Apparatus capable of graphite boat cleaning

Abstract

The application provides a device capable of being used for graphite boat cleaning, relates to the technical field of graphite boat cleaning, and comprises a chamber, a first electrode, a second electrode and a power supply circuit. The inner wall of the chamber is provided with oppositely arranged first and second sides, the first electrode is arranged on the first side of the chamber, and the second electrode is arranged on the second side of the chamber. The graphite boat to be cleaned is placed between the first electrode and the second electrode. The power supply circuit has oppositely isolated input and output ends, the output end is electrically connected with the first electrode and the second electrode respectively, and the power supply circuit is used for feeding in an electric signal to excite a plasma for cleaning the graphite boat. The application can better improve the cleaning efficiency and cleaning uniformity of the graphite boat when the graphite boat is cleaned by using a dry plasma and eliminate cleaning dead angles by arranging the isolated power supply circuit and the alternating intercalated electrode structure, and by using alternating polarity transformation to guide the plasma to penetrate the multi-layer partition plates of the graphite boat.

Description

Technical Field

[0001] This application relates to the field of graphite boat cleaning technology, and more particularly to a device that can be used for cleaning graphite boats. Background Technology

[0002] Graphite boats, as key load-bearing devices in photovoltaic module production, accumulate carbides, metallic impurities, and organic contaminants on their surface and internal partitions after prolonged use in high-temperature processes such as chemical vapor deposition and diffusion furnaces. These contaminants not only reduce process uniformity but also lead to increased product defect rates and equipment performance degradation. Current technologies employ dry plasma cleaning to remove these contaminants. While this dry cleaning technology offers advantages such as environmental friendliness, low temperature, and non-destructive operation, it still suffers from low cleaning efficiency and poor cleaning uniformity in practical applications. Utility Model Content

[0003] The main purpose of this invention is to provide a device for cleaning graphite boats, which aims to improve the cleaning efficiency and uniformity of graphite boats when dry plasma cleaning is used.

[0004] To achieve the above objectives, this utility model provides a device for cleaning graphite boats, the device comprising: A chamber, the inner wall of which has a first side and a second side disposed opposite to each other; The first electrode is disposed on the first side of the chamber; The second electrode is located on the second side of the chamber; the graphite boat to be cleaned is placed between the first electrode and the second electrode; A power supply circuit having relatively isolated input and output terminals, the output terminals being electrically connected to the first electrode and the second electrode respectively, the power supply circuit being used to feed in an electrical signal to excite plasma for cleaning a graphite boat.

[0005] Optionally, the power supply circuit includes: An isolation conversion circuit is provided, comprising an input side and an output side. The input side is used to connect to an external power supply, and the two ends of the output side are respectively connected to the first electrode and the second electrode.

[0006] Optionally, the isolation conversion circuit includes: An isolation transformer, wherein the primary coil of the isolation transformer is connected to the external power supply, the first end of the secondary coil of the isolation transformer is connected to the first electrode, and the second end of the secondary coil of the isolation transformer is connected to the second electrode.

[0007] Optionally, the first electrode is provided with a plurality of first electrode plates arranged along a first direction, and the second electrode is provided with a plurality of second electrode plates arranged along the first direction. The first electrode plates and the second electrode plates are alternately interspersed in a direction perpendicular to the plane where the graphite boat is placed, and the first electrode plates and the second electrode plates are alternately interspersed on each graphite boat partition.

[0008] Optionally, the power supply circuit is used to alternately change the power polarity of the first electrode and the second electrode, and alternately apply positive and negative voltages to the first electrode plate and the second electrode plate to guide the plasma to change its movement direction, so as to clean each area on the graphite boat.

[0009] Optionally, the upper side of the chamber is provided with a first electrode mounting plate for mounting the first electrode, and the first electrode mounting plate is provided with a first cooling pipe on the side opposite to the first electrode.

[0010] Optionally, the chamber is provided with a plurality of insulating support blocks, which are spaced apart on the lower side of the chamber and are used to support the graphite boat.

[0011] Optionally, the lower side of the chamber is provided with a second electrode mounting plate for mounting the second electrode, and the second electrode mounting plate is provided with a second cooling pipe on the side opposite to the second electrode, and the insulating support block is provided on the second electrode.

[0012] Optionally, the lower side of the chamber is provided with a second electrode mounting plate for mounting the second electrode. The second electrode mounting plate is provided with a second cooling pipe on the side opposite to the second electrode. The second electrode mounting plate is installed in the gap between the plurality of insulating support blocks.

[0013] Optionally, the chamber includes an outer shell, which is grounded.

