MEMS chip with vertical direction buffering stop structure

Abstract

The utility model discloses a MEMS chip with vertical direction buffer stop structure belongs to the technical field of chip design and manufacture, MEMS chip including MEMS structure layer and melt bonding in the upper and lower two sides of MEMS structure layer two stop layers, two stop layers all are equipped with by the buffer stop structure that is composed of burying oxygen anchor point, stop anchor point, stop spring and stop block, and two stop layers and MEMS structure layer jointly enclose and form sealed cavity, and provide the activity space for MEMS movable structure and buffer stop structure. The utility model discloses a MEMS chip through the elastic deformation of stop spring absorption impact energy, has realized the two -way buffer of vertical direction, avoided the MEMS movable structure when receiving external force impact and exceeded displacement limit, led to structure to hit, even structure fracture, effectively guaranteed the work reliability of MEMS chip.

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