A focusing lens for a focused ion beam

Abstract

The utility model provides a focusing lens for focusing ion beam, include: first subassembly has a center axis, and is provided with upper mounting area and lower mounting area along the center axis, first cylinder, installs in upper mounting area, second cylinder, installs in lower mounting area, upper subassembly, install in the upper portion of first cylinder, lower subassembly, install in the lower portion of second cylinder, upper mounting area and lower mounting area of first subassembly all are provided with outer thread, first cylinder and second cylinder are provided with inner thread, first cylinder and second cylinder all are ceramic material, upper subassembly and lower subassembly are conductive material, the utility model discloses through modularization, coaxial centering, thread and clamping groove composite connection and sealing ring design, has realized focusing lens assembly precision height, sealing performance is good, the beneficial effect that structure is stable and is convenient for maintenance.

Description

Technical Field

[0001] This utility model relates to the field of focused ion beam equipment technology, and specifically to a focusing lens for focused ion beams. Background Technology

[0002] Focused ion beam (FIB) systems, as high-precision micro- and nano-fabrication and analysis equipment, are widely used in semiconductor testing, materials science, and nanofabrication. In this system, the focusing lens is one of the core components, its function being to precisely focus the ion beam using an electric or magnetic field, thereby achieving high-resolution imaging or micro-area fabrication.

[0003] The shortcomings of existing technology:

[0004] 1. Low structural integration, complex assembly, and poor precision.

[0005] Traditional focusing lenses often employ a split structure, with each electrode assembly lacking precise positioning and reliable mechanical connection to the insulating cylinder. This results in a cumbersome assembly process, poor centering, and affects the focusing accuracy of the ion beam and the stability of the system.

[0006] 2. Unreliable connections between insulation and conductive components can easily lead to electric field distortion.

[0007] If the connection between the conductive electrode and the ceramic insulating cylinder is not firm enough or there is poor contact, it may cause problems such as partial discharge and uneven electric field distribution, which will affect the focusing effect of the ion beam and the safety of the system.

[0008] 3. Difficult to maintain and replace, high repair costs.

[0009] Traditional lenses often employ non-removable or difficult-to-remove structures (such as glue sealing or welding). Once a component is damaged (such as a broken ceramic barrel or electrode contamination), the entire lens often needs to be replaced, resulting in long maintenance cycles and high costs.

[0010] 4. Lack of modular design hinders functional expansion.

[0011] Existing focusing lenses have a fixed structure, making it difficult to flexibly configure different numbers or types of electrode components, which limits their adaptability in complex application scenarios such as multi-stage focusing and beam shaping.

[0012] Therefore, existing technologies have shortcomings and need further improvement. Utility Model Content

[0013] In view of the problems existing in the prior art, this utility model provides a focusing lens for focusing ion beams.

[0014] To achieve the above objectives, the specific solution of this utility model is as follows:

[0015] This utility model provides a focusing lens for focusing ion beams, comprising:

[0016] The first component has a central axis and an upper mounting area and a lower mounting area are provided along the central axis;

[0017] The first cylinder is installed in the upper installation area;

[0018] The second cylinder is installed in the lower installation area;

[0019] The upper component is installed on the upper part of the first cylinder;

[0020] The lower component is installed at the bottom of the second cylinder.

[0021] Furthermore, both the upper and lower mounting areas of the first component are provided with external threads;

[0022] The first cylinder and the second cylinder are provided with internal threads;

[0023] The first cylinder and the second cylinder are threadedly installed in the upper mounting area and the lower mounting area, respectively.

[0024] Furthermore, a first sealing ring is also fitted on the outer side of the upper component;

[0025] A second sealing ring is also fitted on the outside of the lower component.

[0026] Furthermore, both the first cylinder and the second cylinder are made of ceramic material;

[0027] The upper and lower components are made of titanium alloy.

[0028] Furthermore, the upper component includes a plurality of first elements arranged in a circular array around the central axis.

