A load lock coating chamber for a PVD vacuum coating apparatus

Abstract

The utility model relates to a kind of loading coating sealing chamber of PVD vacuum coating equipment in the field of sealed chamber, including main cavity, magnetic fluid sealing door and self-compensation sealing system, the opening end surface outside of main cavity is coaxially provided with annular dovetail groove, double-cone-face metal sealing ring is embedded in the annular dovetail groove inside;The magnetic fluid sealing door includes door body base plate and annular permanent magnet array, the polar direction of the annular permanent magnet array is alternatively arranged to form closed magnetic field loop, the self-compensation sealing system includes memory alloy compensation ring and disc spring group, the memory alloy compensation ring is arranged at the gap between the inner periphery of door body base plate and main cavity.The utility model is sealed by double-cone-face ring initially, permanent magnet steady seal, compensation ring and disc spring compensate gap, wedge-shaped block locks firm, prevent vacuum leakage and sealing failure, guarantee chamber sealing reliable.

Description

Technical Field

[0001] This utility model relates to the field of sealed chambers, specifically to a loading coating sealed chamber for a PVD vacuum coating equipment. Background Technology

[0002] In the field of PVD vacuum coating technology, the coating loading and sealing chamber is the core component that ensures the vacuum environment during the coating process. Its sealing performance directly determines the quality of the coated product. Therefore, the rationality of the chamber sealing structure is a key direction for technological research and development in this field.

[0003] In the existing technology, the initial sealing structure design of some sealed chambers is insufficient, making it difficult to build a reliable initial sealing foundation. When the door body and the main cavity body are connected, the sealing is not tight, which leads to vacuum leakage. At the same time, most chambers lack effective means of dynamic compensation for sealing gaps. Long-term use or temperature fluctuations will cause the sealing gaps to gradually increase, leading to a decrease in sealing performance or even failure, which affects the stability of the coating process. Utility Model Content

[0004] The purpose of this invention is to address the above-mentioned deficiencies and provide a loading coating sealing chamber for a PVD vacuum coating equipment. This chamber optimizes the initial sealing and sealing gap compensation, thus solving the technical problems of poor initial sealing and increased gap in the prior art.

[0005] The objective of this utility model is achieved through the following means:

[0006] A coating sealing chamber for a PVD vacuum coating apparatus includes a main chamber, a magnetohydrodynamic (MHD) sealing door, and a self-compensating sealing system. The main chamber has an annular dovetail groove coaxially formed on its open end face. A double-conical metal sealing ring is embedded inside the annular dovetail groove, providing an initial sealing foundation for the chamber and effectively improving the sealing reliability during chamber docking, thus avoiding vacuum leakage caused by incomplete initial sealing. The MHD sealing door includes a door base plate and an annular permanent magnet array. The alternating polarities of the annular permanent magnet array form a closed magnetic field loop, which covers the docking gap between the MHD sealing door and the main chamber, achieving efficient MHD sealing, enhancing sealing stability, and solving the sealing failure problem caused by incomplete magnetic field coverage. The self-compensating sealing system includes a memory... The system includes an alloy compensation ring and a disc spring assembly. The shape memory alloy compensation ring is positioned at the gap between the inner circumference of the door base plate and the main cavity. It can compensate for changes in the sealing gap during cavity use, adapting to gap changes caused by long-term use or temperature fluctuations, and preventing a decrease in sealing performance due to an enlarged sealing gap. Three wedge-shaped blocks are provided at equal intervals along a ring at the outer edge of the door base plate. A locking mechanism is provided outside the main cavity, located on the outer side of the wedge-shaped blocks. The locking mechanism and the wedge-shaped blocks work together to securely lock the door base plate and the main cavity, ensuring a tight fit between the door and the main cavity and preventing loosening of the seal due to insufficient locking. The disc spring assembly is positioned between the door base plate and the shape memory alloy compensation ring. The disc spring assembly is in a pre-compressed state to provide initial preload to the shape memory alloy compensation ring.

[0007] Furthermore, the locking mechanism includes a side shell, an adjusting screw, and a push block. The side shell is fixedly connected to the main cavity, and the push block is rotatably mounted on the outside of the adjusting screw near the wedge block. The rotation of the adjusting screw controls the push block to move toward the wedge block.

[0008] Furthermore, the wedge block is slidably disposed inside the side shell near the wedge block, and the adjusting screw is connected to the side shell by a threaded connection. When the push block moves toward the wedge block, it generates a downward force on the door base plate under the action of the inclined plane.

[0009] Furthermore, the outer wall of the main cavity is covered with a spiral cooling channel, and the spiral cooling channel is integrally formed with the main cavity. The interface of the spiral cooling channel is a gradually changing teardrop shape. The teardrop-shaped channel efficiently conducts away heat from the cavity wall and suppresses sealing failure caused by local thermal deformation.