[0014] This embodiment of the invention includes a chamber with opposing first and second sides on the inner wall. A first electrode is positioned on the first side of the chamber, and a second electrode is positioned on the second side. The graphite boat to be cleaned is placed between the first and second electrodes. Finally, a power circuit is provided, with relatively isolated input and output terminals. The output terminal is electrically connected to the first and second electrodes, respectively. The power circuit is used to feed in an electrical signal to excite plasma for cleaning the graphite boat. Thus, by setting up an isolated power circuit and an alternating electrode structure, and utilizing alternating polarity changes to guide the plasma through the multi-layered partitions of the graphite boat, the cleaning efficiency and uniformity of the graphite boat using dry plasma cleaning can be significantly improved, and cleaning dead zones can be eliminated. Attached Figure Description

[0015] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of a device for cleaning graphite boats according to an embodiment of the present invention; Figure 2 for Figure 1 A circuit block diagram of a device capable of being used for cleaning graphite boats; Figure 3 A circuit block diagram of a device for cleaning graphite boats according to another embodiment of the present invention; Figure 4 This is a circuit block diagram of a device for cleaning graphite boats, according to another embodiment of the present invention. Figure 5 This is a schematic diagram of a device for cleaning graphite boats according to another embodiment of the present invention. Figure 6 This is a schematic diagram of the structure of a device for cleaning graphite boats according to another embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of a device for cleaning graphite boats according to another embodiment of the present invention; Figure 8 This is a schematic diagram of the structure of a device for cleaning graphite boats according to another embodiment of the present invention. Figure 9 This is a schematic diagram of a device for cleaning graphite boats according to another embodiment of the present invention. Figure 10 This is a schematic diagram of the structure of a device for cleaning graphite boats according to another embodiment of the present invention; Figure 11 This is a schematic diagram of the structure of a device for cleaning graphite boats according to another embodiment of the present invention.

[0018] Explanation of icon numbers:

[0019] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Well-known modules, units, and their connections, links, communications, or operations are not shown or described in detail. Furthermore, the described features, architectures, or functions can be combined in any way in one or more embodiments. Those skilled in the art should understand that the various embodiments described below are only for illustrative purposes and are not intended to limit the scope of protection of the present invention.

[0021] Graphite boats, as key load-bearing devices in photovoltaic module production, accumulate carbides, metallic impurities, and organic contaminants on their surface and internal partitions after prolonged use in high-temperature processes such as chemical vapor deposition and diffusion furnaces. These contaminants not only reduce process uniformity but also lead to increased product defect rates and equipment performance degradation. Current technologies employ dry plasma cleaning to remove these contaminants. While this dry cleaning technology offers advantages such as environmental friendliness, low temperature, and non-destructive operation, it still suffers from low cleaning efficiency and poor cleaning uniformity in practical applications.

[0022] The main solution of this application embodiment is as follows: by providing a chamber, and setting a first side and a second side opposite to each other on the inner wall of the chamber, setting a first electrode on the first side of the chamber, setting a second electrode on the second side of the chamber, placing the graphite boat to be cleaned between the first electrode and the second electrode, and finally providing a power supply circuit, which has relatively isolated input and output terminals, and its output terminal is electrically connected to the first electrode and the second electrode respectively. The power supply circuit is used to feed in an electrical signal to excite plasma for cleaning the graphite boat.

[0023] This application provides a solution that, by setting up an isolated power supply circuit and an alternating electrode structure, guides plasma through the multi-layered partitions of a graphite boat using alternating polarity changes, thereby improving the cleaning efficiency and uniformity of the graphite boat when using dry plasma cleaning and eliminating cleaning dead zones.

[0024] In existing technologies, when graphite boats are used as carriers in the high-temperature processes of photovoltaic modules, the accumulation of surface contaminants can lead to decreased process uniformity and increased equipment failure risks. Traditional chemical cleaning presents environmental pollution and operational safety issues, while mechanical cleaning is prone to damaging the substrate and is inefficient. Although plasma cleaning technology has environmental advantages, existing equipment is difficult to adapt to the complex internal structure of graphite boats, resulting in cleaning blind spots and uneven energy distribution. For example, conventional parallel plate electrode designs cannot effectively cover the partition areas of porous or stacked graphite boats, leading to low cleaning efficiency and contaminant residue.

[0025] To address the aforementioned issues, analysis of the electrode layout in existing equipment revealed that the unidirectional electric field generated by fixed polarity electrodes is difficult to penetrate the multi-layered partitions of a graphite boat. This invention, however, utilizes a relatively arranged electrode structure to create a penetrating electric field. Furthermore, it proposes setting relatively opposite electrodes on both sides of the chamber and controlling the direction of the electric field through an isolated power supply, thereby enabling the plasma to form a dynamic coverage within the graphite boat.

[0026] Based on the above, referring to Figure 1 and Figure 2 In one embodiment of this utility model, the device for cleaning graphite boats includes a chamber 10, a first electrode 20, a second electrode 30, and a power supply circuit 40, wherein: The inner wall of the chamber 10 has a first side and a second side arranged opposite to each other; a first electrode 20 is disposed on the first side of the chamber 10; a second electrode 30 is disposed on the second side of the chamber 10; the graphite boat 50 to be cleaned is placed between the first electrode 20 and the second electrode 30; the power supply circuit 40 has a relatively isolated input terminal and an output terminal, the output terminal being electrically connected to the first electrode 20 and the second electrode 30 respectively, and the power supply circuit 40 is used to feed in an electrical signal to excite plasma for cleaning the graphite boat 50.

