A high-precision mobile device

Abstract

The utility model discloses a high accuracy mobile device, including fixed bolster, be provided with drive arrangement on the fixed bolster, the output of drive arrangement is connected with the screw rod, the other end of screw rod is rotatably connected with fixed bolster, the mobile platform is set up on the screw rod, be provided with guiding mechanism on the fixed bolster, guiding mechanism with mobile platform sliding connection, drive arrangement drives mobile platform moves along guiding mechanism, the rear end axle side of drive arrangement is provided with drive detection device, and drive detection device real -time detection drive arrangement drives the distance of mobile platform movement, the utility model provides a high accuracy mobile device, simple structure and low in cost, stable and reliable performance can satisfy the demand of high accuracy, high reliability of mobile device to semiconductor automatic detection equipment.

Description

Technical Field

[0001] This utility model relates to the field of automatic detection equipment technology, and in particular to a high-precision moving device. Background Technology

[0002] In the semiconductor manufacturing industry, automated wafer inspection is a crucial step in ensuring product quality. As the integration of semiconductor devices continues to increase, the requirements for wafer inspection accuracy are becoming increasingly stringent. During wafer inspection, to comprehensively acquire the geometric and electrical parameters at different locations on the wafer, a high-precision moving device is needed to accurately move the wafer to the designated inspection position. The accuracy of this movement directly determines the reliability of the inspection results. Currently, most existing high-precision motion devices on the market employ complex mechanical transmissions and precision control systems. While these can meet the requirements for high-precision motion, they suffer from complex structures and numerous components. This not only significantly increases the difficulty of assembly and debugging but also keeps manufacturing costs high, severely limiting the room for cost control optimization in semiconductor wafer inspection equipment and making it difficult to meet the industry's urgent need for efficient and low-cost inspection solutions. Therefore, there is an urgent need to develop a high-precision motion device that ensures accurate positioning while possessing the advantages of simple structure and low cost. Utility Model Content

[0003] In view of the above-mentioned shortcomings of current high-precision moving devices, this utility model provides a high-precision moving device that can solve at least one of the problems. This utility model provides a high-precision moving device that ensures moving accuracy through the cooperation of a lead screw and a guide mechanism. The drive device, together with the drive device detection device, forms a closed-loop control to compensate for errors. It has a simple structure, low cost, stable and reliable performance, and can meet the high precision and high reliability requirements of semiconductor automatic testing equipment for the moving platform.

[0004] To achieve the above objectives, the embodiments of this utility model adopt the following technical solutions: A high-precision moving device includes a fixed bracket, a driving device mounted on the fixed bracket, an output end of the driving device connected to a lead screw, the other end of the lead screw rotatably connected to the fixed bracket, a moving platform sleeved on the lead screw, a guide mechanism mounted on the fixed bracket, the guide mechanism slidably connected to the moving platform, the driving device driving the moving platform to move along the guide mechanism, and a driving detection device mounted on the rear shaft side of the driving device, the driving detection device detecting in real time the distance the driving device drives the moving platform to move.

[0005] According to one aspect of the present invention, the drive detection device includes an indexing plate disposed on the rear shaft side of the drive device, and a photoelectric sensor is disposed on the fixed bracket. The photoelectric sensor determines the distance moved by the moving platform by detecting the number of revolutions of the indexing plate.

[0006] According to one aspect of the present invention, the indexing plate is provided with a plurality of slots, and the photoelectric sensor determines the number of revolutions of the indexing plate by detecting the number of slots.

[0007] According to one aspect of the present invention, an initial position detection device is provided on the fixed bracket, and a movable contact piece is provided on the moving platform. The initial position detection device determines the position of the moving platform by detecting the position of the movable contact piece.

[0008] According to one aspect of the present invention, the initial position detection device is a U-shaped photoelectric sensor, the U-shaped photoelectric sensor is provided with a U-shaped groove, and the movable contact piece passes through the U-shaped groove.

[0009] According to one aspect of the present invention, the driving device includes a stepper motor mounted on the fixed bracket, the stepper motor being connected to the lead screw via a coupling.

