Gas inlet structure, upper electrode assembly, and process chamber

Abstract

The application discloses an air inlet structure, an upper electrode assembly and a process chamber. The air inlet structure comprises a center area, a transition area surrounding the center area, and an edge area surrounding the transition area in a radial direction. The air inlet structure comprises an air inlet channel, a diffusion channel and a uniform flow channel arranged in sequence in a thickness direction. The air inlet channel is located in a region corresponding to the center area, and comprises a center air inlet hole, a transition air inlet hole and an edge air inlet hole. The uniform flow channel comprises a center uniform flow channel located in the center area, a transition uniform flow channel located in the transition area, and an edge uniform flow channel located in the edge area. The uniform flow channel is provided with a plurality of uniform flow holes on a side away from the diffusion channel, which serve as air outlets of the uniform flow channel. The diffusion channel comprises a center diffusion channel connecting the center air inlet hole and the center uniform flow channel, a transition diffusion channel connecting the transition air inlet hole and the transition uniform flow channel, and an edge diffusion channel connecting the edge air inlet hole and the edge uniform flow channel. The application can improve the uniformity of gas.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, specifically to an air intake structure, an upper electrode assembly, and a process chamber. Background Technology

[0002] In IC (integrated circuit) manufacturing processes, dielectric etching machines are indispensable equipment. Within these machines, the air intake structure affects the uniformity of airflow, which directly determines the chip processing quality.

[0003] In one existing air intake structure, the process gas enters the gas cavity inside the gas distribution plate through the air intake hole, and then enters the process chamber through small holes evenly distributed on the upper electrode plate. Because the process gas does not diffuse sufficiently within the gas cavity, its distribution is uneven, resulting in an uneven flow of process gas into the final process chamber, thus reducing the uniformity of etching. Summary of the Invention

[0004] To address the aforementioned technical problems, this application provides an air intake structure, an upper electrode assembly, and a process chamber, which can improve the problem of uneven air intake.

[0005] To solve the above-mentioned technical problems, in a first aspect, embodiments of this application provide an air intake structure, the air intake structure including a central region, a transition region surrounding the central region, and an edge region surrounding the transition region in a radial direction;

[0006] The air intake structure includes an air intake channel, a diffusion channel, and a flow equalization channel arranged sequentially along the thickness direction;

[0007] The air intake channel is located in the area corresponding to the central area, and the air intake channel includes a central air intake, a transition air intake, and an edge air intake.

[0008] The uniform flow channel includes a central uniform flow channel located in the central region, a transition uniform flow channel located in the transition region, and an edge uniform flow channel located in the edge region; the uniform flow channel is provided with a plurality of uniform flow holes on the side away from the diffusion channel, which serve as the air outlet of the uniform flow channel;

[0009] The diffusion channel includes a central diffusion channel connecting the central air inlet and the central uniform flow channel, a transition diffusion channel connecting the transition air inlet and the transition uniform flow channel, and an edge diffusion channel connecting the edge air inlet and the edge uniform flow channel.

[0010] Optionally, the central diffusion channel is located in the central region;

[0011] The transition diffusion channel is located in the central region and the transition region;

[0012] The edge diffusion channel is located in the central region, the transition region, and the edge region.

[0013] Optionally, the air intake structure includes a first flow equalizer, a second flow equalizer, and a third flow equalizer along the thickness direction;

[0014] The air intake channel is disposed on the first flow equalizer plate;

[0015] The diffusion channel is disposed between the first flow equalizer and the second flow equalizer;

[0016] The flow equalization channel is disposed between the second flow equalization plate and the third flow equalization plate, and the third flow equalization plate has a plurality of flow equalization holes on the side opposite to the second flow equalization plate.

[0017] Optionally, the second flow equalizer has a central diffusion groove, a transition diffusion groove, and an edge diffusion groove extending radially on the side facing the first flow equalizer, and / or the first flow equalizer has a central diffusion groove, a transition diffusion groove, and an edge diffusion groove extending radially on the side facing the second flow equalizer; the first flow equalizer and the second flow equalizer are sealed together so that the central diffusion groove, the transition diffusion groove, and the edge diffusion groove respectively form the central diffusion channel, the transition diffusion channel, and the edge diffusion channel;

[0018] The central diffusion groove is provided with a first central through hole that communicates with the central uniform flow channel.

[0019] The transition diffusion groove is provided with a first transition through hole that communicates with the transition uniform flow channel.

[0020] The edge diffusion groove is provided with a first edge through hole that communicates with the edge uniform flow channel.

[0021] Optionally, the central air intake is located at the center of the central region;

[0022] The central area is provided with at least two central diffusion grooves, the at least two central diffusion grooves are of equal length, one end is connected to the central air inlet, the other end is provided with the first central through hole, and the central diffusion grooves extend radially along the second flow equalization plate.

[0023] All of the central diffusion grooves are uniformly distributed along the circumference of the first flow uniform plate.

[0024] Optionally, the transition diffusion groove includes: a transition main groove, a transition arc-shaped groove, and multiple transition branch grooves;

[0025] The transition arc-shaped groove is located at the boundary between the central area and the transition area, with the central air inlet as the center.

[0026] The transition main channel is located in the central area, with one end connected to the transition air inlet and the other end connected to the transition arc-shaped channel.

[0027] One end of each of the transition branch slots is connected to the transition arc-shaped slot, the other end extends in the transition area, and at least one of the first transition through holes is provided;

[0028] The plurality of transition branch slots are rotationally symmetrical with respect to the central axis of the second flow uniform plate.

