Screw vacuum pump

Abstract

The utility model provides a screw vacuum pump, including first screw, second screw, first drive motor, second drive motor, third drive motor and fourth drive motor, the axis of first screw and second screw is parallel with each other, and both transmission is connected, in along the extension direction of first screw and second screw, the both ends of first screw are first left end and first right end respectively, and the both ends of second screw are second left end and second right end respectively, first drive motor transmission is connected on first left end, second drive motor transmission is connected on second left end, third drive motor transmission is connected on first right end, and fourth drive motor transmission is connected on second right end, the continuity of the invention can avoid the influence production of motor failure, and then make production efficiency has been guaranteed, can also effectively control the vibration of screw simultaneously, and then reduce the noise.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum pump manufacturing technology, specifically relating to a screw vacuum pump. Background Technology

[0002] Vacuum pumps are essential equipment in industrial production. Screw vacuum pumps, with their wide pumping speed range and compact structure, are widely used in industries such as photovoltaics, semiconductors, LCD panels, and chemicals. Currently, all existing screw vacuum pumps use a single-motor direct-drive method. With this method, in practical operation, when the motor fails, the machine needs to be stopped for repair or replacement, thus affecting the continuity of production and compromising production efficiency. Furthermore, because only one motor is connected to one end of the screw in the screw vacuum pump, while the other end of the screw is in a driven state, it is prone to screw vibration, resulting in relatively high noise levels. Summary of the Invention

[0003] This invention provides a screw vacuum pump that not only avoids production continuity issues caused by motor failure, thus ensuring production efficiency, but also effectively controls screw vibration, thereby reducing noise.

[0004] A screw vacuum pump includes a first screw, a second screw, a first drive motor, a second drive motor, a third drive motor, and a fourth drive motor;

[0005] The axes of the first screw and the second screw are parallel to each other and are connected in a transmission manner. Along the extension direction of the first screw and the second screw, the two ends of the first screw are the first left end and the first right end, respectively, and the two ends of the second screw are the second left end and the second right end, respectively.

[0006] The first drive motor is driven and connected to the first left end, the second drive motor is driven and connected to the second left end, the third drive motor is driven and connected to the first right end, and the fourth drive motor is driven and connected to the second right end.

[0007] Preferably, it also includes a first connecting mechanism, a second connecting mechanism, a third connecting mechanism, and a fourth connecting mechanism;

[0008] The first drive motor is driven to the first left end through the first connecting mechanism, the second drive motor is driven to the second left end through the second connecting mechanism, the third drive motor is driven to the first right end through the third connecting mechanism, and the fourth drive motor is connected to the second right end through the fourth connecting mechanism.

[0009] Preferably, the first connecting mechanism includes a first coupling A, a first coupling B, and a first threaded fastener. The first coupling A is fixedly connected to the first drive motor, and the first coupling B is fixedly connected to the first left end. A first through hole A is provided on the first coupling A, and a first through hole B is provided on the first coupling B. The first threaded fastener passes through the first through hole A and the first through hole B to fix the first coupling A and the first coupling B together.

[0010] The second connecting mechanism includes a second coupling A, a second coupling B, and a second threaded fastener. The second coupling A is fixedly connected to the second drive motor, and the second coupling B is fixedly connected to the second left end. A second through hole A is provided on the second coupling A, and a second through hole B is provided on the second coupling B. The second threaded fastener passes through the second through hole A and the second through hole B to fix the second coupling A and the second coupling B together.

[0011] The third connecting mechanism includes a third coupling A, a third coupling B, and a third threaded fastener. The third coupling A is fixedly connected to the third drive motor, and the third coupling B is fixedly connected to the first right end. A third through hole A is provided on the third coupling A, and a third through hole B is provided on the third coupling B. The third threaded fastener passes through the third through hole A and the third through hole B to fix the third coupling A and the third coupling B together.

[0012] The fourth connecting mechanism includes a fourth coupling A, a fourth coupling B, and a fourth threaded fastener. The fourth coupling A is fixedly connected to the fourth drive motor, and the fourth coupling B is fixedly connected to the second right end. A fourth through hole A is provided on the fourth coupling A, and a fourth through hole B is provided on the fourth coupling B. The fourth threaded fastener passes through the fourth through hole A and the fourth through hole B to fix the fourth coupling A and the fourth coupling B together.