[0027] The equipment used for cleaning the graphite boat is a tubular PECVD equipment for photovoltaic panels, which is used to clean the graphite boat carrying the photovoltaic panels. Chamber 10 refers to a closed processing space where two opposing sides of its inner wall form an electric field region. For example, a rectangular or cylindrical metal shell can be used, and the surface of the inner wall can be covered with an insulating layer to prevent short circuits. The first electrode 20 and the second electrode 30 are paired conductive components, such as copper alloy plates or graphite plates, fixed to the two side walls of chamber 10 to form parallel or staggered electric field regions. The power circuit 40 is an energy conversion device with electrical isolation function, for example, using a high-frequency transformer to achieve potential isolation between the input and output terminals, preventing external power supply interference with the plasma generation process. Connecting the output terminals to the two electrodes means that the two poles of the power supply are independently connected to the corresponding electrodes, for example, using twisted-pair cables connected to the electrode terminals to ensure controllable electric field direction.

[0028] When the graphite boat 50 is placed between the two electrodes, the power supply circuit 40 applies a high-frequency alternating voltage to the electrodes. After the reactive gas is introduced into the chamber 10, an alternating electric field is formed between the electrodes, ionizing the gas and generating plasma containing ions and free radicals. Since the electrodes are positioned opposite each other on both sides of the chamber 10, the electric field lines penetrate the multi-layered partition structure of the graphite boat 50, allowing the plasma to enter the gaps between each layer. The isolated power supply design prevents the external circuit from forming a loop with the chamber 10, ensuring that the plasma is stably distributed in the electrode-covered area. The alternating electric field drives charged particles to reciprocate on the surface of the graphite boat 50, causing physical bombardment and / or chemical reactions with contaminants, achieving three-dimensional cleaning.

[0029] Compared to existing technologies, traditional plasma cleaning equipment uses a single-sided electrode or coaxial electrode structure (which can only form a unidirectional electric field), resulting in an electric field distribution concentrated in a specific area, making it difficult to cover the complex internal structure of the graphite boat 50. This embodiment creates a penetrating electric field through a relative electrode layout, coupled with an isolated power supply to eliminate external interference, allowing the plasma to effectively enter the gaps between the multi-layer partitions. Compared to a fixed polarity electrode system, the dual-electrode alternating power supply design can dynamically adjust the electric field direction, enhancing contaminant removal efficiency.

[0030] Through the above technical solution, this embodiment achieves comprehensive cleaning of the 50-layer structure of the graphite boat, solving the problems of cleaning blind spots and cleaning efficiency in traditional methods. The isolated power supply design ensures the stability of equipment operation and avoids external electromagnetic interference affecting plasma generation. The optimized relative electrode layout improves the electric field distribution, enabling high-energy particles to penetrate the internal porous structure of the graphite boat 50, significantly improving the decomposition efficiency of contaminants.

[0031] This embodiment features a chamber 10 with opposing first and second sides on its inner wall. A first electrode 20 is positioned on the first side of the chamber 10, and a second electrode 30 is positioned on the second side. The graphite boat 50 to be cleaned is placed between the first electrode 20 and the second electrode 30. A power supply circuit 40 is provided, with isolated input and output terminals. The output terminal is electrically connected to the first electrode 20 and the second electrode 30, respectively. The power supply circuit 40 is used to feed in an electrical signal to excite plasma for cleaning the graphite boat 50. Thus, by using an isolated power supply circuit 40 and an alternating electrode structure, and by guiding the plasma through the multiple layers of the graphite boat 50 using alternating polarity changes, the cleaning efficiency and uniformity of the graphite boat 50 using dry plasma cleaning can be significantly improved, and cleaning dead zones can be eliminated.

[0032] It is important to note that Figure 1This is for illustrative purposes only and is not intended to limit the actual size or proportions of the equipment. In practical applications, the equipment can be larger; for example, one device could hold ten graphite boats, and the graphite boats would not be as large as shown in the illustration, or they could be smaller, for example, only able to hold one graphite boat. Figure 1 The dimensions shown are not intended to be a proportional representation of the dimensions between the device and the graphite boat. Figure 1 The figures shown are for reference only and are not intended to indicate the location of the corresponding devices. Other figures are also intended to be protected within the scope of this application.

[0033] Optionally, refer to Figure 3 Another embodiment of this utility model provides a device for cleaning graphite boats, based on the above. Figure 1 and Figure 2 In the embodiment shown, the power supply circuit 40 includes an isolation conversion circuit 41, wherein: The isolation conversion circuit 41 includes an input side and an output side. The input side is used to connect to an external power supply, and the two ends of the output side are respectively connected to the first electrode 20 and the second electrode 30.

[0034] The isolation conversion circuit 41 refers to a power conversion module with electrical isolation function. It can employ a transformer structure with magnetic core windings or opto-isolating elements to achieve electrical isolation between the input and output. Electrical isolation between the input and output sides is achieved through electromagnetic induction between the primary and secondary coils. The input side refers to the circuit port connected to an external power source, which can be implemented using an AC or DC power interface to receive external electrical energy. The output side refers to the circuit port connected to the electrodes, which can be implemented using low-impedance wires directly connected to the electrodes, used to transmit the converted electrical signal to the electrodes to excite plasma.

