Quartz vacuum process tube for diffusion furnace
CN224692286UActive Publication Date: 2026-08-28XIAN PERI POWER SEMICONDUCTOR CONVERSION TECHNOLOGY CO LTD
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Patent Information
- Application Number
- CN202521849968.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-29
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2035-08-29
AI Technical Summary
Technical Problem
在日常工艺运行中沉积层会逐渐变厚，在杂质沉积层达到一定厚度的情况下，由于杂质沉积层的热膨胀系数与石英的热膨胀系数差值较大，杂质沉积物与石英表面附着牢固，二者会在热膨胀系数的作用下产生非常大的应力，并且会在尾部直角处出现应力集中，由于直角型尾部与石英真空工艺管主体连接使用的是焊接工艺，会在焊接处出现应力集中现象，导致石英真空工艺管尾部出现断裂或者破损，影响石英真空工艺管的使用寿命和产品质量
Benefits of technology
1、本实用新型改变了石英真空工艺管尾部结构和造型，外观由直角结构变为直线结构，免去了石英工艺管尾部与主体连接使用的焊接技术，避免沉积物和石英二者的结合处在热膨胀系数的作用下在焊接处产生应力集中现象，防止应力集中造成石英真空工艺管尾在焊接处出现断裂破损，提高了石英真空工艺管的使用寿命；
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Abstract
The utility model discloses a quartz vacuum process pipe for diffusion furnace, quartz vacuum process pipe tail portion inner wall is arc, and the outer wall is integrally formed with the main body directly, makes tail portion to be circular platform state, makes the cross section of tail portion to reduce slowly, prevents the stress concentration phenomenon from appearing, further avoids the tail portion broken damage condition, the adhesion area of deposit has been increased, reduces the thickness of deposition layer and prevents the quartz vacuum process pipe from appearing stress due to the deposition layer being too thick, and the thermal expansion coefficient of two kinds of materials is inconsistent, leads to generating stress, arc inner wall has been used, and the airflow is extruded when passing through arc inner wall, and the flow velocity becomes fast, and the adhesion difficulty of deposit has been increased.
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