[0029] Furthermore, the lower component includes a plurality of second elements arranged in a circular array around the central axis.

[0030] Furthermore, the first element includes a first fixing member, a second fixing member, and a first connecting member;

[0031] The first fixing member and the second fixing member are connected by the first connector to form a first slot. When the upper end of the first cylinder is connected to the upper component, the edge of the upper end of the first cylinder is engaged in the first slot, the first fixing member is inserted into the first cylinder, and the second fixing member is located on the outside of the first cylinder.

[0032] The second fixing member is further provided with a first mounting groove on the side away from the first fixing member for installing the first sealing ring;

[0033] The second fixing member is further provided with a first bolt radially toward the central axis, and the first connecting member is further provided with a first mounting hole axially parallel to the central axis, and the front end of the first bolt screw is screwed into the first mounting hole;

[0034] The first bolt is a terminal block used to input voltage, and focusing is achieved through voltage.

[0035] Furthermore, the second element includes a third fixing member, a fourth fixing member, and a fifth fixing member;

[0036] The fourth fixing member is connected to the third fixing member through the second connector and forms a second slot with the opening facing upward. When the lower component is connected to the lower end of the second cylinder, the edge of the lower end of the second cylinder is engaged in the second slot, the upper end of the third fixing member is inserted into the second cylinder, and the fourth fixing member is located on the outside of the second cylinder.

[0037] The upper end of the third fixing member is provided with an external thread on the side facing the fourth fixing member, and the inner side of the lower end of the second cylinder is provided with an internal thread. The third fixing member and the second cylinder are connected by threads.

[0038] The fifth fixing member is connected to the third fixing member through the third connector and forms a third slot with the opening facing downward. When the third cylinder is sleeved on the lower end of the lower component, the upper edge of the third cylinder is engaged in the third slot, the lower end of the third fixing member is inserted into the third cylinder, and the fifth fixing member is located on the outside of the third cylinder.

[0039] The connection between the third fastener and the second and third connectors forms a second mounting groove for installing the second sealing ring.

[0040] Furthermore, the lower end of the lower component is also provided with external threads;

[0041] The lower part of the lower component is located below the third cylinder and is further fitted with a fourth cylinder and a fifth cylinder in sequence;

[0042] The third, fourth, and fifth cylinders are all made of ceramic.

[0043] Furthermore, the first component is an integral structure, with a flange provided in its middle;

[0044] The flange has multiple through holes evenly distributed for installation and fixing;

[0045] The number of the first element and the second element are both eight;

[0046] Both the first and second sealing rings are rubber rings used to hold the wire in place, and the wire is used to connect the first and second components.

[0047] The technical solution of this utility model has the following beneficial effects:

[0048] 1. Compact structure and good centering improve focusing accuracy.

[0049] The first component has a central axis, and the upper and lower components are arranged in a circular array around the central axis to ensure that the electric field distribution is symmetrical and uniform.

[0050] The first and second cylinders are installed along the central axis in the upper and lower mounting areas of the first component, achieving coaxial alignment of all components, effectively reducing ion beam offset, and improving focusing accuracy and beam stability.

[0051] 2. The threaded connection is reliable, easy to assemble, and secure.

[0052] The upper and lower mounting areas of the first component are provided with external threads, and the first cylinder and the second cylinder are provided with internal threads. The ceramic cylinder and the main structure are fastened together by the thread engagement method.

[0053] Threaded connections not only facilitate disassembly and maintenance, but also improve the connection strength and repeatability of components, avoiding the irreversibility and stress concentration problems caused by traditional bonding or welding.

[0054] 3. The combination of slot and bolt connection enhances mechanical stability.

[0055] The upper component adopts a first slot structure to insert the upper edge of the first cylinder into it, and achieves radial and axial dual locking by inserting the first fastener into the cylinder and screwing the first bolt into the first mounting hole;

[0056] This composite connection method not only enables rapid positioning but also enhances the resistance to vibration and thermal deformation, preventing electrode displacement or poor contact due to loosening during operation.