[0010] According to one aspect of the present invention, the mobile platform includes a mobile stage base plate, a lead screw bushing is sleeved on the lead screw and connected to the mobile stage base plate, and a guide rail bushing is provided on the guide mechanism and connected to the mobile stage base plate.

[0011] According to one aspect of the present invention, the fixed bracket includes a bracket base plate, a front fixing block of the guide rail, a rear fixing block of the guide rail, a front fixing block of the lead screw, and a rear fixing block of the lead screw. The guiding mechanism is mounted on the front fixing block of the guide rail and the rear fixing block of the guide rail, and the lead screw is rotatably connected to the front fixing block of the lead screw and the rear fixing block of the lead screw through a bearing.

[0012] According to one aspect of the present invention, a limit detection device is provided on the fixed bracket, the limit detection device being used to detect the extreme position of the reverse movement of the mobile platform.

[0013] According to one aspect of the present invention, the limiting detection device is a U-shaped photoelectric sensor, the U-shaped photoelectric sensor is provided with a U-shaped groove, and the movable contact piece passes through the U-shaped groove.

[0014] The advantages of this invention are as follows: It employs a combination of a high-precision ball screw and a spline linear guide, ensuring stable and smooth operation of the moving platform through minimal sliding clearance and high linear accuracy, meeting the high-precision movement requirements of semiconductor testing. The drive device uses a stepper motor connected to the screw via a coupling, significantly reducing costs compared to a servo motor. Simultaneously, a closed-loop control system is formed by the indexing plate on the rear shaft and a U-shaped photoelectric sensor. The indexing plate with multiple slots compensates for movement deviations caused by mechanical structure and speed, achieving precise calibration of the movement distance. The initial position detection device uses a non-contact detection method with a U-shaped photoelectric sensor and a moving contact piece to ensure the moving platform always returns to a unique reference position, eliminating accumulated errors. In the overall structure, the screw and guide mechanism are mounted on the support base plate via a fixing block, and the moving platform is modularly connected to the fixing frame via bushings, simplifying the assembly process while improving structural reliability. The non-contact photoelectric detection mechanism avoids mechanical wear, significantly extending the device's mean time between failures (MTBF). It is suitable for scenarios in semiconductor automatic testing equipment where precision, cost, and stability requirements are stringent. This utility model provides a high-precision moving device that ensures moving accuracy through the cooperation of a lead screw and a guide mechanism. It uses a drive device and a drive device detection device to form a closed-loop control to compensate for errors. It uses an initial position detection device and a limit detection device to achieve initial position calibration and reverse movement limit position detection. It has a simple structure, low cost, stable and reliable performance, and can meet the high precision and high reliability requirements of semiconductor automatic testing equipment for the moving platform. It is suitable for many automated semiconductor testing equipment that need to move during the testing process. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a three-dimensional structural diagram of a high-precision moving device according to the present invention; Figure 2 This is a front view of a high-precision moving device according to the present invention; Figure 3 This is a schematic diagram of the mobile platform structure in a high-precision mobile device according to the present invention; Figure 4 This is a schematic diagram of the structure of the fixed bracket in the high-precision moving device of this utility model.

[0017] The names corresponding to the serial numbers in the diagram are as follows: 1. Fixed bracket; 11. Bracket base plate; 12. Front fixing block of guide rail; 13. Rear fixing block of guide rail; 14. Front fixing block of lead screw; 15. Rear fixing block of lead screw; 2. Guide mechanism; 3. Drive device; 31. Stepper motor; 32. Coupling; 33. Motor mounting bracket; 4. Lead screw; 5. Moving platform; 51. Moving platform base plate; 52. Lead screw bushing; 53. Lead screw bushing mounting bracket; 54. Guide rail bushing; 55. Guide rail bushing mounting block; 6. Drive detection device; 61. Photoelectric sensor; 62. Indexing plate; 621. Slot; 63. Sensor mounting bracket; 7. Initial position detection device; 71. U-shaped slot; 72. Initial position detection device mounting bracket; 8. Moving contact piece; 9. Limit detection device; 91. U-shaped slot; 92. Limit detection device mounting bracket. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0020] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0021] Example 1