[0013] Preferably, the number of the first through holes A is at least two, and the at least two first through holes A are arranged in a circular array. The number of the first through holes B is equal to the number of the first through holes A and corresponds one-to-one. The number of the first threaded fasteners is equal to the number of the first through holes A and corresponds one-to-one.

[0014] The number of the second through holes A is at least two, and the at least two second through holes A are arranged in a circular array. The number of the second through holes B is equal to the number of the second through holes A, and they correspond one-to-one. The number of the second threaded fasteners is equal to the number of the second through holes A, and they correspond one-to-one.

[0015] The number of the third through holes A is at least two, and the at least two third through holes A are arranged in a circular array. The number of the third through holes B is equal to the number of the third through holes A, and they correspond one-to-one. The number of the third threaded fasteners is equal to the number of the third through holes A, and they correspond one-to-one.

[0016] The number of the fourth through holes A is at least two, and the at least two fourth through holes A are arranged in a circular array. The number of the fourth through holes B is equal to the number of the fourth through holes A and corresponds one-to-one. The number of the fourth threaded fasteners is equal to the number of the fourth through holes A and corresponds one-to-one.

[0017] Preferably, it also includes a first gear and a second gear that mesh with each other, wherein a first through hole C is provided on the first gear and a second through hole C is provided on the second gear;

[0018] The first gear is located between the first coupling A and the first coupling B, and is sleeved on the first threaded fastener through the first through hole C. The second gear is located between the second coupling A and the second coupling B, and is sleeved on the second threaded fastener through the second through hole C.

[0019] Preferably, when the number of the first through hole A and the number of the second through hole A are both at least two, the number of the first through hole C is equal to the number of the first through hole A and corresponds one-to-one, and the number of the second through hole C is equal to the number of the second through hole A and corresponds one-to-one.

[0020] Preferably, it also includes a third gear and a fourth gear that mesh with each other, wherein a third through hole C is provided on the third gear and a fourth through hole C is provided on the fourth gear;

[0021] The third gear is located between the third coupling A and the third coupling B, and is fitted onto the third threaded fastener through the third through hole C. The fourth gear is located between the fourth coupling A and the fourth coupling B, and is fitted onto the fourth threaded fastener through the fourth through hole C.

[0022] Preferably, when the number of the third through hole A and the number of the fourth through hole A are both at least two, the number of the third through hole C is equal to the number of the third through hole A and corresponds one-to-one, and the number of the fourth through hole C is equal to the number of the fourth through hole A and corresponds one-to-one.

[0023] Preferably, it also includes a controller, a housing, and an intake pipe;

[0024] Both the first screw and the second screw are disposed within the housing, which has an air inlet. One end of the air inlet pipe is connected to the air inlet, and the other end can be connected to an external target device so that fluid in the external target device can enter the housing through the air inlet pipe.

[0025] An intake valve is provided on the intake pipe. The intake valve, the first drive motor, the second drive motor, the third drive motor, and the fourth drive motor are all electrically connected to the controller so that the controller can control the operation of the intake valve and control the operation of the first drive motor, the second drive motor, the third drive motor, and the fourth drive motor according to the operating state of the intake valve.

[0026] Preferably, a dust concentration detection device electrically connected to the controller is provided inside the air intake pipe;

[0027] The dust concentration detection device detects the dust concentration in the gas entering the housing through the air inlet pipe in real time and sends the information to the controller. The controller controls the first drive motor, the second drive motor, the third drive motor and the fourth drive motor to work according to the dust concentration information.

