Wafer seal storage device

Abstract

The utility model relates to wafer sealing piece storage device, its setting is in wafer film -coating equipment machine platform inside, and the storage device includes the material frame that forms with storage area and transfer area, stores material tray group, transfer material tray group, manipulator. The utility model on one hand adopts storage area and transfer area to realize sealing piece automatic storage, the sealing piece transfer of waiting to change or having changed needs, ensures that film -coating process whole continuous normal operation, on the other hand based on material frame setting is in film -coating machine platform inside and inside and outside layout first, second port, ensure that sealing piece is always located in machine platform inside when moving and carrying, reduce the frequency of opening machine platform, effectively reduce the probability of outside particulate matter pollution, and only need to draw out transfer material tray to change sealing piece, simple, convenient operation, and high replacement efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of cleaning equipment, and specifically relates to a wafer sealing component storage device. Background Technology

[0002] In wafer electrochemical coating (ECD) equipment, a ring-shaped conductive seal is typically used to hold and fix the wafer to the carrier along the edge of the wafer. This ensures the sealing between the wafer and the carrier and allows the wafer to be connected to an external power source to participate in the electrochemical reaction in the electroplating tank.

[0003] Currently, when replacing damaged wafer seals, the machine usually needs to automatically unload the damaged seals first, then the process technicians take out the damaged seals, and then send the intact seals into the machine for the robot to load onto the wafer carrier. However, this method is not only cumbersome and time-consuming, but also involves repeatedly opening and closing the machine cabinet door during the replacement process, which can easily introduce new particles into the machine, creating a potential risk that affects the overall process stability of the machine. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide an improved wafer sealing storage device.

[0005] To solve the above technical problems, the present invention adopts the following technical solution:

[0006] A wafer sealing component storage device is installed inside a wafer coating equipment. The storage device includes a material rack forming a storage area and a transfer area, a storage tray group, a transfer tray group, and a robot arm. The inner side of the material rack has a first port that communicates with the storage area and the transfer area and allows the robot arm to pick up and put in materials. The outer side of the material rack has a second port that communicates with the transfer area and the outside of the equipment and can be opened or closed. The storage tray group includes multiple storage trays fixed in the storage area. The transfer tray group includes multiple transfer trays that are movably arranged in the transfer area. When the second port is closed, the robot arm transfers the sealing components one by one between the storage trays, the transfer trays, and the sealing component loading station through the first port. When the second port is open, each transfer tray can be pulled out for replacement of the sealing component.

[0007] Preferably, multiple storage trays and multiple transfer trays are stacked vertically and spaced apart. This maximizes the number of seals that can be stored within a limited space.

[0008] Preferably, the storage area and the transfer area are arranged vertically, and with the second port closed, the storage trays and transfer trays are aligned vertically. This facilitates the precise transfer of seals to the trays by the robotic arm. Simultaneously, placing the transfer area below allows process personnel to easily open the second port to remove the transfer trays for seal replacement.

[0009] Preferably, each storage tray and each transfer tray includes a tray body and connecting modules located on opposite sides of the tray body and respectively connected to the material rack. The tray body has an annular positioning groove formed on its upper surface to match the seal, and the seal is inserted and positioned within the positioning groove. This facilitates precise positioning of the seal.

[0010] Specifically, the disc body also has multiple through holes arranged in a ring at intervals on the inner and / or outer rings of the positioning groove. This not only facilitates the lightweight design of the disc body, but also, based on the alignment of the upper and lower material trays, the through holes are aligned vertically, which facilitates the airflow generated by the internal air purifier of the electroplating equipment and prevents particulate matter from accumulating between the seals.

[0011] Preferably, there are at least a plurality of positioning slots arranged concentrically, wherein the diameter of each positioning slot gradually increases from the inside to the outside; and / or, the disk body has a clearance notch formed from the edge to avoid the robot arm. Here, multiple specifications of seals can be stored simultaneously on the same disk to meet the needs of electroplating processing of wafers of different sizes.

[0012] Preferably, the material rack includes a storage rack body forming a storage area and a transfer rack body forming a transfer area, wherein there are multiple storage rack bodies arranged sequentially from top to bottom, and multiple storage tray groups are correspondingly arranged on each storage rack body. Here, the structure is simple and easy to assemble and disassemble.

[0013] Specifically, each storage rack includes a first rack plate located on the side of the storage area furthest from the first port, and second rack plates located on opposite sides of the storage area. The first rack plate has vertically spaced positioning steps, on which each storage tray rests against and is supported from its outer edge. The second rack plates on both sides have multiple vertically spaced connecting slots, on which each storage tray is inserted from its opposite side and secured with bolts. This design ensures precise connection of each storage tray to the storage rack, and the layout of the first and second racks avoids deformation caused by the central suspension of the storage tray, thus extending its service life.

