Furnace cover air inlet device

Abstract

The utility model belongs to single crystal furnace furnace cover technical field, concretely is a kind of furnace cover air inlet device, including single crystal furnace furnace cover body, the single crystal furnace furnace cover body top is equipped with air inlet;The air inlet is inclined setting;The air inlet top is provided with ceramic pipe;Second connecting flange is fixedly connected in the air inlet end portion;The ceramic pipe and air inlet are connected by second connecting flange;By increasing ceramic pipe, when the air inlet device body passes through air inlet and contacts in the single crystal furnace internal air intake, the direct contact of air inlet device body and air inlet is reduced, so that it reduces the contact of air inlet device body and air inlet by the blocking of ceramic pipe when heat transfer, thereby reducing the influence caused by long time direct contact, and air inlet is inclined setting can be installed after the air inlet device body top is away from the central region of single crystal furnace furnace cover body, thereby being away from temperature concentration area, thereby reduce the temperature around air inlet device body.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace cover technology, specifically a furnace cover air inlet device. Background Technology

[0002] A single crystal furnace is a device used to produce single crystal materials. Its principle is to heat the material to a molten state and then form a single crystal structure by controlling the temperature gradient and the stretching speed. The furnace cover is the core sealing component of the single crystal furnace. Its main function is to isolate the high-temperature environment inside the furnace from the outside air and maintain a vacuum or inert gas atmosphere inside the furnace.

[0003] The single crystal furnace cover gas inlet device is used to enter the furnace cover during the production process and add special gas to the furnace body to adjust the growth environment of silicon rods.

[0004] The existing single crystal furnace cover air inlet device is directly installed on the furnace cover and in contact with the furnace cover. However, the high temperature inside the furnace will continuously dissipate heat to the outside, which will affect the air inlet device after prolonged contact with the furnace cover.

[0005] Therefore, a furnace cover air inlet device is proposed to address the above problems. Utility Model Content

[0006] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0007] The technical solution adopted by this utility model to solve its technical problem is as follows: The furnace cover air inlet device of this utility model includes a single crystal furnace cover body, and an air inlet is opened on the top of the single crystal furnace cover body; the air inlet is inclined; a ceramic tube is provided on the top of the air inlet; a second connecting flange is fixedly connected to the end of the air inlet; the ceramic tube and the air inlet are connected through the second connecting flange; an air inlet device body is fixedly connected inside the ceramic tube; a first connecting flange is fixedly connected to the end of the ceramic tube; by adding a ceramic tube, when the air inlet device body comes into contact with the air inside the single crystal furnace through the air inlet, the direct contact between the air inlet device body and the air inlet is reduced, so that when heat is transferred, the contact between heat and the air inlet device body is reduced by the obstruction of the ceramic tube, thereby reducing the impact caused by long-term direct contact. At the same time, the inclined setting of the air inlet allows the top of the air inlet device body to be far away from the central area of ​​the single crystal furnace cover body after installation, thereby away from the temperature concentration area, thereby reducing the temperature around the air inlet device body.

[0008] Preferably, a buffer tube is provided on the top of the first connecting flange; the buffer tube and the ceramic tube are connected through the first connecting flange; a guide tube is provided inside the buffer tube; multiple mounting blocks are fixed to the side wall of the guide tube; the mounting blocks and the buffer tube are threaded together; a round rod is fixed to the top of the guide tube; by adding a buffer tube and a guide tube, the movement path of the airflow can be increased when the airflow enters, making it more stable during movement, thereby increasing the air intake effect. At the same time, the heat on the buffer tube will also be carried by the airflow during movement, preheating the airflow before it enters.

[0009] Preferably, a heat sink is fixed to the surface of the ceramic tube; multiple heat sinks are provided on the ceramic tube; by adding heat sinks, the heat received by the ceramic tube can be eliminated by airflow during daily use, thereby increasing passive heat dissipation of the ceramic tube and thus increasing the protection of the ceramic tube.

[0010] Preferably, a reflector is fixed to the end of the heat sink; the reflector and the heat sink are arranged correspondingly; by adding a reflector, the heat transfer mode of the single crystal furnace can be reduced, thereby reducing heat transfer.