[0029] Optionally, the edge diffusion groove includes: an edge trunk groove and a first edge circular groove;

[0030] The first edge circular groove is disposed around the outside of the transition branch groove, and at least one first edge through hole is provided;

[0031] The edge main groove extends from the central area to the edge area, with one end connected to the edge air inlet and the other end connected to the first edge circular groove.

[0032] Optionally, the transition air inlet and the edge air inlet are disposed on a circumference with a preset radius centered on the central air inlet, and are evenly distributed on the circumference;

[0033] Multiple transition arc-shaped grooves are provided, and adjacent transition arc-shaped grooves are spaced apart;

[0034] Multiple transition main channels are provided and are connected one-to-one with the transition arc-shaped channels. The multiple transition main channels are rotationally symmetrical about the central air inlet.

[0035] The transition branch slots are provided in multiple ways, and each transition arc-shaped slot is connected to at least one transition branch slot. The multiple transition branch slots are rotationally symmetrical about the central air intake.

[0036] Multiple edge main grooves are provided, and each edge main groove corresponds to a transition arc groove. Each edge main groove passes through the gap between two adjacent transition arc grooves, and the multiple edge main grooves are rotationally symmetrical about the central air inlet.

[0037] Optionally, the second flow equalizer is provided on the side facing the third flow equalizer with a central circular groove centered on the central air inlet, a plurality of transition circular grooves arranged sequentially around the outside of the central circular groove, a connecting groove spanning the plurality of transition circular grooves, and a second edge circular groove arranged around the outside of the transition circular groove.

[0038] The first central through hole is connected to the central circular groove;

[0039] The connecting groove corresponds one-to-one with the transition branch groove, and the projection of the top surface of the second flow equalizer plate coincides with the transition branch groove. A first transition through hole is provided at the intersection of the connecting groove and each of the transition circular grooves.

[0040] The first edge through hole communicates with the second edge circular groove;

[0041] The third flow equalizer plate has a slot on the side facing the second flow equalizer plate that is mirrored on the side facing the third flow equalizer plate, so that the second flow equalizer plate, after being covered on the third flow equalizer plate, forms the central flow equalizer channel, the transition flow equalizer channel and the edge flow equalizer channel.

[0042] Optionally, the first edge circular groove is provided with a plurality of radially extending first edge diffusion grooves, the plurality of first edge diffusion grooves being evenly distributed along the circumference of the first edge circular groove, and the first edge diffusion grooves extending from the first edge circular groove to the inner and outer sides.

[0043] The first edge through hole is disposed in the first edge diffusion groove, and the first edge through hole is disposed at least at both ends of the first edge diffusion groove;

[0044] The second edge circular groove includes an inner circular groove, an outer circular groove surrounding the inner circular groove, and a plurality of second edge diffusion grooves connecting the inner circular groove and the outer circular groove;

[0045] The second edge diffusion groove corresponds one-to-one with the first edge diffusion groove, and their projections in the thickness direction of the second flow uniform plate coincide.

[0046] Optionally, the first flow equalizer, the second flow equalizer, and the third flow equalizer are welded together in sequence.

[0047] Optionally, a groove is provided on the side of the first flow equalizer away from the second flow equalizer, corresponding to the central area, and the air intake channel is disposed in the groove.

[0048] Secondly, this application also provides an upper electrode assembly, including an air intake block and a cooling plate, a heating plate, an air intake structure, and an electrode plate stacked sequentially; wherein, the air intake structure is the air intake structure described in the above embodiments, the air intake block is provided with an air intake pipe, the air intake block passes through the cooling plate and the heating plate, so that the air intake pipe is connected to the air intake channel of the air intake structure.

[0049] Thirdly, embodiments of this application also provide a process chamber, including a chamber body and an upper electrode assembly as described in the above embodiments;

[0050] The upper cover of the chamber body has an opening, the cooler is sealed at the opening, and the heating plate, the air intake structure and the electrode plate are all located inside the cavity of the chamber body.

[0051] As described above, in the air intake structure of this application, gas enters through the central air intake, diffuses through the central diffusion channel, is homogenized through the central uniform flow channel, and finally flows out from a portion of the uniform flow holes. Gas enters through the transition air intake, diffuses through the transition diffusion channel, is homogenized through the transition uniform flow channel, and finally flows out from another portion of the uniform flow holes. Gas enters through the edge air intake, diffuses through the edge diffusion channel, is homogenized through the edge uniform flow channel, and finally flows out from the remaining uniform flow holes. The gas undergoes sufficient diffusion in the central, transition, and edge regions, improving the uniformity of the gas flowing out of the uniform flow holes. Furthermore, since the central, transition, and edge air intakes are all located in the central region, the air intake path is concentrated, occupying less space. Attached Figure Description

[0052] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0053] Figure 1 This is a schematic diagram of the structure of a process chamber in a related technology.

[0054] Figure 2 This is a schematic diagram of the internal airflow channel of an intake structure provided in an embodiment of this application;

[0055] Figure 3 This is a schematic diagram of the top surface structure of a first flow uniform plate provided in an embodiment of this application;

[0056] Figure 4 yes Figure 3 A schematic diagram of the bottom structure of the first flow uniform plate;

[0057] Figure 5 This is a schematic diagram of the top surface structure of a second flow uniform plate provided in an embodiment of this application;

[0058] Figure 6 yes Figure 5 A schematic diagram of the bottom structure of the second flow uniform plate;

[0059] Figure 7This is a schematic diagram of the top surface structure of a third flow uniform plate provided in an embodiment of this application;

[0060] Figure 8 yes Figure 7 A schematic diagram of the bottom structure of the third flow uniform plate;

[0061] Figure 9 This is a schematic diagram of another air intake structure provided in the embodiments of this application, wherein (a) is a schematic diagram of the top surface structure of the second flow equalizer, (b) is a schematic diagram of the bottom surface structure of the second flow equalizer, and (c) is a schematic diagram of the top surface structure of the third flow equalizer.

