hot plate furnace

Abstract

The utility model relates to a hot plate furnace, including shell and heating assembly, be provided with a plurality of heating chamber in the shell, heating assembly is provided with a plurality of, respectively located a plurality of heating chamber, and heating assembly includes heating table, vacuum tube and fixing piece, the heating table is used to place and heat the heating piece, the vacuum tube adopts rigid material to make, first end is connected with the heating table, is used to the heating piece adsorption on the heating table, the fixing piece is used to the vacuum tube with the heating table is fixed, and can prevent the vacuum tube relative to the heating table inclination. The utility model discloses a hot plate furnace through setting fixing piece on the vacuum tube, the connection between vacuum tube and heating table through fixing piece, can prevent the vacuum tube relative to the heating table inclination, to make the vacuum tube when with other external equipment connection, can be more stable, is not easy to appear due to the vacuum tube inclination, difficult to with other equipment docking problem.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor processing technology, and more specifically, to a hot plate furnace. Background Technology

[0002] In semiconductor manufacturing, silicon wafers need to be baked in a hot plate furnace. Before baking, the silicon wafer is placed on a heating stage, which is connected to a vacuum tube. The vacuum tube passes through tiny vacuum holes in the heating stage. After the silicon wafer is in place, a vacuum is activated to hold the wafer firmly against the surface of the heating stage, preventing warping or displacement of the wafer due to thermal stress or airflow during baking. In related technologies, after the vacuum tube is fixed to the heating stage, a gap exists between it and the stage. This gap can cause the vacuum tube to tilt relative to the stage, making it prone to damage and difficult to connect with vacuum equipment. Utility Model Content

[0003] The purpose of this disclosure is to provide a hot plate furnace in which the vacuum tubes remain stable during use and are not prone to tilting relative to the heating platform, thus affecting docking and use.

[0004] To achieve the above objectives, this disclosure provides a hot plate furnace, comprising: The outer casing has multiple heating chambers disposed therein; The heating assembly comprises multiple components, each located within a plurality of heating chambers. It includes a heating platform, a vacuum tube, and a fixing component. The heating platform is used to place and heat the component to be heated. The vacuum tube is made of a rigid material, with its first end connected to the heating platform for adsorbing the component to be heated onto the heating platform. The fixing component is used to fix the vacuum tube onto the heating platform and prevents the vacuum tube from tilting relative to the heating platform.

[0005] Optionally, the fixing member includes a limiting part and a fixing part. The fixing part is fixedly connected to the heating stage, and the limiting part is fixedly connected to the fixing part. It is used to cooperate with the vacuum tube to limit the tilt of the vacuum tube relative to the heating stage.

[0006] Optionally, the fixing part is Ω-shaped and includes a fixing plate that contacts and is fixedly connected to the heating table, and an arc-shaped plate for connecting the limiting part, wherein the limiting part is fixedly connected to the arc-shaped plate.

[0007] Optionally, the limiting part is tubular, extends a predetermined distance in the same direction as the vacuum tube, is sleeved on the vacuum tube, and its inner wall abuts against the outer wall of the vacuum tube, while its outer wall is fixedly connected in the arc-shaped plate.

[0008] Optionally, the second end of the vacuum tube is further provided with a plug-in assembly, which is used to plug the second end of the vacuum tube into the vacuum device.

[0009] Optionally, the plug-in assembly includes a plug-in disposed at the second end of the vacuum tube and a mating part disposed at the vacuum device, wherein the plug-in can be inserted into the mating part to connect the vacuum tube to the vacuum device.

[0010] Optionally, the connector includes a first ring and a second ring. The inner ring of the first ring is connected to the outer wall of the vacuum tube and extends radially along the vacuum tube. One end of the second ring is connected to the outer ring of the first ring, and the other end extends outward along the axial direction of the vacuum tube. The mating member includes a third ring and a fourth ring that are concentrically arranged and extend inward along the axial direction of the vacuum tube. The diameter of the third ring is smaller than that of the fourth ring. The spaced portion between the third ring and the fourth ring is used to insert the second ring.

