A raw material reaction kettle for wafer blue film production

Abstract

The utility model discloses a raw material reaction kettle for wafer blue film production relates to the technical field of reaction kettle, this raw material reaction kettle for wafer blue film production, including the reaction kettle body, the outside of reaction kettle body is provided with the heating cover, the upper end of reaction kettle body is provided with the top cap, the upper end of top cap is provided with the stirring motor, the output of stirring motor is provided with the stirring column, the outside of stirring column is provided with the stirring subassembly, the side surface of stirring column is provided with the adjusting groove, and adjusting groove penetrates stirring column, the stirring subassembly includes first fixed cover and second fixed cover, first fixed cover and second fixed cover are wrapped in the outside of stirring column, and this scheme has solved the problem that the stirring vane of existing reaction kettle is mostly fixed point, and is the integrated fixed, is inconvenient to carry out the split independent disassembly, also is inconvenient to carry out the position adjustment, leads to the problem of poor flexibility and replacement performance.

Description

Technical Field

[0001] This utility model relates to the field of reaction vessel technology, specifically a raw material reaction vessel for the production of blue film on wafers. Background Technology

[0002] In a broad sense, a reaction vessel is a container that undergoes physical or chemical reactions. Through structural design and parameter configuration of the container, the heating, evaporation, cooling, and low-to-high-speed mixing functions required by the process can be achieved.

[0003] For example, Chinese Patent CN202570146U (Titanium Reactor) includes a reactor support, a stirring motor fixed to the upper end of the support, a stirring shaft connected to the lower end of the motor, and a stirring paddle fixed to the lower end of the shaft. The stirring paddle is inserted into the reactor. The reactor comprises an inner layer and an outer layer. The lower end of the inner layer is fixed to the inside of the outer layer via a fixing seat. A heating device is installed in the interlayer between the inner and outer layers. The inner layer is made of titanium. This invention has a simple structure, reasonable design, good corrosion resistance, strong impact resistance, and long service life. The use of a fixing seat to connect the inner and outer layers solves the problem of difficult welding between different metal materials.

[0004] However, most existing reactors have fixed stirring blades that are fixed in one piece, making it inconvenient to disassemble them separately or adjust their position, resulting in poor flexibility and replacement performance. Therefore, they do not meet the current requirements. To address this, we propose a raw material reactor for the production of blue film on wafers. Utility Model Content

[0005] The purpose of this invention is to provide a raw material reaction vessel for the production of blue film on wafers, in order to solve the problems mentioned in the background art, where the stirring blades of most existing reaction vessels are fixed at a fixed point and are fixed as a whole, which makes it inconvenient to disassemble them separately or adjust their position, resulting in poor flexibility and replacement performance.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a raw material reaction vessel for the production of blue film on wafers, comprising: a reaction vessel body, a heating cover provided on the outside of the reaction vessel body, a top cover provided on the upper end of the reaction vessel body, a stirring motor provided on the upper end of the top cover, a stirring column provided at the output end of the stirring motor, a stirring assembly provided on the outside of the stirring column, and an adjustment groove provided on one side surface of the stirring column, the adjustment groove penetrating the stirring column.

[0007] Preferably, the stirring assembly includes a first fixing sleeve and a second fixing sleeve, which wrap around the outside of the stirring column. Stirring blades are provided at the outer edges of both the first fixing sleeve and the second fixing sleeve, and multiple stirring blades are provided.

[0008] Preferably, a movable groove is provided on one side surface of both the first fixed sleeve and the second fixed sleeve, and the movable groove passes through the first fixed sleeve and the second fixed sleeve.

[0009] Preferably, a fixing bolt is provided on one side of the movable groove, and one end of the fixing bolt passes through the stirring column, the first fixing sleeve and the second fixing sleeve and is then fixed by an external nut.

[0010] Preferably, a feed inlet is provided on one side of the stirring motor, and a pressure relief pipe is provided on the other side of the stirring motor, with both the feed inlet and the pressure relief pipe penetrating the top cover.

[0011] Preferably, a connecting flange is provided at the bottom edge of the top cover and at the top edge of the reactor body, and the two connecting flanges are fixed by external bolts.

