PECVD graphite boat for photovoltaic cell production

Abstract

The utility model discloses a kind of PECVD graphite boats for photovoltaic cell piece production, including two outer boat pieces and several inner boat pieces, several inner boat pieces are equidistantly distributed between two outer boat pieces, several fixed holes corresponding are provided on outer boat piece and inner boat piece, a fixed rod is commonly provided in several fixed holes of coincident median axis, two outer boat pieces and several inner boat pieces are connected together by several fixed rods;Several mounting holes are respectively provided on outer boat piece and inner boat piece, a clamping nail is provided in mounting hole, the clamping nail includes the mounting portion adapted with mounting hole, the two sides of mounting portion vertical surface are equipped with connecting portion, the outer vertical surface of connecting portion is equipped with first clamping point cap, the outer vertical surface of first clamping point cap is equipped with second clamping point cap, the outer vertical surface of second clamping point cap is equipped with third clamping point cap. First clamping point cap, second clamping point cap and third clamping point cap are sequentially arranged, and outer diameter is sequentially larger, so as to realize the purpose that clamping nail can bear multiple thickness silicon wafer.

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