[0062] Figure 10 This is a schematic diagram of the structure of a process chamber provided in an embodiment of this application.

[0063] The realization of the objectives, functional features, and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. The accompanying drawings have illustrated specific embodiments of this application, which will be described in more detail below. These drawings and textual descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concepts of this application to those skilled in the art through reference to specific embodiments. Detailed Implementation

[0064] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0065] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, components, features, and elements with the same names in different embodiments of this application may have the same meaning or different meanings, the specific meaning of which must be determined by its interpretation in that specific embodiment or further in conjunction with the context of that specific embodiment.

[0066] It should be further understood that the terms "comprising" or "including" indicate the presence of the stated features, steps, operations, elements, components, items, types, and / or groups, but do not exclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, components, items, types, and / or groups. The terms "or," "and / or," and "comprising at least one of the following," as used in this application, can be interpreted as inclusive, or mean any one or any combination thereof. For example, "comprising at least one of the following: A, B, C" means "any one of the following: A; B; C; A and B; A and C; B and C; A and B and C," and similarly, "A, B, or C" or "A, B, and / or C" means "any one of the following: A; B; C; A and B; A and C; B and C; A and B and C." Exceptions to this definition only occur when the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0067] It should be understood that although the terms first, second, third, etc., may be used in this document to describe various types of information, this information should not be limited to these terms. These terms are only used to distinguish information of the same type from one another. For example, without departing from the scope of this document, first information may also be referred to as second information, and similarly, second information may also be referred to as first information. Depending on the context, the singular forms “a,” “an,” and “the” used in this document are intended to also include the plural forms, unless the context indicates otherwise.

[0068] It should be understood that the terms "top", "bottom", "upper", "lower", "vertical", "horizontal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application.

[0069] For ease of description, the orientation in the following embodiments is based on the current view of the accompanying drawings, and this premise should not be construed as a limitation of this application.

[0070] Please see Figure 1 , Figure 1 This is a schematic diagram of a process chamber in a related technology, which includes a chamber body 10a, a heat-conducting flow equalization plate 20a, a flow equalization disk 30a, a heating ring 40a, a water-cooling disk 50a, and a silicon electrode 60a.

[0071] The top surface of the heat-conducting uniform flow plate 20a has a central groove, and the uniform flow disk 30a is located in the central groove. The water-cooling disk 50a covers the top of the central groove. The uniform flow disk 30a includes an upper uniform flow plate 31a and a lower uniform flow plate 32a. The uniform flow disk 30a includes three air inlet zones—inner, middle, and outer—along the radial direction. Adjacent air inlet zones are separated by a sealing ring 70a. Three air inlets 80a are located in the inner, middle, and outer air inlet zones, respectively, and allow air to enter the three air inlet zones. Because the gas does not diffuse sufficiently upon entering the three air inlet zones, the uniformity is poor. Based on this, this application provides an air inlet structure, an upper electrode assembly, and a process chamber.

[0072] Please see Figures 2-4 , Figure 2 This is a schematic diagram of the internal airflow channel of an intake structure provided in an embodiment of this application. Figure 3 This is a schematic diagram of the top surface structure of a first flow uniform plate provided in an embodiment of this application. Figure 4 yes Figure 3 A schematic diagram of the bottom structure of the first flow equalizer plate. The air intake structure may include a central region A1, a transition region A2 surrounding the central region A1, and an edge region A3 surrounding the transition region A2 in the radial direction. The air intake structure includes an air intake channel 11, a diffusion channel B1, B2, B3 and a flow equalizer channel C1, C2, C3 arranged sequentially in the thickness direction.

[0073] Specifically, the air intake channel 11 is located in the area corresponding to the central region A1, and the air intake channel 11 may include a central air intake 111, transition air intakes 112, and edge air intakes 113. Optionally, the air intake channel 11 may include one central air intake 111, multiple transition air intakes 112, and multiple edge air intakes 113. The central air intake 111 is located at the center of the central region A1, and the multiple transition air intakes 112 and multiple edge air intakes 113 are alternately arranged around the central air intake 111. For example... Figure 3 In the middle, the air intake channel 11 includes a central air intake 111, two transition air intakes 112 and two edge air intakes 113.

[0074] Specifically, the flow uniform channel includes a central flow uniform channel C1, a transition flow uniform channel C2, and an edge flow uniform channel C3. Among them, the central flow uniform channel C1 is located in the central region A1, the transition flow uniform channel C2 is located in the transition region A2, and the edge flow uniform channel C3 is located in the edge region A3.

[0075] Specifically, the diffusion channels include a central diffusion channel B1, a transition diffusion channel B2, and an edge diffusion channel B3. The central diffusion channel B1 connects the central inlet 111 and the central uniform flow channel C1; the transition diffusion channel B2 connects the transition inlet 112 and the transition uniform flow channel C2; and the edge diffusion channel B3 connects the edge inlet 113 and the edge uniform flow channel C3. The three diffusion channels serve two purposes: firstly, to ensure sufficient gas diffusion; and secondly, to primarily introduce the gas into the corresponding zones (A1, A2, A3). The uniform flow channel is located away from the diffusion channels (please also refer to...). Figure 2 and Figure 8 Multiple flow equalization holes 301 are provided as air outlets for the flow equalization channel. It can be understood that the central region A1, the transition region A2, and the edge region A3 are all provided with flow equalization holes 301.