[0011] Preferably, a ceramic plunger is provided on the top of the single crystal furnace cover body; the ceramic plunger and the air inlet are in sliding fit; by adding the ceramic plunger, the air inlet can be controlled after the air inlet body is disassembled, so as to close it and increase protection, thereby reducing the number of items falling from the air inlet into the single crystal furnace.

[0012] Preferably, a metal rope is fixedly connected to the top of the single crystal furnace cover body; the end of the metal rope is fixedly connected to the ceramic plunger; by adding the metal rope, the ceramic plunger can be restrained when placed, thereby increasing the storage of the ceramic plunger and reducing its scattering.

[0013] The advantages of this utility model are: 1. The furnace cover air inlet device of this utility model reduces the direct contact between the air inlet device body and the air inlet when the air inlet device body comes into contact with the air inside the single crystal furnace through the air inlet. During heat transfer, the ceramic tube reduces the contact between heat and the air inlet device body, thereby reducing the impact of prolonged direct contact. At the same time, the inclined air inlet allows the top of the air inlet device body to be away from the central area of ​​the single crystal furnace cover body after installation, thereby moving away from the temperature concentration area and reducing the temperature around the air inlet device body.

[0014] 2. The furnace cover air intake device of this utility model can increase the movement path of the airflow when it enters by adding a buffer pipe and a guide pipe, so that the airflow is more stable during movement, thereby increasing the air intake effect. At the same time, the heat on the buffer pipe will also be carried by the airflow during movement, so that the airflow is preheated before entering. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the main body of this utility model; Figure 2 This is a schematic diagram of the metal rope structure in this utility model; Figure 3 This is a schematic diagram of the buffer tube in this utility model; Figure 4 This is a schematic diagram of the guide tube in this utility model; Figure 5 This is a schematic diagram of the air guide tube in this utility model.

[0017] In the diagram: 1. Single crystal furnace cover body; 11. Air inlet; 12. Ceramic tube; 13. Air inlet device body; 14. First connecting flange; 15. Second connecting flange; 2. Buffer tube; 21. Guide tube; 22. Round rod; 23. Mounting block; 3. Heat sink; 4. Reflector plate; 5. Ceramic plunger; 6. Metal rope. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0019] Specific implementation examples are given below.

[0020] like Figures 1 to 5As shown in the embodiment of this utility model, a furnace cover air inlet device includes a single crystal furnace cover body 1, with an air inlet 11 at the top. The air inlet 11 is inclined. A ceramic tube 12 is provided at the top of the air inlet 11. A second connecting flange 15 is fixedly connected to the end of the air inlet 11. The ceramic tube 12 and the air inlet 11 are connected through the second connecting flange 15. An air inlet device body 13 is fixedly connected inside the ceramic tube 12. A first connecting flange 14 is fixedly connected to the end of the ceramic tube 12. During operation, when it is necessary to connect the air inlet 11 and the air inlet device body 13, the bottom of the air inlet device body 13 is first inserted into the air inlet 11, and then bolts are used to connect and fix the ceramic tube 12 and the air inlet 11 through the first connecting flange 14. When the heat inside the single crystal furnace is transferred to the outside, the ceramic tube 12 will transfer the heat through its own resistance. The reduced heat transfer slows down the contact area between the heat and the ceramic tube 12 during operation. Since the air intake device body 13 is located inside the ceramic tube 12, when external heat approaches the air intake device body 13, it first contacts the ceramic tube 12. The ceramic tube 12 then blocks the heat, thus reducing the heat's approach to the air intake device body 13. By adding the ceramic tube 12, the direct contact between the air intake device body 13 and the air intake port 11 is reduced when the air intake device body 13 contacts the interior of the single crystal furnace through the air intake port 11. This reduces the contact between heat and the air intake device body 13 during heat transfer, thereby minimizing the impact of prolonged direct contact. Furthermore, the inclined arrangement of the air intake port 11 keeps the top of the air intake device body 13 away from the center of the single crystal furnace cover body 1 after installation, thus moving it away from the temperature concentration zone and reducing the temperature around the air intake device body 13.