[0035] The external power supply is connected to the isolation conversion circuit 41 at the input side, and then the electrical energy is transferred to the output side through electromagnetic induction. The two ends of the output side form closed loops with the first electrode 20 and the second electrode 30, respectively. When an alternating electric field is applied between the electrodes, the gas (such as argon) in the chamber 10 is ionized to generate plasma. The active particles in the plasma react with contaminants on the surface of the graphite boat 50, thereby achieving cleaning. Since the input side and the output side are electrically isolated by the isolation structure, fluctuations or interference from the external power supply are effectively suppressed, the stability of the electrical signal between the electrodes is improved, and potential safety hazards caused by equipment grounding loops are avoided.

[0036] Compared to existing technologies, the power supply circuit 40 of traditional plasma cleaning equipment is usually directly connected to the electrodes and an external power source without an isolation structure. This makes it susceptible to unstable plasma excitation due to power supply interference and poses a risk of leakage. The application of the isolation conversion circuit 41 not only reduces the impact of power supply interference on the cleaning process but also improves operational safety through electrical isolation, making it particularly suitable for high-pressure cleaning scenarios requiring a highly stable electric field.

[0037] Through the above technical solution, this embodiment solves the problem of unstable plasma excitation caused by power supply interference in traditional plasma cleaning equipment, while avoiding the risk of leakage that may be caused by direct connection of electrodes to an external power supply. The structural design of the isolation conversion circuit 41 makes the electrical signal transmission more reliable, can adapt to the electrode layout required by the complex internal structure of the graphite boat 50, and ensures the uniformity of plasma distribution during the cleaning process.

[0038] Optionally, refer to Figure 4 Another embodiment of this utility model provides a device for cleaning graphite boats, based on the above. Figure 3 In the embodiment shown, the isolation transformation circuit 41 includes an isolation transformer T1, wherein: The primary coil of the isolation transformer T1 is connected to the external power supply, the first end of the secondary coil of the isolation transformer T1 is connected to the first electrode 20, and the second end of the secondary coil of the isolation transformer T1 is connected to the second electrode 30.

[0039] The isolation transformer T1 is a device that achieves electrical isolation between the input and output sides through the principle of electromagnetic induction. It can be implemented using a ferrite core or a laminated silicon steel sheet structure. Its function is to block the direct electrical connection between the external power supply and the electrodes, preventing high-voltage leakage or interference signals from affecting the cleaning process. The primary coil is the winding portion connected to the external power supply. It can be made of copper wire wound with an insulating layer. Its function is to receive external electrical energy and transmit it to the secondary coil through magnetic coupling. The secondary coil is the winding portion connected to the electrodes. It can be implemented using segmented winding or a parallel structure. Its function is to convert the electrical energy transmitted by the primary coil into voltage and current parameters suitable for exciting the plasma.

[0040] When an external power source is connected to the primary coil of the isolation transformer T1, electrical energy is transferred to the secondary coil via electromagnetic induction. The two ends of the secondary coil are connected to the first electrode 20 and the second electrode 30, respectively, thereby forming an alternating electric field between the electrodes. When a reactive gas is introduced into the chamber 10, the electric field excites the gas molecules to ionize and generate plasma. The active particles in the plasma physically bombard or chemically react with contaminants on the surface of the graphite boat 50, achieving cleaning. The introduction of the isolation transformer T1 provides electrical isolation between the power input and the electrode output, preventing external power fluctuations or grounding issues from interfering with the plasma excitation process.

[0041] Existing plasma cleaning equipment typically uses non-isolated power supplies to directly drive the electrodes, which can easily lead to uneven electric field distribution due to grounding loops or common-mode interference, affecting the cleaning effect. This embodiment, however, achieves complete isolation between input and output through an isolation transformer T1, eliminating interference from external power supplies on the electrode electric field. It also simplifies the power supply circuit 40 structure and reduces equipment manufacturing costs. This embodiment ensures the stability of the electric field between electrodes, avoiding uneven plasma distribution caused by power fluctuations or poor grounding, thereby improving the cleaning uniformity of contaminants on the graphite boat 50 surface. Furthermore, the isolation transformer T1 effectively blocks the high-voltage loop between the external power supply and the interior of the chamber 10, improving equipment operational safety and reducing the risk of electrical faults.

[0042] Optionally, refer to Figure 5 Another embodiment of this utility model provides a device for cleaning graphite boats, based on the above. Figure 1 and Figure 2 In the embodiment shown, the first electrode 20 is provided with a plurality of first electrode plates 21 arranged along a first direction, and the second electrode 30 is provided with a plurality of second electrode plates 31 arranged along the first direction, wherein: The first electrode plate 21 and the second electrode plate 31 are alternately interspersed in a direction perpendicular to the plane where the graphite boat 50 is placed, and the first electrode plate 21 and the second electrode plate 31 are alternately interspersed on each partition of the graphite boat 50.

[0043] The first directional arrangement refers to the electrode plates being arranged at equal or non-equal intervals along the length or width of the graphite boat 50. This can be achieved using a horizontal straight-line arrangement or an arc-shaped arrangement, ensuring that the electrode plates cover the entire extended area of ​​the graphite boat 50. The alternating interleaved arrangement means that adjacent electrode plates, belonging to the first electrode 20 and the second electrode 30 respectively, are staggered in the vertical direction. This can be achieved through staggered installation or intermittent insertion to form multiple sets of symmetrically distributed electric field regions. The partitions of the graphite boat 50 refer to the vertical structures inside the graphite boat 50 used to separate the substrate or workpiece. These can be plate-shaped components with through holes or grooves, with the electrode plates interleaved between the partitions or embedded in the internal cavities of the partitions.