[0076] In this embodiment, the gas enters through the central inlet 111, diffuses through the central diffusion channel B1, is homogenized through the central uniform flow channel C1, and finally exits from a portion of the uniform flow holes 301. Gas enters through the transition inlet 112, diffuses through the transition diffusion channel B2, is homogenized through the transition uniform flow channel C2, and finally exits from another portion of the uniform flow holes 301. Gas enters through the edge inlet 113, diffuses through the edge diffusion channel B3, is homogenized through the edge uniform flow channel C3, and finally exits from the remaining uniform flow holes 301. The gas undergoes sufficient diffusion in the central region A1, transition region A2, and edge region A3, improving the uniformity of the gas exiting the uniform flow holes 301. Furthermore, since the central inlet 111, transition inlet 112, and edge inlet 113 are all located in the central region A1, the air intake path is concentrated, occupying less space.

[0077] For example, the central diffusion channel B1 is located in the central region A1, and the transition diffusion channel B2 is located in both the central region A1 and the transition region A2. This allows gas to enter through the transition inlet 112 in the central region A1 and diffuse through the transition diffusion channel B2 to the transition region A2. The edge diffusion channel B3 is located in the central region A1, the transition region A2, and the edge region A3. This allows gas to enter through the edge inlet 113 in the central region A1 and diffuse through the edge diffusion channel B3 to the edge region A3. Overall, the air intake structure of this embodiment allows gas to enter from the central region A1, and through diffusion via the diffusion channel and homogenization via the flow equalization channel, homogenized gas can be obtained in the central region A1, the transition region A2, and the edge region A3.

[0078] As an example of the air intake structure of this application, the air intake structure includes a first flow equalizer 10, a second flow equalizer 20, and a third flow equalizer 30 arranged sequentially along the thickness direction. In specific implementation, the first flow equalizer 10, the second flow equalizer 20, and the third flow equalizer 30 can be assembled with screws and sealing rings. Optionally, the first flow equalizer 10, the second flow equalizer 20, and the third flow equalizer 30 are welded together sequentially, and the overall assembly and fixation of the air intake structure is achieved by welding, thereby reducing the risk of gas passage blockage during use. Exemplarily, the three flow equalizers can be substantially disc-shaped. The air intake passage 11 is located in the central area A1 of the first flow equalizer 10. Optionally, a groove 12 can be provided in the central area A1 of the first flow equalizer 10 on the side opposite to the second flow equalizer 20 (i.e., the top surface in the figure), and the air intake hole 11 is located in the groove 12. The groove 12 can serve as an air intake interface. Compared with the traditional solution that requires different independent interfaces, this solution has a more concentrated air intake path, occupies less space, and has a more compact structure.

[0079] Diffusion channels B1, B2, and B3 are disposed between the first flow uniform plate 10 and the second flow uniform plate 20. Each diffusion channel primarily introduces gas into its corresponding region. This embodiment does not impose a particular limitation on the shape of each diffusion channel. Taking the transition diffusion channel B2 as an example, the transition diffusion channel B2 can be straight and / or curved, and can radially cover the transition region A2, introducing gas radially from the central region A1 into the transition region A2. Similarly, the central diffusion channel B1 and the edge diffusion channel B3 can be designed similarly.

[0080] The flow equalization channels C1, C2, and C3 are disposed between the second flow equalization plate 20 and the third flow equalization plate 30. Each flow equalization channel mainly diffuses the gas within its respective region to homogenize the gas in that region. For example, each flow equalization channel can homogenize the gas circumferentially, but is not limited to this. As examples, each flow equalization channel can be circular, elliptical, or other shapes.

[0081] The flow equalization hole 301 is disposed on the side of the third flow equalization plate 30 away from the second flow equalization plate 20 (e.g., Figure 8 As shown, that is Figure 2 (The bottom surface of the structure). For example, the central uniform flow channel C1, the transition uniform flow channel C2, and the edge uniform flow channel C3 are each evenly distributed with multiple uniform flow holes 301, which can make the gas flow out of the inlet structure evenly.

[0082] The working principle of the air intake structure in this embodiment is as follows: Gas enters the space between the first uniform flow plate 10 and the second uniform flow plate 20 through the central air intake 111, the transition air intake 112, and the edge air intake 113 of the first uniform flow plate 10, and diffuses through the central diffusion channel B1, the transition diffusion channel B2, and the edge diffusion channel B3, respectively. Since the central diffusion channel B1 is connected to the central uniform flow channel C1, the transition diffusion channel B2 is connected to the transition uniform flow channel C2, and the edge diffusion channel B3 is connected to the edge uniform flow channel C3, the gas, after entering the space between the first uniform flow plate 10 and the second uniform flow plate 20, further enters the space between the second uniform flow plate 20 and the third uniform flow plate 30, and then enters the central uniform flow channel C1, the transition uniform flow channel C2, and the edge uniform flow channel C3, respectively, to achieve homogenization. The bottom surface of the third flow equalizer 30 is provided with a plurality of flow equalizer holes 301 that are respectively connected to the central flow equalizer channel C1, the transition flow equalizer channel C2 and the edge flow equalizer channel C3. Therefore, the gas finally flows out uniformly from the flow equalizer holes 301 on the bottom surface of the third flow equalizer 30.

[0083] In this embodiment, the air intake structure first diffuses between the first uniform flow plate 10 and the second uniform flow plate 20, and then further diffuses and homogenizes between the second uniform flow plate 20 and the third uniform flow plate 30. Finally, the gas flows out from the uniform flow hole 301 on the bottom surface of the third uniform flow plate 30. The gas undergoes sufficient diffusion and homogenization, thereby improving the uniformity of the gas.