[0057] 4. Modular electrode design, supporting flexible configuration and expansion.

[0058] Both the upper and lower components are composed of multiple first or second elements arranged in an array around the central axis, forming a modular structure;

[0059] The number of electrodes can be increased or decreased or the potential distribution can be adjusted according to different focusing requirements. It is suitable for multi-level electrostatic lens design, improving the adaptability and functionality of the system. Attached Figure Description

[0060] Figure 1 This is a perspective view of the present invention;

[0061] Figure 2 This is an exploded view of this utility model;

[0062] Figure 3 This is a top perspective view of the upper component of this utility model;

[0063] Figure 4 This is a bottom-view perspective view of the upper component of this utility model;

[0064] Figure 5 This is a top perspective view of the lower component of this utility model;

[0065] Figure 6 This is a bottom perspective view of the lower component of this utility model;

[0066] Figure 7 This is a top perspective view of the first element of this utility model;

[0067] Figure 8 This is a bottom perspective view of the first element of this utility model;

[0068] Figure 9 This is a top perspective view of the second element of this utility model;

[0069] Figure 10 This is a bottom-view perspective view of the second element of this utility model.

[0070] Attached image captions:

[0071] 1. First component; 2. First cylinder; 3. Second cylinder; 4. Upper component; 5. Lower component; 6. First sealing ring; 7. Second sealing ring; 8. First element; 9. First fastener; 10. Second fastener; 11. First connector; 12. First slot; 13. First mounting groove; 14. First bolt; 15. First mounting hole; 16. Second element; 17. Third fastener; 18. Fourth fastener; 19. Fifth fastener; 20. Second connector; 21. Second slot; 22. Third connector; 23. Third slot; 24. Second mounting groove; 25. Third cylinder; 26. Fourth cylinder; 27. Fifth cylinder; 28. Flange; 29. ​​Through hole. Detailed Implementation

[0072] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0073] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0074] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0075] In the description of this embodiment, the terms "upper," "lower," "front," "rear," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0076] Combination Figures 1-10 As shown, this utility model provides a focusing lens for focusing an ion beam, comprising:

[0077] The first component 1 has a central axis and an upper mounting area and a lower mounting area are provided along the central axis;

[0078] The first cylinder 2 is installed in the upper installation area;

[0079] The second cylinder 3 is installed in the lower installation area;

[0080] Upper component 4 is installed on the upper part of the first cylinder 2;

[0081] The lower component 5 is installed at the lower part of the second cylinder 3.

[0082] Both the upper and lower mounting areas of the first component 1 are provided with external threads;

[0083] The first cylinder 2 and the second cylinder 3 are provided with internal threads;

[0084] The first cylinder 2 and the second cylinder 3 are installed in the upper and lower mounting areas by threads.

[0085] The outer side of the upper component 4 is also fitted with a first sealing ring 6;

[0086] The lower component 5 is also fitted with a second sealing ring 7 on its outer side.

[0087] Both the first cylinder 2 and the second cylinder 3 are made of ceramic.

[0088] The upper component 4 and the lower component 5 are made of titanium alloy.

[0089] The upper component 4 includes a plurality of first elements 8 arranged in a circular array around the central axis.

[0090] The lower component 5 includes a plurality of second elements 16 arranged in a circular array around the central axis.

[0091] The first element 8 includes a first fixing member 9, a second fixing member 10, and a first connecting member 11;

[0092] The first fixing member 9 and the second fixing member 10 are connected by the first connector 11 to form a first slot 12. When the upper end of the first cylinder 2 is connected to the upper component 4, the edge of the upper end of the first cylinder 2 is engaged in the first slot 12, the first fixing member 9 is inserted into the first cylinder 2, and the second fixing member 10 is located on the outside of the first cylinder 2.

