Boat structure and processing equipment

Abstract

The application relates to the technical field of semiconductors and photovoltaics, in particular to a boat structure and processing equipment for reducing energy consumption and improving production efficiency when the boat structure is processed. The boat structure comprises at least one group of boat components and at least one group of electrode components, each group of boat components comprises a plurality of boat pages, each group of electrode components comprises a positive heating electrode for being electrically connected with a positive pole of a heating power supply and a negative heating electrode for being electrically connected with a negative pole of the heating power supply, the first boat page and the last boat page in the same group of boat components are electrically connected with the positive heating electrode and the negative heating electrode in the group of electrode components to form a complete current loop, so that the boat pages are provided with the heating power supply to form a heating resistor, thereby reducing energy consumption and improving production efficiency when the boat structure is processed.

Description

Technical Field

[0001] This application relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat structure and processing equipment. Background Technology

[0002] In the production of silicon solar cells, processes such as PECVD, LPCVD, ALD, and PVD are widely used to deposit various thin films. These processes typically place the silicon wafer in a vacuum environment, with a heating device outside the vacuum chamber to create a thermal field within the chamber, providing the heat required for the process. This external thermal field is located a considerable distance from the silicon wafer, and because the wafer is in a vacuum environment, the heating efficiency of the thermal field is low, resulting in significant energy loss and impacting the production efficiency of the silicon wafers. Utility Model Content

[0003] In view of this, this application provides a boat structure and processing equipment to reduce energy consumption and improve production efficiency during the processing of the boat structure.

[0004] In a first aspect, this application provides a boat structure, which includes at least one set of boat assemblies and at least one set of electrode assemblies. Each set of boat assemblies includes multiple boat blades, which are spaced apart along a first direction and electrically connected to each other. Each set of electrode assemblies includes a positive heating electrode for electrical connection to the positive electrode of a heating power source and a negative heating electrode for electrical connection to the negative electrode of the heating power source. The first and last boat blades in the same set of boat assemblies are electrically connected to the positive heating electrode and the negative heating electrode in the same set of electrode assemblies, respectively, to form a complete current loop.

[0005] In conjunction with the first aspect, in certain implementations of the first aspect, the boat structure includes two sets of boat assemblies, namely a first boat assembly and a second boat assembly, wherein the boat leaf in the first boat assembly is a first boat leaf, and the boat leaf in the second boat assembly is a second boat leaf, the first boat leaf and the second boat leaf are arranged alternately and at intervals along a first direction, and the first boat leaf and the second boat leaf are insulated from each other; the boat structure includes two sets of electrode assemblies, namely a first electrode assembly and a second electrode assembly, wherein the first first boat leaf and the last first boat leaf in the first boat assembly are electrically connected to the positive heating electrode and the negative heating electrode in the first electrode assembly, respectively, and the first second boat leaf and the last second boat leaf in the second boat assembly are electrically connected to the positive heating electrode and the negative heating electrode in the second electrode assembly, respectively, the first electrode assembly and the second electrode assembly are arranged at intervals along a second direction, wherein the second direction is perpendicular to the third direction and the first direction; the first electrode assembly and the second electrode assembly respectively provide a first contact terminal and a second contact terminal electrically connected to a radio frequency power supply, the first contact terminal and the second contact terminal forming a radio frequency electrode, and the radio frequency electrode is configured to provide a radio frequency voltage to the first boat leaf and the second boat leaf when connected to a radio frequency power supply.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the positive heating electrode and the negative heating electrode of the same group of electrode assemblies are disposed on the same side of a group of boat assemblies in a third direction, and the third direction is perpendicular to the first direction; the first electrode assembly and the second electrode assembly are respectively disposed on the same side of the first boat assembly and the second boat assembly in a third direction, and / or, the positive heating electrode, the negative heating electrode and the first contact terminal of the first electrode assembly are disposed on the same side of the first boat assembly in a third direction, and the positive heating electrode, the negative heating electrode and the second contact terminal of the second electrode assembly are disposed on the same side of the second boat assembly in a third direction.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, in the first electrode assembly, the first contact terminal is disposed between the positive heating electrode and the negative heating electrode in the first direction; and / or, in the second electrode assembly, the second contact terminal is disposed between the positive heating electrode and the negative heating electrode in the first direction.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the positive heating electrode has a positive conductive surface facing the second direction, which is used for electrical connection with the positive electrode of the heating power supply, and the negative heating electrode has a negative conductive surface facing the second direction, which is used for electrical connection with the negative electrode of the heating power supply. The positive and negative conductive surfaces of the same set of electrode assemblies have the same orientation, wherein the second direction is perpendicular to the third direction and the first direction.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, at least a portion of the boat leaves of the same group of boat components are connected in series, and in the third direction, the positive heating electrode is electrically connected to the end of the boat leaf closest to the positive heating electrode, and the negative heating electrode is electrically connected to the end of the boat leaf closest to the negative heating electrode.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, in the same group of boat components, a portion of the boat leaves are connected in parallel to form a parallel group, and multiple parallel groups are connected in series to form a current loop; wherein, a conductive block is provided between adjacent boat leaves in the same parallel group, and an insulating block is provided between the first ends of adjacent parallel groups, and a conductive block is provided between the second ends of adjacent parallel groups, so that adjacent parallel groups are connected in series.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the first electrode assembly and the second electrode assembly respectively provide a plurality of first contact terminals and a plurality of second contact terminals connected to a radio frequency power supply. One first contact terminal and one second contact terminal form a radio frequency electrode. There are multiple radio frequency electrodes, wherein the number of radio frequency electrodes is the same as the number of parallel groups. In one radio frequency electrode, the first contact terminal is electrically connected to one parallel group in the first assembly, and the second contact terminal is electrically connected to one parallel group in the second assembly.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, there are two radio frequency electrodes, namely a first radio frequency electrode and a second radio frequency electrode, and two parallel groups in the same group of boat components, namely a first parallel group and a second parallel group. An insulating block is provided between the first end of the first parallel group and the second parallel group, and a conductive block is provided between the second end of the first parallel group and the second parallel group, so that the first parallel group and the second parallel group in the same group of boat components are connected in series. The first contact terminal of the first radio frequency electrode is electrically connected to the radio frequency power supply and the first parallel group in the first boat component, respectively. The second contact terminal of the first radio frequency electrode is electrically connected to the radio frequency power supply and the first parallel group in the second boat component, respectively. The first contact terminal of the second radio frequency electrode is electrically connected to the radio frequency power supply and the second parallel group in the first boat component, respectively. The second contact terminal of the second radio frequency electrode is electrically connected to the radio frequency power supply and the second parallel group in the second boat component, respectively.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, each leaf is provided with lugs at both ends along a third direction. In the first direction, each conductive block is disposed between two adjacent lugs to make the two adjacent lugs electrically connected, and each insulating block is disposed between two adjacent lugs to make the two adjacent lugs insulated from each other.

[0014] A conductive block is provided between two adjacent lugs of the same group of boat components to make the two adjacent lugs electrically connected, and an insulating block is provided between two adjacent lugs of the same group of boat components to make the two adjacent lugs insulated from each other.

[0015] In conjunction with the first aspect, in some implementations of the first aspect, at least one set of electrode components includes at least two conductive blocks, at least one conductive block forming a positive heating electrode, and at least one conductive block forming a negative heating electrode.

[0016] In conjunction with the first aspect, in some implementations of the first aspect, at least one conductive block includes a plurality of clamping portions, with a gap between two adjacent clamping portions of the same conductive block for avoiding lugs, and in the first direction, each clamping portion is clamped between two adjacent lugs of the same group of boat components.

[0017] Secondly, this application provides a processing apparatus, which includes an apparatus body and a boat structure mentioned in any of the first aspects. The apparatus body has a process chamber, and the boat structure can be placed inside the process chamber.

[0018] The boat structure of this application electrically connects the first and last boat blades in the same group of boat components to the positive and negative heating electrodes in the corresponding electrode components, respectively. This allows the positive and negative heating electrodes to be electrically connected to the positive and negative terminals of a heating power supply, respectively, when a product (such as a silicon wafer) placed on the boat blades needs to be processed. This enables multiple boat blades in the same group of boat components to form a complete current loop with the heating power supply, achieving electrical connection between multiple boat blades and the heating power supply. By using the boat blades as heating resistors to directly heat the product placed on them, the heating efficiency of the product can be effectively improved, thereby reducing energy consumption and increasing production efficiency during boat structure processing. Attached Figure Description

[0019] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further understand this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0020] Figure 1 The image shown is a perspective view of a boat structure provided in one embodiment of this application.