[0044] When the graphite boat 50 is placed inside the chamber 10, the alternating interlacing structure of its partitions and electrode plates forms multiple sets of parallel electric field channels. After an alternating voltage is applied to the power supply circuit 40, an alternating electric field is generated between adjacent first electrode plates 21 and second electrode plates 31, exciting plasma to diffuse along the gaps or through-holes in the partitions. Because the electrode plates are arranged along the length of the graphite boat 50 and interlaced with the partitions, the plasma can uniformly penetrate to both sides and the internal area of ​​each partition, avoiding cleaning dead zones caused by uneven electric field distribution. At the same time, the staggered arrangement of the electrode plates and partitions allows the plasma to form a dynamic movement path in the vertical direction, enhancing the impact effect on the surface and edges of the partitions.

[0045] Existing plasma cleaning equipment typically employs fixed-position flat electrodes or single-sided electrode arrays, which are ill-suited to the multi-layered partition structure inside the graphite boat 50. For example, in existing technologies, electrode plates are only positioned on the upper and lower sides of the chamber 10, preventing the electric field from effectively penetrating the gaps between the partitions and limiting the cleaning effect to the surface of the graphite boat 50. This embodiment, however, by alternating electrode plates and partitions, allows the electric field to act directly around each partition, significantly improving the plasma's penetration ability in complex structures and avoiding energy loss due to excessive electrode distance. This embodiment enables omnidirectional cleaning of the multi-layered partitions inside the graphite boat 50, effectively removing carbides and metal residues from the partition surfaces and gaps, and solving the problem of uneven cleaning caused by unreasonable electrode layout in traditional equipment. The staggered structure of the electrode plates and partitions also reduces obstruction in the plasma movement path, improving energy utilization efficiency and preventing surface damage to the graphite boat 50 caused by excessively high local electric field strength.

[0046] Optionally, refer to Figure 6 In another embodiment, this utility model provides a device for cleaning graphite boats, based on the above. Figure 5 In the embodiment shown, the power supply circuit 40 is used to alternately change the power polarity of the first electrode 20 and the second electrode 30, and alternately apply positive and negative voltages to the first electrode plate 21 and the second electrode plate 31 to guide the plasma to change its direction of motion, so as to clean each area on the graphite boat 50.

[0047] Alternating power supply polarity refers to controlling the power supply circuit 40 to output power with opposite polarities, causing the voltage polarities of the first electrode 20 and the second electrode 30 to switch periodically over time. This can be achieved using an isolation switching circuit 41 with bidirectional output capability or a polarity switching switch. By changing the direction of the electric field, the trajectory of charged particles in the plasma changes. Guiding the plasma to change its motion direction refers to using the alternating changes in the direction of the electric field to drive the plasma to migrate back and forth between the partitions of the graphite boat 50. This can be achieved by adjusting the voltage switching frequency and amplitude, allowing the plasma to cover all areas of the complex surface and internal structure of the graphite boat 50.

[0048] The power supply circuit 40 periodically switches the voltage polarity of the first electrode 20 and the second electrode 30, causing the first electrode plate 21 and the second electrode plate 31 to be at positive or negative potentials at different time periods. When a positive voltage is applied to the first electrode plate 21 and a negative voltage is applied to the second electrode plate 31, positive ions in the plasma migrate towards the second electrode plate 31, while negative ions and electrons migrate towards the first electrode plate 21. After the polarity switch, the ion migration direction is reversed. This alternating migration process forces the plasma to reciprocate between the partitions of the graphite boat 50, thereby eliminating the cleaning dead zones caused by traditional fixed polarity and ensuring that contaminants on the surface and in the narrow slit areas inside the graphite boat 50 are uniformly removed.

[0049] Existing plasma cleaning equipment typically employs fixed electrode polarity, causing charged particles to move in a single direction, making it difficult to penetrate the complex internal structure of the graphite boat 50 or cover all surface areas. This embodiment, however, dynamically adjusts the electrode polarity, causing the plasma to migrate back and forth under the alternating action of the electric field, effectively expanding the cleaning coverage and improving energy utilization. This embodiment solves the problem of uneven cleaning of the complex internal structure of the graphite boat 50, ensuring that the plasma fully contacts all areas to be cleaned under the drive of the alternating electric field, improving cleaning thoroughness, and simultaneously avoiding surface damage to the graphite boat 50 caused by localized energy concentration.

[0050] Optionally, refer to Figure 7 Another embodiment of this utility model provides a device for cleaning graphite boats, based on the above. Figure 1 and Figure 2 In the embodiment shown, a first electrode mounting plate 60 for mounting the first electrode 20 is provided on the upper side of the chamber 10, wherein: The first electrode mounting plate 60 is provided with a first cooling pipe 61 on the side opposite to the first electrode 20.