[0093] The second fixing member 10 is also provided with a first mounting groove 13 on the side away from the first fixing member 9 for installing the first sealing ring 6;

[0094] The second fixing member 10 is further provided with a first bolt 14 radially toward the central axis, and the first connecting member 11 is further provided with a first mounting hole 15 axially parallel to the central axis. The front end of the screw of the first bolt 14 is screwed into the first mounting hole 15. The first bolt 14 is a terminal block used to input voltage and achieve focusing through voltage.

[0095] The second element 16 includes a third fixing member 17, a fourth fixing member 18, and a fifth fixing member 19;

[0096] The fourth fixing member 18 is connected to the third fixing member 17 through the second connector 20, forming a second slot 21 with the opening facing upward. When the lower component 5 is connected to the lower end of the second cylinder 3, the edge of the lower end of the second cylinder 3 is engaged in the second slot 21, the upper end of the third fixing member 17 is inserted into the second cylinder 3, and the fourth fixing member 18 is located on the outside of the second cylinder 3.

[0097] The upper end of the third fixing member 17 is provided with an external thread on the side facing the fourth fixing member 18, and the inner side of the lower end of the second cylinder 3 is provided with an internal thread. The third fixing member 17 and the second cylinder 3 are connected by threads.

[0098] The fifth fixing member 19 is connected to the third fixing member 17 through the third connector 22, forming a third slot 23 with the opening facing downward. When the third cylinder 25 is sleeved on the lower end of the lower component 5, the upper edge of the third cylinder 25 is engaged in the third slot 23, the lower end of the third fixing member 17 is inserted into the third cylinder 25, and the fifth fixing member 19 is located on the outside of the third cylinder 25.

[0099] The connection between the third fastener 17 and the second connector 20 and the third connector 22 forms a second mounting groove 24 for installing the second sealing ring 7.

[0100] The lower end of the lower component 5 is also provided with external threads;

[0101] The lower end of the lower component 5 is located below the third cylinder 25 and is also fitted with a fourth cylinder 26 and a fifth cylinder 27 in sequence.

[0102] The third cylinder 25, the fourth cylinder 26, and the fifth cylinder 27 are all made of ceramic.

[0103] The first component 1 is an integral structure, with a flange 28 provided in its middle;

[0104] The flange 28 has a plurality of through holes 29 evenly distributed for installation and fixing;

[0105] The number of the first element 8 and the second element 16 are both eight;

[0106] The first sealing ring 6 and the second sealing ring 7 are both rubber rings used to press down the wire, which is used to connect the first element 8 and the second element 16.

[0107] The principle of this utility model is as follows:

[0108] I. Constructing Ion Beam Transport Paths Using Structured Channels

[0109] The focusing lens is framed around the central axis of the first component 1. The first component 1 serves as the basic structure, with its upper and lower mounting areas tightly connected to the first cylinder 2 and the second cylinder 3, both with internal threads, via external threads. The upper component 4 is mounted on the upper part of the first cylinder 2, and the lower component 5 is mounted on the lower part of the second cylinder 3. The lower end of the lower component 5 is sequentially fitted with the third cylinder 25, the fourth cylinder 26, and the fifth cylinder 27 via external threads. These components are arranged sequentially along the central axis, forming a continuous and closed channel that provides a dedicated transmission path for the ion beam, ensuring stable transmission along the central axis and preventing path deviation from affecting the focusing effect.

