Lifting mechanism for electrostatic chuck module

Abstract

The utility model discloses a kind of lifting mechanisms for electrostatic chuck module, it is related to electrostatic chuck technical field, including installation base, motor main body and lifting platform, installation base upper end middle part is equipped with installation vertical board, and installation vertical board right side upper end is equipped with motor main body, and motor main body front end is connected with upper belt pulley, while upper belt pulley outside is connected with transmission belt, the transmission belt lower end is connected with lower belt pulley, and lower belt pulley front end is connected with screw rod, and screw rod outside is connected with installation sliding block, while installation sliding block lower end two sides additionally install limit sliding block, the limit sliding block inside is connected with limit guide rail. The lifting mechanism for electrostatic chuck module, can be driven by motor whole lifting platform group rises and falls, more accurate than manually to the adjustment of lifting platform, and efficiency is higher, more quickly than the thickness adjustment of different products using jig, and better economy.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck technology, specifically a lifting mechanism for an electrostatic chuck module. Background Technology

[0002] An electrostatic chuck is a device that uses electrostatic adsorption to fix wafers. It is widely used in semiconductor manufacturing processes. It generates adsorption force through a uniformly distributed electrostatic field, keeping the wafer stable during processing. Suitable for vacuum or non-vacuum environments, electrostatic chucks are mainly used to fix wafers, ensuring their positional accuracy and stability in processes such as ion implantation, physical vapor deposition, and chemical vapor deposition. Electrostatic chucks typically consist of an alumina or aluminum nitride ceramic substrate, an electrode layer, and a dielectric layer. Some models support temperature control to adapt to different process requirements. Currently, when using electrostatic chucks for workpiece lamination, the thickness of the workpiece varies, but its height must remain consistent during the lamination action with the pressure rollers. Therefore, the workpiece needs to be placed on a work platform, and the platform's lifting and lowering are used to maintain a consistent height of the workpiece relative to the pressure rollers. However, existing lifting mechanisms still have the following shortcomings:

[0003] When using existing lifting mechanisms, each product needs to be individually matched with tooling fixtures for adjustment, resulting in too many fixtures, which is uneconomical and cumbersome. When adjusting manually, the relative height needs to be judged manually, which may result in a large error. This leads to a decrease in the practicality and efficiency of the lifting mechanism. Utility Model Content

[0004] The purpose of this invention is to provide a lifting mechanism for an electrostatic chuck module to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a lifting mechanism for an electrostatic chuck module, comprising a mounting base, a motor body, and a lifting platform. A mounting vertical plate is mounted on the upper center of the mounting base, and the motor body is mounted on the upper right side of the mounting vertical plate. An upper pulley is connected to the front end of the motor body, and a transmission belt is connected to the outside of the upper pulley. A lower pulley is connected to the lower end of the transmission belt, and a lead screw is connected to the front end of the lower pulley. A mounting slider is connected to the outside of the lead screw. Limiting sliders are added to both sides of the lower end of the mounting slider, and a limiting guide rail is connected inside the limiting slider. Movable mounting blocks are mounted at both ends of the mounting slider, and a lower mounting guide rail is connected to the lower end of each movable mounting block. A movable slider is mounted on the upper end of each movable mounting block, and an upper mounting guide rail is connected inside the movable slider. An inclined slider is mounted on the upper end of the upper mounting guide rail. Mounting vertical rods are mounted at the four corners of the upper end of the mounting base, and receiving guide rails are mounted inside the mounting vertical rods. Receiving sliders are mounted outside the receiving guide rails, and a lifting platform is mounted on the upper end of the receiving sliders.

[0006] Furthermore, the mounting plate is embedded in the mounting base, and the mounting plate is fixedly connected to the mounting base by bolts.

[0007] Furthermore, the external dimensions of the lead screw are adapted to the internal dimensions of the mounting slider, and the mounting slider is slidably connected to the mounting base via the lead screw.

[0008] Furthermore, the internal dimensions of the limiting slider are adapted to the external dimensions of the limiting guide rail, and the limiting slider and the limiting guide rail are slidably connected.

[0009] Furthermore, the movable mounting block and the mounting slider are distributed perpendicularly, and the movable mounting block and the mounting slider are fixedly connected by bolts.