[0028] The screw vacuum pump provided by this utility model employs a technical solution where the first drive motor is driven and connected to the first left end, the second drive motor is driven and connected to the second left end, the third drive motor is driven and connected to the first right end, and the fourth drive motor is driven and connected to the second right end. This solution allows the other drive motors to continue driving the screw vacuum pump even if one of the drive motors fails, avoiding disruption to production continuity due to motor failure and thus ensuring production efficiency. Furthermore, it effectively controls the vibration of the first and second screws, thereby reducing noise. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of an embodiment of the screw vacuum pump of this utility model;

[0030] Figure 2 yes Figure 1 A schematic diagram of the connection status of the first connecting mechanism in the diagram;

[0031] Figure 3 yes Figure 1 K-direction diagram;

[0032] Figure 4 yes Figure 3 The circuit diagram.

[0033] The reference numerals in the figure are as follows:

[0034] 1-First screw; 2-Second screw; 3-First drive motor; 4-Second drive motor; 5-Third drive motor; 6-Fourth drive motor; 7-First left end; 8-First right end; 9-Second left end; 10-Second right end; 11-First connecting mechanism; 12-Second connecting mechanism; 13-Third connecting mechanism; 14-Fourth connecting mechanism; 15-First coupling A; 16-First coupling B; 17-First threaded fastener; 18-First through hole A; 19-First through hole B; 20-First gear; 21-Second gear; 22-First through hole C; 23-Third gear; 24-Fourth gear; 25-Controller; 26-Housing; 27-Inlet pipe; 28-Inlet port; 39-Inlet valve; 30-Dust concentration detection device. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0036] like Figure 1 As shown, a screw vacuum pump includes a first screw 1, a second screw 2, a first drive motor 3, a second drive motor 4, a third drive motor 5, and a fourth drive motor 6. The axes of the first screw 1 and the second screw 2 are parallel to each other and are connected in a transmission manner. Along the extension direction of the first screw 1 and the second screw 2, the two ends of the first screw 1 are a first left end 7 and a first right end 8, respectively, and the two ends of the second screw 2 are a second left end 9 and a second right end 10, respectively. The first drive motor 3 is connected in a transmission manner to the first left end 7, the second drive motor 4 is connected in a transmission manner to the second left end 9, the third drive motor 5 is connected in a transmission manner to the first right end 8, and the fourth drive motor 6 is connected in a transmission manner to the second right end 10. With this technical solution, in actual operation, if one, two, or three of the four drive motors fail, the remaining drive motors will continue to drive the screw vacuum pump, avoiding disruption to production continuity due to the failure of a single drive motor, thereby ensuring production efficiency. Simultaneously, by driving both ends of the first screw 1 with the first drive motor 3 and the third drive motor 5 respectively, the vibration of the first screw 1 can be reduced, thereby reducing the noise generated by the first screw 1. Similarly, by driving both ends of the second screw 2 with the second drive motor 4 and the fourth drive motor 6 respectively, the vibration of the second screw 2 can also be reduced, thereby reducing the noise of the second screw 2.

[0037] In actual production, in order to facilitate maintenance work, such as Figure 1 As shown, it also includes a first connecting mechanism 11, a second connecting mechanism 12, a third connecting mechanism 13, and a fourth connecting mechanism 14. The first drive motor 3 is connected to the first left end 7 via the first connecting mechanism 11; the second drive motor 4 is connected to the second left end 9 via the second connecting mechanism 12; the third drive motor 5 is connected to the first right end 8 via the third connecting mechanism 13; and the fourth drive motor 6 is connected to the second right end 10 via the fourth connecting mechanism 14. This facilitates the installation and removal of the first drive motor 3, the second drive motor 4, the third drive motor 5, and the fourth drive motor 6, making maintenance work simple and convenient.

[0038] Specifically, such as Figure 2 As shown, the first connecting mechanism 11 includes a first coupling A15, a first coupling B16, and a first threaded fastener 17. The first coupling A15 is fixedly connected to the first drive motor 3, and the first coupling B16 is fixedly connected to the first left end 7. A first through hole A18 is provided on the first coupling A15, and a first through hole B19 is provided on the first coupling B16. The first threaded fastener 17 passes through the first through hole A18 and the first through hole B19 to fix the first coupling A15 and the first coupling B16 together. This ensures the reliability of the connection between the first drive motor 3 and the first left end 7. It should be noted that in specific manufacturing, the number of first through holes A18 is at least two, and the at least two first through holes A18 are arranged in a circular array. The number of first through holes B19 is equal to the number of first through holes A18 and corresponds one-to-one. The number of first threaded fasteners 17 is equal to the number of first through holes A18 and corresponds one-to-one.