[0084] For an example of a diffusion channel between the first flow uniform plate 10 and the second flow uniform plate 20, please refer to Figure 5 , Figure 5 This is a schematic diagram of the top surface structure of a second flow equalizer provided in an embodiment of this application. The second flow equalizer 20 has a central diffusion groove 21, a transition diffusion groove 22, and an edge diffusion groove 23 extending radially on the side facing the first flow equalizer 10 (i.e., the top surface). The first flow equalizer 10 and the second flow equalizer 20 are sealed together so that the central diffusion groove 21, the transition diffusion groove 22, and the edge diffusion groove 23 form a central diffusion channel B1, a transition diffusion channel B2, and an edge diffusion channel B3. It should be noted that the side of the first flow equalizer 10 facing the second flow equalizer 20 (i.e., the bottom surface) can also simultaneously have a central diffusion groove, a transition diffusion groove, and an edge diffusion groove extending radially, where the diffusion grooves on the bottom surface of the first flow equalizer 10 and the diffusion grooves on the top surface of the second flow equalizer 20 are mirror images of each other. Of course, the central diffusion groove 21, the transition diffusion groove 22, and the edge diffusion groove 23 can also be provided only on the side of the first flow equalizer 10 facing the second flow equalizer 20; this application does not limit this.

[0085] Please also refer to Figure 5The central diffusion groove 21 is provided with a first central through hole 241 communicating with the central uniform flow channel C1; the transition diffusion groove 22 is provided with a first transition through hole 242 communicating with the transition uniform flow channel C2; and the edge diffusion groove 23 is provided with a first edge through hole 243 communicating with the edge uniform flow channel C3. Multiple first central through holes 241, first transition through holes 242, and first edge through holes 243 can be provided and evenly distributed in each diffusion groove.

[0086] The airflow path of the intake structure in this embodiment is (please also consider...) Figure 2 Gas enters the central diffusion channel B1 through the central inlet 111, and then enters the central uniform flow channel C1 through the first central through-hole 241. Gas enters the central diffusion channel B1 through the transition inlet 112, and then enters the transition uniform flow channel C2 through the first transition through-hole 242. Gas enters the edge diffusion channel B3 through the edge inlet 113, and then enters the edge uniform flow channel C3 through the first edge through-hole 243. In this way, the gas can be fully diffused in the central region A1, the transition region A2, and the edge region A3.

[0087] For an example of a central diffusion groove 21, please refer to [link / reference]. Figures 3-5 The central air inlet 111 can be located at the center of the central region A1. The central region A1 is provided with at least two central diffuser grooves 21. All central diffuser grooves 21 are of equal length and one end is connected to the central air inlet 111 (directly opposite), and the other end is provided with a first central through hole 241. The central diffuser grooves 21 extend radially along the first flow equalizer 10. All central diffuser grooves 21 are evenly distributed circumferentially along the first flow equalizer 10. Figure 5 In this embodiment, four central diffuser grooves 21 are provided, and the included angle between two adjacent central diffuser grooves 21 is 90°. The distribution of the central air inlet 111 and the central diffuser grooves 21 in this embodiment can further improve the gas uniformity in the central region A1.

[0088] As an example of a transition diffusion groove 22, please continue reading. Figure 5 The transition diffusion groove 22 may include: a transition main groove 221, a transition arc-shaped groove 222, and multiple transition branch grooves 223. The transition arc-shaped groove 222 is located at the boundary between the central region A1 and the transition region A2, with the central air inlet 111 as its center.

[0089] The inner ring of the transition arc-shaped groove 222 is the central region A1, and the outer ring is the transition region A2. The main transition groove 221 is located in the central region A1, with one end connected to the transition air inlet 112 (directly opposite) and the other end connected to the transition arc-shaped groove 222. Each transition branch groove 223 has one end connected to the transition arc-shaped groove 222 and the other end extending into the transition region A2, and the transition branch groove 223 is provided with at least one first transition through hole 242. To improve the air uniformity effect, multiple first transition through holes 242 can be provided and evenly distributed in the transition diffusion groove 22. All transition branch grooves 223 are rotationally symmetrical with respect to the central axis of the second flow uniform plate 20.

[0090] After entering through the transition inlet 112, the gas enters the transition main channel 221, and then diffuses through the transition arc-shaped channel 222 into different transition branch channels 223 to achieve gas diffusion in the transition zone A2. The rotational symmetry design of all transition branch channels 223 can make the gas enter the transition uniform flow channel C2 more evenly.

[0091] For an example of an edge diffusion groove 23, please refer to [link / reference]. Figure 5 The edge diffusion groove 23 may include an edge main groove 231 and a first edge circular groove 232. The first edge circular groove 232 is disposed around the outside of the transition branch groove 223 and is provided with at least one first edge through hole 243. The edge main groove 231 extends from the central region A1 to the edge region A3, and one end is connected to the edge air inlet 113 (directly opposite), and the other end is connected to the first edge circular groove 232. Gas enters the edge main groove 231 from the edge air inlet 113 and then enters the first edge circular groove 232 to achieve diffusion in the edge region A3.

[0092] Optional, such as Figure 4 As shown, the transition air inlet 112 and the edge air inlet 113 are arranged on a circumference with a preset radius centered on the central air inlet 111, and are evenly distributed on the circumference. In the figure, two transition air inlets 112 and two edge air inlets 113 are each provided, and they are evenly distributed on the same circumference with the central air inlet 111 as the center. Multiple transition arc-shaped grooves 222 are provided, and two adjacent transition arc-shaped grooves 222 are spaced apart.

