A rapid cooling mechanism in an ion implanter

Abstract

The utility model discloses a quick cooling mechanism in ion implanter, including cooling device casing and setting in the heat absorption pipe of cooling device casing inside four sides, cooling device casing bottom four sides all be provided with the mounting groove, and the mounting groove with cooling device casing four sides heat absorption pipe position corresponds, install the heat conduction plate who contacts with ion implanter in the mounting groove, export the heat of ion implanter through the heat conduction plate, and then play the function of quick cooling, the utility model discloses a heat conduction plate directly contacts ion implanter heat source, and combines the cooling circuit that the heat absorption pipe and heat conduction copper pipe of inside bending arrangement constitute, exports the heat quickly, the setting of the position hole has guaranteed that the heat conduction plate and heat absorption pipe contact fully, has improved the heat conduction efficiency greatly.

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