[0011] Optionally, it also includes a slide rail and an inspection door, the inspection door being able to slide along the extension direction of the slide rail to open or seal the heating chamber, the slide rail being provided with a sliding member, the sliding member being able to slide along the extension direction of the slide rail to limit the position of the inspection door on the slide rail.

[0012] Optionally, the slide rail is provided in two sections, located on both sides of the inspection door along its length. The inspection door is provided with mating openings on both sides along its length to mate with the slide rails and slide along the extension direction of the slide rails.

[0013] Optionally, the slider is U-shaped, including an arc-shaped first extension and two straight second extensions. The first extension has a first opening, and the second extension has a second opening. The first and second openings are used to connect with the slide rail. The slide rail has a mating part. The two first extensions are configured to contact the mating part. The first extension and the mating part also have connecting holes for engaging with a connector to fix the slider to the mating part.

[0014] The advantages of this disclosure through the above technical solution are as follows: the hot plate furnace of this utility model, by setting a fixing component on the vacuum tube and connecting the vacuum tube and the heating platform through the fixing component, can prevent the vacuum tube from tilting relative to the heating platform, so that the vacuum tube can be more stable when connected to other external equipment, such as a vacuum machine, and is less likely to have problems with docking with other equipment due to the tilting of the vacuum tube.

[0015] Other features and advantages of this disclosure will be described in detail in the following detailed description section. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the present disclosure and form part of the specification. They are used together with the following detailed description to explain the present disclosure, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the structure of the hot plate furnace provided in an exemplary embodiment of this disclosure; Figure 2 This is a schematic diagram of the structure of the fixing component in the hot plate furnace provided in an exemplary embodiment of this disclosure; Figure 3 This is a schematic diagram of the structure of the connector in the hot plate furnace provided in an exemplary embodiment of this disclosure; Figure 4 This is a schematic diagram of the structure of the mating parts in the hot plate furnace provided in an exemplary embodiment of this disclosure; Figure 5 This is a schematic diagram of the structure of the sliding member in the hot plate furnace provided in an exemplary embodiment of this disclosure; Figure 6 This is a structural schematic diagram of the sliding member in a hot plate furnace provided in an exemplary embodiment of this disclosure from another angle.

[0017] Explanation of reference numerals in the attached figures 1-Outer shell; 11-Heating chamber; 2-Heating component; 21-Heating platform; 22-Vacuum tube; 23-Fixing component; 231-Limiting part; 232-Fixing part; 2321-Fixing plate; 2322-Arc plate; 3-Plug-in assembly; 31-Plug-in part; 311-First ring body; 312-Second ring body; 32-Matching part; 321-Third ring body; 322-Fourth ring body; 4-Slide rail; 41-Matching part; 5-Inspection door; 51-Matching opening; 6-Sliding component; 61-First extension section; 611-Opening; 62-Second extension section; 63-Connecting hole; 64-Connecting component. Detailed Implementation

[0018] The specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit this disclosure.

[0019] In this disclosure, unless otherwise stated, directional terms such as "upper," "lower," "higher," "lower," "top," and "bottom" generally refer to the orientation of the corresponding component or structure in the direction of gravity. "Inner" and "outer" refer to the inner and outer contours of the corresponding component. Furthermore, it should be noted that terms such as "first" and "second" are used to distinguish one element from another and do not indicate sequence or importance. Additionally, in the description with reference to the accompanying drawings, the same reference numerals in different drawings denote the same element. The above definitions are for explanation and illustration only and should not be construed as limiting this disclosure.

[0020] For ease of understanding, please refer to the appendix below. Figures 1 to 5 The specific structure and working principle of the hot plate furnace disclosed herein will be described in detail with reference to the embodiments.