[0012] Preferably, a heat inlet pipe is provided on one side of the heating shroud, a heat outlet pipe and a slag discharge pipe are provided on the other side of the heating shroud, a discharge pipe is provided at the bottom of the reactor body, and a support leg is provided on the lower surface of the heating shroud.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] (1) This utility model places the first and second fixing sleeves on both sides of the stirring column, and fixes them with an external nut after passing one end of the fixing bolt through the stirring column, the first and second fixing sleeves. The fixing bolt can move up and down along the adjustment groove and the moving groove to adjust the distance, which is convenient for adjusting the height of the stirring component and improving flexibility. It is suitable for stirring columns of different sizes and raw material input for wafer blue film production at different depths. The stirring component is installed higher for deeper depths and lower for shallower depths, which improves applicability. The first and second fixing sleeves can be disassembled independently, which is convenient for independent replacement without disassembling and replacing the whole unit, thus reducing replacement costs. It solves the problem that most of the stirring blades in the existing reactors are fixed at a fixed point and are fixed as a whole, which is inconvenient for separate disassembly and position adjustment, resulting in poor flexibility and replacement performance.

[0015] (2) By providing a moving groove on one side surface of both the first and second fixed sleeves, the fixing bolts can also move along the moving groove, adjusting the fixing position and the number of fixing bolts, thereby improving flexibility and applicability. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the internal structure of the reaction vessel body of this utility model;

[0018] Figure 3 This is a schematic diagram showing the disassembled structure of the stirring column and stirring assembly of this utility model;

[0019] Figure 4 This is a top view of the structure of the stirring column and stirring assembly of this utility model after they are connected.

[0020] In the diagram: 1. Reactor body; 2. Heating hood; 3. Top cover; 4. Connecting flange; 5. Stirring motor; 6. Feed inlet; 7. Pressure relief pipe; 8. Heat inlet pipe; 9. Heat exhaust pipe; 10. Slag discharge pipe; 11. Discharge pipe; 12. Support leg; 13. Stirring column; 14. Stirring assembly; 15. Adjustment tank; 16. First fixed sleeve; 17. Stirring blade; 18. Moving tank; 19. Second fixed sleeve; 20. Fixing bolt. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Please see Figure 1-4 This utility model provides an embodiment of a raw material reaction vessel for the production of blue film on wafers, comprising: a reaction vessel body 1, a heating cover 2 disposed on the outside of the reaction vessel body 1, a top cover 3 disposed on the upper end of the reaction vessel body 1, a stirring motor 5 disposed on the upper end of the top cover 3, a stirring column 13 disposed at the output end of the stirring motor 5, a stirring assembly 14 disposed on the outside of the stirring column 13, an adjusting groove 15 disposed on one side surface of the stirring column 13, the adjusting groove 15 penetrating the stirring column 13, and the stirring assembly 14 comprising a first fixing sleeve 16 and a second fixing sleeve 19. The first fixing sleeve 16 and the second fixing sleeve 19 are wrapped around the outside of the stirring column 13. The outer edges of the first fixing sleeve 16 and the second fixing sleeve 19 are provided with stirring blades 17, and there are multiple stirring blades 17. The first fixing sleeve 16 and the second fixing sleeve 19 are provided with a moving groove 18 on one side surface, and the moving groove 18 passes through the first fixing sleeve 16 and the second fixing sleeve 19. A fixing bolt 20 is provided on one side of the moving groove 18, and one end of the fixing bolt 20 passes through the stirring column 13, the first fixing sleeve 16 and the second fixing sleeve 19 and is then fixed with a nut.

[0023] The first fixing sleeve 16 and the second fixing sleeve 19 are respectively fitted onto both sides of the stirring column 13, and the moving groove 18 is aligned with the adjusting groove 15. Then, one end of the fixing bolt 20 is passed through the stirring column 13, the first fixing sleeve 16 and the second fixing sleeve 19 and then fixed with an external nut, thereby fixing the stirring assembly 14 to the stirring column 13. The fixing bolt 20 can move up and down along the adjusting groove 15 and the moving groove 18, thereby realizing distance adjustment, which facilitates the adjustment of the height of the stirring assembly 14, improves flexibility, and is suitable for stirring columns 13 of different sizes, as well as for the input of raw materials for wafer blue film production at different depths. For deeper depths, the stirring assembly 14 is installed higher, and for shallower depths, the stirring assembly 14 is installed lower, thus improving applicability.