[0021] Figure 2 The image shown is a side view of a boat structure provided in an embodiment of this application.

[0022] Figure 3The image shown is a perspective view of a boat structure provided in one embodiment of this application.

[0023] Figure 4 The image shown is a front view of a boat structure provided in an embodiment of this application.

[0024] Figure 5 The image shown is a rear view of a boat structure provided in an embodiment of this application.

[0025] Figure 6 The diagram shown is a schematic diagram of the boat structure and the heating power supply provided in one embodiment of this application.

[0026] Figure 7 The image shown is a perspective view of a boat structure provided in another embodiment of this application.

[0027] Figure 8 As shown Figure 7 Enlarged view of point A in the middle.

[0028] Figure 9 As shown Figure 7 Enlarged view of point B in the middle.

[0029] Figure 10 The image shown is a perspective view of the first boat component in a boat structure provided in an embodiment of this application.

[0030] Figure 11 The image shown is a perspective view of the first boat component in a boat structure provided in an embodiment of this application from another angle.

[0031] Figure 12 The image shown is a side view of the first boat component in a boat structure provided in an embodiment of this application.

[0032] Figure 13 The image shown is a front view of the first boat component in a boat structure provided in an embodiment of this application.

[0033] Figure 14 The image shown is a rear view of the first boat component in a boat structure provided in an embodiment of this application.

[0034] Figure 15 The image shown is a perspective view of the second boat component in a boat structure provided in an embodiment of this application.

[0035] Figure 16 The image shown is a perspective view of the second boat component in a boat structure provided in one embodiment of this application.

[0036] Figure 17 The image shown is a side view of the second boat component in a boat structure provided in an embodiment of this application.

[0037] Figure 18The image shown is a front view of the second boat component in a boat structure provided in an embodiment of this application.

[0038] Figure 19 The image shown is a rear view of the second boat component in a boat structure provided in an embodiment of this application.

[0039] Figure 20 The diagram shown is a schematic diagram of the boat structure and the electrical connection between the radio frequency power supply and the heating power supply provided in another embodiment of this application.

[0040] Figure 21 The diagram shown is a schematic diagram of the boat structure and the electrical connection between the radio frequency power supply and the heating power supply provided in another embodiment of this application.

[0041] Figure 22 The diagram shown is a schematic diagram of the boat structure and the electrical connection between the radio frequency power supply and the heating power supply provided in another embodiment of this application.

[0042] Figure 23 The image shown is a perspective view of the boat structure provided in an embodiment of this application, electrically connected to the radio frequency electrode rod and the heating electrode rod.

[0043] Figure 24 The image shown is a perspective view of the boat structure electrically connected to the radio frequency electrode rod and the heating electrode rod according to another embodiment of this application.

[0044] Figure 25 The image shown is a perspective view of the boat structure electrically connected to the radio frequency electrode rod and the heating electrode rod according to another embodiment of this application.

[0045] Figure label: 10. Boat structure; 1. Boat assembly; 11. Boat blade; 12. Lug; 13. First connecting rod; 14. First nut; 101. First boat assembly; 1011. First boat blade; 1012. First lug; 102. Second boat assembly; 1021. Second boat blade; 1022. Second lug; 103. First parallel assembly; 104. Second parallel assembly; 2. Electrode assembly; 21. Positive heating electrode; 211. Positive conductive surface; 212. Positive clamping part; 213. Positive gap; 22. Negative heating electrode; 221. Negative conductive surface; 222. Negative clamping part; 223. Negative gap; 23. Radio frequency electrode; 24. Conductive block; 25. Insulating block; 26. First support foot; 27. Second support foot; 201. First electrode assembly; 2011. First positive heating electrode; 2012. First negative heating electrode; 2013. First positive conductive surface; 2014. First negative conductive surface; 2015. 2016. A negative electrode clamping part; 202. A first negative electrode spacer; 202. A second electrode assembly; 2021. A second positive electrode heating electrode; 2022. A second negative electrode heating electrode; 2023. A second positive electrode conductive surface; 2024. A second negative electrode conductive surface; 2025. A second positive electrode clamping part; 2026. A second positive electrode spacer; 2027. A second negative electrode clamping part; 2028. A second negative electrode spacer; 203. A first contact terminal; 204. A second contact terminal; 205. A first conductive block; 206. A first insulating block; 207. A second conductive block; 208. A second insulating block; 3. Second connecting rod; 4. Second nut; 5. Spacers; 20. First positive electrode rod; 30. First negative electrode rod; 40. Second positive electrode rod; 50. Second negative electrode rod; 60. First radio frequency electrode rod; 70. Second radio frequency electrode rod. Detailed Implementation

[0046] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0047] Figure 1 The image shown is a perspective view of a boat structure provided in one embodiment of this application. Figure 2 The image shown is a side view of a boat structure provided in an embodiment of this application. Figure 3 The image shown is a perspective view of a boat structure provided in one embodiment of this application. Figure 4 The image shown is a front view of a boat structure provided in an embodiment of this application. Figure 5 The image shown is a rear view of a boat structure provided in an embodiment of this application. Figure 6The diagram shown is a schematic diagram of the boat structure and the heating power supply provided in one embodiment of this application. Figure 7 The image shown is a perspective view of a boat structure provided in another embodiment of this application. Figure 8 As shown Figure 7 Enlarged view of point A in the middle. Figure 9 As shown Figure 7 Enlarged view of point B in the middle.

[0048] like Figures 1 to 9 As shown, the boat structure 10 includes at least one set of boat assemblies 1 and at least one set of electrode assemblies 2. Each set of boat assemblies 1 includes multiple boat blades 11, which are spaced apart along a first direction and electrically connected to each other. Each set of electrode assemblies 2 includes a positive heating electrode 21 electrically connected to the positive terminal of a heating power supply and a negative heating electrode 22 electrically connected to the negative terminal of the heating power supply. The first and last boat blades 11 in the same set of boat assemblies 1 are electrically connected to the positive heating electrode 21 and the negative heating electrode 22 in the same electrode assembly 2, respectively, to form a complete current loop.

[0049] In the same group of boat components 1, the first and last boat leaves 11 are electrically connected to the positive heating electrode 21 and the negative heating electrode 22 in the same electrode assembly 2, respectively, forming a complete current loop. This loop provides heating power to the boat leaves 11, enabling them to act as heating resistors. The positive heating electrode 21 and the negative heating electrode 22 of the same group of electrode components 2 are positioned on the same side of the corresponding boat component 1 in a third direction, which is perpendicular to the first direction. The multiple boat leaves 11 in the same group of boat components 1 are electrically connected to each other, including: multiple boat leaves 11 in the same group of boat components 1 are all connected in parallel; or multiple boat leaves 11 in the same group of boat components 1 are all connected in series; or a portion of the boat leaves 11 in the same group of boat components 1 are connected in parallel, and another portion of the boat leaves 11 in the same group of boat components 1 are connected in series. For example, a portion of the boat leaves 11 are connected in parallel to form a parallel group, and then multiple parallel groups are connected in series. After the positive heating electrode 21 is electrically connected to the positive terminal of the heating power supply and the negative heating electrode 22 is electrically connected to the negative terminal of the heating power supply, the heating power supply and multiple boats 11 form a heating circuit. At this time, each boat 11 forms a heating resistor in the heating circuit.

[0050] In the same group of boat components 1, the two outermost boat leaves 11 in the first direction are the first boat leaf 11 and the last boat leaf 11, respectively. It should be noted that the first boat leaf 11 and the last boat leaf 11 in the same group of boat components 1 are electrically connected to the positive heating electrode 21 and the negative heating electrode 22 in the corresponding electrode components 2, respectively. This does not preclude the possibility that, apart from the first boat leaf 11 and the last boat leaf 11, the other boat leaves 11 cannot be electrically connected to the positive heating electrode 21 and the negative heating electrode 22. For example, the boat leaf 11 adjacent to the first boat leaf 11 in the same group of boat components 1 can also be electrically connected to the positive heating electrode 21. In this case, the first boat leaf 11 and the boat leaf 11 adjacent to the first boat leaf 11 in the same group of boat components 1 are connected in parallel; or, the boat leaf 11 adjacent to the last boat leaf 11 in the same group of boat components 1 can also be electrically connected to the negative heating electrode 22. In this case, the last boat leaf 11 and the boat leaf 11 adjacent to the last boat leaf 11 in the same group of boat components 1 are connected in parallel.

