Roll-to-roll evaporation apparatus
CN224692203UActive Publication Date: 2026-08-28JIANGSU ENPACK COMPOSITE CURRENT COLLECTORS CO LTD
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Patent Information
- Application Number
- CN202522094564.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-28
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2035-09-28
AI Technical Summary
Technical Problem
[0004]然而经现有生产装置制备得到的钝化层附着力与致密性较差，且制备效率低
Benefits of technology
[0023]进一步地，所述过渡通道沿着竖直方向布置，所述挡板靠近顶部的位置处开设有第一避让口，以连通所述工艺腔和所述过渡通道，所述连接壁的底部和所述真空容器的内底壁之间形成第二避让口，以连通所述过渡通道和所述后处理腔。
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Abstract
The utility model discloses a kind of roll-to-roll evaporation equipment, comprising: vacuum container, process cavity and post-processing cavity are formed in it;Winding system, be in vacuum container, for driving substrate from process cavity unwinding, in turn after process cavity, transition channel and post-processing cavity are rolled in post-processing cavity;Evaporation source, be in process cavity, and it is suitable for evaporating metal layer on substrate surface;Ion source, be in post-processing cavity, and it is suitable for high-energy ion beam bombardment on the metal layer of substrate, to form passivation layer.The utility model uses above structure, and the adhesion and compactness of passivation layer obtained by production are good, and preparation efficiency is high.
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