[0110] II. Material properties and component layout facilitate the formation of a focused electric field

[0111] The upper component 4 and the lower component 5 are made of conductive materials and can be connected to a specific voltage during operation. Several first elements 8 of the upper component 4 are arranged in a circular array around the central axis. In each first element 8, a first fixing member 9 is inserted into the first cylinder 2, and a second fixing member 10 is located outside the first cylinder 2. The two are connected by a first connector 11 to form a first slot 12, which clamps the upper edge of the first cylinder 2. The first bolt 14 on the second fixing member 10 is screwed into the first mounting hole 15 of the first connector 11, which further strengthens the structure of the first element 8 and ensures its stability in the circular array. Several second elements 16 of the lower component 5 are also arranged in a circular array around the central axis. The upper end of the third fixing member 17 of the second element 16 is inserted into the second cylinder 3 and connected to the second cylinder 3 by threads. The fourth fixing member 18 is located outside the second cylinder 3. The two are connected by the second connector 20 to form a second groove 21 to clamp the lower edge of the second cylinder 3. The lower end of the third fixing member 17 is inserted into the third cylinder 25. The fifth fixing member 19 is located outside the third cylinder 25. The two are connected by the third connector 22 to form a third groove 23 to clamp the upper edge of the third cylinder 25. The multiple connection structure ensures the stability of the second element 16 in the circular array. This symmetrical circular array layout makes the conductive upper component 4 and lower component 5 form a uniform and symmetrical electric field distribution around the central axis.

[0112] The first cylinder 2, the second cylinder 3, the third cylinder 25, the fourth cylinder 26, and the fifth cylinder 27 are all made of ceramic and have excellent insulation properties. They isolate the conductive components such as the upper component 4 and the lower component 5 from each other, preventing direct current conduction, and at the same time confine the electric field to the area around the ion beam transmission channel, creating the necessary electric field environment for ion beam focusing.

[0113] III. Gradual Focusing of Ion Beams under Multi-Level Electric Fields

[0114] After entering from the top of the focusing lens, the ion beam first enters the upper component 4 region. Because the first element 8 of the upper component 4 is arranged in a circular array and carries a specific voltage, a radial electric field force pointing towards the central axis is generated. Under the action of this electric field force, the ions in the ion beam begin to deflect towards the central axis, achieving initial focusing.

[0115] Next, the ion beam enters the channel composed of a first cylinder 2 and a second cylinder 3 made of ceramic material. The ceramic material ensures that the electric field energy is stably transmitted into the channel, so that the ion beam is continuously subjected to the electric field force during transmission, and further converges towards the central axis.

[0116] When the ion beam reaches the region of the lower component 5, the second element 16 of the lower component 5 also carries a corresponding voltage. The radial electric field force generated by its circumferential array further focuses the ion beam. At the same time, the tight connection between the lower component 5 and the second cylinder 3 and the third cylinder 25 ensures the stability of the electric field distribution in this region. Under the continuous action of the electric field force, the ion beam continuously converges, eventually forming a smaller diameter and more concentrated ion beam, which is then emitted from the fifth cylinder 27, completing the entire focusing process.

[0117] IV. Sealing and Fixing Structures Ensure Focusing Stability

[0118] The first sealing ring 6 on the outer side of the upper component 4 is installed in the first mounting groove 13 of the second fixing member 10, and the second sealing ring 7 on the outer side of the lower component 5 is installed in the second mounting groove 24 at the connection between the third fixing member 17 and the second connecting member 20 and the third connecting member 22. These two sealing rings effectively prevent external air and impurities from entering the channel, maintain the vacuum environment in the channel, reduce the collision between the ion beam and air molecules, reduce energy loss and scattering, and ensure the stability of ion beam transmission and focusing.

[0119] The threaded connections and slotted snap-fit ​​structures between the components, as well as the fixing method of the flange 28 in the middle of the integrated structure of the first component 1 to the system through the through hole 29, ensure that the entire focusing lens structure is stable and will not be displaced due to vibration or other factors during operation. This ensures the stability of the electric field distribution and the constant angle of ion beam incidence, thereby guaranteeing the stability of focusing accuracy and effect.