[0051] The boat structure 10 of this application electrically connects the first and last boat blades 11 in the same group of boat components 1 to the positive heating electrode 21 and negative heating electrode 22 in the corresponding electrode components 2, respectively. This allows the positive heating electrode 21 and negative heating electrode 22 to be electrically connected to the positive and negative terminals of a heating power supply, respectively, when the product (e.g., a silicon wafer) placed on the boat blades 11 needs to be processed. This enables multiple boat blades 11 in the same group of boat components 1 to form a complete current loop with the heating power supply, realizing the electrical connection between multiple boat blades 11 and the heating power supply. By using the boat blades 11 as heating resistors to directly heat the product placed on them, the heating efficiency of the product can be effectively improved, thereby reducing the energy consumption and increasing the production efficiency of the boat structure 10 during processing.

[0052] In addition, the positive heating electrode 21 and the negative heating electrode 22 are arranged on the same side of the corresponding boat assembly 1 in the third direction, which facilitates the electrical connection of the positive heating electrode 21 and the negative heating electrode 22 with the heating power supply and helps to further improve the production efficiency of the boat structure 10 during the process.

[0053] The boat structure 10 can be used in processing equipment with a process chamber. The process chamber has a sealable inlet and outlet for the boat structure 10 to enter and exit the process chamber. Multiple power interfaces are located on the inner wall of the process chamber opposite the inlet and outlet. The power interfaces include a first interface and a second interface. The first interface is electrically connected to the positive terminal of a heating power source, and the second interface is electrically connected to the negative terminal of the heating power source. After the boat structure 10 is placed in the process chamber, the positive heating electrode 21 is electrically connected to the first interface, and the negative heating electrode 22 is electrically connected to the second interface, thus establishing an electrical connection between the boat 11 and the heating power source. The heating power source heats the boat 11, raising the product to a preset temperature before further processing (e.g., depositing a thin film). The preset temperature is the temperature required for the product to be processed.

[0054] Alternatively, before the boat structure 10 is placed into the process chamber, i.e., while the boat structure 10 is outside the process chamber, the positive heating electrode 21 can be electrically connected to the positive terminal of the heating power supply, and the negative heating electrode 22 can be electrically connected to the negative terminal of the heating power supply, using the heating power supply to heat the product. After the product is heated to the preset temperature, the boat structure 10 containing the product is then placed into the process chamber, and the product is processed within the process chamber. This reduces the preparation time from when the boat structure 10 enters the process chamber to when processing begins, thereby increasing the production capacity of the processing equipment equipped with the boat structure 10.

[0055] In some embodiments, the electrode assembly 2 is arranged in a one-to-one correspondence with the boat assembly 1, and the first boat leaf 11 and the last boat leaf 11 in the same group of boat assemblies 1 are electrically connected to the positive heating electrode 21 and the negative heating electrode 22 in the corresponding electrode assembly 2 to form a complete current loop.

[0056] like Figures 3 to 7As shown, the boat structure includes two sets of boat assemblies 1, namely a first boat assembly 101 and a second boat assembly 102. The boat leaf 11 in the first boat assembly 101 is the first boat leaf 1011, and the boat leaf 11 in the second boat assembly 102 is the second boat leaf 1021. The first boat leaf 1011 and the second boat leaf 1021 are arranged alternately and at intervals along a first direction, and the first boat leaf 1011 and the second boat leaf 1021 are insulated from each other. The boat structure includes two sets of electrode assemblies 2, namely a first electrode assembly 201 and a second electrode assembly 202. The first first boat leaf 1011 in the first boat assembly 101 is electrically connected to the positive heating electrode 21 in the first electrode assembly 201, and the last first boat leaf 1011 is electrically connected to the negative heating electrode 22. The first second boat leaf 1021 in the second boat assembly 102 is electrically connected to the positive heating electrode 21 in the second electrode assembly 202, and the last second boat leaf 1022 is electrically connected to the negative heating electrode 22. The first electrode assembly 201 and the second electrode assembly 202 are arranged at intervals along a second direction, wherein the second direction is perpendicular to the third direction and the first direction.

[0057] The first electrode assembly 201 and the second electrode assembly 202 respectively provide a first contact terminal 203 and a second contact terminal 204 that are electrically connected to the radio frequency power supply. The first contact terminal 203 and the second contact terminal 204 form a radio frequency electrode 23. The radio frequency electrode 23 is configured to provide radio frequency voltage to the first page 1011 and the second page 1021 when connected to the radio frequency power supply.

[0058] The first leaf 1011 and the second leaf 1021 are arranged alternately and at intervals along the first direction, which can achieve mutual insulation between the first leaf 1011 and the second leaf 1021.

[0059] The heating power supply electrically connected to the second page 1021 and the heating power supply electrically connected to the first page 1011 can be the same heating power supply or two different heating power supplies.

[0060] In the first boat assembly 101, the first first boat leaf 1011 and the last first boat leaf 1011 are electrically connected to the positive heating electrode 21 and the negative heating electrode 22 in the first electrode assembly 201, respectively. In the second boat assembly 102, the first second boat leaf 1021 and the last second boat leaf 1022 are electrically connected to the positive heating electrode 21 and the negative heating electrode 22 in the second electrode assembly 202, respectively. This allows heating power to be provided to the first boat leaf 1011 and the second boat leaf 1021, so that both the first boat leaf 1011 and the second boat leaf 1021 form heating resistors, thereby realizing direct heating of the products on the first boat leaf 1011 and the second boat leaf 1021.

[0061] When the first contact terminal 203 and the second contact terminal 204 are electrically connected to the radio frequency power supply, radio frequency voltage is provided to the first boat 1011 and the second boat 1021 to generate plasma in the process chamber and process the product placed on the first boat 1011 and the second boat 1021.

[0062] By arranging the first electrode assembly 201 and the second electrode assembly 202 at intervals along the second direction, the layout compactness between the first electrode assembly 201 and the second electrode assembly 202 can be improved while ensuring the electrical insulation performance between them, thus reducing the space occupied by the boat structure 10.

[0063] Figure 10 The image shown is a perspective view of the first boat component in a boat structure provided in an embodiment of this application. Figure 11 The image shown is a perspective view of the first boat component in a boat structure provided in an embodiment of this application from another angle. Figure 12 The image shown is a side view of the first boat component in a boat structure provided in an embodiment of this application. Figure 13 The image shown is a front view of the first boat component in a boat structure provided in an embodiment of this application. Figure 14 The image shown is a rear view of the first boat component in a boat structure provided in an embodiment of this application. Figure 15 The image shown is a perspective view of the second boat component in a boat structure provided in an embodiment of this application. Figure 16 The image shown is a perspective view of the second boat component in a boat structure provided in one embodiment of this application. Figure 17 The image shown is a side view of the second boat component in a boat structure provided in an embodiment of this application. Figure 18 The image shown is a front view of the second boat component in a boat structure provided in an embodiment of this application. Figure 19 The image shown is a rear view of the second boat component in a boat structure provided in an embodiment of this application.

[0064] To make the technical solution of this application easier to understand, the following description uses the example of the first direction being consistent with the left-right direction, the third direction being consistent with the front-back direction, and the second direction being consistent with the up-down direction. The left-right direction, front-back direction, and up-down direction are shown in the figure.

[0065] For example, such as Figure 4 , Figure 5 and Figure 7 As shown, the first page 1011 and the second page 1021 are arranged alternately along the left-right direction. Specifically, as... Figure 10 , Figure 11 , Figure 13 and Figure 14 As shown, a plurality of first boat pages 1011 in the first boat assembly 101 are arranged at intervals along the left-right direction. Figure 15 , Figure 16 , Figure 18 and Figure 19 As shown, multiple second boat pages 1021 in the second boat assembly 102 are arranged at intervals along the left-right direction. Among them, the first boat page 1011 located on the far right is the first first boat page 1011 of the first boat assembly 101, and the first boat page 1011 located on the far left is the last first boat page 1011 of the first boat assembly 101; the second boat page 1012 located on the far right is the first second boat page 1021 of the second boat assembly 102, and the second boat page 1012 located on the far left is the last second boat page 1021 of the second boat assembly 102.