[0021] like Figures 1 to 4As shown, a buffer tube 2 is provided on the top of the first connecting flange 14; the buffer tube 2 and the ceramic tube 12 are connected through the first connecting flange 14; a guide tube 21 is provided inside the buffer tube 2; multiple mounting blocks 23 are fixed to the side wall of the guide tube 21; the mounting blocks 23 and the buffer tube 2 are threadedly connected; a round rod 22 is fixed to the top of the guide tube 21; during operation, the intake device body 13 is installed on the intake port 11, and then the buffer tube 2 and the ceramic tube 12 are connected. Then, the round rod 22 is held to insert the guide tube 21 into the buffer tube 2. Subsequently, the mounting blocks 23 will contact the inside of the buffer tube 2. When the mounting blocks 23 and the threads inside the buffer tube 2 are in contact, the round rod 22 is rotated to make the mounting blocks 23 and the buffer tube 2 engage threadedly. When the guide tube 21 pushes the end of the intake device body 13 into the air intake... The airflow is then lowered slightly by moving the obstruction down a bit. During intake, the airflow enters the buffer tube 2 and then backflows at the bottom of the buffer tube 2. At this point, the airflow enters the guide tube 21 and finally enters the intake device body 13 through the guide tube 21. From there, it is transmitted to the intake port 11 for use. The movement of the airflow within the buffer tube 2 and guide tube 21 increases its path, allowing it to enter the intake device body 13 more smoothly after a series of movements. By adding the buffer tube 2 and guide tube 21, the airflow path is increased during intake, resulting in smoother movement and improved intake efficiency. Simultaneously, the heat from the buffer tube 2 is carried by the airflow, preheating it before it enters the device.

[0022] like Figures 3 to 5 As shown in the figure, a heat sink 3 is fixedly attached to the surface of the ceramic tube 12; multiple heat sinks 3 are arranged on the ceramic tube 12; during operation, when heat is received inside the ceramic tube 12, it will gradually be transferred to the heat sink 3, and then when the external airflow passes by, the airflow will contact the heat sink 3 and eliminate the heat on the heat sink 3, thus dissipating heat; by adding heat sinks 3, the heat received by the ceramic tube 12 can be eliminated by airflow during daily use, thereby increasing the passive heat dissipation of the ceramic tube 12 and thus increasing the protection of the ceramic tube 12.

[0023] like Figures 3 to 5 As shown, a reflector plate 4 is fixedly connected to the end of the heat sink 3; the reflector plate 4 and the heat sink 3 are arranged correspondingly; during operation, when the single crystal furnace dissipates heat to the outside, it is a heat radiation transfer, which will come into contact with the reflector plate 4 during the transfer. When in contact, the reflector plate 4 will reflect the heat and make it radiate in other directions, thereby reducing the contact of heat radiation; by adding the reflector plate 4, the heat transfer mode of the single crystal furnace can be reduced, thereby reducing the heat transfer.

[0024] like Figures 1 to 2As shown, a ceramic plunger 5 is provided on the top of the single crystal furnace cover body 1; the ceramic plunger 5 and the air inlet 11 are in sliding fit; during operation, when the air inlet device body 13 is disassembled for maintenance, the ceramic plunger 5 can be inserted into the air inlet 11 to close the air inlet 11, thereby increasing the sealing of the air inlet 11 during maintenance; by adding the ceramic plunger 5, the air inlet 11 can be controlled to close after the air inlet device body 13 is disassembled, thereby increasing protection and reducing the number of items falling from the air inlet 11 into the single crystal furnace.

[0025] like Figures 1 to 2 As shown, a metal rope 6 is fixedly connected to the top of the single crystal furnace cover body 1; the end of the metal rope 6 is fixedly connected to the ceramic plunger 5; during operation, the ceramic plunger 5 can be released after being disassembled. When released, the ceramic plunger 5 will be restrained by the metal rope 6, causing it to stay near the single crystal furnace cover body 1, thereby increasing the restriction on the ceramic plunger 5 during use; by adding the metal rope 6, the ceramic plunger 5 can be restrained when placed, thereby increasing the storage of the ceramic plunger 5 and reducing its scattering.