[0010] Furthermore, the upper mounting guide rail and the movable slider are embeddedly connected, and the inclined slider is slidably connected to the movable slider through the upper mounting guide rail.

[0011] Furthermore, the number of receiving guide rails is set to four, and the four receiving guide rails are symmetrically arranged on both sides of the upper end of the mounting base with respect to the central axis of the front of the mounting base.

[0012] Furthermore, the outer side of the receiving slider is horizontally distributed with the outer side of the lifting platform, and the lifting platform is fixedly connected to the receiving slider by bolts.

[0013] This utility model provides a lifting mechanism for an electrostatic chuck module, which has the following advantages:

[0014] 1. By setting up the motor body, this utility model enables the upper pulley to rotate when the lifting mechanism of the electrostatic chuck module is in use. The motor body drives the upper pulley to rotate, which in turn drives the transmission belt to rotate the lower pulley. This causes the lead screw connected to the lower pulley to rotate, and the rotation of the lead screw drives the installation slider to move in position. At the same time, the limit slider and the limit guide rail make the installation slider move stably left and right on the upper end of the mounting base, thereby improving the movement stability of the lifting mechanism and increasing the overall practicality and efficiency of the lifting structure.

[0015] 2. This utility model, through the setting of the inclined slider, enables the position adjustment of the movable mounting block by moving the mounting slider when using the lifting mechanism of the electrostatic chuck module. The lower mounting guide rail further enhances the stability of the movable mounting block during movement. The movable slider is fixedly installed on the upper end of the movable mounting block, and the inclined slider slides into contact with the movable mounting block via the upper mounting guide rail. Simultaneously, the mounting vertical rod is fixed to the four corners of the upper end of the mounting base with fastening bolts, fixing the lifting platform to the receiving slider. This allows the inclined slider to move up and down as the movable mounting block moves left and right, and the receiving slider ensures stable up and down adjustment of the lifting platform, improving the processing efficiency of the electrostatic chuck module and increasing the overall practicality of the lifting mechanism. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of a lifting mechanism for an electrostatic chuck module according to the present invention;

[0017] Figure 2 This is a three-dimensional structural diagram of the receiving slider of the lifting mechanism for an electrostatic chuck module according to the present invention;

[0018] Figure 3 This is a three-dimensional structural diagram of the motor body of a lifting mechanism for an electrostatic chuck module according to the present invention;

[0019] Figure 4 This is a side view of the inclined slider structure of the lifting mechanism for an electrostatic chuck module according to the present invention.

[0020] In the diagram: 1. Mounting base; 2. Mounting vertical plate; 3. Motor body; 4. Upper pulley; 5. Transmission belt; 6. Lower pulley; 7. Lead screw; 8. Mounting slider; 9. Limiting slider; 10. Limiting guide rail; 11. Movable mounting block; 12. Lower mounting guide rail; 13. Movable slider; 14. Upper mounting guide rail; 15. Inclined slider; 16. Mounting vertical rod; 17. Receiving guide rail; 18. Receiving slider; 19. Lifting platform. Detailed Implementation

[0021] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0022] like Figures 1 to 4As shown, a lifting mechanism for an electrostatic chuck module includes a mounting base 1, a motor body 3, and a lifting platform 19. A mounting vertical plate 2 is mounted on the upper center of the mounting base 1, and the motor body 3 is mounted on the upper right side of the mounting vertical plate 2. An upper pulley 4 is connected to the front end of the motor body 3, and a transmission belt 5 is connected to the outside of the upper pulley 4. A lower pulley 6 is connected to the lower end of the transmission belt 5, and a lead screw 7 is connected to the front end of the lower pulley 6. A mounting slider 8 is connected to the outside of the lead screw 7. Limiting sliders 9 are installed on both sides of the lower end of the mounting slider 8, and limiting guide rails 10 are connected inside the limiting sliders 9. The mounting vertical plate 2 is embedded in the mounting base 1 and is fixedly connected to the mounting base 1 by bolts. The external dimensions of the lead screw 7 are adapted to the internal dimensions of the mounting slider 8, and the mounting slider 8 is slidably connected to the mounting base 1 through the lead screw 7. The internal dimensions of block 9 are adapted to the external dimensions of the limiting guide rail 10, and the limiting slider 9 is slidably connected to the limiting guide rail 10. The motor body 3 is fixedly installed on the upper right side of the mounting vertical plate 2 by fastening bolts. The output shaft of the motor body 3 is connected to the upper pulley 4 through a coupling. The operation of the motor body 3 drives the upper pulley 4 to rotate, which in turn drives the transmission belt 5 to rotate the lower pulley 6. This causes the lead screw 7 connected to the lower pulley 6 to rotate as well. The rotation of the lead screw 7 drives the mounting slider 8 to move in position. At the same time, the internal dimensions of the limiting sliders 9 added on both sides of the lower end of the mounting slider 8 are adapted to the external dimensions of the limiting guide rail 10. Thus, the limiting sliders 9 cooperate with the limiting guide rail 10 to make the mounting slider 8 move stably left and right on the upper end of the mounting base 1, thereby improving the stability of the lifting mechanism and increasing the overall practicality and efficiency of the lifting structure.