[0066] In some embodiments, such as Figure 3 As shown, the first electrode assembly 201 and the second electrode assembly 202 are respectively disposed on the same side of the first boat assembly 101 and the second boat assembly 102 in the third direction.

[0067] For example, the first electrode assembly 201 is disposed on the rear side of the first boat assembly 101, and the second electrode assembly 202 is disposed on the rear side of the second boat assembly 102.

[0068] By arranging the first electrode assembly 201 and the second electrode assembly 202 on the same side of the first boat assembly 101 and the second boat assembly 102 respectively in the third direction, the first boat page 1011 and the second boat page 1012 can be electrically connected to the heating power source on the same side in the third direction. This facilitates the electrical connection of the first boat page 1011 and the second boat page 1012 to the heating power source and helps to further improve the production efficiency of the boat structure 10 during the process.

[0069] In some embodiments, the positive heating electrode 21 and negative heating electrode 22 of the first electrode assembly 201 and the first contact terminal 203 are disposed on the same side of the first boat assembly 101 in the third-party orientation. The positive heating electrode 21 and negative heating electrode 22 of the second electrode assembly 202 and the second contact terminal 204 are disposed on the same side of the second boat assembly 102 in the third-party orientation.

[0070] For example, the positive heating electrode 21 and the negative heating electrode 22 of the first electrode assembly 201 are respectively the first positive heating electrode 2011 and the first negative heating electrode 2012, and the positive heating electrode 21 and the negative heating electrode 22 of the second electrode assembly 202 are respectively the second positive heating electrode 2021 and the second negative heating electrode 2022. The first contact terminal 203, the first positive heating electrode 2011 and the first negative heating electrode 2012 are arranged in the third direction on the rear side of the first boat assembly 101, and the second contact terminal 204, the second positive heating electrode 2021 and the second negative heating electrode 2022 are arranged in the third direction on the rear side of the second boat assembly 102.

[0071] By arranging the contact terminals of the positive heating electrode 21, negative heating electrode 22, and radio frequency electrode 23 of the same group of boat components 1 on the same side of the same boat component 1 in the third direction, it is possible to make electrical connections between the boat 11 and the heating power supply, and between the boat 11 and the radio frequency power supply, on the same side in the third direction. This facilitates the electrical connection between the boat 11 and the heating power supply and the radio frequency power supply, and helps to further improve the production efficiency of the boat structure 10 during the process.

[0072] In some embodiments, as shown in 4, in the first electrode assembly, the first contact terminal 203 is disposed in a first direction between the positive heating electrode 21 and the negative heating electrode 22.

[0073] For example, such as Figure 4 , Figure 10 and Figure 13 As shown, the first positive heating electrode 2011 is disposed to the right of the first negative heating electrode 2012, and the first contact terminal 203 is disposed between the first positive heating electrode 2011 and the first negative heating electrode 2012 in the left-right direction.

[0074] Understandably, when the RF electrode 23 is electrically connected to the RF power supply, the positive heating electrode 21 and the negative heating electrode 22 are not electrically connected to the heating power supply. Correspondingly, when the positive heating electrode 21 and the negative heating electrode 22 are electrically connected to the heating power supply, the RF electrode 23 is not electrically connected to the RF power supply. Therefore, the distance between the RF electrode 23 and the positive heating electrode 21, and between the RF electrode 23 and the negative heating electrode 22, can be set relatively close.

[0075] By arranging the first contact terminal 203 of the radio frequency electrode 23 in the first electrode assembly between the positive heating electrode 21 and the negative heating electrode 22 in the first direction, the distance between the positive heating electrode 21 and the negative heating electrode 22 in the first electrode assembly is made larger, which avoids short circuit between the positive and negative electrodes of the heating power supply and helps to improve the safety of the boat structure 10.

[0076] In some embodiments, as shown in 4, in the second electrode assembly, the second contact terminal 204 of the radio frequency electrode 23 is disposed in a first direction between the positive heating electrode 21 and the negative heating electrode 22.

[0077] like Figure 4 , Figure 15 and Figure 18 As shown, the second positive heating electrode 2021 is disposed to the right of the second negative heating electrode 2022, and the second contact terminal 204 is disposed between the second positive heating electrode 2021 and the second negative heating electrode 2022 in the left-right direction.

[0078] By arranging the second contact terminal 204 in the second electrode assembly between the positive heating electrode 21 and the negative heating electrode 22 in the first direction, the distance between the positive heating electrode 21 and the negative heating electrode 22 in the second electrode assembly is made larger, which avoids short circuit between the positive and negative electrodes of the heating power supply and helps to improve the safety of the boat structure 10.

[0079] In some embodiments, such as Figure 6 As shown, at least a portion of the boat leaves 11 of the same group of boat components 1 are connected in series. For example... Figure 4 As shown, in the third direction, the positive heating electrode 21 is electrically connected to one end of the boat 11 near the positive heating electrode 21, and the negative heating electrode 22 is electrically connected to one end of the boat 11 near the negative heating electrode 22.

[0080] For example, such as Figure 6 As shown, four or more adjacent first boat pages 1011 are connected in parallel to form a parallel group. Then, multiple parallel groups are connected in series, so that at least a portion of the first boat pages 1011 are connected in series. Figure 4 , Figure 7 , Figure 10 and Figure 13 As shown, the rear end of the first leaf 1011 located near the right side is electrically connected to the first positive heating electrode 2011, and the rear end of the first leaf 1011 located near the left side is electrically connected to the first negative heating electrode 2012. Figure 4 , Figure 7 , Figure 15 and Figure 18 As shown, the rear end of the second leaf 1021 located near the right side is electrically connected to the second positive heating electrode 2021, and the rear end of the second leaf 1021 located near the left side is electrically connected to the second negative heating electrode 2022.

[0081] By designing the boat 11, the positive heating electrode 21, and the negative heating electrode 22 as described above, the distance between the positive heating electrode 21 and the negative heating electrode 22 and the corresponding boat 11 can be shortened, making it easier to achieve electrical connection between the positive heating electrode 21 and the negative heating electrode 22 and the corresponding boat 11.

[0082] In some embodiments, such as Figures 2 to 5 , Figure 7 As shown, each boat leaf 11 has lugs 12 at both ends along a third direction. In the first direction, conductive blocks 24 are disposed between two adjacent lugs 12 to make the two adjacent lugs 12 electrically connected, and insulating blocks 25 are disposed between two adjacent lugs 12 to make the two adjacent lugs 12 insulated from each other.

[0083] For example, the conductive block 24 corresponding to the first electrode assembly 201 is the first conductive block 205, the insulating block 25 corresponding to the first electrode assembly 201 is the first insulating block 206, and the lugs 12 at both ends of the first leaf 1011 are the first lugs 1012. Figure 7 , Figures 10 to 12 As shown, the first boat leaf 1011 has first lugs 1012 at both its front and rear ends. At the rear of the first boat assembly 101, a first conductive block 205 is clamped between two adjacent first lugs 1012, thereby achieving electrical connection between the rear ends of two adjacent first boat leaves 1011. At the rear of the first boat assembly 101, a first insulating block 206 is clamped between two adjacent first lugs 1012, thereby achieving mutual insulation between the rear ends of two adjacent first boat leaves 1011. By providing a first conductive block 205 or a first insulating block 206 between two adjacent first lugs 1012, electrical connection between multiple first boat leaves 1011 is achieved, and a portion of the first boat leaves 1011 are connected in series.

[0084] For example, the conductive block 24 of the second electrode assembly 202 is the second conductive block 207, the insulating block 25 of the second electrode assembly 202 is the second insulating block 208, and the lugs 12 at both ends of the second leaf 1021 are the second lugs 1022. Figure 7 , Figures 15 to 18 As shown, the second boat leaf 1021 has second lugs 1022 at both its front and rear ends. On the rear side of the second boat assembly 102, a second conductive block 207 is clamped between two adjacent second lugs 1022, achieving electrical connection between the rear ends of two adjacent second boat leaves 1021. On the rear side of the second boat assembly 102, a second insulating block 208 is clamped between two adjacent second lugs 1022, achieving mutual insulation between the rear ends of two adjacent second boat leaves 1021. By setting the second conductive block 207 or the second insulating block 208 between two adjacent second lugs 1022, electrical connection between multiple second boat leaves 1021 is achieved, and a portion of the second boat leaves 1021 are connected in series.