[0051] The first electrode mounting plate 60 is a plate-like structure fixed to the upper side of the chamber 10 for supporting and fixing the first electrode 20. It can be made of metal or high-temperature resistant insulating materials, such as aluminum alloy or stainless steel. The side connected to the electrode is coated with an insulating material, such as polytetrafluoroethylene or ceramic coating, to prevent short circuits or breakdowns between the electrode and the mounting plate. The function of the first electrode mounting plate 60 is to provide a stable mounting position for the first electrode 20 and to ensure insulation between the electrode and other components of the chamber 10. The first cooling pipe 61 is a fluid circulation channel located on the back side of the first electrode mounting plate 60. It can be made of copper or aluminum pipe embedded inside the mounting plate. Cooling media such as water or ethylene glycol solution can flow inside. Its function is to dissipate the heat generated during the operation of the electrode in a timely manner through heat conduction, preventing the electrode from degrading in performance or deforming due to excessive temperature.

[0052] During plasma cleaning, the first electrode 20 generates a large amount of heat due to the high-frequency electric field. If this heat cannot be dissipated in time, it may cause thermal expansion or localized overheating of the electrode material, thereby affecting the stability of plasma excitation. By providing a first cooling pipe 61 on the back side of the first electrode mounting plate 60, the cooling medium absorbs and carries away the heat transferred by the electrode as it circulates within the pipe, keeping the electrode temperature within a reasonable range. In addition, the first electrode mounting plate 60 is fixedly connected to the upper side of the cavity to ensure that the electrode remains in a stable position during cleaning, avoiding changes in the electrode spacing due to vibration or thermal deformation, thereby maintaining the uniformity of plasma distribution.

[0053] Existing plasma cleaning equipment typically lacks specific design for electrode heat dissipation. Prolonged electrode operation can lead to temperature increases, potentially causing material degradation or plasma instability, thus affecting cleaning performance. This embodiment integrates a first cooling pipe 61 with the electrode mounting structure, achieving efficient heat dissipation while ensuring reliable electrode fixation, thereby solving the problem of equipment performance degradation due to electrode overheating.

[0054] This embodiment can effectively control the electrode operating temperature, avoid electrode deformation or uneven plasma distribution caused by heat accumulation, thereby improving the stability and continuity of the cleaning process, extending the service life of the electrode and equipment, and ensuring that contaminants on the surface of the graphite boat 50 are uniformly removed.

[0055] Optionally, refer to Figure 8 Another embodiment of this utility model provides a device for cleaning graphite boats, based on the above. Figure 1 and Figure 2 In the embodiment shown, the chamber 10 is provided with a plurality of insulating support blocks 70, wherein: Multiple insulating support blocks 70 are spaced apart on the lower side of the chamber 10, and the multiple insulating support blocks 70 are used to support the graphite boat 50.

[0056] The insulating support block 70 is a support structure made of non-conductive material, such as ceramic, polytetrafluoroethylene, or glass fiber reinforced plastic. Its function is to prevent the formation of a conductive path between the electrode and the graphite boat 50, and to prevent the risk of arcing or short circuits during plasma excitation. The spacing refers to maintaining a certain distance between the support blocks. This can be achieved by uniform arrangement or by adjusting the spacing according to the size of the graphite boat 50. Its function is to ensure uniform stress on the graphite boat 50, avoid localized stress concentration leading to structural deformation, and allow plasma to flow in the gaps between the support blocks to cover the cleaning area.

[0057] The insulating support block 70 is fixed to the lower side of the chamber 10, for example, by bolts or a snap-fit ​​structure. Because the insulating support block 70 is heavy enough, it can also be placed directly into the chamber 10 without fixing during installation. Multiple support blocks are arranged at intervals along the horizontal direction, with their support surfaces contacting the bottom of the graphite boat 50. During installation, the position of the support blocks can be adjusted according to the size of the graphite boat 50, for example, by using slide rails or a detachable design to adjust the spacing. When the graphite boat 50 is placed on the support blocks, its weight is distributed to multiple support points, avoiding deformation due to single-point load. The gaps between the support blocks allow plasma to diffuse from below to the bottom of the graphite boat 50, ensuring thorough cleaning coverage.

[0058] Compared to existing technologies, traditional graphite boat 50 support structures often use metal materials or continuous trays, which pose a risk of electrical conductivity and hinder plasma diffusion. This embodiment, however, uses insulating materials to block current paths, while the spaced arrangement promotes uniform plasma distribution, improving both safety and cleaning effectiveness. For example, in existing technologies, metal supports may cause short circuits between electrodes, while the insulating support block 70 completely avoids this problem; continuous trays obstruct gas flow, while the spaced support blocks allow plasma to penetrate to the bottom surface of the graphite boat 50.

[0059] This embodiment provides stable support for the graphite boat 50 during the cleaning process, preventing circuit abnormalities caused by conductive materials. At the same time, the plasma distribution is optimized through interval design to ensure that the cleaning covers the bottom surface and complex internal structural areas of the graphite boat 50, avoiding cleaning blind spots caused by the support structure.

[0060] Optionally, refer to Figure 9 Another embodiment of this utility model provides a device for cleaning graphite boats, based on the above. Figure 8 In the embodiment shown, a second electrode mounting plate 80 for mounting the second electrode 30 is provided on the lower side of the chamber 10, wherein: The second electrode mounting plate 80 is provided with a second cooling pipe 81 on the side opposite to the second electrode 30, and the insulating support block 70 is provided on the second electrode 30.