[0014] Preferably, the transfer frame includes third frame plates disposed on opposite sides of the transfer area, wherein each third frame plate has multiple slide rails spaced vertically apart and corresponding stops disposed at the inner ends of the slide rails. Each transfer tray is slidably connected to its corresponding slide rail from opposite sides, and when the second port is closed, each transfer tray abuts against the stop from its inner edge. This facilitates process personnel in confirming that the transfer tray is pushed back into place after each seal replacement.

[0015] In addition, the transfer frame also includes a door panel rotatably connected to either of the third frame plates on both sides. The door panel rotates inward and outward to open or close the second port. A transparent observation window is provided on the door panel to allow process personnel to easily observe whether the transfer tray is full.

[0016] Due to the implementation of the above technical solution, this utility model has the following advantages compared with the prior art:

[0017] In existing technologies, when replacing damaged wafer seals, the machine typically requires first automatically unloading the damaged seal, then having process engineers remove it, and finally feeding the intact seal into the machine for the robot to load onto the wafer carrier. However, this method is cumbersome, time-consuming, and involves repeatedly opening and closing the machine cabinet door during the replacement process, which can introduce new particles into the machine, potentially affecting the overall process stability. This application addresses these shortcomings by comprehensively designing the wafer seal storage device, cleverly resolving the deficiencies of existing technologies. By implementing this wafer seal storage device, the storage device is placed within the wafer coating area. Inside the equipment, multiple seals are stored on several storage trays in the storage area. With the second port closed, a robotic arm moves the seals one by one between the storage trays, transfer trays, and seal loading stations through the first port to meet the needs of seal loading, replacement, or transfer of replaced seals. When a seal needs to be replaced, the robotic arm first stores the seal to be replaced on the transfer tray through the first port, then opens the second port and pulls out the corresponding transfer tray. The process personnel then take out the seal to be replaced and place the replaced seal. Finally, the transfer tray is returned to the transfer area and the second port is closed. Therefore, compared with the prior art, this utility model adopts a storage area and a transfer area to realize the need for automatic storage of seals and transfer of seals to be replaced or already replaced, ensuring the continuous and normal operation of the coating process as a whole; on the other hand, based on the material rack being set inside the coating machine and the first and second ports being arranged on the inner and outer sides, it ensures that the seals are always inside the machine when being transferred, reducing the frequency of opening the machine and effectively reducing the probability of external particulate matter contamination. Moreover, the seals can be replaced simply by pulling out the transfer tray, which is simple, convenient and efficient. Attached Figure Description

[0018] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments:

[0019] Figure 1 This is a front view schematic diagram of the wafer sealing storage device of this utility model (partially omitted);

[0020] Figure 2 for Figure 1 Enlarged schematic diagram of the central storage rack structure;

[0021] Figure 3 for Figure 1 Enlarged structural diagram of the transfer frame;

[0022] Figure 4 for Figure 1Enlarged schematic diagram of the structure of the intermediate storage tray / transfer tray;

[0023] In the attached diagram: 1. Material rack; 11. Storage rack body; 111. First rack plate; t. Positioning step; 112. Second rack plate; c0. Connecting groove; 12. Transfer rack body; 121. Third rack plate; g. Slide rail; d. Stop block; 122. Door panel; q1. Storage area; q2. Transfer area; k1. First port; k2. Second port; 2. Storage tray group; 20. Storage tray; 3. Transfer tray group; 30. Transfer tray; a0. Tray body; c1. Positioning groove; k3. Through hole; k4. Clearance notch; a1. Connecting module. Detailed Implementation

[0024] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0025] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0026] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0027] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0028] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0029] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0030] like Figures 1 to 4 As shown, the wafer sealing component storage device of this embodiment is installed inside the wafer coating equipment and includes a material rack 1 with a storage area q1 and a transfer area q2, a storage tray group 2, a transfer tray group 3, and a robot arm.

[0031] Specifically, the inner side of the material rack 1 has a first port k1 that communicates with the storage area q1 and the transfer area q2 and allows the robot arm to pick up and put down materials, and the outer side of the material rack 1 has a second port k2 that communicates with the transfer area q2 and the outside of the machine and can be opened or closed.

[0032] For ease of implementation, the material rack 1 includes a storage rack body 11 forming a storage area q1 and a transfer rack body 12 forming a transfer area q2. Multiple storage rack bodies 11 are arranged sequentially, and multiple storage tray groups 2 are correspondingly arranged on each storage rack body 11. Each storage tray group 2 includes multiple storage trays 20 fixed to the storage area q1 and arranged in a stacked, spaced-apart configuration. Each transfer tray group 3 includes multiple transfer trays 30 movably arranged in the transfer area q2 and arranged in a stacked, spaced-apart configuration. This design is simple and easy to assemble and disassemble.