[0023] like Figures 1 to 4As shown, movable mounting blocks 11 are installed at both ends of the mounting slider 8. A lower mounting guide rail 12 is connected to the lower end of each movable mounting block 11, and a movable slider 13 is installed at the upper end of each movable mounting block 11. An upper mounting guide rail 14 is connected inside the movable slider 13, and an inclined slider 15 is installed at the upper end of the upper mounting guide rail 14. Mounting vertical rods 16 are installed at the four corners of the upper end of the mounting base 1, and a receiving guide rail 17 is installed inside each mounting vertical rod 16. A receiving slider 18 is installed outside the receiving guide rail 17, and a lifting platform 19 is installed at the upper end of the receiving slider 18. The movable mounting block 11 and the mounting slider 8 are vertically distributed and fixedly connected by bolts. The upper mounting guide rail 14 is embeddedly connected to the movable slider 13, and the inclined slider 15 is slidably connected to the movable slider 13 through the upper mounting guide rail 14. Four receiving guide rails 17 are provided, symmetrically arranged on both sides of the upper end of the mounting base 1 about the central axis of the front of the mounting base 1. The outer sides of the receiving slider 18 and the outer sides of the lifting platform 19 are horizontally distributed, and the lifting platform 19 is bolted to the receiving slider 18. 8. Fixed connection: The movable mounting block 11 is fixedly installed on the outer end of the mounting slider 8 using fastening bolts. The movement of the mounting slider 8 drives the movable mounting block 11 to adjust its position. The lower mounting guide rail 12 is used to increase the stability of the movable mounting block 11 during movement. The movable slider 13 is fixedly installed on the upper end of the movable mounting block 11. The internal dimensions of the movable slider 13 are adapted to the external dimensions of the upper mounting guide rail 14 added to the lower end of the inclined slider 15. Thus, the inclined slider 15 slides against the movable mounting block 11 through the cooperation of the movable slider 13 and the upper mounting guide rail 14. The lifting platform 19 is fixedly installed on the upper end of the inclined slider 15. At the same time, the mounting vertical rod 16 is fixedly installed on the four corners of the upper end of the mounting base 1 by fastening bolts. The receiving guide rail 17 installed on the outside of the mounting vertical rod 16 slides stably between the receiving slider 18 and the lifting platform 19. The lifting platform 19 is fixed to the receiving slider 18, so that when the movable mounting block 11 moves left and right, it drives the inclined slider 15 to move up and down accordingly. In conjunction with the receiving slider 18, the lifting platform 19 can be stably adjusted up and down, improving the processing efficiency of the electrostatic chuck module and increasing the overall practicality of the lifting mechanism.