[0010] Furthermore, the double-conical metal sealing ring is embedded with a microporous oil seepage channel. The outlet of the microporous oil seepage channel points to the sealing contact surface between the double-conical metal sealing ring and the main cavity and the magnetic fluid sealing door. The microporous oil seepage channel slowly releases high-temperature resistant lubricant to the sealing surface, reducing wear and avoiding contamination of the coating environment.

[0011] Furthermore, the adjacent permanent magnets in the annular permanent magnet array are arranged with alternating N and S poles, and the closed magnetic field loop covers the docking gap between the magnetohydrodynamic sealing door and the main cavity.

[0012] The beneficial effects of this utility model are:

[0013] This invention achieves initial sealing of the chamber through an annular dovetail groove on the outer side of the main cavity opening face, embedding a double-conical metal sealing ring. This provides a reliable foundation for sealing and solves the problem of vacuum leakage caused by incomplete sealing during initial docking. Magnetohydrodynamic (MHD) sealing is achieved by alternating polarities of an annular permanent magnet array within the door, forming a closed magnetic field loop. This covers the docking gap and enhances sealing stability, solving the problem of sealing failure caused by incomplete magnetic field coverage. A shape memory alloy compensation ring in the self-compensating sealing system is positioned at the gap between the door base plate and the main cavity, with a disc spring assembly between the door base plate and the shape memory alloy compensation ring. This dynamically compensates for the sealing gap, adapting to gap changes and solving the problem of increased sealing gap due to long-term use or temperature fluctuations. Finally, a wedge-shaped block on the outer edge of the door base plate, in conjunction with a locking mechanism on the outer side of the main cavity, ensures a secure and tight fit between the door and the main cavity, preventing loosening due to inadequate locking. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the loading coating sealing chamber of a PVD vacuum coating equipment according to the present invention;

[0015] Figure 2 This is a cross-sectional view of the loading and sealing chamber of a PVD vacuum coating equipment according to this utility model;

[0016] Figure 3 for Figure 2 A magnified view of part A in the diagram;

[0017] Figure 4 This is a plan view of the door substrate of the loading coating sealing chamber of a PVD vacuum coating equipment according to the present invention.

[0018] In the figure, 1. Main cavity; 2. Door base plate; 3. Annular permanent magnet array; 4. Annular dovetail groove; 5. Double conical metal sealing ring; 6. Shape memory alloy compensation ring; 7. Disc spring assembly; 8. Wedge block; 9. Side shell; 10. Adjusting screw; 11. Push block; 12. Spiral cooling channel. Detailed Implementation

[0019] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0020] In this embodiment, refer to Figures 1-4The present invention relates to a loading and sealing chamber of a PVD vacuum coating equipment, comprising a main chamber 1, a magnetohydrodynamic sealing door, and a self-compensating sealing system. The main chamber 1 has an annular dovetail groove 4 coaxially formed on its outer opening end face, and a double-conical metal sealing ring 5 is embedded inside the annular dovetail groove 4. The magnetohydrodynamic sealing door includes a door base plate 2 and an annular permanent magnet array 3, with the poles of the annular permanent magnet array 3 alternately arranged to form a closed magnetic field loop. The self-compensating sealing system includes a shape memory alloy compensation ring 6 and a disc spring assembly 7. The shape memory alloy compensation ring 6 is located in the gap between the inner circumference of the door base plate 2 and the main chamber 1. Three wedge-shaped blocks 8 are equidistantly distributed along an annular ring at the outer edge of the door base plate 2, and a locking mechanism is located outside the main chamber 1 on the outside of the wedge-shaped blocks 8. The disc spring assembly 7 is located between the door base plate 2 and the shape memory alloy compensation ring 6, and the disc spring assembly 7 is in a pre-compressed state to provide an initial pre-tightening force to the shape memory alloy compensation ring 6.

[0021] like Figure 1 and Figure 2 As shown, the locking mechanism includes a side shell 9, an adjusting screw 10, and a push block 11. The side shell 9 is fixedly connected to the main cavity 1. The push block 11 is rotatably mounted on the outside of the adjusting screw 10 near the wedge block 8. The rotation of the adjusting screw 10 controls the push block 11 to move toward the wedge block 8.

[0022] like Figure 1 and Figure 2 As shown, the wedge block 8 is slidably disposed inside the side shell 9 near the wedge block 8. The adjusting screw 10 is connected to the side shell 9 by a threaded connection. When the push block 11 moves toward the wedge block 8, it generates a downward force on the door base plate 2 under the action of the inclined plane.