[0093] Multiple transition main slots 221 can be provided, each corresponding to a one-to-one transition arc-shaped slot 222. All transition main slots 221 are rotationally symmetrical about the central air intake 111. Multiple transition branch slots 223 are provided, and each transition arc-shaped slot 222 is connected to at least one transition branch slot 223. All transition branch slots 223 are rotationally symmetrical about the central air intake 111. Multiple edge main slots 231 are provided, each corresponding to a one-to-one transition arc-shaped slot 222. Each edge main slot 231 passes through the gap between two adjacent transition arc-shaped slots 222. All edge main slots 231 are rotationally symmetrical about the central air intake 111.

[0094] Figure 5 In the process, there are two transition main grooves 221, two transition arc grooves 222 and two edge main grooves 231, and eight transition branch grooves 223. Each transition arc groove 222 is connected to four transition branch grooves 223. Multiple first transition through holes 242 are provided and are evenly distributed in the transition arc grooves 222 and the transition branch grooves 223.

[0095] For an example of an air distribution channel between the second flow equalizer 20 and the third flow equalizer 30, please refer to Figure 6 and Figure 7 , Figure 6 yes Figure 5 A schematic diagram of the bottom structure of the second flow uniform plate. Figure 7 This is a schematic diagram of the top surface structure of a third flow equalizer provided in an embodiment of this application. The second flow equalizer 20 has a central circular groove 25 with the central air inlet 111 as the center, a plurality of transition circular grooves 26 arranged sequentially around the outside of the central circular groove 25, a connecting groove 27 spanning the plurality of transition circular grooves 26, and a second edge circular groove 28 arranged around the outside of the transition circular grooves 26.

[0096] The first central through hole 241 communicates with the central circular groove 25. The connecting groove 27 corresponds one-to-one with the transition branch groove 223, and the projection of the second flow equalizer 20 onto the side (i.e., the top surface) facing the first flow equalizer 10 coincides with the transition branch groove 223. A first transition through hole 242 is provided at the intersection of the connecting groove 27 and each transition circular groove 26, and the first edge through hole 243 communicates with the second edge circular groove 28.

[0097] The third flow equalizer 30 has a slot on the side (top surface) facing the second flow equalizer 20 that is mirrored on the side (bottom surface) facing the third flow equalizer 30, so that after the second flow equalizer 20 is placed on the third flow equalizer 30, a central flow equalizer channel C1, a transition flow equalizer channel (the annular area crossed by the dashed line in the figure) C2, and an edge flow equalizer channel (the annular area crossed by the dashed line in the figure) C3 are formed.

[0098] In specific implementations, the second flow equalizer 20 may only have a central circular groove 25 centered on the central air inlet 111, a plurality of transition circular grooves 26 arranged sequentially around the outside of the central circular groove 25, a connecting groove 27 spanning the plurality of transition circular grooves 26, and a second edge circular groove 28 arranged around the outside of the transition circular grooves 26 on the side of the second flow equalizer 20 facing the third flow equalizer 20 (i.e., the bottom surface). Alternatively, the third flow equalizer 30 may only have a central circular groove 25 centered on the central air inlet 111, a plurality of transition circular grooves 26 arranged sequentially around the outside of the central circular groove 25, a connecting groove 27 spanning the plurality of transition circular grooves 26, and a second edge circular groove 28 arranged around the outside of the transition circular grooves 26 on the side of the third flow equalizer 30 facing the second flow equalizer 20 (i.e., the top surface).

[0099] Please see Figure 8 , Figure 8 yes Figure 7 The schematic diagram of the bottom structure of the third flow equalizer plate shows that after the gas is homogenized through the central flow equalizer channel C1, the transition flow equalizer channel C2 and the edge flow equalizer channel C3, it flows out from the flow equalizer holes 301 that are evenly distributed at the bottom of the third flow equalizer plate 30.

[0100] Optional, please continue reading Figure 5 and Figure 6 The first edge circular groove 232 is provided with a plurality of radially extending first edge diffusion grooves 233. The plurality of first edge diffusion grooves 233 are evenly distributed along the circumference of the first edge circular groove 232, and the first edge diffusion grooves 233 extend from the first edge circular groove 232 to the inner and outer sides, that is, the first edge diffusion grooves 233 and the first edge circular groove 232 form a cross intersection. A first edge through hole 243 is provided in the first edge diffusion groove 233, and a first edge through hole 243 is provided at least at both ends of the first edge diffusion groove 233.

[0101] The second edge circular groove 28 includes an inner circular groove 281, an outer circular groove 282 surrounding the inner circular groove 281, and a plurality of second edge diffusion grooves 283 connecting the inner circular groove 281 and the outer circular groove 282. The second edge diffusion grooves 283 correspond one-to-one with the first edge diffusion grooves 233 and coincide in their projection along the thickness direction of the second flow equalizer 20. After the gas enters the first edge circular groove 232, it then enters the inner circular groove 281 and the outer circular groove 282 respectively through the first edge through holes 243 at both ends of the first edge diffusion groove 233. The second edge diffusion grooves 283 allow the gas to diffuse between the inner circular groove 281 and the outer circular groove 282, thereby improving the gas uniformity of the edge flow equalizer channel C3.