[0039] The second connecting mechanism 12 includes a second coupling A (not shown), a second coupling B (not shown), and a second threaded fastener (not shown). The second coupling A is fixedly connected to the second drive motor 4, and the second coupling B is fixedly connected to the second left end 9. A second through hole A (not shown) and a second through hole B (not shown) are provided on the second coupling A and the second coupling B, respectively. The second threaded fastener passes through the second through hole A and the second through hole B to fix the second coupling A and the second coupling B together. This ensures the reliability of the connection between the second drive motor 4 and the second left end 9. The specific connection method of the second coupling A and the second coupling B can be found in [reference needed]. Figure 2 It should be noted that in the specific manufacturing process, there are at least two second through holes A, and the at least two second through holes A are arranged in a circular array. The number of second through holes B is equal to the number of second through holes A, and they correspond one-to-one. The number of second threaded fasteners is equal to the number of second through holes A, and they correspond one-to-one.

[0040] The third connecting mechanism 13 includes a third coupling A (not shown), a third coupling B (not shown), and a third threaded fastener (not shown). The third coupling A is fixedly connected to the third drive motor 5, and the third coupling B is fixedly connected to the first right end 8. A third through hole A (not shown) is provided on the third coupling A, and a third through hole B (not shown) is provided on the third coupling B. The third threaded fastener passes through the third through holes A and B to fix the third coupling A and the third coupling B together. This ensures the reliability of the connection between the third drive motor 5 and the first right end 8. The specific connection method of the third coupling A and the third coupling B can be found in [reference needed]. Figure 2 It should be noted that in the specific manufacturing process, there are at least two third through holes A, and the at least two third through holes A are arranged in a circular array. The number of third through holes B is equal to the number of third through holes A, and they correspond one-to-one. The number of third threaded fasteners is equal to the number of third through holes A, and they correspond one-to-one.

[0041] The fourth connecting mechanism 14 includes a fourth coupling A (not shown), a fourth coupling B (not shown), and a fourth threaded fastener (not shown). The fourth coupling A is fixedly connected to the fourth drive motor 6, and the fourth coupling B is fixedly connected to the second right end 10. A fourth through hole A (not shown) is provided on the fourth coupling A, and a fourth through hole B (not shown) is provided on the fourth coupling B. The fourth threaded fastener passes through the fourth through hole A and the fourth through hole B to fix the fourth coupling A and the fourth coupling B together. This ensures the reliability of the connection between the fourth motor 6 and the second right end 10. The specific connection method of the fourth coupling A and the fourth coupling B can be found in [reference needed]. Figure 2 It should be noted that in the specific manufacturing process, there are at least two fourth through holes A, and the at least two fourth through holes A are arranged in a circular array. The number of fourth through holes B is equal to the number of fourth through holes A, and they correspond one-to-one. The number of fourth threaded fasteners is equal to the number of fourth through holes A, and they correspond one-to-one.

[0042] Preferably, such as Figure 1 , 2 As shown, it also includes a first gear 20 and a second gear 21 that mesh with each other. The first gear 20 has a first through hole C22, and the second gear 21 has a second through hole C. The first gear 20 is located between the first coupling A15 and the first coupling B16, and is fitted onto the first threaded fastener 17 through the first through hole C22. The second gear 21 is located between the second coupling A and the second coupling B, and is fitted onto the second threaded fastener through the second through hole C. For the specific installation method of the second gear 21, please refer to [reference needed]. Figure 2This technical solution allows for the limitation of the distance between the first screw 1 and the second screw 2 via the first gear 20 and the second gear 21, preventing them from approaching each other in the direction perpendicular to their axes. It also establishes a transmission connection between them. When the drive motor connected to the first screw 1 fails, the drive motor connected to the second screw 2 can sequentially drive the first screw 1 to rotate via the second screw 2, the second gear 21, and the first gear 20, and vice versa. It should be noted that when the number of first through holes A18 and the number of second through holes A are both at least two, the number of first through holes C22 is equal to the number of first through holes A18 and corresponds one-to-one, and the number of second through holes C is equal to the number of second through holes A and corresponds one-to-one.