[0026] Working principle: When connecting the air inlet 11 and the air inlet device body 13, first insert the bottom of the air inlet device body 13 into the air inlet 11, and then use bolts to connect and fix the ceramic tube 12 and the air inlet 11 through the first connecting flange 14. When heat inside the single crystal furnace is transferred to the outside, the ceramic tube 12 will slow down the heat transfer due to its own resistance, thus reducing the contact area between heat and the ceramic tube 12 during operation. At the same time, the air inlet device body 13 is located inside the ceramic tube 12, so when external heat approaches the air inlet device body 13, it will first contact the ceramic tube 12. At this time, the ceramic tube 12 will resist the heat. The air intake device body 13 is blocked, thus reducing the heat from approaching and contacting the intake device body 13. After installing the intake device body 13 onto the intake port 11, the buffer tube 2 and ceramic tube 12 are connected. Then, holding the round rod 22, the guide tube 21 is inserted into the buffer tube 2. The mounting block 23 will then contact the inside of the buffer tube 2. After the mounting block 23 contacts the thread inside the buffer tube 2, the round rod 22 is rotated to make the mounting block 23 and the buffer tube 2 threadedly engage. The guide tube 21 blocks the end of the intake device body 13 and then moves down a small section. Then, during air intake, the airflow enters the buffer tube 2 and then, upon reaching the bottom of the buffer tube 2, it will... During the backflush process, the airflow enters the guide tube 21 and then the intake device body 13. From there, it is transferred to the intake port 11 for use. The movement of the airflow within the buffer tube 2 and guide tube 21 increases its path, allowing it to enter the intake device body 13 more smoothly after a series of movements. When heat is received inside the ceramic tube 12, it is gradually transferred to the heat sink 3. Subsequently, as external airflow passes through, the contact between the airflow and the heat sink 3 dissipates the heat, thus achieving heat dissipation. The single crystal furnace then... During heat dissipation, heat radiation is transferred. During this transfer, the heat will come into contact with the reflector plate 4. Upon contact, the reflector plate 4 will reflect the heat and direct it in other directions, thereby reducing the contact of heat radiation. When the air intake device body 13 is disassembled for maintenance, the ceramic plunger 5 can be inserted into the air intake port 11 to close the air intake port 11. Closing the air intake port 11 increases the sealing of the air intake port 11 during maintenance. After the ceramic plunger 5 is disassembled, it can be released. When released, the ceramic plunger 5 will be restrained by the metal rope 6, keeping it near the single crystal furnace cover body 1, thereby increasing the restriction on the ceramic plunger 5 during use.

[0027] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A furnace cover air inlet device, characterized in that: The device includes a single crystal furnace cover body (1), the top of which is provided with an air inlet (11); the air inlet (11) is inclined; a ceramic tube (12) is provided on the top of the air inlet (11); a second connecting flange (15) is fixedly connected to the end of the air inlet (11); the ceramic tube (12) and the air inlet (11) are connected by the second connecting flange (15); an air intake device body (13) is fixedly connected inside the ceramic tube (12); a first connecting flange (14) is fixedly connected to the end of the ceramic tube (12).

2. The furnace cover air inlet device according to claim 1, characterized in that: A buffer tube (2) is provided on the top of the first connecting flange (14); the buffer tube (2) and the ceramic tube (12) are connected through the first connecting flange (14); a guide tube (21) is provided inside the buffer tube (2); a plurality of mounting blocks (23) are fixed to the side wall of the guide tube (21); the mounting blocks (23) and the buffer tube (2) are threaded together; a round rod (22) is fixed to the top of the guide tube (21).

3. The furnace cover air inlet device according to claim 2, characterized in that: The ceramic tube (12) is fixed with heat sinks (3); multiple heat sinks (3) are provided on the ceramic tube (12).

4. The furnace cover air inlet device according to claim 3, characterized in that: A reflector plate (4) is fixedly connected to the end of the heat sink (3); the reflector plate (4) and the heat sink (3) are arranged correspondingly.

5. The furnace cover air inlet device according to claim 4, characterized in that: The top of the single crystal furnace cover body (1) is provided with a ceramic plunger (5); the ceramic plunger (5) and the air inlet (11) are in sliding fit.

6. The furnace cover air inlet device according to claim 5, characterized in that: A metal rope (6) is fixedly connected to the top of the single crystal furnace cover body (1); the end of the metal rope (6) and the ceramic plunger (5) are fixedly connected.

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