[0033] In some specific embodiments, the storage area q1 and the transfer area q2 are arranged vertically, and with the second port k2 closed, each storage tray 20 and each transfer tray 30 are aligned vertically. This facilitates the precise transfer of seals to each tray by the robotic arm. Simultaneously, placing the transfer area at the bottom allows process personnel to easily open the second port to remove the transfer tray for seal replacement.

[0034] Each storage rack 11 includes multiple first rack plates 111 fixedly installed on the side of storage area q1 away from the first port k1, and second rack plates 112 installed on the left and right sides of storage area q1. The first rack plates 111 have vertically spaced positioning steps t, and each storage tray 20 rests against and is supported on the corresponding positioning step from its outer edge. The inner walls of the second rack plates 112 on the left and right sides have multiple vertically spaced connecting grooves c0, and the outer walls are provided with handles for handling. The multiple connecting grooves c0 on the left and right sides correspond one-to-one, and each storage tray 20 is inserted from its opposite side and fixedly connected to the corresponding connecting groove c0 by bolts. This ensures that each storage tray is accurately connected to the storage rack. Furthermore, based on the layout of the first and second racks, it avoids deformation problems caused by the storage trays being suspended in the middle, thus extending their service life.

[0035] The transfer frame 12 includes third frame plates 121 positioned on opposite sides of the transfer area q2. Each third frame plate 121 has multiple slide rails g spaced vertically and extending along the front-back direction, and corresponding stops d positioned at the inner ends of the slide rails g. Each transfer tray 30 is slidably connected to its corresponding slide rail g from the left and right sides. When the second port k2 is closed, each transfer tray 30 abuts against the stop d from its inner edge. This design facilitates process personnel in confirming that the transfer trays are pushed back into place after each seal replacement. The drawer-type structure allows for easy removal of the seal to be replaced by simply pulling it out, making operation simple and convenient.

[0036] To further facilitate implementation, the transfer frame 12 also includes a door panel 122 that is rotatably connected to either of the third frame plates 121 on both sides around a vertical center line. The door panel 122 rotates inward and outward to open or close the second port k2. A transparent observation window is provided on the door panel 122 to facilitate process personnel to observe whether the transfer tray is full.

[0037] In this example, the structures of each storage tray 20 and each transfer tray 30 are basically the same, each including a circular tray a0 and connecting modules a1 integrally formed on the left and right sides of the tray a0 and respectively connected to the material rack 1. The tray a0 has an annular positioning groove c1 on its upper surface that matches the seal J, and the seal J is inserted and positioned within the positioning groove c1. This facilitates precise positioning of the seal. It should be noted that the structure of the seal J involved in this embodiment can refer to the outer ring plate involved in Chinese Patent CN218160335U. The surface of the seal J has multiple protruding and annularly spaced locking pins. Therefore, in this embodiment, when the seal J is positioned, the seal J fits against the surface of the tray a0, and the multiple locking pins are inserted into the positioning groove c1.

[0038] In some specific embodiments, the disc body a0 is further provided with a plurality of through holes k3 arranged in a ring at intervals on the inner and / or outer rings of the positioning groove c1. This not only facilitates the lightweight design of the disc body, but also, based on the alignment of the upper and lower material trays, the through holes are aligned vertically, which facilitates the flow of air generated by the internal air purifier of the electroplating equipment and prevents particulate matter from accumulating between the seals.

[0039] Meanwhile, there are two concentric positioning grooves c1, with the diameter of each groove c1 gradually increasing from the inside out; the disk a0 has a clearance notch k4 formed from its edge to avoid the robot arm picking up and placing the inner ring seal. This allows for the simultaneous storage of seals of various specifications on the same disk, meeting the needs of electroplating wafers of different sizes.

[0040] Furthermore, the robotic arm used in this embodiment is any conventional robotic arm for transferring seals, which will not be described in detail here. Therefore, when the second port k2 is closed, the robotic arm transfers the seals J one by one between each storage tray 20, each transfer tray 30, and the seal loading station through the first port k1.