[0022] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, a high-precision moving device is applicable to semiconductor automatic testing equipment. It includes a fixed bracket 1, which comprises a bracket base 11, a front fixing block 12 of the guide rail, a rear fixing block 13 of the guide rail, a front fixing block 14 of the lead screw, and a rear fixing block 15 of the lead screw. A driving device 3 is mounted on the fixed bracket 1, with its output end connected to a lead screw 4. The other end of the lead screw 4 is rotatably connected to the fixed bracket 1. Preferably, the lead screw 4 is a high-precision ball screw. A moving platform 5 is sleeved on the lead screw 4. A guiding mechanism 2, which is a guide rail, is mounted on the fixed bracket 1. Preferably, the guide rail is a spline linear guide rail. The guiding mechanism 2 is slidably connected to the moving platform 5. The driving device 3 drives the moving platform 5 to move along the guiding mechanism 2. A driving detection device 6 is mounted on the rear shaft side of the driving device 3, which detects the distance the driving device 3 drives the moving platform 5 to move in real time. The drive device 3 drives the lead screw 4 to rotate, thereby causing the moving platform 5 to move on the guide rail.

[0023] In this embodiment, the drive detection device 6 includes a dividing plate 62 disposed on the rear shaft side of the drive device 3, and a photoelectric sensor 61 disposed on the fixed bracket 1. The photoelectric sensor 61 determines the distance traveled by the moving platform 5 by detecting the number of revolutions of the dividing plate 62. The dividing plate 62 has multiple slots 621, and the photoelectric sensor 61 determines the number of revolutions of the dividing plate 62 by detecting the number of slots 621. In this embodiment, the number of slots 621 is 16; in other embodiments, the number of slots 621 can be adjusted according to accuracy requirements. Preferably, the photoelectric sensor 61 is a U-shaped photoelectric sensor with a U-shaped groove, within which the dividing plate 62 can rotate. The photoelectric sensor 61 determines the distance traveled by the moving platform by detecting the number of slots.

[0024] In this embodiment, the driving device 3 includes a stepper motor 31 mounted on the fixed bracket 1, and the stepper motor 31 is connected to the lead screw 4 via a coupling 32. The indexing plate 62 is fixed to the rear end shaft of the stepper motor 31 by set screws. When the stepper motor 31 rotates, it can drive the indexing plate 62 to rotate synchronously. The stepper motor 31 is mounted on the bracket base plate 11 via a motor mounting bracket 33. Before each operation, the stepper motor 31 rotates and drives the moving stage base plate 51 to move to the initial position.

[0025] In this embodiment, an initial position detection device 7 is provided on the fixed bracket 1. The initial position detection device 7 is mounted on the bracket base 11 via an initial position detection device mounting bracket 72. A movable contact piece 8 is provided on the moving platform 5. The initial position detection device 7 determines the position of the moving platform 5 by detecting the position of the movable contact piece 8. The initial position detection device 7 is a U-shaped photoelectric sensor. The U-shaped sensor is fixedly mounted on the bracket base 11 via a sensor mounting bracket. The U-shaped photoelectric sensor has a U-shaped groove 71 through which the movable contact piece 8 passes. That is, when the moving platform 5 moves, the movable contact piece 8 moves synchronously. When the movable contact piece 8 passes through the U-shaped groove 71, it blocks the sensor's transmit-receive optical path, triggering photoelectric signal conversion. The U-shaped photoelectric sensor transmits the detected position signal to the control system (such as a PLC) in real time. Based on this, the control system determines that the moving platform 5 has reached the preset initial position and sends a command to stop the drive device 3. The moving platform 5 has returned to the initial position and is ready for the next action.

[0026] In this embodiment, the mobile platform 5 includes a mobile stage base plate 51, and a lead screw bushing 52 is sleeved on the lead screw 4. The lead screw bushing 52 is fixedly installed on the mobile stage base plate 51 by a lead screw bushing fixing bracket 53. A guide rail bushing 54 is provided on the guide mechanism 2, and the guide rail bushing 54 is fixedly installed on the mobile stage base plate 51 by a guide rail bushing fixing block 55.