[0061] The second electrode mounting plate 80 is a support structure used to fix the second electrode 30. It can be formed from sheet metal, with electrode fixing positions on its surface. It is connected to the lower side of the cavity by bolts to stabilize the electrode position. The second cooling pipe 81 is a fluid circulation channel embedded inside the mounting plate. It can be made of copper or aluminum pipe bent into shape, with both ends connected to an external coolant circulation system to dissipate heat generated during electrode operation. The insulating support block 70 is a support component in contact with the electrode. It can be made of ceramic or polytetrafluoroethylene into a block structure, with grooves on its surface matching the bottom of the graphite boat 50. It supports the graphite boat 50 while preventing a conductive path from forming between the electrode and the cavity 10. The insulating support block 70 is directly mounted on the surface of the second electrode 30 and is detachably connected to the second electrode 30. For example, it can be quickly installed and removed by snap-fit ​​or threaded engagement, or the insulating support block 70 can be placed directly on the surface of the second electrode 30.

[0062] When the second electrode 30 is installed on the lower side of the chamber 10, the second electrode mounting plate 80 serves as the basic load-bearing structure, ensuring the relative position of the electrode and the chamber is stable through mechanical fixing. The second cooling pipe 81 is arranged on the side of the mounting plate away from the electrode, and uses circulating coolant to promptly dissipate the heat generated during electrode operation, preventing high temperature from causing electrode deformation or a decrease in insulation performance. The insulating support block 70 is directly set on the surface of the second electrode 30. When supporting the graphite boat 50, its insulating properties block the current path between the electrode and the chamber 10, avoiding the risk of short circuit. During the cleaning process, the graphite boat 50 is placed on the insulating support block 70, the electrode is energized to excite plasma, the second cooling pipe 81 continuously dissipates heat to maintain a stable electrode temperature, and the insulating support block 70 ensures that the current only acts between the electrode and the graphite boat 50.

[0063] Compared to existing technologies, traditional equipment typically lacks active heat dissipation design in its electrode mounting structure. Prolonged operation can lead to performance degradation due to temperature rise, and the supporting components, often made of metal, pose a risk of short circuits due to contact with the electrodes. This embodiment solves both heat dissipation and insulation problems while ensuring electrode stability by integrating a second cooling pipe 81 and an insulating support block 70, thereby improving the reliability of continuous operation. This embodiment effectively reduces electrode operating temperature, preventing equipment shutdown due to overheating. The insulating support structure blocks unnecessary conductive paths, reducing energy loss and short-circuit risks, ensuring stable plasma cleaning.

[0064] Optionally, refer to Figure 10In another embodiment, this utility model provides a device for cleaning a graphite boat 50, based on the above. Figure 8 In the embodiment shown, a second electrode mounting plate 80 for mounting the second electrode 30 is provided on the lower side of the chamber 10, wherein: The second electrode mounting plate 80 is provided with a second cooling pipe 81 on the side opposite to the second electrode 30, and the second electrode mounting plate 80 is installed in the gap between the plurality of insulating support blocks 70.

[0065] The second electrode mounting plate 80 refers to the metal base supporting the second electrode 30, which can be made of aluminum alloy or copper alloy sheet. Its surface has electrode fixing grooves for positioning the second electrode 30. The second cooling pipe 81 refers to the fluid circulation channel embedded inside the mounting plate, which can be made of serpentine copper pipe or machined flow channel structure, dissipating the heat generated by the electrode operation through circulating cooling medium. The insulating support block 70 refers to the high-temperature resistant non-conductive component supporting the graphite boat 50, which can be made of silicon nitride or alumina ceramic block. Its bottom has positioning protrusions to embed into the pre-set grooves of the mounting plate. The gap position refers to the area on the surface of the mounting plate not covered by the insulating support block 70. This can be determined by calculating the matching relationship between the distribution spacing of the support blocks and the size of the mounting plate, ensuring that the second electrode 30 avoids the support block mounting area. The reason for installing the second electrode 30 in the gap position is to facilitate the modification of the spatial layout of older equipment and reduce modification costs.

[0066] The second electrode mounting plate 80 is bolted to the support frame at the bottom of the chamber 10, and the second cooling pipe 81 is arranged parallel to the length of the mounting plate between the support blocks. When the graphite boat 50 is placed on the insulating support block 70, a uniform discharge gap is formed between its bottom and the second electrode 30. The cooling medium flows in from the inlet on the side of the mounting plate, flows along the pipe through the electrode heating area, and then exits from the outlet, preventing the electrode temperature from becoming too high and causing a decrease in plasma stability. The spaced arrangement of the insulating support blocks 70 ensures the stable support of the graphite boat 50 and provides a complete heat dissipation path for the second cooling pipe 81. The second cooling pipe 81 can be configured as a double-helix structure to increase the heat dissipation area, and the cooling medium can be deionized water or ethylene glycol solution.

[0067] Existing equipment often separates the cooling system from the support structure, resulting in increased chamber height and limited heat dissipation efficiency. This embodiment achieves a compact heat dissipation structure through a spatially staggered layout, ensuring support strength while resolving the contradiction between localized electrode overheating and excessive equipment size. This embodiment effectively controls the operating temperature of the second electrode 30, preventing uneven plasma distribution due to high temperatures, while ensuring the positioning stability of the graphite boat 50 during the cleaning process and avoiding the problem of reduced cooling efficiency caused by support structure obstruction.