[0041] In summary, by adopting this wafer seal storage device, the storage device is installed inside the wafer coating equipment. Multiple seals are stored on multiple storage trays located in the storage area. With the second port closed, a robot arm transfers seals one by one between the storage trays, transfer trays, and seal loading stations through the first port to meet the needs of seal loading, replacement, or transfer of replaced seals. When a seal needs to be replaced, the robot arm first stores the seal to be replaced on the transfer tray through the first port, then opens the second port and pulls out the corresponding transfer tray. The process personnel then take out the seal to be replaced and place the replaced seal. Finally, the transfer tray is returned to the transfer area and the second port is closed. Therefore, compared with the prior art, this utility model, on the one hand, adopts a storage area and a transfer area to realize the need for automatic storage of seals and transfer of seals to be replaced or already replaced, ensuring the continuous and normal operation of the coating process as a whole; on the other hand, based on the material rack being set inside the coating machine and the first and second ports being arranged on the inner and outer sides, it ensures that the seals are always inside the machine during transfer, reducing the frequency of opening the machine and effectively reducing the probability of external particulate matter contamination. Moreover, the seals can be replaced simply by pulling out the transfer tray, making the operation simple, convenient, and efficient; thirdly, it facilitates maximizing the number of seals that can be stored in a limited space; fourthly, it not only facilitates the lightweight design of the tray body, but also... The alignment of the upper and lower material trays ensures that the formed through holes are aligned vertically, facilitating the airflow generated by the internal air purifier of the electroplating equipment and preventing particulate matter from accumulating between the seals. Fifthly, it allows for the simultaneous storage of multiple specifications of seals on the same tray to meet the needs of electroplating wafers of different sizes. Sixthly, it ensures that each storage tray is precisely connected to the storage frame, and based on the layout of the first and second frames, it avoids deformation problems caused by the central suspension of the storage tray, extending its service life. Furthermore, it facilitates process personnel in confirming that the transfer tray can be pushed back into place after each seal replacement, and the drawer-type structure allows for easy removal of the seal to be replaced by pulling it out, making operation simple and convenient.

[0042] The present utility model has been described in detail above, with the aim of enabling those skilled in the art to understand its contents and implement it. However, this description should not be construed as limiting the scope of protection of the present utility model. All equivalent changes or modifications made in accordance with the spirit and essence of the present utility model should be included within the scope of protection of the present utility model.

Claims

1. A wafer sealing component storage device, disposed inside a wafer coating equipment, characterized in that: The storage device includes a material rack forming a storage area and a transfer area, a storage tray group, a transfer tray group, and a robot arm. The inner side of the material rack has a first port that communicates with the storage area and the transfer area and allows the robot arm to pick up and put in materials. The outer side of the material rack has a second port that communicates with the transfer area and the outside of the machine and can be opened or closed. The storage tray group includes multiple storage trays fixed in the storage area. The transfer tray group includes multiple transfer trays movably arranged in the transfer area. When the second port is closed, the robot arm transfers the seals piece by piece between the storage trays, the transfer trays, and the seal loading station through the first port. When the second port is open, each transfer tray can be pulled out for replacement of the seals.

2. The wafer sealing storage device according to claim 1, characterized in that: Multiple storage trays and multiple transfer trays are stacked on top of each other at intervals.

3. The wafer sealing storage device according to claim 1, characterized in that: The storage area and the transfer area are arranged vertically, and when the second port is closed, each storage tray and each transfer tray are aligned vertically.

4. The wafer sealing storage device according to claim 1, characterized in that: Each of the storage trays and each of the transfer trays includes a tray body and connecting modules located on opposite sides of the tray body and respectively connected to the rack. The tray body forms an annular positioning groove on its upper surface that matches the seal, and the seal is inserted and positioned in the positioning groove.

5. The wafer sealing storage device according to claim 4, characterized in that: The disc body also has multiple through holes arranged in a ring at intervals on the inner and / or outer rings of the positioning groove.

6. The wafer sealing storage device according to claim 4, characterized in that: The positioning grooves are at least multiple and concentrically arranged, wherein the diameter of each positioning groove gradually increases from the inside to the outside; and / or, the disk body has a clearance notch formed from the edge for avoiding the robot arm.

7. The wafer sealing storage device according to claim 2, characterized in that: The material rack includes a storage rack body forming a storage area and a transfer rack body forming a transfer area. There are multiple storage rack bodies arranged sequentially from top to bottom, and multiple storage tray groups are arranged on each of the storage rack bodies.

8. The wafer sealing storage device according to claim 7, characterized in that: Each of the storage racks includes a first rack plate disposed on the side of the storage area away from the first port and a second rack plate disposed on opposite sides of the storage area. The first rack plate has positioning steps that are spaced vertically, and each of the storage trays rests against and is supported on the corresponding positioning steps from its outer edge. The second rack plates on both sides have multiple connecting slots that are spaced vertically, and each of the storage trays is inserted into the corresponding connecting slot from opposite sides and fixedly connected by bolts.

9. The wafer sealing storage device according to claim 7, characterized in that: The transfer frame includes a third frame plate disposed on opposite sides of the transfer area. Each of the third frame plates has multiple slide rails distributed vertically and vertically, and corresponding stops disposed at the inner ends of the multiple slide rails. Each of the transfer trays is slidably connected to the corresponding slide rail from opposite sides. When the second port is closed, each of the transfer trays abuts against the stop from its inner edge.

10. The wafer sealing storage device according to claim 9, characterized in that: The transfer frame also includes a door panel rotatably connected to either of the third frame plates on both sides, which rotates inward and outward to open or close the second port.

Images