A clean oven

CN224694882UActive Publication Date: 2026-08-28惠州市华博科微半导体设备有限公司
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Patent Information

Application Number
CN202522599586.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-08
Publication Date
2026-08-28
Estimated Expiration
2035-12-08

AI Technical Summary

Benefits of technology

[0014]本实用新型的有益效果是:本实用新型提供的一种洁净烘箱,在烘箱主体的循环风道内设置与进气口和充氮接口连通的玻璃风槽,玻璃风槽内设置有加热装置,并且在玻璃风槽下方设置运风装置,通过运风装置将热风均匀导入均流板的均流通道,再经导流口进入各放料层,使各个放料层的温度分布更加均匀,有效提升烘干效果;热风从烘干室一侧的导流口进入各放料层后,自另一侧回流至循环风道,形成闭合气流循环,减少热量损耗;排气口设于循环风道远离运风装置的一侧,且配备调节阀,可以通过调节阀精确控制排气量,维持箱内气压稳定;此外,在放料层内设有测温传感器,可实时监测各层温度变化,并将数据反馈至控制面板,实现精准控温;在玻璃风槽内设有超温保护传感器,当温度超过预设安全阈值时自动切断加热电源,防止设备过热引发安全隐患。

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Abstract

The utility model relates to a kind of clean oven, glass air flume is set in the circulating air duct of oven main body and is communicated with air inlet and nitrogen filling interface, heating device is provided in glass air flume, and wind transport device is set below glass air flume, hot air is uniformly introduced into uniform flow passage by wind transport device, then each discharge layer is entered by guide port, temperature is kept consistent, and drying effect is effectively improved;After hot air enters each discharge layer from the guide port of the side of drying chamber, it is refluxed to circulating air duct from the other side, closed air circulation is formed, and heat loss is reduced;Exhaust port is located at the side of circulating air duct away from wind transport device, and is equipped with regulating valve, exhaust volume can be controlled by regulating valve, and maintain stable air pressure in the box;Temperature sensor is provided in discharge layer, real-time monitoring temperature change of each layer, realize accurate temperature control;Over-temperature protection sensor is provided in glass air flume, when temperature exceeds preset safety threshold, heating power is automatically cut off, prevent overheating of equipment to cause security risk.
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Claims

1. A cleanroom drying oven, characterized in that, include: The oven body has a door on its front side and a control panel above the door. Inside the oven body is a drying chamber, which is divided into multiple equal-spaced material feeding layers. Each material feeding layer has a guide port on its side wall. A circulating air duct is formed between the outer wall of the drying chamber and the inner wall of the oven body. An air inlet is located at the upper end of the left side wall of the oven body, communicating with a glass air duct within the circulating air duct. A heating device is located within the glass air duct, and a fan device is located at the end of the glass air duct furthest from the air inlet. A flow equalization plate is located at the end of the fan device closest to the drying chamber, and the flow equalization plate contains several flow equalization channels, each corresponding to a material feeding layer. An exhaust port is located on the side of the circulating air duct furthest from the fan device, and a regulating valve is located on the exhaust port.

2. A cleanroom drying oven according to claim 1, characterized in that, The door is equipped with an electromagnetic lock to prevent it from opening during the drying process.

3. A cleanroom drying oven according to claim 1, characterized in that, The inner wall of the drying chamber is provided with multiple slide rails, and trays are slidably connected to the slide rails, dividing the drying chamber into multiple independent material feeding layers.

4. A cleanroom drying oven according to claim 1, characterized in that, The air inlet is equipped with a pre-filter to intercept large particulate impurities in the air; the end of the glass air duct away from the air inlet is equipped with a high-efficiency filter.

5. A cleanroom drying oven according to claim 1, characterized in that, A nitrogen filling port is also provided on one side of the air inlet, and the nitrogen filling port is connected to the glass air duct.

6. A cleanroom drying oven according to claim 1, characterized in that, The air circulation device includes an air circulation motor located below the glass air duct and a fan wheel fixed to the output end of the air circulation motor. The air circulation device circulates air horizontally toward the drying chamber.

7. A cleanroom drying oven according to any one of claims 1-6, characterized in that, The glass air duct has a connection port on its side wall that communicates with the circulating air duct, and the connection port is located above the heating device; the outer side wall of the glass air duct is equipped with an exhaust fan for sending the gas in the circulating air duct into the glass air duct from the connection port.

8. A cleanroom drying oven according to claim 7, characterized in that, The oven body has a first heat dissipation vent on its rear side wall, which is connected to the glass air duct; the oven body has a second heat dissipation vent on the side away from the air inlet, which is connected to the circulating air duct and is located below the exhaust port.

9. A cleanroom drying oven according to claim 7, characterized in that, Temperature sensors are installed inside each material feeding layer in the drying chamber to monitor the temperature of each layer in real time; all temperature sensors are connected to the control panel.

10. A cleanroom drying oven according to claim 7, characterized in that, An over-temperature protection sensor is installed inside the glass air duct, and the over-temperature protection sensor is connected to the control panel.