[0068] Optionally, refer to Figure 11 Another embodiment of this utility model provides a device for cleaning graphite boats, based on the above. Figure 1 and Figure 2 In the embodiment shown, chamber 10 includes an outer shell that is grounded.

[0069] The outer shell refers to the external structure constituting the chamber 10, which can be made of metallic materials such as stainless steel or aluminum alloy, and is used to support the internal components and form a sealed space. Grounding refers to forming a conductive connection between the outer shell and the ground, which can be achieved by connecting a wire to a grounding stake or grounding grid. During the plasma cleaning process, grounding the outer shell can conduct away the charge accumulated on the surface, avoiding electrostatic discharge interference with the cleaning process or causing safety hazards.

[0070] The outer casing forms the main frame of the chamber 10 by welding or bolting, and houses the electrodes and graphite boat 50. One end of the grounding wire is fixed to the surface of the outer casing, and the other end extends to an external grounding device. When the power circuit 40 excites the plasma, the potential difference between the outer casing and the ground is eliminated, thereby suppressing the local accumulation of charge on the inner wall of the chamber 10. For example, during the ionization of the gas by the plasma, free electrons or ions are rapidly conducted away after contacting the grounded outer casing, avoiding electric field distortion or arc breakdown.

[0071] Compared to existing technologies, the outer casing of conventional plasma cleaning equipment is typically not grounded, leading to the accumulation of static charge on the cavity surface. This charge can interfere with the uniformity of plasma distribution and even cause accidental discharges that could damage the graphite boat 50. This embodiment, through its grounding design, not only maintains the stability of the plasma field but also reduces the safety risks caused by static electricity during operation. This embodiment eliminates the uneven distribution of charge within the chamber 10, ensuring that the plasma maintains a stable trajectory during cleaning. Simultaneously, the grounded outer casing prevents operators from suffering electric shocks when touching the cavity, further enhancing the safety and reliability of the equipment.

[0072] The above are merely preferred embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A device for cleaning graphite boats, characterized in that, The device includes: A chamber, the inner wall of which has a first side and a second side disposed opposite to each other; The first electrode is disposed on the first side of the chamber; The second electrode is located on the second side of the chamber; the graphite boat to be cleaned is placed between the first electrode and the second electrode; A power supply circuit having relatively isolated input and output terminals, the output terminals being electrically connected to the first electrode and the second electrode respectively, the power supply circuit being used to feed in an electrical signal to excite plasma for cleaning a graphite boat.

2. The equipment for cleaning graphite boats as described in claim 1, characterized in that, The power supply circuit includes: An isolation conversion circuit is provided, comprising an input side and an output side. The input side is used to connect to an external power supply, and the two ends of the output side are respectively connected to the first electrode and the second electrode.

3. The equipment for cleaning graphite boats as described in claim 2, characterized in that, The isolation conversion circuit includes: An isolation transformer, wherein the primary coil of the isolation transformer is connected to the external power supply, the first end of the secondary coil of the isolation transformer is connected to the first electrode, and the second end of the secondary coil of the isolation transformer is connected to the second electrode.

4. The equipment for cleaning graphite boats as described in claim 1, characterized in that, The first electrode is provided with a plurality of first electrode plates arranged along a first direction, and the second electrode is provided with a plurality of second electrode plates arranged along the first direction. The first electrode plates and the second electrode plates are alternately interspersed in a direction perpendicular to the plane in which the graphite boat is placed, and the first electrode plates and the second electrode plates are alternately interspersed on each graphite boat partition.

5. The equipment for cleaning graphite boats as described in claim 4, characterized in that, The power supply circuit is used to alternately change the power polarity of the first electrode and the second electrode, and to alternately apply positive and negative voltages to the first electrode plate and the second electrode plate to guide the plasma to change its direction of motion, so as to clean each area on the graphite boat.

6. The equipment for cleaning graphite boats as described in claim 1, characterized in that, The upper side of the chamber is provided with a first electrode mounting plate for mounting the first electrode, and the first electrode mounting plate is provided with a first cooling pipe on the side opposite to the first electrode.

7. The equipment for cleaning graphite boats as described in claim 1, characterized in that, The chamber is provided with multiple insulating support blocks, which are spaced apart on the lower side of the chamber and are used to support the graphite boat.

8. The apparatus for cleaning graphite boats as described in claim 7, characterized in that, The lower side of the chamber is provided with a second electrode mounting plate for mounting the second electrode. The second electrode mounting plate is provided with a second cooling pipe on the side opposite to the second electrode. The insulating support block is provided on the second electrode.

9. The apparatus for cleaning graphite boats as described in claim 7, characterized in that, The lower side of the chamber is provided with a second electrode mounting plate for mounting the second electrode. The second electrode mounting plate is provided with a second cooling pipe on the side opposite to the second electrode. The second electrode mounting plate is installed in the gap between the plurality of insulating support blocks.

10. The apparatus for cleaning graphite boats as described in claim 1, characterized in that, The chamber includes an outer shell, which is grounded.

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