[0021] This disclosure relates to a hot plate furnace, see [link to relevant documentation] Figure 1 The furnace includes a shell 1 and heating components 2. The shell 1 forms the outer body of the hot plate furnace. Multiple heating chambers 11 are provided in the shell 1. The heating chambers 11 can be used to bake the workpiece to be heated, such as silicon wafers. Multiple heating components 2 are provided and are located in multiple heating chambers 11. The heating components 2 are the main devices for baking the workpiece to be heated. They include a heating platform 21, a vacuum tube 22 and a fixing component 23. The heating platform 21 is used to place the workpiece to be heated. It can be made of ceramic and heated by resistance wire or mica heaters.

[0022] The vacuum tube 22 is made of a rigid material to provide good strength and ensure its stability during operation. It is not prone to bending or moving relative to the heating platform 21. The first end of the vacuum tube 22 is connected to the heating platform 21. A tiny vacuum hole can be provided on the heating platform 21. The vacuum tube 22 applies negative pressure to the heating platform 21 through the vacuum hole, so that the workpiece to be heated placed on the heating platform 21 can be firmly adsorbed onto the heating platform 21. The fixing member 23 can fix the vacuum tube 22 to the heating platform 21 to prevent the vacuum tube 22 from tilting relative to the heating platform 21, so as to avoid the vacuum tube 22 tilting during use or when connected to other equipment, making it difficult to complete the docking.

[0023] The hot plate furnace disclosed herein, by setting a fixing member 23 on the vacuum tube 22 and connecting the vacuum tube 22 to the heating platform 21 through the fixing member 23, can prevent the vacuum tube 22 from tilting relative to the heating platform 21, so that the vacuum tube 22 can be more stable when connected to other external equipment, such as a vacuum machine, and is less likely to have problems such as difficulty in docking with other equipment due to the tilt of the vacuum tube 22.

[0024] In one embodiment of this disclosure, see Figure 1 and Figure 2The fixing member 23 includes a limiting part 231 and a fixing part 232. The fixing part 232 can be fixedly connected to the heating table 21 to fix the fixing member 23 to the heating table 21. The limiting part 231 and the fixing part 232 are fixedly connected and can cooperate with the vacuum tube 22 to prevent the vacuum tube 22 from tilting relative to the heating table 21. Of course, in other embodiments, the fixing member 23 can also have other structures, which can be determined according to the actual situation. This disclosure does not limit it.

[0025] In one embodiment of this disclosure, see Figure 1 and Figure 2 The fixing part 232 is Ω-shaped and includes a fixing plate 2321 that contacts and is fixedly connected to the heating table 21, and an arc-shaped plate 2322 for connecting the limiting part 231. The fixing plate 2321 is disposed on both sides of the fixing part 232 and can be flat. The fixing plate 2321 can be fixed to the heating table 21 to complete the fixation between the fixing part 23 and the heating table 21. The fixing method between the fixing plate 2321 and the heating table 21 can be bonding, welding, or bolt connection, etc., which are well known to those skilled in the art and will not be described in detail here. Since the limiting part 231 needs to cooperate with the vacuum tube 22, its shape is usually arc-shaped to facilitate connection with the circular vacuum tube 22. The arc-shaped plate 2322 can be set to an arc shape that matches the shape of the limiting part 231, thereby facilitating the connection between the limiting part 231 and the limiting part 231. The connection method between the arc-shaped plate 2322 and the limiting part 231 can also be bonding, welding, etc., which will not be described in detail here.