[0102] It should be noted that in the embodiments of this application, the radial diffusion groove is not necessarily a straight line; it can also be a polygonal line or a curve. Please refer to [link / reference]. Figure 9 , Figure 9 This is a schematic diagram of another air intake structure provided in an embodiment of this application, wherein (a) is a schematic diagram of the top surface structure of the second flow equalizer, (b) is a schematic diagram of the bottom surface structure of the second flow equalizer, and (c) is a schematic diagram of the top surface structure of the third flow equalizer. In this embodiment, the transition branch groove 223 on the top surface of the second flow equalizer 20 is a polygonal shape, and correspondingly, the connecting groove 27 on the bottom surface of the second flow equalizer 20 can also be a polygonal shape. The polygonal shape can increase the diffusion path, thereby allowing more first transition through holes 242 to be set in the diffusion groove, making the gas diffusion more complete.

[0103] This application also provides an upper electrode assembly; please refer to [link to relevant documentation]. Figure 10 , Figure 10 This is a schematic diagram of a process chamber provided in an embodiment of this application. The upper electrode assembly of this embodiment can be applied to this process chamber. The upper electrode assembly of this embodiment may include an air inlet block 150 and a cooling plate 140, a heating plate 130, an air inlet structure 110, and an electrode plate 120 stacked sequentially. The air inlet structure 110 is the air inlet structure 110 described in the above embodiments. The air inlet block 150 is provided with an air inlet pipe (not shown in the figure), and the air inlet block 150 passes through the cooling plate 140 and the heating plate 130, so that the air inlet pipe is connected to the air inlet channel 11 of the air inlet structure 110. The upper electrode assembly of this embodiment can provide uniform gas to the process chamber.

[0104] This application also provides a process chamber in its embodiments; please refer to the following: Figure 10 The process chamber may include a chamber body 100 and an upper electrode assembly as described in the above embodiments. The upper cover 101 of the chamber body 100 has an opening, and a cooling plate 140 covers the opening. The heating plate 130, the air intake structure 110, and the electrode plate 120 are all located inside the chamber body 100.

[0105] like Figure 1 As shown, the flow equalization plate 30a of the process chamber includes three radially arranged air inlet zones: inner, middle, and outer. Adjacent air inlet zones are separated by sealing rings 70a, and the three air inlets 80a supply air to the three zones respectively. This process chamber structure presents a problem with poor gas uniformity control, especially for low-flow-rate gases. This is primarily due to the unavoidable installation gap 80a between the flow equalization plate 30a and the sidewall of the central groove of the heat-conducting flow equalization plate 20a. Gas entering the outer air inlet zone will enter this installation gap 80a. This abrupt change in space generates eddies, affecting gas uniformity. Furthermore, when a low-flow-rate gas is introduced, some gas is absorbed by the installation gap 80a, severely impacting gas transfer efficiency and consequently affecting gas uniformity.

[0106] In this embodiment, the process chamber consists of a cooling plate 140, a heating plate 130, an air intake structure 110, and an electrode plate 120 stacked sequentially from top to bottom. Compared to... Figure 1 The proposed solution eliminates the heat-conducting flow equalizer 20a, thus eliminating the gas vortex phenomenon caused by abrupt spatial changes within the heat-conducting flow equalizer 20a. Furthermore, in this embodiment, the three flow equalizers in the air intake structure 110 can be assembled using diffusion welding, eliminating the problem of gas leaking out from the gaps between parts in the original structure.

[0107] For other working principles and processes of the upper electrode assembly and process chamber in this embodiment, please refer to the description of the air intake structure in the foregoing embodiments of the present invention, which will not be repeated here.

[0108] The above provides a detailed description of the air intake structure, upper electrode assembly, and process chamber provided in this application. Specific examples have been used to illustrate the principles and implementation methods of this application. It should be noted that the descriptions of each embodiment in this application have different emphases; parts not described in detail in a particular embodiment can be referred to in the relevant descriptions of other embodiments.

[0109] The above are merely preferred embodiments of this application and do not limit the patent scope of this application. The technical features of the technical solution of this application can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are also included within the patent protection scope of this application, as long as the combination of these technical features does not contradict each other.

Claims

1. An air intake structure, characterized in that, The intake structure includes, radially, a central region, a transition region surrounding the central region, and an edge region surrounding the transition region; The air intake structure includes an air intake channel, a diffusion channel, and a flow equalization channel arranged sequentially along the thickness direction; The air intake channel is located in the area corresponding to the central area, and the air intake channel includes a central air intake, a transition air intake, and an edge air intake. The uniform flow channel includes a central uniform flow channel located in the central region, a transition uniform flow channel located in the transition region, and an edge uniform flow channel located in the edge region; the uniform flow channel is provided with a plurality of uniform flow holes on the side opposite to the diffusion channel, which serve as the air outlet of the uniform flow channel; The diffusion channel includes a central diffusion channel connecting the central air inlet and the central uniform flow channel, a transition diffusion channel connecting the transition air inlet and the transition uniform flow channel, and an edge diffusion channel connecting the edge air inlet and the edge uniform flow channel.

2. The intake structure according to claim 1, characterized in that, The central diffusion channel is located in the central region; The transition diffusion channel is located in the central region and the transition region; The edge diffusion channel is located in the central region, the transition region, and the edge region.

3. The intake structure according to claim 2, characterized in that, The air intake structure includes a first flow equalizer, a second flow equalizer, and a third flow equalizer along the thickness direction; The air intake channel is disposed on the first flow equalizer plate; The diffusion channel is disposed between the first flow equalizer and the second flow equalizer; The flow equalization channel is disposed between the second flow equalization plate and the third flow equalization plate, and the third flow equalization plate has a plurality of flow equalization holes on the side opposite to the second flow equalization plate.