[0027] In this embodiment, the guide mechanism 2 is mounted on the front fixing block 12 and the rear fixing block 13 of the guide rail, and the lead screw 4 is rotatably connected to the front fixing block 14 and the rear fixing block 15 of the lead screw through bearings.

[0028] In this embodiment, the driving device 3, photoelectric sensor 61, initial position detection device 7, and limit detection device 9 are all connected to the control system.

[0029] When the mobile device needs to move a certain distance according to an instruction, the PLC sends the number of pulses required to move to the specified position to the stepper motor 31. The stepper motor 31 will rotate a specified number of revolutions according to the specified number of pulses, thereby driving the mobile platform 5 to move to the specified position. However, due to the transmission efficiency of the mechanical structure and the effect of stepper motors missing steps, the actual movement position based on the given number of pulses may deviate from the expected movement position. At this time, the photoelectric sensor 61 and the indexing plate 62 can avoid the above-mentioned error. In this embodiment, when the stepper motor 31 rotates, it will drive the indexing plate 62 to rotate together. The 16 evenly distributed slots on the circumference of the indexing plate will trigger the photoelectric sensor 61. For every revolution of the stepper motor, the photoelectric sensor 61 will be triggered 16 times, that is, counted 16 times. In this way, 100 revolutions of the stepper motor will count 1600 times. The pulses sent in the above-mentioned movement command drive the stepper motor 31 to rotate. If the pulse count is exhausted but the count has not reached the specified number, that is, due to the influence of mechanical structure or stepper motor step loss, the moving mechanism has not yet moved to the specified position. At this time, the PLC will continue to send a certain number of pulses to the stepper motor 31 to make the stepper motor continue to rotate until the count of photoelectric sensor 61 and indexing disk 62 reaches the specified number. Then the PLC sends an immediate stop command to the stepper motor, thereby achieving the purpose of precise movement of the moving mechanism.

[0030] The beneficial effects of this embodiment are as follows: The combination of a high-precision ball screw and a spline linear guide ensures stable and smooth operation of the moving platform through minimal sliding clearance and high linear accuracy, meeting the high-precision movement requirements of semiconductor testing. The drive device uses a stepper motor connected to the screw via a coupling, significantly reducing costs compared to a servo motor. Simultaneously, a closed-loop control system is formed by the indexing plate on the rear shaft and a U-shaped photoelectric sensor. The indexing plate with multiple slots compensates for movement deviations caused by mechanical structure and speed, achieving precise calibration of the movement distance. The initial position detection device uses a non-contact detection method with a U-shaped photoelectric sensor and a moving contact piece to ensure the moving platform returns to a unique reference position each time, eliminating accumulated errors. In the overall structure, the screw and guide mechanism are mounted on the support base plate via a fixing block, and the moving platform is modularly connected to the fixing frame via bushings, simplifying the assembly process while improving structural reliability. The non-contact photoelectric detection mechanism avoids mechanical wear, significantly extending the device's mean time between failures (MTBF). This makes it suitable for scenarios in semiconductor automatic testing equipment where precision, cost, and stability requirements are stringent.

[0031] Example 2

[0032] The difference between this embodiment and Embodiment 1 is that, in this embodiment, a limit detection device 9 is provided on the fixed bracket 1. The limit detection device 9 is used to detect the extreme position of the reverse movement of the moving platform 5. The limit detection device 9 is mounted on the bracket base plate 11 through a limit detection device fixing frame 92.

[0033] In this embodiment, the limit detection device 9 is a U-shaped photoelectric sensor with a U-shaped slot 91. The movable contact piece 8 passes through the U-shaped slot. The U-shaped photoelectric sensor is fixedly mounted on the support base plate 11. When the movable contact piece 8 passes through the U-shaped slot 91, it blocks the transmitting-receiving optical path of the U-shaped sensor, triggering photoelectric signal conversion. The U-shaped photoelectric sensor transmits the detected position signal to the control system (such as a PLC) in real time. Based on this, the control system determines that the moving platform 5 has reached the limit position and sends a command to stop the drive device 3.