[0026] In one embodiment of this disclosure, see Figure 1 and Figure 2 The limiting part 231 is tubular and extends a predetermined distance in the same direction as the vacuum tube 22. During connection, the limiting part 231 is fitted onto the vacuum tube 22 and abuts against the outer wall of the vacuum tube 22. The outer wall of the limiting part 231 is fixedly connected to the arc-shaped plate 2322 to fix the limiting part 231 and the fixing part 232. Since the vacuum tube 22 is made of rigid material and the limiting part 231 extends in the same direction as the vacuum tube 22, when the outer wall of the vacuum tube 22 abuts against the inner wall of the limiting part 231 and has a tendency to tilt, it will be blocked by the limiting part 231, so that the outer wall of the vacuum tube 22 remains in contact with the inside of the limiting part 231 and does not tilt. This keeps the position of the vacuum tube 22 relative to the heating table 21 stable, which facilitates the subsequent docking of the vacuum tube 22 with other flower equipment. The length of the predetermined distance can be determined according to the actual situation to ensure that the vacuum tube 22 does not move relative to the limiting part 231. This disclosure does not impose any limitations on this.

[0027] In one embodiment of this disclosure, see Figure 1 , Figure 3 and Figure 4 A connector 3 is provided at the second end of the vacuum tube 22. The connector 3 allows the second end of the vacuum tube 22 to be connected to a vacuum device, ensuring the stability of the relative position of the second end of the vacuum tube 22 with respect to the vacuum device during connection. This prevents positional shift during the connection process, which could hinder the connection between the vacuum tube 22 and the vacuum device. In some embodiments, see... Figure 3 and Figure 4 The insertion assembly 3 includes an insertion member 31 disposed at the second end of the vacuum tube 22 and a mating member 32 disposed at the vacuum device. When connecting the vacuum tube 22 to the vacuum device, the insertion member 31 can be easily inserted into the mating member 32 to ensure the positional relationship between the vacuum tube 22 and the vacuum device, avoiding difficulty in inserting the vacuum tube 22 into the vacuum device during docking. Of course, in other embodiments, the insertion assembly 3 can also have other structures, depending on the actual situation; this disclosure does not impose any limitations on this.

[0028] In one embodiment of this disclosure, see Figure 1 , Figure 3 and Figure 4 The connector 31 includes a first ring 311 and a second ring 312. The inner ring of the first ring 311 is connected to the outer wall of the vacuum tube 22 and extends radially along the vacuum tube 22. One end of the second ring 312 is connected to the outer ring of the first ring 311, and the other end extends outward along the axial direction of the vacuum tube 22. The mating part 32 includes a third ring 321 and a fourth ring 322 that are concentrically arranged and extend inward along the axial direction of the vacuum tube 22. The diameter of the third ring 321 is smaller than that of the fourth ring 322. When the connector 31 and the mating part 32 are connected, the gap between the third ring 321 and the fourth ring 322 in the mating part 32 can be inserted into the second ring 312 in the connector 31 so that the second ring 312 can be connected to the third ring 321 and the fourth ring 322 in the axial direction.

[0029] Compared to directly plugging the second end of the vacuum tube 22 into the vacuum equipment, the plug-in component 3 allows for a more accurate and convenient connection between the vacuum tube 22 and the vacuum equipment, preventing positional misalignment of the vacuum tube 22 during connection and ensuring a smooth connection. Of course, in other embodiments, the plug-in component 31 and the mating component 32 can have other structures, depending on the specific circumstances; this disclosure does not impose any limitations on this.

[0030] In one embodiment of this disclosure, see Figure 1 and Figure 5The hot plate furnace disclosed herein also includes a slide rail 4 and an inspection door 5 disposed in the heating chamber 11. The inspection door 5 can slide along the extension direction of the slide rail 4 to open and seal the heating chamber 11. A sliding member 6 is also provided on the slide rail 4. By providing the sliding member 6, the inspection door 5 can be prevented from disengaging from the slide rail 4 after sealing the heating chamber 11. For example, when the inspection door 5 needs to seal the heating chamber 11, the sliding member 6 can prevent the inspection door 5 from disengaging from the slide rail 4, affecting the sealing of the heating chamber 11, and thus affecting the baking of the heating components therein. When it is necessary to open the inspection door 5 to inspect the heating chamber 11, the sliding member 6 can allow the inspection door 5 to slide away from the slide rail 4 so that the inspection door 5 can move to open the heating chamber 11.