[0120] In summary, this focusing lens guides the ion beam transmission through a structured channel, utilizes the properties of conductive and insulating materials and the symmetrical layout of components to form a uniform electric field, enabling the ion beam to be gradually focused under the action of multiple electric fields. At the same time, the sealing and fixing structure ensures the stability of the focusing process, ultimately achieving precise focusing of the ion beam.

[0121] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the protection scope of the present utility model.

Claims

1. A focusing lens for focusing an ion beam, characterized in that, include: The first component has a central axis and an upper mounting area and a lower mounting area are provided along the central axis; The first cylinder is installed in the upper installation area; The second cylinder is installed in the lower installation area; The upper component is installed on the upper part of the first cylinder; The lower component is installed at the bottom of the second cylinder.

2. The focusing lens according to claim 1, characterized in that, Both the upper and lower mounting areas of the first component are provided with external threads; The first cylinder and the second cylinder are provided with internal threads; The first cylinder and the second cylinder are threadedly installed in the upper mounting area and the lower mounting area, respectively.

3. The focusing lens according to claim 2, characterized in that, The upper component is also fitted with a first sealing ring on its outer side; A second sealing ring is also fitted on the outside of the lower component.

4. The focusing lens according to claim 1, characterized in that, Both the first and second cylinders are made of ceramic. The upper and lower components are made of titanium alloy.

5. The focusing lens according to claim 3, characterized in that, The upper component includes a plurality of first elements arranged in a circular array around the central axis.

6. The focusing lens according to claim 5, characterized in that, The lower component includes a plurality of second elements arranged in a circular array around the central axis.

7. The focusing lens according to claim 5, characterized in that, The first element includes a first fixing member, a second fixing member, and a first connecting member; The first fixing member and the second fixing member are connected by the first connector to form a first slot. When the upper end of the first cylinder is connected to the upper component, the edge of the upper end of the first cylinder is engaged in the first slot, the first fixing member is inserted into the first cylinder, and the second fixing member is located on the outside of the first cylinder. The second fixing member is further provided with a first mounting groove on the side away from the first fixing member for installing the first sealing ring; The second fixing member is further provided with a first bolt radially toward the central axis, and the first connecting member is further provided with a first mounting hole axially parallel to the central axis, and the front end of the first bolt screw is screwed into the first mounting hole; The first bolt is a terminal block used to input voltage, and focusing is achieved through voltage.

8. The focusing lens according to claim 6, characterized in that, The second component includes a third fixing member, a fourth fixing member, and a fifth fixing member; The fourth fixing member is connected to the third fixing member through the second connector and forms a second slot with the opening facing upward. When the lower component is connected to the lower end of the second cylinder, the edge of the lower end of the second cylinder is engaged in the second slot, the upper end of the third fixing member is inserted into the second cylinder, and the fourth fixing member is located on the outside of the second cylinder. The upper end of the third fixing member is provided with an external thread on the side facing the fourth fixing member, and the inner side of the lower end of the second cylinder is provided with an internal thread. The third fixing member and the second cylinder are connected by threads. The fifth fixing member is connected to the third fixing member through the third connector and forms a third slot with the opening facing downward. When the third cylinder is sleeved on the lower end of the lower component, the upper edge of the third cylinder is engaged in the third slot, the lower end of the third fixing member is inserted into the third cylinder, and the fifth fixing member is located on the outside of the third cylinder. The connection between the third fastener and the second and third connectors forms a second mounting groove for installing the second sealing ring.

9. The focusing lens according to claim 8, characterized in that, The lower end of the lower component is also provided with external threads; The lower part of the lower component is located below the third cylinder and is further fitted with a fourth cylinder and a fifth cylinder in sequence; The third, fourth, and fifth cylinders are all made of ceramic.

10. The focusing lens according to claim 6, characterized in that, The first component is an integral structure, with a flange in its middle; The flange has multiple through holes evenly distributed for installation and fixing; The number of the first element and the second element are both eight; Both the first and second sealing rings are rubber rings used to hold the wire in place, and the wire is used to connect the first and second components.

Images