[0085] By setting conductive blocks 24 and insulating blocks 25, it is convenient to realize parallel and series connection between adjacent boat leaves 11 in the same group of boat components 1, thereby facilitating the processing and manufacturing of boat structure 10 and helping to reduce the cost of boat structure 10.

[0086] In some embodiments, at least one set of electrode assemblies 2 includes at least two conductive blocks 24, at least one conductive block 24 forming a positive heating electrode 21, and at least one conductive block 24 forming a negative heating electrode 22.

[0087] In this configuration, at least one set of electrode components 2 includes at least two conductive blocks 24, which can be understood as: each set of electrode components 2 includes at least two conductive blocks 24; or, one set of electrode components 2 includes at least two conductive blocks 24, and another set of electrode components 2 includes one conductive block 24. At least one conductive block 24 forms a positive heating electrode 21, which can be understood as: one of the conductive blocks 24 forms a positive heating electrode 21; or, two or more conductive blocks 24 form a positive heating electrode 21. At least one conductive block 24 forms a negative heating electrode 22, which can be understood as: one of the conductive blocks 24 forms a negative heating electrode 22; or, two or more conductive blocks 24 form a negative heating electrode 22.

[0088] For example, such as Figure 10 and Figure 13 As shown, ten first conductive blocks 205 and two first insulating blocks 206 are arranged at the rear end of the first boat assembly 101. The three first conductive blocks 205 adjacent to each other on the right form the first positive heating electrode 2011, and the three first conductive blocks 205 adjacent to each other on the left form the first negative heating electrode 2012.

[0089] For example, such as Figure 15 and Figure 18 As shown, nine second conductive blocks 207 and two second insulating blocks 208 are arranged at the rear end of the second boat assembly 102. The three adjacent second conductive blocks 207 on the right side form the second positive heating electrode 2021, and the three adjacent second conductive blocks 207 on the left side form the second negative heating electrode 2022.

[0090] By forming at least one conductive block 24 as a positive heating electrode 21 and at least one conductive block 24 as a negative heating electrode 22, a portion of the conductive blocks 24 not only serve as electrical connections between the same ends of two adjacent boat leaves 11 in the same boat assembly 1, but also function as positive or negative heating electrodes 21 or 22 for electrical connection with a heating power source. This reduces the number of parts in the boat structure 10, simplifies its structure, facilitates assembly, and lowers its cost.

[0091] In some embodiments, such as Figure 7 and Figure 8 As shown, at least one conductive block 24 includes a plurality of clamping portions, with a gap between two adjacent clamping portions of the same conductive block 24 to avoid the lugs 12. In a first direction, each clamping portion is clamped between two adjacent lugs 12 of the same boat assembly 1.

[0092] For example, the positive heating electrode 21 formed by the conductive block 24 includes multiple clamping portions. The clamping portion of the positive heating electrode 21 is the positive clamping portion 212, and the interval between two adjacent positive clamping portions 212 is the positive interval 213. The positive interval 213 is used to avoid the lug 12.

[0093] For example, such as Figure 7 and Figure 8 As shown, the positive electrode clamping portion 212 of the first positive electrode heating electrode 2011 is a first positive electrode clamping portion, and the positive electrode spacing 213 of the first positive electrode heating electrode 2011 is a first positive electrode spacing. The first positive electrode spacing is used to avoid the first lug 1012, and each first positive electrode clamping portion 212 is clamped between two adjacent first lugs 1012 in the first direction. The positive electrode clamping portion 212 of the second positive electrode heating electrode 2011 is a second positive electrode clamping portion 2025, and the positive electrode spacing 213 of the second positive electrode heating electrode 2011 is a second positive electrode spacing 2026. The second positive electrode spacing 2026 is used to avoid the second lug 1022, and each second positive electrode clamping portion 2025 is clamped between two adjacent second lugs 1022 in the third direction.

[0094] For example, the first positive heating electrode 2011 includes three first positive electrode clamping portions 212, which are arranged at intervals in the left-right direction, and there is a first positive electrode gap 213 between two adjacent first positive electrode clamping portions 212. Each first positive electrode gap 213 is provided with a first lug 1012, and the leftmost first positive electrode clamping portion 212 is provided with a first lug 1012 on the left side, and the rightmost first positive electrode clamping portion 212 is provided with a first lug 1012 on the right side, so that each first positive electrode clamping portion 212 is clamped between two adjacent first lugs 1012 in the left-right direction, thereby realizing the electrical connection of the rear end of the four first leaf 1011. The second positive heating electrode 2021 includes three second positive electrode clamping portions 2025, which are spaced apart in the left-right direction. A second positive electrode gap 2026 is provided between adjacent two second positive electrode clamping portions 2025. Each second positive electrode gap 2026 is provided with a second lug 1022. The leftmost second positive electrode clamping portion 2025 has a second lug 1022 on its left side, and the rightmost second positive electrode clamping portion 2025 has a second lug 1022 on its right side. This ensures that each second positive electrode clamping portion 2025 is clamped between adjacent two second lugs 1022 in the left-right direction, achieving electrical connection of the rear ends of the four second boats 1021. (Same group of boat assemblies) For example, such as Figure 7 and Figure 8As shown, the negative electrode heating electrode 22 formed by the conductive block 24 includes multiple clamping portions. The clamping portions of the negative electrode heating electrode 22 are negative electrode clamping portions 222. The interval between two adjacent negative electrode clamping portions 222 of the same negative electrode heating electrode 22 is a negative electrode interval 223. The negative electrode interval 223 is used to avoid the lugs 12. In the first direction, each negative electrode clamping portion 222 is clamped between two adjacent lugs 12 of the same boat assembly 1.

[0095] For example, such as Figure 7 and Figure 8 As shown, the negative electrode clamping portion 222 of the first negative electrode heating electrode 2012 is the first negative electrode clamping portion 2015, and the negative electrode spacing 223 of the first negative electrode heating electrode 2012 is the first negative electrode spacing 2016. The first negative electrode spacing 2016 is used to avoid the first lug 1012, and each first negative electrode clamping portion 2015 is clamped between two adjacent first lugs 1012 in the first direction. The negative electrode clamping portion 222 of the second negative electrode heating electrode 2022 is the second negative electrode clamping portion 2027, and the negative electrode spacing 223 of the second negative electrode heating electrode 2022 is the second negative electrode spacing 2028. The second negative electrode spacing 2028 is used to avoid the second lug 1022, and each second negative electrode clamping portion 2027 is clamped between two adjacent second lugs 1022 in the third direction.

[0096] For example, the first negative electrode heating electrode 2012 includes three first negative electrode clamping portions 2015, which are arranged at intervals in the left-right direction, and there is a first negative electrode gap 2016 between two adjacent first negative electrode clamping portions 2015. Each first negative electrode gap 2016 is provided with a first lug 1012, and the leftmost first negative electrode clamping portion 2015 is provided with a first lug 1012 on its left side, and the rightmost first negative electrode clamping portion 2015 is provided with a first lug 1012 on its right side, so that each first negative electrode clamping portion 2015 is clamped between two adjacent first lugs 1012 in the left-right direction, thereby realizing the electrical connection of the rear end of the four first leaf 1011. The second negative electrode heating electrode 2022 includes three second negative electrode clamping portions 2027, which are arranged at intervals in the left-right direction. There is a second negative electrode gap 2028 between two adjacent second negative electrode clamping portions 2027. Each second negative electrode gap 2028 is provided with a second lug 1022. The leftmost second negative electrode clamping portion 2027 is provided with a second lug 1022 on its left side, and the rightmost second negative electrode clamping portion 2027 is provided with a second lug 1022 on its right side. This allows each second negative electrode clamping portion 2027 to be clamped between two adjacent second lugs 1022 in the left-right direction, thereby achieving electrical connection of the rear ends of the four second leaflets 1021.

[0097] By designing the conductive block 24 as described above, an electrical connection can be made at the same end of multiple boat leaves 11 in the same group of boat components 1 using a single conductive block 24. This further reduces the number of parts in the boat structure 10 and lowers the cost of the boat structure 10.