[0031] In one embodiment of this disclosure, see Figure 1 and Figure 5 The slide rail 4 has two sections, located on both sides of the inspection door 5 along its length. On both sides of the inspection door 5 along its length, there are mating openings 51. The shape of the mating openings 51 matches the cross-sectional shape of the slide rail 4. For example, the cross-section of the slide rail 4 can be rectangular, and the shape of the mating opening 51 can also be rectangular, so that the mating openings 51 can engage with the slide rail 4, allowing the inspection door 5 to slide along the extension direction of the slide rail 4 through the mating openings 51. Of course, in other embodiments, the inspection door 5 and the slide rail 4 can also have other structures, depending on the actual situation; this disclosure does not impose any limitations on this.

[0032] In one embodiment of this disclosure, see Figure 1 and Figure 5 The sliding member 6 is U-shaped, including an arc-shaped first extension 61 and two straight second extensions 62. A first opening 611 is provided on the first extension 61, and a second opening 621 is provided on the second extensions 62. Through the first opening 611 and the second opening 621, the sliding member 6 can engage with the slide rail 4 to complete the connection between the sliding member 6 and the slide rail 4. For example, a mating part 41 can be provided on the slide rail 4. The mating part 41 is a plate extending vertically at the end of the slide rail 4. The extension 61 can be inserted vertically into the mating part 41 so that the two first extensions 61 can contact the two sides of the mating part 41 respectively. The first opening 611 and the second opening 621 can prevent the first extension 61 and the second extension 62 from interfering with the slide rail 4 and the mating part 41 when the slider 6 is inserted into the mating part 41. Furthermore, the first extension 61 and the mating part 41 are also provided with connecting holes 63, which can cooperate with the connecting member 64 to fix the slider 6 and the mating part 41.

[0033] Specifically, the connecting hole 63 and the connecting piece 64 can be threaded holes and bolts. Compared with structures such as impact screws, the bolt hole and bolt fit are more stable under frequent insertion and removal, less prone to damage, and can ensure the stability of the connection. When the inspection door 5 needs to seal the heating chamber 11, after the inspection door 5 is in the correct sealing position, the sliding piece 6 can be inserted into the mating part 41 of the slide rail 4 through the first opening 611 and the second opening 621. Then, the connecting hole 63 on the first extension 61 is aligned with the connecting hole 63 on the slide rail 4, and the bolt is screwed in to complete the fixation between the sliding piece 6 and the mating part 41. Thus, the sliding piece 6 can be used to restrict the inspection door 5 from disengaging from the slide rail 4, ensuring the stability of the inspection door 5 on the slide rail 4. When it is necessary to remove the inspection door 5 and open the heating chamber 11 for maintenance, the bolt and the sliding piece 6 can be removed from the mating part 41 so that the inspection door 5 can slide along the slide rail 4 to disengage from the slide rail 4 to open the heating chamber 11.

[0034] When the hot plate furnace of this disclosure is in use, the vacuum tube 22 is fixedly connected to the heating platform 21 by the fixing component 23 to ensure that the vacuum tube 22 will not shift relative to the heating platform 21 when in use and when docking with vacuum equipment. Furthermore, a plug-in component 3 is provided at the second end of the vacuum tube 22 to facilitate docking of the vacuum tube 22 with the vacuum equipment and to avoid the vacuum tube 22 shifting position and making docking difficult when docking with the vacuum equipment.

[0035] The preferred embodiments of the present disclosure have been described in detail above with reference to the accompanying drawings. However, the present disclosure is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present disclosure, various simple modifications can be made to the technical solutions of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0036] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, this disclosure will not describe the various possible combinations separately.

[0037] Furthermore, various different embodiments of this disclosure can be combined in any way, as long as they do not violate the spirit of this disclosure, they should also be regarded as the content disclosed in this disclosure.

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