[0043] Furthermore, such as Figure 1 As shown, it also includes a third gear 23 and a fourth gear 24 that mesh with each other. The third gear 23 has a third through hole C, and the fourth gear 24 has a fourth through hole C. The third gear 23 is located between the third coupling A and the third coupling B, and is fitted onto the third threaded fastener through the third through hole C. The fourth gear 24 is located between the fourth coupling A and the fourth coupling B, and is fitted onto the fourth threaded fastener through the fourth through hole C. This further ensures the relative position between the first screw 1 and the second screw 2. The specific installation methods of the third gear 23 and the fourth gear 24 can be found in [reference needed]. Figure 2 It should be noted that when the number of third through holes A and the number of fourth through holes A are both at least two, the number of third through holes C is equal to the number of third through holes A and corresponds one-to-one, and the number of fourth through holes C is equal to the number of fourth through holes A and corresponds one-to-one.

[0044] As a preferred implementation scheme, such as Figure 3 , 4 As shown, the system also includes a controller 25, a housing 26, and an air inlet pipe 27. The first screw 1 and the second screw 2 are both housed within the housing 26. The housing 26 has an air inlet hole 28. One end of the air inlet pipe 27 is connected to the air inlet hole 28, and the other end can be connected to an external target device, allowing fluid from the external target device to enter the housing 26 through the air inlet pipe 27. The external target device refers to the device used by the screw vacuum pump to evacuate the system. An air inlet valve 29 is provided on the air inlet pipe 27. The air inlet valve 29, the first drive motor 3, the second drive motor 4, the third drive motor 5, and the fourth drive motor 6 are all electrically connected to the controller 25, enabling the controller 25 to control the operation of the air inlet valve 29 and, based on the operating state of the air inlet valve 29, control the operation of the first drive motor 3, the second drive motor 4, the third drive motor 5, and the fourth drive motor 6.

[0045] The intake valve 29 is initially closed. Upon startup, the controller 25 controls the first drive motor 3, second drive motor 4, third drive motor 5, and fourth drive motor 6 to rapidly increase speed using a synchronization algorithm. These motors drive the first screw 1 and the second screw 2 to rotate. When the set speed is reached, the controller 26 controls the current of these motors to decrease to the minimum value required to maintain the speed, thus reducing energy consumption. During operation, the controller 25 opens the intake valve 29, allowing gas from the external target device to enter the housing 26 through the intake pipe 27. Under the control of the controller 25, the first drive motor 3, second drive motor 4, third drive motor 5, and fourth drive motor 6 operate at a higher speed to ensure efficiency. After operation, the controller 25 closes the intake valve 29 and simultaneously restores the speed of the first drive motor 3, second drive motor 4, third drive motor 5, and fourth drive motor 6 to the set speed.

[0046] Furthermore, such as Figure 3 , 4 As shown, a dust concentration detection device 30, electrically connected to the controller 25, is installed inside the air intake pipe 27. The dust concentration detection device 30 detects the dust concentration in the gas entering the housing 26 through the air intake pipe 27 in real time and sends this information to the controller 25. The controller 25 controls the operation of the first drive motor 3, the second drive motor 4, the third drive motor 5, and the fourth drive motor 6 based on this dust concentration information. In this way, the controller 25 can adjust the operating speeds of the first drive motor 3, the second drive motor 4, the third drive motor 5, and the fourth drive motor 6 according to the actual situation of the gas entering the housing 26, thus reducing energy consumption while ensuring working efficiency.

[0047] The above embodiments enable this utility model to avoid the impact of motor failure on the continuity of production, thereby ensuring production efficiency. At the same time, it can also effectively control the vibration of the screw, thereby reducing noise.

[0048] It will be readily understood by those skilled in the art that the aforementioned advantageous methods can be freely combined and superimposed without conflict.

[0049] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model. The above description is only a preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

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