[0098] In some embodiments, each lug 12 is provided with a first connecting hole, such as Figure 2 , Figure 8 , Figure 15 and Figure 16 As shown, the boat assembly 1 also includes a first connecting rod 13 and a first nut 14. The first connecting rod 13 passes through a first connecting hole and is threadedly connected to the first nut 14, thereby connecting the lugs 12 of multiple boat blades 11 in the same group of boat assemblies 1. The first connecting rod 13 can be a ceramic rod. The lugs 12 of multiple boat blades 11 located on the same side of the boat assembly 1 in the same group of boat assemblies 1 are connected by the same first connecting rod 13.

[0099] Each leaf 11 is provided with a second connecting hole, such as Figure 7 , Figure 10 and Figure 11 As shown, the boat structure 10 also includes a second connecting rod 3, a second nut 4, and a spacer 5. The second connecting rod 3 passes through the second connecting hole of each boat leaf 11 in the left-right direction and is connected to the second nut 4, thereby connecting the first boat assembly 101 and the second boat assembly 102. The first boat leaf 1011 is separated from the adjacent second boat leaf 1021 by the spacer 5, achieving insulation between the first boat leaf 1011 and the second boat leaf 1021. The second connecting rod 3 can be a ceramic rod, and the spacer 5 can be a ceramic block.

[0100] In some embodiments, such as Figures 3 to 5 , Figure 10 , Figures 12 to 14 As shown, the first insulating block 206 is provided with a first supporting leg 26, and the second insulating block 208 is provided with a second supporting leg 27. The first supporting leg 26 and the second supporting leg 27 are used to support the boat structure 10. The second supporting leg 27 and the first supporting leg 26 are arranged on both sides of the boat structure 10 in a third-dimensional direction.

[0101] For example, the first support leg 26 is located behind the second support leg 27.

[0102] In some embodiments, such as Figure 7 As shown, the positive heating electrode 21 has a positive conductive surface 211 facing the second direction, which is used for electrical connection with the positive terminal of the heating power supply. The negative heating electrode 22 has a negative conductive surface 221 facing the second direction, which is used for electrical connection with the negative terminal of the heating power supply. The positive conductive surfaces 211 and 221 of the same electrode assembly 2 have the same orientation.

[0103] For example, such as Figure 7 and Figure 8 As shown, the first positive heating electrode 2011 has a downward-facing first positive conductive surface 2013, and the first negative heating electrode 2012 has a downward-facing first negative conductive surface 2014. The first positive conductive surface 2013 is used for electrical connection with the positive terminal of the heating power supply, and the first negative conductive surface 2014 is used for electrical connection with the negative terminal of the heating power supply. The second positive heating electrode 2021 has a downward-facing second positive conductive surface 2023, and the second negative heating electrode 2022 has a downward-facing second negative conductive surface 2024. The second positive conductive surface 2023 is used for electrical connection with the positive terminal of the heating power supply, and the second negative conductive surface 2024 is used for electrical connection with the negative terminal of the heating power supply.

[0104] Figure 20 The diagram shown is a schematic diagram of the boat structure and the electrical connection between the radio frequency power supply and the heating power supply provided in another embodiment of this application. Figure 21 The diagram shown is a schematic diagram of the boat structure and the electrical connection between the radio frequency power supply and the heating power supply provided in another embodiment of this application. Figure 22 The diagram shown is a schematic representation of the electrical connection between the boat structure and the radio frequency power supply and the heating power supply according to another embodiment of this application. Wherein, Figures 20 to 22 Darker colored arrows indicate the direction of current flow from the heating power supply, while lighter colored arrows indicate the direction of current flow from the radio frequency power supply.

[0105] In some embodiments, such as Figures 20 to 22 As shown, in the same group of boat components 1, some boat leaves 11 are connected in parallel to form a parallel group, and multiple parallel groups are connected in series to form a current loop. A conductive block 24 is provided between adjacent boats 11 in the same parallel group. In adjacent parallel groups, an insulating block 25 is provided between the first ends of adjacent parallel groups, and a conductive block 24 is provided between the second ends of adjacent parallel groups, so that adjacent parallel groups are connected in series.

[0106] For example, such as Figure 20 As shown, a total of 32 boat leaves 11 are arranged, of which 16 form the first boat assembly 101 and the other 16 form the second boat assembly 102. In the first boat assembly 101, four adjacent boat leaves 11 are connected in parallel to form four parallel groups, and these four parallel groups are connected in series. Figure 21 As shown, a total of 32 boat leaves 11 are arranged, of which 16 form the first boat assembly 101 and the other 16 form the second boat assembly 102. In the first boat assembly 101, eight boat leaves 11 are arranged in parallel to form two parallel groups, which are then connected in series. In the second boat assembly 102, eight boat leaves 11 are arranged in parallel to form two parallel groups, which are then connected in series. Figure 22As shown, a total of 30 leaf blades 11 are arranged, of which 15 form the first boat assembly 101 and the other 15 form the second boat assembly 102. In the first boat assembly 101, six leaf blades 11 are arranged in parallel, and the other nine leaf blades 11 are also arranged in parallel, so that the first boat assembly 101 forms two parallel groups, namely the first parallel group 103 and the second parallel group 104. The thickness of the leaf blades 11 in the first parallel group 103 is greater than that in the second parallel group 104, so that the resistance of the first parallel group 103 is comparable to that of the second parallel group 104. The arrangement of the second boat assembly 102 is similar to that of the first boat assembly 101, also forming two parallel groups. A conductive block 24 is provided between adjacent leaf blades 11 in the same parallel group, and the parallel connection between adjacent leaf blades 11 in the same parallel group is realized through the conductive block 24.

[0107] By setting conductive blocks 24 between adjacent boat blades 11 in the same parallel group, parallel connection between adjacent boat blades 11 can be easily achieved. By setting conductive blocks 24 and insulating blocks 25 between adjacent parallel groups, parallel connection and series connection between parallel groups can be easily achieved. This facilitates the processing and manufacturing of the boat structure 10 and helps to reduce the cost of the boat structure 10.

[0108] like Figure 20 As shown, it can be understood that when all parallel groups in the same group of boat components 1 are connected to only one RF power supply, the RF current will flow from the middle boat 11 to the boats 11 on both sides. The path of the RF current is relatively long, resulting in weaker RF energy when the RF current reaches the boats 11 on both sides, which in turn results in a weaker RF electric field, resulting in a thinner film layer during coating (the film layer does not reach the standard thickness).

[0109] In some embodiments, the first electrode assembly 201 and the second electrode assembly 202 respectively provide a plurality of first contact terminals 203 and a plurality of second contact terminals 204 connected to an RF power supply. One first contact terminal 203 and one second contact terminal 204 form one RF electrode 23, and there are multiple RF electrodes 23. The number of RF electrodes 23 is the same as the number of parallel groups. In one RF electrode, the first contact terminal 203 is electrically connected to one parallel group in the first boat assembly 101, and the second contact terminal 204 is electrically connected to one parallel group in the second boat assembly 102.

[0110] For example, in the same RF electrode, the first contact terminal 203 is electrically connected to a parallel group in the first boat assembly 101, and the second contact terminal 204 is electrically connected to a parallel group in the second boat assembly 102. When both the first boat assembly 101 and the second boat assembly 102 include two parallel groups, two RF electrodes are required; when both the first boat assembly 101 and the second boat assembly 102 include three parallel groups, three RF electrodes are required.

[0111] By setting the number of RF electrodes to be the same as the number of parallel groups, the path of RF current can be effectively shortened, avoiding weak RF energy, thereby increasing the film thickness during coating and ensuring product quality.

[0112] In some embodiments, such as Figure 21 and Figure 22 As shown, there are two radio frequency (RF) electrodes, namely a first RF electrode and a second RF electrode. There are two parallel groups in the same boat assembly 1, namely a first parallel group 103 and a second parallel group 104. An insulating block 25 is provided between the first ends of the first parallel group 103 and the second parallel group 104, and a conductive block 24 is provided between the second ends of the first parallel group 103 and the second parallel group 104, so that the first parallel group 103 and the second parallel group 104 in the same boat assembly 1 are connected in series. The first contact terminal 203 of the first RF electrode is electrically connected to the RF power supply and the first parallel group 103 in the first boat assembly 101, respectively. The second contact terminal 204 of the first RF electrode is electrically connected to the RF power supply and the first parallel group 103 in the second boat assembly 102, respectively. The first contact terminal 203 in the second radio frequency electrode is electrically connected to the radio frequency power supply and the second parallel group 104 in the first boat assembly 101, respectively. The second contact terminal 204 in the second radio frequency electrode is electrically connected to the radio frequency power supply and the second parallel group 104 in the second boat assembly 102, respectively.