[0024] In summary, this electrostatic chuck module uses a lifting mechanism. First, the motor body 3 is fixed to the upper right side of the mounting plate 2 using fastening bolts. The motor body 3 drives the upper pulley 4 to rotate, which in turn drives the transmission belt 5, causing the lower pulley 6 to rotate. This, in turn, drives the lead screw 7 connected to the lower pulley 6 to rotate. The rotation of the lead screw 7 drives the mounting slider 8 to move in position. Simultaneously, the limiting slider 9, in conjunction with the limiting guide rail 10, allows the mounting slider 8 to move stably left and right on the upper part of the mounting base 1. Then, the movement of the mounting slider 8 drives the movable mounting block 11 to adjust its position, and, in conjunction with the lower mounting guide rail 12, increases the movable mounting block's position. To ensure stability during the movement of block 11, the movable slider 13 is fixedly installed on the upper end of the movable mounting block 11. The movable slider 13, in conjunction with the mounting guide rail 14, allows the inclined slider 15 to slide and connect with the movable mounting block 11. The lifting platform 19 is fixedly installed on the upper end of the inclined slider 15, and simultaneously fixed to the receiving slider 18. This allows the inclined slider 15 to move up and down as the movable mounting block 11 moves left and right, and, in conjunction with the receiving slider 18, enables the lifting platform 19 to be stably adjusted up and down. This method is more accurate and efficient than manually adjusting the lifting platform 19, and faster and more economical than using fixtures to adjust the thickness of different products.

[0025] The embodiments of this utility model are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the utility model to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical applications of this utility model, and to enable those skilled in the art to understand this utility model and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A lifting mechanism for an electrostatic chuck module, comprising a mounting base (1), a motor body (3), and a lifting platform (19), characterized in that, A mounting plate (2) is installed at the upper middle part of the mounting base (1), and a motor body (3) is installed at the upper right end of the mounting plate (2). An upper pulley (4) is connected to the front end of the motor body (3), and a transmission belt (5) is connected to the outside of the upper pulley (4). A lower pulley (6) is connected to the lower end of the transmission belt (5), and a lead screw (7) is connected to the front end of the lower pulley (6). An installation slider (8) is connected to the outside of the lead screw (7). Limiting sliders (9) are added to both sides of the lower end of the installation slider (8). A limiting guide rail (10) is connected inside the limiting slider (9), and the installation slider (8) is connected to the outside of the limiting guide rail (10). The mounting base (1) has movable mounting blocks (11) installed at both ends, and the lower end of the movable mounting block (11) is connected to the lower mounting guide rail (12). The upper end of the movable mounting block (11) is equipped with a movable slider (13), and the inside of the movable slider (13) is connected to the upper mounting guide rail (14). The upper end of the upper mounting guide rail (14) is equipped with an inclined slider (15). The four corners of the upper end of the mounting base (1) are equipped with mounting vertical rods (16), and the inner side of the mounting vertical rods (16) is equipped with a receiving guide rail (17). The outside of the receiving guide rail (17) is equipped with a receiving slider (18), and the upper end of the receiving slider (18) is equipped with a lifting platform (19).

2. The lifting mechanism for an electrostatic chuck module according to claim 1, characterized in that, The mounting vertical plate (2) is embedded in the mounting base (1), and the mounting vertical plate (2) is fixedly connected to the mounting base (1) by bolts.

3. The lifting mechanism for an electrostatic chuck module according to claim 1, characterized in that, The external dimensions of the lead screw (7) are adapted to the internal dimensions of the mounting slider (8), and the mounting slider (8) is slidably connected to the mounting base (1) through the lead screw (7).

4. The lifting mechanism for an electrostatic chuck module according to claim 1, characterized in that, The internal dimensions of the limiting slider (9) are adapted to the external dimensions of the limiting guide rail (10), and the limiting slider (9) and the limiting guide rail (10) are slidably connected.

5. The lifting mechanism for an electrostatic chuck module according to claim 1, characterized in that, The movable mounting block (11) and the mounting slider (8) are arranged perpendicularly, and the movable mounting block (11) and the mounting slider (8) are fixedly connected by bolts.

6. The lifting mechanism for an electrostatic chuck module according to claim 1, characterized in that, The upper mounting guide rail (14) is embeddedly connected to the movable slider (13), and the inclined slider (15) is slidably connected to the movable slider (13) through the upper mounting guide rail (14).

7. The lifting mechanism for an electrostatic chuck module according to claim 1, characterized in that, The number of the receiving guide rails (17) is four, and the four receiving guide rails (17) are symmetrically arranged on both sides of the upper end of the mounting base (1) with respect to the central axis of the front of the mounting base (1).

8. The lifting mechanism for an electrostatic chuck module according to claim 1, characterized in that, The outer side of the receiving slider (18) is horizontally distributed with the outer side of the lifting platform (19), and the lifting platform (19) is fixedly connected to the receiving slider (18) by bolts.

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