooperation with a slide rail provided on the base of the metal ball sample wear scar analysis device, so that the electron probe sample stage can slide into or out of the base. Furthermore, when the electron probe sample stage includes the sliding seat 300, the connecting plate 310 of the sliding seat 300 may be provided with a lifting adjustment operation hole 311, that is, the connecting plate 310 can serve as the aforementioned lower baffle. Of course, the lower baffle may also be an additional component, and the additional lower baffle may or may not be connected to the sliding seat 300. Through the above structural design, this disclosure can utilize the sliding seat 300 to realize the sliding of the electron probe sample stage on the base of the metal ball sample wear scar analysis device.

[0067] like Figure 6 As shown, in one embodiment of this disclosure, the sliding seat 300 can be detachably connected to the platform 100 by screws 312.

[0068] It should be noted that the electron probe stage shown in the accompanying drawings and described in this specification is merely a few examples of many electron probe stages capable of employing the principles of this disclosure. It should be clearly understood that the principles of this disclosure are by no means limited to any detail or component of the electron probe stage shown in the accompanying drawings or described in this specification.

[0069] Based on the detailed description of several exemplary embodiments of the electron probe sample proposed in this disclosure above, an exemplary embodiment of the metal ball sample wear scar analysis device proposed in this disclosure will be described below.

[0070] In one embodiment of this disclosure, the metal ball sample wear scar analysis device proposed in this disclosure includes the electron probe sample stage proposed in this disclosure and described in detail in the above embodiments.

[0071] It should be noted that the metal ball sample wear scar analysis apparatus shown in the accompanying drawings and described in this specification is merely a few examples among many analytical apparatuses capable of employing the principles of this disclosure. It should be clearly understood that the principles of this disclosure are by no means limited to any detail or component of the metal ball sample wear scar analysis apparatus shown in the accompanying drawings or described in this specification.

[0072] Based on the above exemplary description of the probe sample stage proposed in this disclosure, the process of using the probe sample stage to prevent metal ball samples from participating in wear scar analysis tests generally includes: first, removing the upper baffle 400; placing the metal ball sample on the first groove 210 on the top surface of the placement plate 200, and adjusting the position of the metal ball sample so that the wear scar is located directly above the sphere of the metal ball sample; after adjusting the position of the wear scar, the metal ball sample can be adhered to the placement plate 200 with conductive adhesive to stabilize the position of the wear scar and keep the wear scar surface facing upwards; fixing the upper baffle 400; raising and lowering the position of the placement plate 200 within the through hole 110 so that the top of the sphere of the metal ball sample is flush with the stage body 100 through the test hole 410, thereby completing the placement and support of the metal ball sample by the probe sample stage, after which subsequent test operations can be carried out.

[0073] In summary, the electron probe sample stage proposed in this disclosure includes a stage body 100 and a placement plate 200. The stage body 100 is provided with a through hole 110 extending along the height direction. The top surface of the placement plate 200 is provided with a first groove 210, the opening of which is circular. The placement plate 200 is used to place a metal ball sample, and the first groove 210 is used to accommodate a portion of the metal ball sample. The placement plate 200 is vertically and vertically disposed in the through hole 110, so that the metal ball sample placed on the placement plate 200 can move up and down within the through hole 110. Through the above structural design, this disclosure utilizes the first groove 210 with a circular opening to accommodate a portion of the metal ball sample, so that when the metal ball sample is placed on the placement plate 200, it has a line contact or surface contact with the placement plate 200. This increases the contact area when the metal ball sample is placed on the placement plate 200, improves the stability and reliability of the metal ball sample when placed on the placement plate 200, eliminates the need to cut the metal ball sample, and avoids secondary contamination that could affect the test results. Furthermore, by utilizing the liftable design of the placement plate 200, the metal ball sample placed on the placement plate 200 can be lifted and lowered in the through hole 110, thereby meeting the placement needs of metal ball samples of various sizes participating in the test and expanding the application range.