[0113] The radio frequency (RF) power supply can be one or two. When there is one RF power supply, it is split into two paths by a splitter. One path is connected to the first parallel group 103 of the same boat component 1, and the other path is connected to the second parallel group 104 of the same boat component 1. When there are two RF power supplies, one RF power supply is connected to the first parallel group 103 of the same boat component 1, and the other RF power supply is connected to the second parallel group 104 of the same boat component 1.

[0114] By setting two radio frequency electrodes and two parallel groups in the same boat assembly 1, the number of radio frequency electrodes 23 can be reduced, thereby reducing the number of radio frequency electrode rods electrically connected to the radio frequency electrodes 23, reducing the space occupied by the radio frequency electrode rods, and facilitating the layout design of the radio frequency electrode rods.

[0115] Figure 23 The image shown is a perspective view of the boat structure electrically connected to the radio frequency electrode rod and the heating electrode rod according to an embodiment of this application. Exemplarily, as shown... Figure 23As shown, the boat structure 10 is used in conjunction with the first positive electrode rod 20, the first negative electrode rod 30, the second positive electrode rod 40, and the second negative electrode rod 50. One end of the first positive electrode rod 20 is electrically connected to the positive terminal of the heating power supply, and the other end of the first positive electrode rod 20 has a first positive contact surface, with the first positive conductive surface 2013 facing downwards and abutting against the first positive contact surface. One end of the first negative electrode rod 30 is electrically connected to the negative terminal of the heating power supply, and the other end of the first negative electrode rod 30 has a first negative contact surface, with the first negative conductive surface 2014 facing downwards and abutting against the first negative contact surface. One end of the second positive electrode rod 40 is electrically connected to the positive terminal of the heating power supply, and the other end of the second positive electrode rod 40 has a second positive contact surface, with the second positive conductive surface 2023 facing downwards and abutting against the second positive contact surface. One end of the second negative electrode rod 50 is electrically connected to the negative electrode of the heating power supply, and the other end of the second negative electrode rod 50 is provided with a second negative electrode contact surface, with the second negative electrode conductive surface 2024 facing downward and abutting against the second negative electrode contact surface.

[0116] By providing a positive conductive surface 211 for electrical connection with the positive electrode of the heating power supply on the positive electrode heating electrode 21, and a negative conductive surface 221 for electrical connection with the negative electrode of the heating power supply on the negative electrode heating electrode 22, and by providing a positive conductive surface 211 and a negative conductive surface 221 for electrical connection with the negative electrode of the heating power supply on the negative electrode heating electrode 22, and by providing a positive conductive surface 211 and a negative conductive surface 221 for electrical connection with the heating power supply on the same set of electrode components 2, it is not only convenient for the positive electrode heating electrode 21 and the negative electrode heating electrode 22 to be electrically connected to the heating power supply, but also the electrical connection area between the positive electrode heating electrode 21 and the negative electrode heating electrode 22 and the heating power supply can be increased, thereby further improving the production efficiency of the boat structure 10 during the process of manufacturing and improving the reliability of the boat structure 10.

[0117] The processing equipment of this application includes a main body and a boat structure 10 as described in any of the above embodiments. The main body has a process chamber, and the boat structure 10 can be placed inside the process chamber. It should be understood that the description of the embodiments of the boat structure 10 corresponds to the description of the processing equipment embodiments; therefore, any parts not described in detail can be referred to the preceding embodiments of the boat structure 10.

[0118] The processing equipment provided in this embodiment uses the boat 11 to directly heat the product placed on it, which effectively improves the heating efficiency of the product, thereby reducing the energy consumption of the boat structure 10 during processing and shortening the production time delayed due to excessive heating time. This can speed up the production cycle and improve production efficiency.

[0119] For example, the processing equipment can be any equipment capable of coating an object.

[0120] For example, the processing equipment may include a vapor deposition apparatus. For instance, the processing equipment may include a physical vapor deposition (PVD) apparatus. For example, the processing equipment may include a magnetron sputtering PVD apparatus. Specifically, the processing equipment is used to deposit a coating onto a workpiece. The workpiece to be coated may include components or raw materials used to form photovoltaic modules. For example, the workpiece to be coated may be a silicon wafer, a cell, a crystal wafer, etc. The processing equipment can also be used to prepare perovskite layers, electron transport layers, hole transport layers, encapsulation layers, and transparent electrodes for perovskite photovoltaic cells. The processing equipment can also be used to prepare tandem cells.

[0121] Figure 24 The image shown is a perspective view of the boat structure electrically connected to the radio frequency electrode rod and the heating electrode rod according to another embodiment of this application. Figure 25 The image shown is a perspective view of the boat structure electrically connected to the radio frequency electrode rod and the heating electrode rod according to another embodiment of this application.

[0122] In some embodiments, the process chamber is provided with a plurality of heating electrode rods and a plurality of radio frequency (RF) electrode rods. The heating electrode rods include the aforementioned first positive electrode rod 20, first negative electrode rod 30, second positive electrode rod 40, and second negative electrode rod 50. The RF electrode rods include a first RF electrode rod 60 and a second RF electrode rod 70. One end of the first RF electrode rod 60 is electrically connected to the anode of the RF power supply, and the other end is electrically connected to the first contact terminal 203. One end of the second RF electrode rod 70 is electrically connected to the cathode of the RF power supply, and the other end is electrically connected to the second contact terminal 204.

[0123] For example, such as Figures 23 to 25 As shown, the first RF electrode rod 60 and the second RF electrode rod 70 are respectively inserted into the first contact terminal 203 and the second contact terminal 204 to realize the electrical connection between the first contact terminal 203 and the positive terminal of the RF power supply, and the second contact terminal 204 and the negative terminal of the RF power supply.

[0124] For example, such as Figures 23 to 25 As shown, the first contact terminal 203 is provided with a first radio frequency hole, and one end of the first radio frequency electrode rod 60 is inserted into the first radio frequency hole; the second contact terminal 204 is provided with a second radio frequency hole, and one end of the second radio frequency electrode rod 70 is inserted into the second radio frequency hole.

[0125] For example, such as Figure 24 and Figure 25As shown, the first positive electrode rod 20 is electrically connected to the first positive heating electrode 2011, the first negative electrode rod 30 is connected to the first negative heating electrode 2012, the second positive electrode rod 40 is connected to the second positive heating electrode 2021, and the second negative electrode rod 50 is connected to the second negative heating electrode 2022 through plug-in connection.

[0126] For example, such as Figure 23 and Figure 24 As shown, the first positive heating electrode 2011 has a first positive conductive hole, and one end of the first positive electrode rod 20 is inserted into the first positive conductive hole to achieve electrical connection between the first positive electrode rod 20 and the first positive heating electrode 2011. The first negative heating electrode 2012 has a first negative conductive hole, and one end of the first negative electrode rod 30 is inserted into the first negative conductive hole to achieve electrical connection between the first negative electrode rod 30 and the first negative heating electrode 2012. The second positive heating electrode 2021 has a second positive conductive hole, and one end of the second positive electrode rod 40 is inserted into the second positive conductive hole to achieve electrical connection between the second positive electrode rod 40 and the second positive heating electrode 2021. The second negative heating electrode 2022 has a second negative conductive hole, and one end of the second negative electrode rod 50 is inserted into the second negative conductive hole to achieve electrical connection between the second negative electrode rod 50 and the second negative heating electrode 2022.

[0127] in, Figure 25 and Figure 24 The difference is that, Figure 24 Each of the following electrodes is provided: a first positive heating electrode 2011, a first negative heating electrode 2012, a second positive heating electrode 2021, and a second negative heating electrode 2022. Figure 25 Multiple first positive heating electrode 2011, first negative heating electrode 2012, second positive heating electrode 2021 and second negative heating electrode 2022 are provided.