[0034] The working principle or operation process in this implementation is as follows: After startup, the drive device 3 is powered on and receives the return command from the control system (PLC). The motor rotates, driving the lead screw 4 to rotate through the coupling 32, thereby driving the moving platform 5 to move along the guide mechanism 2. When the moving contact 8 on the moving platform 5 moves with the platform and passes through the U-shaped groove 71 of the initial position detection device 7, the light path is blocked. The sensor sends a signal to the PLC, and the PLC controls the stepper motor 31 to stop rotating, completing the initial position calibration of the moving platform 5.

[0035] When the moving platform 5 needs to perform displacement detection, the PLC sends a command containing the number of pulses and direction to the stepper motor 31. The motor rotates, driving the lead screw 4 to rotate. The moving platform 5 achieves linear movement through the threaded engagement between the lead screw bushing 52 and the lead screw 4, and the sliding engagement between the guide rail bushing 54 and the spline linear guide. At the same time, the indexing plate 62 on the rear shaft of the stepper motor 31 rotates synchronously. Multiple slots 621 evenly distributed around its circumference pass sequentially through the U-shaped photoelectric sensor 61 of the drive detection device 6. Each time the sensor detects a slot, it generates a counting signal and feeds it back to the PLC. If the actual moving distance deviates from the set pulse count value due to mechanical transmission efficiency or stepper motor step loss, the PLC will send additional pulses based on the count difference of the indexing plate 62 until the count reaches the preset number, forming a closed-loop control to ensure movement accuracy.

[0036] When the mobile platform 5 moves in the reverse direction to the limit position, the moving contact 8 passes through the U-shaped slot 91 of the limit detection device 9. The light path is blocked, triggering the sensor to send a limit position signal to the PLC. The PLC immediately instructs the stepper motor 31 to stop rotating to prevent the platform from moving beyond its travel range and causing mechanical collision.

[0037] The beneficial effects of this embodiment are as follows: The limit detection device 9, through the cooperation of the U-shaped photoelectric sensor and the moving contact piece 8, achieves accurate detection of the reverse movement limit position of the moving platform 5, preventing mechanical collisions caused by overtravel of the moving platform and ensuring the safety of equipment operation; it also prevents damage to the equipment in case of failure. Employing a non-contact photoelectric detection mechanism, when the moving contact piece 8 passes through the U-shaped slot 91, signal transmission is triggered by light path blocking, avoiding the wear problem of traditional mechanical limiters and meeting the high precision requirements of semiconductor testing equipment for travel boundaries. The limit detection device 9 and the initial position detection device 7 form a bidirectional position protection mechanism, ensuring both the accuracy of the moving platform's return to its original position and eliminating the risk of overtravel, significantly improving the reliability and stability of the overall system, especially suitable for scenarios in semiconductor wafer testing where strict control of the movement trajectory boundaries is required.

[0038] The advantages of this invention are as follows: It employs a combination of a high-precision ball screw and a spline linear guide, ensuring stable and smooth operation of the moving platform through minimal sliding clearance and high linear accuracy, meeting the high-precision movement requirements of semiconductor testing. The drive device uses a stepper motor connected to the screw via a coupling, significantly reducing costs compared to a servo motor. Simultaneously, a closed-loop control system is formed by the indexing plate on the rear shaft and a U-shaped photoelectric sensor. The indexing plate with multiple slots compensates for movement deviations caused by mechanical structure and speed, achieving precise calibration of the movement distance. The initial position detection device uses a non-contact detection method with a U-shaped photoelectric sensor and a moving contact piece to ensure the moving platform always returns to a unique reference position, eliminating accumulated errors. In the overall structure, the screw and guide mechanism are mounted on the support base plate via a fixing block, and the moving platform is modularly connected to the fixing frame via bushings, simplifying the assembly process while improving structural reliability. The non-contact photoelectric detection mechanism avoids mechanical wear, significantly extending the device's mean time between failures (MTBF). It is suitable for scenarios in semiconductor automatic testing equipment where precision, cost, and stability requirements are stringent. This utility model provides a high-precision moving device that ensures moving accuracy through the cooperation of a lead screw and a guide mechanism. It uses a drive device and a drive device detection device to form a closed-loop control to compensate for errors. It uses an initial position detection device and a limit detection device to achieve initial position calibration and reverse movement limit position detection. It has a simple structure, low cost, stable and reliable performance, and can meet the high precision and high reliability requirements of semiconductor automatic testing equipment for the moving platform. It is suitable for many automated semiconductor testing equipment that need to move during the testing process.