4. The intake structure according to claim 3, characterized in that, The second flow equalizer plate has a central diffusion groove, a transition diffusion groove, and an edge diffusion groove extending radially in a uniform direction on the side facing the first flow equalizer plate, and / or the first flow equalizer plate has a central diffusion groove, a transition diffusion groove, and an edge diffusion groove extending radially in a uniform direction on the side facing the second flow equalizer plate; the first flow equalizer plate and the second flow equalizer plate are sealed together so that the central diffusion groove, the transition diffusion groove, and the edge diffusion groove respectively form the central diffusion channel, the transition diffusion channel, and the edge diffusion channel. The central diffusion groove is provided with a first central through hole that communicates with the central uniform flow channel. The transition diffusion groove is provided with a first transition through hole that communicates with the transition uniform flow channel. The edge diffusion groove is provided with a first edge through hole that communicates with the edge uniform flow channel.

5. The intake structure according to claim 4, characterized in that, The central air intake is located at the center of the central area; The central area is provided with at least two central diffusion grooves, the at least two central diffusion grooves are of equal length, one end is connected to the central air inlet, the other end is provided with the first central through hole, and the central diffusion grooves extend radially along the second flow equalization plate. All of the central diffusion grooves are uniformly distributed along the circumference of the first flow uniform plate.

6. The intake structure according to claim 5, characterized in that, The transition diffusion groove includes: a main transition groove, a transition arc-shaped groove, and multiple transition branch grooves; The transition arc-shaped groove is located at the boundary between the central area and the transition area, with the central air inlet as the center. The transition main channel is located in the central area, with one end connected to the transition air inlet and the other end connected to the transition arc-shaped channel. One end of each of the transition branch slots is connected to the transition arc-shaped slot, the other end extends in the transition area, and at least one of the first transition through holes is provided; The plurality of transition branch slots are rotationally symmetrical with respect to the central axis of the second flow uniform plate.

7. The intake structure according to claim 6, characterized in that, The edge diffusion groove includes: an edge main groove and a first edge circular groove; The first edge circular groove is disposed around the outside of the transition branch groove, and at least one first edge through hole is provided; The edge main groove extends from the central area to the edge area, with one end connected to the edge air inlet and the other end connected to the first edge circular groove.

8. The intake structure according to claim 7, characterized in that, The transition air inlet and the edge air inlet are arranged on a circumference with a preset radius centered on the central air inlet, and are evenly distributed on the circumference. Multiple transition arc-shaped grooves are provided, and adjacent transition arc-shaped grooves are spaced apart; Multiple transition main channels are provided and are connected one-to-one with the transition arc-shaped channels. The multiple transition main channels are rotationally symmetrical about the central air inlet. The transition branch slots are provided in multiple ways, and each transition arc-shaped slot is connected to at least one transition branch slot. The multiple transition branch slots are rotationally symmetrical about the central air intake. Multiple edge main grooves are provided, and each edge main groove corresponds to a transition arc groove. Each edge main groove passes through the gap between two adjacent transition arc grooves, and the multiple edge main grooves are rotationally symmetrical about the central air inlet.

9. The intake structure according to claim 7, characterized in that, The second flow equalizer is provided on the side facing the third flow equalizer with a central circular groove centered on the central air inlet, a plurality of transition circular grooves arranged sequentially around the outside of the central circular groove, a connecting groove spanning the plurality of transition circular grooves, and a second edge circular groove arranged around the outside of the transition circular groove. The first central through hole is connected to the central circular groove; The connecting groove corresponds one-to-one with the transition branch groove, and the projection of the second flow equalizer plate on the side facing the first flow equalizer plate coincides with the transition branch groove. A first transition through hole is provided at the intersection of the connecting groove and each of the transition circular grooves. The first edge through hole communicates with the second edge circular groove; The third flow equalizer plate has a slot on the side facing the second flow equalizer plate that is mirrored on the side facing the third flow equalizer plate, so that the second flow equalizer plate, after being covered on the third flow equalizer plate, forms the central flow equalizer channel, the transition flow equalizer channel and the edge flow equalizer channel.

10. The intake structure according to claim 9, characterized in that, The first edge circular groove is provided with a plurality of first edge diffusion grooves extending radially. The plurality of first edge diffusion grooves are evenly distributed along the circumference of the first edge circular groove, and the first edge diffusion grooves extend from the first edge circular groove to the inner and outer sides. The first edge through hole is disposed in the first edge diffusion groove, and the first edge through hole is disposed at least at both ends of the first edge diffusion groove; The second edge circular groove includes an inner circular groove, an outer circular groove surrounding the inner circular groove, and a plurality of second edge diffusion grooves connecting the inner circular groove and the outer circular groove; The second edge diffusion groove corresponds one-to-one with the first edge diffusion groove, and their projections in the thickness direction of the second flow uniform plate coincide.

11. The intake structure according to any one of claims 3-10, characterized in that, The first flow equalizer, the second flow equalizer, and the third flow equalizer are welded together in sequence.

12. The intake structure according to claim 11, characterized in that, A groove is provided on the side of the first flow equalizer away from the second flow equalizer, corresponding to the central area, and the air intake channel is disposed in the groove.

13. An upper electrode assembly, characterized in that, It includes an air intake block and a cooling plate, a heating plate, an air intake structure, and an electrode plate arranged in sequence; wherein, the air intake structure is the air intake structure according to any one of claims 1-12. The air intake block is provided with an air intake pipe, and the air intake block passes through the cooling plate and the heating plate so that the air intake pipe is connected to the air intake channel of the air intake structure.

14. A process chamber, characterized in that, It includes a chamber body and the upper electrode assembly as described in claim 13; The upper cover of the chamber body has an opening, the cooling plate covers the opening, and the heating plate, the air intake structure and the electrode plate are all located inside the chamber body.

Images