A splash-proof device for improving the surface quality of a thin film aluminum layer

Abstract

The utility model belongs to vacuum evaporation technology field, and disclose a kind of prevent splashing device of improvement film aluminium layer surface quality, including evaporation boat, the both ends of evaporation boat are connected with an electrically conductive plate, two The electrode is connected respectively in two electrically conductive plate, the top of two electrically conductive plate is connected with prevent splashing mechanism, the middle part of prevent splashing mechanism is set in the top of evaporation boat;The evaporation boat includes the boat body connected between two electrically conductive plates, the boat body is obliquely arranged, the upper end of boat body is provided with upper guard plate, the lower end of boat body is provided with lower guard plate, the side of upper guard plate outer surface close to lower guard plate is equipped with heat collection area.The utility model because the setting of evaporation zone, under the cooperation of melting zone and overflow zone, the molten aluminium liquid can be quickly flowed on evaporation zone, and aluminium liquid film is formed on evaporation zone, to better timely heat and quickly evaporate, to effectively avoid the situation that filter liquid accumulation causes boiling splashing.

Claims

1. A splash-proof device for improving the surface quality of a thin-film aluminum layer, comprising an evaporation boat (1), characterized in that: The evaporation boat (1) is connected to a conductive plate (2) at both ends. The two conductive plates (2) are respectively connected to electrodes. The top of the two conductive plates (2) is connected to an anti-splash mechanism (3). The middle part of the anti-splash mechanism (3) is located above the evaporation boat (1). The evaporation boat (1) includes a boat body (11) connected between two conductive plates (2). The boat body (11) is inclined. An upper guard plate (12) is provided at the upper end of the boat body (11), and a lower guard plate (13) is provided at the lower end of the boat body (11). A heat collection area (14) is opened on the outer surface of the upper guard plate (12) near the lower guard plate (13). The boat body (11) is composed of a melting zone (15), an overflow zone (16), an evaporation zone (17), and a deposition zone (18). The melting zone (15), overflow zone (16), evaporation zone (17), and deposition zone (18) are connected in sequence. The far ends of the melting zone (15) and the deposition zone (18) are connected to the upper guard plate (12) and the lower guard plate (13), respectively. The surfaces of the melting zone (15), overflow zone (16), evaporation zone (17), and deposition zone (18) are smoothly connected.

2. The anti-splash device for improving the surface quality of a thin-film aluminum layer according to claim 1, characterized in that: The bottom of the inner cavity of the heat collection zone (14) is smoothly connected to the side of the surface of the melting zone (15) away from the overflow zone (16), and the height of the inner cavity of the heat collection zone (14) is greater than the height of the area where the aluminum wire is fed.

3. The anti-splash device for improving the surface quality of a thin-film aluminum layer according to claim 1, characterized in that: The width dimension of the surface of the evaporation zone (17) is greater than the width dimension of the surface of the molten zone (15), and the width dimension of the surface of the molten zone (15) is greater than the width dimension of the area where the aluminum wire is fed.

4. The anti-splash device for improving the surface quality of a thin-film aluminum layer according to claim 1, characterized in that: The surface of the molten zone (15) is smooth and inclined. The horizontal plane on one side of the molten zone (15) connected to the heat collection zone (14) is above the horizontal plane on the other side of the molten zone (15).

5. The anti-splash device for improving the surface quality of a thin-film aluminum layer according to claim 1, characterized in that: The surface of the overflow area (16) is a smooth arc surface. The upper end of the surface of the overflow area (16) is tangent to the lower end of the surface of the melting area (15). The lower end of the surface of the overflow area (16) is tangent to the lower end of the surface of the evaporation area (17). The inner walls of the heat collection area (14) and the deposition area (18) are smooth. The near ends of the heat collection area (14) and the deposition area (18) are tangent to the far ends of the melting area (15) and the evaporation area (17), respectively.

6. The anti-splash device for improving the surface quality of a thin-film aluminum layer according to claim 1, characterized in that: The conductive plate (2) includes a conductive heat-insulating protective plate (21) connected to both ends of the evaporation boat (1). The upper end of the conductive heat-insulating protective plate (21) extends to the top of the evaporation boat (1), and with the cooperation of the upper protective plate (12) and the lower protective plate (13), an evaporation pool is formed through the melting zone (15), the overflow zone (16) and the evaporation zone (17). The bottom of the conductive heat insulation plate (21) extends to the bottom of the evaporation boat (1) and is horizontal. The top of the conductive heat insulation plate (21) is provided with wire feeding grooves (22) located on the front and rear sides of the melting zone (15). The aluminum wire is fed into the melting zone (15) and the heat collection zone (14) through the wire feeding grooves (22).

7. The anti-splash device for improving the surface quality of a thin-film aluminum layer according to claim 1, characterized in that: The anti-splash mechanism (3) includes several anti-splash components (31) that are vertically arranged on the evaporation boat (1) and the conductive plate (2) and distributed in parallel. The vertical line at any point on the surface of the evaporation zone (17) passes through at least one of the anti-splash components (31).

8. The anti-splash device for improving the surface quality of a thin-film aluminum layer according to claim 7, characterized in that: The lower end of the splash-proof component (31) is connected to a positioning component (33), and the upper ends of two adjacent splash-proof components (31) are connected to a linkage plate (32). Several positioning components (33) are connected in sequence through the linkage plate (32).

9. The anti-splash device for improving the surface quality of a thin-film aluminum layer according to claim 8, characterized in that: The splash shield assembly (31) consists of a splash shield plate (311) connected between the linkage plate (32) and the positioning assembly (33). The upper end of the splash shield plate (311) is fixedly connected to two front and rear first rotating shafts (312). The two ends of the linkage plate (32) are connected to the upper ends of two adjacent splash shield plates (311) through the first rotating shafts (312). The lower end of the splash shield plate (311) is connected to two front and rear second rotating shafts (313). The upper end of the positioning assembly (33) is connected to the lower end of the splash shield plate (311) through the two front and rear second rotating shafts (313). The bottom of the positioning assembly (33) is installed on the top of the two front and rear conductive heat-insulating protective plates (21).

10. The anti-splash device for improving the surface quality of a thin-film aluminum layer according to claim 9, characterized in that: The positioning component (33) includes a connecting frame (331) connected to the top of the conductive heat-insulating protective plate (21). A sleeve hole (332) is provided in the middle of the connecting frame (331). The connecting frame (331) is sleeved on the second rotating shaft (313) through the sleeve hole (332). Two positioning grooves (333) are provided on the outer surface of the connecting frame (331) near the splash guard (311) and located outside the sleeve hole (332). One of the positioning grooves (333) is located directly above the socket hole (332), and the other positioning groove (333) is located diagonally above the socket hole (332). The anti-splash plate (311) is connected with a protrusion that matches the positioning groove (333). When the anti-splash plate (311) is connected to the two positioning grooves (333) in sequence through the protrusion, the anti-splash plate (311) achieves two states: vertical and attached to the surface of the conductive heat insulation protective plate (21).

Images