[0074] The foregoing has described and / or illustrated exemplary embodiments of the probe sample stage and metal ball sample wear scar analysis apparatus proposed in this disclosure. However, the embodiments of this disclosure are not limited to the specific embodiments described herein; rather, components and / or steps of each embodiment may be used independently and separately from other components and / or steps described herein. Each component and / or step of one embodiment may also be used in combination with other components and / or steps of other embodiments. In describing the elements / components / etc. described and / or illustrated herein, the terms “a,” “an,” and “the above” are used to indicate the presence of one or more elements / components / etc. The terms “comprising,” “including,” and “having” are used to indicate an open-ended inclusion and mean that additional elements / components / etc. may exist in addition to those listed. Furthermore, the terms “first” and “second,” etc., in the claims and specification are used only as illustrative marks and are not intended to limit the numerical scope of the object.

[0075] Although the probe sample stage and metal ball sample wear scar analysis apparatus of this disclosure have been described according to different specific embodiments, those skilled in the art will recognize that modifications may be made to the implementation of this disclosure within the spirit and scope of the claims.

Claims

1. An electron probe sample stage, disposed in a metal ball sample wear scar analysis device, characterized in that, The electron probe sample stage includes: The platform has a through hole extending along its height. A placement plate has a first groove on its top surface, the opening of which is circular; the placement plate is used to place a metal ball sample, and the first groove is used to accommodate a portion of the metal ball sample; the placement plate is vertically and vertically disposed in the through hole, so that the metal ball sample placed on the placement plate can move up and down in the through hole.

2. The electron probe sample stage according to claim 1, characterized in that, The cross-sectional shape of the first groove is an arc, and the angle of the corresponding central angle of the arc is less than or equal to 180°.

3. The electron probe sample stage according to claim 1, characterized in that, The stage body is provided with a plurality of through holes, and the electron probe sample stage includes a plurality of placement plates, which are respectively disposed in the plurality of through holes.

4. The electron probe sample stage according to claim 3, characterized in that: The first grooves of at least two of the placement plates are not identical; and / or The first groove is identical in at least two of the placement plates.

5. The electron probe sample stage according to claim 1, characterized in that, The wall of the through hole is provided with an internal thread, and the periphery of the placement plate is provided with an external thread. The internal thread and the external thread are screwed together so that the placement plate can move up and down in the through hole when it is rotated.

6. The electron probe sample stage according to claim 5, characterized in that, The bottom surface of the placement plate is provided with a second groove, the opening of the second groove being polygonal or elliptical; wherein, the second groove can cooperate with an adjustment fixture, the adjustment fixture having an adjustment end that matches the shape of the opening of the second groove, and when the adjustment end extends into the second groove, the adjustment fixture can drive the placement plate to rotate.

7. The electron probe sample stage according to claim 5, characterized in that, The electron probe sample stage also includes: A lower baffle is provided on the bottom surface of the platform. The lower baffle is provided with a lifting adjustment operation hole. The position of the lifting adjustment operation hole corresponds to the position of the through hole, and the diameter of the lifting adjustment operation hole is smaller than the diameter of the through hole, so that the part of the lower baffle without the lifting adjustment operation hole covers part of the bottom opening of the through hole, thereby preventing the placement plate from coming out of the bottom opening of the through hole.

8. The electron probe sample stage according to claim 1, characterized in that, The electron probe sample stage also includes: An upper baffle is detachably mounted on the top surface of the platform. The upper baffle is provided with test holes, the positions of which correspond to the positions of the through holes. The diameter of the test holes is smaller than the diameter of the smallest metal ball sample placed on the placement plate in the corresponding through hole, so that the part of the upper baffle without the test holes covers part of the top opening of the through hole, preventing the metal ball sample from falling out of the top opening of the through hole.

9. The electron probe sample stage according to claim 1, characterized in that, The electron probe sample stage also includes: A sliding seat is disposed on the bottom surface of the stage body. The sliding seat includes a connecting plate connected to the stage body and a protrusion protruding downward from the connecting plate. The protrusion is used to slide in cooperation with a slide rail provided on the base of the metal ball sample wear mark analysis device, so that the electron probe sample stage can slide into or out of the base.

10. A device for analyzing wear scars on metal ball samples, characterized in that, Includes the electron probe sample stage as described in any one of claims 1 to 9.

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