[0128] like Figure 25As shown, the first positive electrode rod 20 includes a first positive main rod and multiple first positive support rods. Each first positive support rod corresponds to a first positive conductive hole. One end of each first positive support rod is inserted into its corresponding first positive conductive hole. The other ends of the multiple first positive support rods are electrically connected to one end of the first positive main rod, and the other end of the first positive main rod is electrically connected to the positive terminal of the heating power supply. The first negative electrode rod 30 includes a first negative main rod and multiple first negative support rods. Each first negative support rod corresponds to a first negative conductive hole. One end of each first negative support rod is inserted into its corresponding first negative conductive hole. The other ends of the multiple first negative support rods are electrically connected to one end of the first negative main rod, and the other end of the first negative main rod is electrically connected to the negative terminal of the heating power supply. The second positive electrode rod 40 includes a second positive main rod and multiple second positive support rods. Each second positive support rod corresponds one-to-one with a second positive conductive hole. One end of each second positive support rod is inserted into its corresponding second positive conductive hole. The other ends of all the second positive support rods are electrically connected to one end of the second positive main rod, and the other end of the second positive main rod is electrically connected to the positive terminal of the heating power supply. The second negative electrode rod 50 includes a second negative main rod and multiple second negative support rods. Each second negative support rod corresponds one-to-one with a second negative conductive hole. One end of each second negative support rod is inserted into its corresponding second negative conductive hole. The other ends of all the second negative support rods are electrically connected to one end of the second negative main rod, and the other end of the second negative main rod is electrically connected to the negative terminal of the heating power supply.

[0129] For example, the boat structure 10 also includes an electrical control assembly (not shown) and a ventilation assembly. The electrical control assembly can be used for controlling and monitoring signals, power, current, voltage, airflow, etc., during the coating process. The ventilation assembly can be used to introduce process gases into the process chamber during the coating process.

[0130] The boat structure 10 and processing equipment in this embodiment utilize the boat leaf 11 as a heating resistor to heat the product to be processed. This brings the heat source closer to the product, resulting in more direct heating, faster heating response, and reduced heating and holding time. It also reduces the preheating preparation time from when the processing equipment enters the boat to when processing begins, thereby increasing the processing capacity. Furthermore, it eliminates the need for an external heat field, simplifying the equipment's structure and reducing its cost.

[0131] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications or equivalent substitutions made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A boat structure, characterized in that, include: At least one set of boat components, each set of boat components including multiple boat blades, the multiple boat blades of the same set of boat components being arranged at intervals along a first direction, and the multiple boat blades of the same set of boat components being electrically connected to each other; At least one set of electrode assemblies, each set of electrode assemblies including a positive heating electrode for electrical connection to the positive terminal of a heating power source and a negative heating electrode for electrical connection to the negative terminal of the heating power source, wherein the first and last boat pages in the same set of boat assemblies are respectively electrically connected to the positive heating electrode and the negative heating electrode in the set of electrode assemblies to form a complete current loop.

2. The boat structure according to claim 1, characterized in that, The boat structure includes two sets of boat components, namely a first boat component and a second boat component. The boat leaf in the first boat component is a first boat leaf, and the boat leaf in the second boat component is a second boat leaf. The first boat leaf and the second boat leaf are arranged alternately and at intervals along the first direction, and the first boat leaf and the second boat leaf are insulated from each other. The boat structure includes two sets of electrode assemblies, namely a first electrode assembly and a second electrode assembly. The first first boat leaf and the last first boat leaf in the first boat assembly are electrically connected to the positive heating electrode and the negative heating electrode in the first electrode assembly, respectively. The first second boat leaf and the last second boat leaf in the second boat assembly are electrically connected to the positive heating electrode and the negative heating electrode in the second electrode assembly, respectively. The first electrode assembly and the second electrode assembly are arranged at intervals along a second direction, wherein the second direction is perpendicular to the first direction. The first electrode assembly and the second electrode assembly respectively provide a first contact terminal and a second contact terminal connected to an RF power supply. The first contact terminal and the second contact terminal form an RF electrode, which is configured to provide an RF voltage to the first and second pages when connected to the RF power supply.

3. The boat structure according to claim 2, characterized in that, The positive heating electrode and the negative heating electrode of the same group of electrode assemblies are arranged on the same side of the group of boat assemblies in a third direction, which is perpendicular to the first direction and the second direction; The first electrode assembly and the second electrode assembly are respectively disposed on the same side of the first boat assembly and the second boat assembly in the third direction, and / or, The positive heating electrode, the negative heating electrode, and the first contact terminal of the first electrode assembly are disposed on the same side of the first boat assembly in the third direction, and the positive heating electrode, the negative heating electrode, and the second contact terminal of the second electrode assembly are disposed on the same side of the second boat assembly in the third direction.

4. The boat structure according to claim 3, characterized in that, In the first electrode assembly, the first contact terminal is disposed between the positive heating electrode and the negative heating electrode in the first direction; and / or, In the second electrode assembly, the second contact terminal is disposed between the positive heating electrode and the negative heating electrode in the first direction.

5. The boat structure according to claim 1, characterized in that, The positive heating electrode has a positive conductive surface facing the second direction, which is used to be electrically connected to the positive electrode of the heating power supply. The negative heating electrode has a negative conductive surface facing the second direction, which is used to be electrically connected to the negative electrode of the heating power supply. The positive and negative conductive surfaces of the same group of electrode assemblies have the same orientation, wherein the second direction is perpendicular to the first direction.

6. The boat structure according to claim 2, characterized in that, At least a portion of the boat blades in the same group of boat components are connected in series. In a third direction, the positive heating electrode is electrically connected to the end of the boat blade closest to the positive heating electrode, and the negative heating electrode is electrically connected to the end of the boat blade closest to the negative heating electrode. The third direction is perpendicular to the first direction and the second direction.

7. The boat structure according to claim 6, characterized in that, In the same group of boat components, a portion of the boat blades are connected in parallel to form a parallel group, and multiple parallel groups are connected in series to form the current loop; In this configuration, a conductive block is provided between adjacent leaf blades in the same parallel group, and an insulating block is provided between the first ends of adjacent parallel groups, and the conductive block is provided between the second ends of adjacent parallel groups, so that adjacent parallel groups are connected in series.

8. The boat structure according to claim 7, characterized in that, The first electrode assembly and the second electrode assembly respectively provide a plurality of first contact terminals and a plurality of second contact terminals connected to the radio frequency power supply. One first contact terminal and one second contact terminal form one radio frequency electrode. There are a plurality of radio frequency electrodes, wherein the number of radio frequency electrodes is the same as the number of parallel groups. In one of the radio frequency electrodes, the first contact terminal is electrically connected to one of the parallel groups in the first boat assembly, and the second contact terminal is electrically connected to one of the parallel groups in the second boat assembly.

9. The boat structure according to claim 8, characterized in that, There are two radio frequency electrodes, namely a first radio frequency electrode and a second radio frequency electrode. There are two parallel groups in the same group of boat components, namely a first parallel group and a second parallel group. An insulating block is provided between the first end of the first parallel group and the second parallel group, and a conductive block is provided between the second end of the first parallel group and the second parallel group, so that the first parallel group and the second parallel group in the same group of boat components are connected in series. The first contact terminal in the first radio frequency electrode is electrically connected to the radio frequency power supply and the first parallel group in the first boat assembly, respectively; the second contact terminal in the first radio frequency electrode is electrically connected to the radio frequency power supply and the first parallel group in the second boat assembly, respectively. The first contact terminal in the second radio frequency electrode is electrically connected to the radio frequency power supply and the second parallel group in the first boat assembly, respectively. The second contact terminal in the second radio frequency electrode is electrically connected to the radio frequency power supply and the second parallel group in the second boat assembly, respectively.

10. The boat structure according to claim 7, characterized in that, Each of the said leaf blades has lugs at both ends along a third direction, the third direction being perpendicular to the first direction; In the first direction, each of the conductive blocks is disposed between two adjacent lugs to make the two adjacent lugs electrically connected, and each of the insulating blocks is disposed between two adjacent lugs to make the two adjacent lugs insulated from each other.

11. The boat structure according to claim 10, characterized in that, At least one set of the electrode assemblies includes at least two of the conductive blocks, at least one of the conductive blocks forming the positive heating electrode, and at least one of the conductive blocks forming the negative heating electrode.

12. The boat structure according to claim 10, characterized in that, At least one of the conductive blocks includes a plurality of clamping portions, with a gap between two adjacent clamping portions of the same conductive block, the gap being used to avoid the lugs, and in the first direction, each clamping portion clamps between two adjacent lugs of the same group of boat assemblies.

13. A processing equipment, characterized in that, include: The main body of the equipment has a process chamber; The boat structure according to any one of claims 1-12 can be placed inside the process chamber.

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