[0039] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A high-precision moving device, comprising a fixed bracket (1), wherein a driving device (3) is disposed on the fixed bracket (1), characterized in that, The output end of the drive device (3) is connected to the lead screw (4), and the other end of the lead screw (4) is rotatably connected to the fixed bracket (1). A moving platform (5) is sleeved on the lead screw (4), and a guide mechanism (2) is provided on the fixed bracket (1). The guide mechanism (2) is slidably connected to the moving platform (5). The drive device (3) drives the moving platform (5) to move along the guide mechanism (2). A drive detection device (6) is provided on the rear shaft side of the drive device (3). The drive detection device (6) detects in real time the distance that the drive device (3) drives the moving platform (5) to move.

2. The high-precision moving device according to claim 1, characterized in that, The drive detection device (6) includes a rear shaft-side indexing plate (62) disposed on the drive device (3), and a photoelectric sensor (61) is disposed on the fixed bracket (1). The photoelectric sensor (61) determines the distance moved by the moving platform (5) by detecting the number of revolutions of the indexing plate (62).

3. The high-precision moving device according to claim 2, characterized in that, The indexing plate (62) is provided with multiple slots (621), and the photoelectric sensor (61) determines the number of revolutions of the indexing plate (62) by detecting the number of slots.

4. The high-precision moving device according to claim 1, characterized in that, An initial position detection device (7) is provided on the fixed bracket (1), and a movable contact piece (8) is provided on the moving platform (5). The initial position detection device (7) determines the position of the moving platform (5) by detecting the position of the movable contact piece (8).

5. The high-precision moving device according to claim 4, characterized in that, The initial position detection device (7) is a U-shaped photoelectric sensor, and a U-shaped groove (71) is provided on the U-shaped photoelectric sensor. The movable contact piece (8) passes through the U-shaped groove.

6. The high-precision moving device according to claim 1, characterized in that, The drive device (3) includes a stepper motor (31) mounted on the fixed bracket (1), and the stepper motor (31) is connected to the lead screw (4) via a coupling (32).

7. The high-precision moving device according to claim 1, characterized in that, The mobile platform (5) includes a mobile stage base plate (51), a lead screw bushing (52) is sleeved on the lead screw (4), the lead screw bushing (52) is connected to the mobile stage base plate (51), and a guide rail bushing (54) is provided on the guide mechanism (2), the guide rail bushing (54) is connected to the mobile stage base plate (51).

8. The high-precision moving device according to claim 1, characterized in that, The fixed bracket (1) includes a bracket base plate (11), a guide rail front fixing block (12), a guide rail rear fixing block (13), a lead screw front fixing block (14) and a lead screw rear fixing block (15). The guide mechanism (2) is installed on the guide rail front fixing block (12) and the guide rail rear fixing block (13). The lead screw (4) is rotatably connected to the lead screw front fixing block (14) and the lead screw rear fixing block (15) through bearings.

9. The high-precision moving device according to any one of claims 1 to 8, characterized in that, A limit detection device (9) is provided on the fixed bracket (1), and the limit detection device (9) is used to detect the extreme position of the reverse movement of the mobile platform (5).

10. The high-precision moving device according to claim 5, characterized in that, The fixed bracket (1) is provided with a limit detection device (9), which is used to detect the extreme position of the reverse movement of the moving platform (5); the limit detection device (9) is a U-shaped photoelectric sensor, which is provided with a U-shaped slot (91), and the moving contact piece (8) passes through the U-shaped slot.

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