[0024] Furthermore, the first fixing sleeve 16 and the second fixing sleeve 19 can be disassembled independently, making it easy to replace them independently without having to disassemble and replace the whole thing, thus reducing replacement costs.

[0025] A feed inlet 6 is provided on one side of the stirring motor 5, and a pressure relief pipe 7 is provided on the other side of the stirring motor 5. Both the feed inlet 6 and the pressure relief pipe 7 pass through the top cover 3. A connecting flange 4 is provided at the bottom edge of the top cover 3 and the top edge of the reactor body 1. The two connecting flanges 4 are fixed by external bolts. A heat inlet pipe 8 is provided on one side of the heating cover 2, and a heat exhaust pipe 9 and a slag discharge pipe 10 are provided on the other side of the heating cover 2. A discharge pipe 11 is provided at the bottom of the reactor body. A support leg 12 is provided on the lower surface of the heating cover 2.

[0026] After installing the mixing assembly 4, cover the top cover 3, fix the two connecting flanges 4 with external bolts, and then put the raw materials for producing the blue wafer film into the feed port 6. Start the mixing motor 5, and the output end of the mixing motor 5 drives the mixing column 13 to rotate, thereby relying on the mixing blade 17 to mix the raw materials.

[0027] Simultaneously, heat conduction is performed through the heat inlet pipe 8, and the reactor body 1 is heated through heat transfer, thereby achieving the heating and mixing effect of the reactor. The heat source is discharged from the heat exhaust pipe 9, and the mixed material is discharged from the discharge pipe 11.

[0028] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A raw material reaction vessel for the production of blue film on wafers, comprising a reaction vessel body (1), characterized in that: The reactor body (1) is provided with a heating cover (2) on the outside. The reactor body (1) is provided with a top cover (3) at the upper end. The top cover (3) is provided with a stirring motor (5) at the upper end. The output end of the stirring motor (5) is provided with a stirring column (13). The stirring column (13) is provided with a stirring assembly (14) on the outside. The stirring column (13) is provided with an adjustment groove (15) on one side surface, and the adjustment groove (15) penetrates the stirring column (13).

2. The raw material reaction vessel for producing blue film on wafers according to claim 1, characterized in that: The stirring assembly (14) includes a first fixing sleeve (16) and a second fixing sleeve (19). The first fixing sleeve (16) and the second fixing sleeve (19) are wrapped around the outside of the stirring column (13). Stirring blades (17) are provided at the outer edges of the first fixing sleeve (16) and the second fixing sleeve (19), and there are multiple stirring blades (17).

3. The raw material reaction vessel for producing blue film on wafers according to claim 2, characterized in that: The first fixing sleeve (16) and the second fixing sleeve (19) are each provided with a moving groove (18) on one side surface, and the moving groove (18) passes through the first fixing sleeve (16) and the second fixing sleeve (19).

4. The raw material reaction vessel for producing blue film on wafers according to claim 3, characterized in that: A fixing bolt (20) is provided on one side of the moving groove (18), and one end of the fixing bolt (20) passes through the stirring column (13), the first fixing sleeve (16) and the second fixing sleeve (19) and is then fixed by an external nut.

5. The raw material reaction vessel for producing blue film on wafers according to claim 1, characterized in that: The stirring motor (5) has a feed inlet (6) on one side and a pressure relief pipe (7) on the other side, and both the feed inlet (6) and the pressure relief pipe (7) penetrate the top cover (3).

6. The raw material reaction vessel for producing blue film on wafers according to claim 1, characterized in that: A connecting flange (4) is provided at the bottom edge of the top cover (3) and at the top edge of the reactor body (1), and the two connecting flanges (4) are fixed by external bolts.

7. The raw material reaction vessel for producing blue film on wafers according to claim 1, characterized in that: A heat inlet pipe (8) is provided on one side of the heating cover (2), a heat exhaust pipe (9) and a slag discharge pipe (10) are provided on the other side of the heating cover (2), a discharge pipe (11) is provided at the bottom of the reactor body, and a support leg (12) is provided on the lower surface of the heating cover (2).

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