[0023] like Figure 1 and Figure 2 As shown, the outer wall of the main cavity 1 is covered with a spiral cooling channel 12, and the spiral cooling channel 12 is integrally formed with the main cavity 1. The interface of the spiral cooling channel 12 is a gradually changing teardrop shape. The teardrop-shaped channel efficiently conducts away the heat of the cavity wall and suppresses the sealing failure caused by local thermal deformation.

[0024] like Figure 3 and Figure 4 As shown, the double-conical metal sealing ring 5 is embedded with a microporous oil seepage channel. The outlet of the microporous oil seepage channel points to the sealing contact surface between the double-conical metal sealing ring 5 and the main cavity 1 and the magnetic fluid sealing door. The microporous oil seepage channel slowly releases high-temperature resistant lubricant to the sealing surface, reducing wear and avoiding contamination of the coating environment.

[0025] like Figure 3 and Figure 4 As shown, the adjacent permanent magnets in the annular permanent magnet array 3 are arranged with alternating N and S poles, and the closed magnetic field loop covers the docking gap between the magnetohydrodynamic sealing door and the main cavity 1.

[0026] The working principle of the loading coating sealing chamber of the PVD vacuum coating equipment in this embodiment is as follows: First, operate the locking mechanism and rotate the adjusting screw 10 that is threadedly engaged with the side shell 9. This causes the push block 11, which is rotatably installed on the adjusting screw 10 near the wedge block 8, to move toward the three wedge blocks 8 that are equidistantly distributed in a ring along the outer edge of the door substrate 2. The inclined plane generates a downward force on the door substrate 2, thus achieving the initial locking of the magnetic fluid sealing door and the main cavity 1. In the magnetic fluid sealing door, the annular permanent magnet array 3 forms a closed magnetic field loop, covering the mating area between the door and the main cavity 1. The gap is filled to achieve magnetic fluid sealing; the double conical metal sealing ring 5 embedded in the annular dovetail groove 4 on the outer side of the opening end face of the main cavity 1 has a microporous oil seepage channel that slowly releases high-temperature resistant lubricant to the sealing contact surface, reducing wear and not polluting the coating environment, thus assisting the sealing; in the self-compensating sealing system, the pre-compressed disc spring group 7 provides initial pre-tightening force to the shape memory alloy compensation ring 6, which can compensate for changes in the sealing gap; at the same time, the spiral cooling channel 12 integrally formed on the outer wall of the main cavity 1 efficiently conducts away the heat of the cavity wall, suppresses the sealing failure caused by local thermal deformation, and ultimately ensures the reliability of the cavity sealing.

[0027] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A loading and sealing chamber for a PVD vacuum coating apparatus, comprising a main chamber, a magnetohydrodynamic sealing door, and a self-compensating sealing system, characterized in that: The main cavity has an annular dovetail groove coaxially formed on the outer opening face, and a double-conical metal sealing ring is embedded inside the annular dovetail groove; the magnetohydrodynamic sealing door includes a door base plate and an annular permanent magnet array, the poles of the annular permanent magnet array are arranged alternately to form a closed magnetic field loop; the self-compensating sealing system includes a shape memory alloy compensation ring and a disc spring assembly; the shape memory alloy compensation ring is disposed in the gap between the inner circumference of the door base plate and the main cavity; three wedge-shaped blocks are disposed at equal intervals along the annular shape at the outer edge of the door base plate, and a locking mechanism is disposed outside the main cavity on the outside of the wedge-shaped blocks; the disc spring assembly is disposed between the door base plate and the shape memory alloy compensation ring.

2. The loading and sealing chamber of a PVD vacuum coating apparatus according to claim 1, characterized in that: The locking mechanism includes a side shell, an adjusting screw, and a push block. The side shell is fixedly connected to the main cavity, and the push block is rotatably mounted on the outside of the adjusting screw near the wedge block.

3. The loading and sealing chamber of a PVD vacuum coating equipment according to claim 2, characterized in that: The wedge block is slidably disposed inside the side shell near the wedge block, and the adjusting screw is connected to the side shell by a threaded connection.

4. The loading and sealing chamber of a PVD vacuum coating equipment according to claim 1, characterized in that: The outer wall of the main cavity is covered with a spiral cooling channel, and the spiral cooling channel is integrally formed with the main cavity. The interface of the spiral cooling channel is a gradient teardrop shape.

5. The loading and sealing chamber of a PVD vacuum coating apparatus according to claim 1, characterized in that: The double-conical metal sealing ring is embedded with a microporous oil seepage channel, and the outlet of the microporous oil seepage channel points to the sealing contact surface between the double-conical metal sealing ring and the main cavity and the magnetic fluid sealing door.

6. The loading and sealing chamber of a PVD vacuum coating apparatus according to claim 1, characterized in that: The adjacent permanent magnets in the annular permanent magnet array are arranged with alternating N and S poles, and the closed magnetic field loop covers the docking gap between the magnetohydrodynamic sealing door and the main cavity.

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